JP2014056820A5 - - Google Patents

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JP2014056820A5
JP2014056820A5 JP2013188123A JP2013188123A JP2014056820A5 JP 2014056820 A5 JP2014056820 A5 JP 2014056820A5 JP 2013188123 A JP2013188123 A JP 2013188123A JP 2013188123 A JP2013188123 A JP 2013188123A JP 2014056820 A5 JP2014056820 A5 JP 2014056820A5
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JP
Japan
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sample
charged particle
image
spectral
detector
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JP2013188123A
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Japanese (ja)
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JP2014056820A (ja
JP6151138B2 (ja
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Priority claimed from EP12184099.5A external-priority patent/EP2708874A1/en
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JP2013188123A 2012-09-12 2013-09-11 荷電粒子顕微鏡内において試料の断層撮像を実行する方法 Active JP6151138B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP12184099.5 2012-09-12
EP12184099.5A EP2708874A1 (en) 2012-09-12 2012-09-12 Method of performing tomographic imaging of a sample in a charged-particle microscope

Publications (3)

Publication Number Publication Date
JP2014056820A JP2014056820A (ja) 2014-03-27
JP2014056820A5 true JP2014056820A5 (enExample) 2017-02-02
JP6151138B2 JP6151138B2 (ja) 2017-06-21

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JP2013188123A Active JP6151138B2 (ja) 2012-09-12 2013-09-11 荷電粒子顕微鏡内において試料の断層撮像を実行する方法

Country Status (4)

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US (1) US9618460B2 (enExample)
EP (2) EP2708874A1 (enExample)
JP (1) JP6151138B2 (enExample)
CN (1) CN103681189B (enExample)

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