JP2014056820A5 - - Google Patents

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JP2014056820A5
JP2014056820A5 JP2013188123A JP2013188123A JP2014056820A5 JP 2014056820 A5 JP2014056820 A5 JP 2014056820A5 JP 2013188123 A JP2013188123 A JP 2013188123A JP 2013188123 A JP2013188123 A JP 2013188123A JP 2014056820 A5 JP2014056820 A5 JP 2014056820A5
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JP
Japan
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sample
charged particle
image
spectral
detector
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JP2013188123A
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English (en)
Japanese (ja)
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JP2014056820A (ja
JP6151138B2 (ja
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Priority claimed from EP12184099.5A external-priority patent/EP2708874A1/en
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JP2013188123A 2012-09-12 2013-09-11 荷電粒子顕微鏡内において試料の断層撮像を実行する方法 Active JP6151138B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP12184099.5A EP2708874A1 (en) 2012-09-12 2012-09-12 Method of performing tomographic imaging of a sample in a charged-particle microscope
EP12184099.5 2012-09-12

Publications (3)

Publication Number Publication Date
JP2014056820A JP2014056820A (ja) 2014-03-27
JP2014056820A5 true JP2014056820A5 (enExample) 2017-02-02
JP6151138B2 JP6151138B2 (ja) 2017-06-21

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JP2013188123A Active JP6151138B2 (ja) 2012-09-12 2013-09-11 荷電粒子顕微鏡内において試料の断層撮像を実行する方法

Country Status (4)

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US (1) US9618460B2 (enExample)
EP (2) EP2708874A1 (enExample)
JP (1) JP6151138B2 (enExample)
CN (1) CN103681189B (enExample)

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CZ305955B6 (cs) 2014-12-03 2016-05-18 Advacam S.R.O. Způsob rentgenové nanoradiografie a nanotomografie a zařízení k provádění tohoto způsobu
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US10103002B1 (en) * 2016-05-20 2018-10-16 Carl Zeiss Microscopy Gmbh Method for generating an image of an object and particle beam device for carrying out the method
JP6640057B2 (ja) * 2016-09-14 2020-02-05 株式会社日立ハイテクノロジーズ 電子顕微鏡装置及びそれを用いた傾斜ホールの測定方法
JP2019533819A (ja) * 2016-11-09 2019-11-21 アイメック・ヴェーゼットウェーＩｍｅｃ Ｖｚｗ 組み合わされたｓｔｅｍとｅｄｓの断層撮影のための装置
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JP2025504235A (ja) * 2022-02-10 2025-02-06 カール・ツァイス・エスエムティー・ゲーエムベーハー 半導体試料を層ごとに検査するための方法およびそのような方法を実行するための検査装置
US12456600B2 (en) * 2023-05-29 2025-10-28 Applied Materials Israel Ltd. Scanning electron microscopy-based tomography of specimens
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