WO2008123408A1 - ３次元顕微鏡および３次元画像取得方法 - Google Patents

３次元顕微鏡および３次元画像取得方法 Download PDF

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Publication number
WO2008123408A1
WO2008123408A1 PCT/JP2008/056046 JP2008056046W WO2008123408A1 WO 2008123408 A1 WO2008123408 A1 WO 2008123408A1 JP 2008056046 W JP2008056046 W JP 2008056046W WO 2008123408 A1 WO2008123408 A1 WO 2008123408A1
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WIPO (PCT)
Prior art keywords
dimensional
microscope
dimensional image
imaging section
interference images
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PCT/JP2008/056046
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English (en)
French (fr)
Inventor
Naoki Fukutake
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Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Priority to JP2009509194A priority Critical patent/JP5170084B2/ja
Publication of WO2008123408A1 publication Critical patent/WO2008123408A1/ja

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/18—Arrangements with more than one light path, e.g. for comparing two specimens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365—Control or image processing arrangements for digital or video microscopes
    • G02B21/367—Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/0005—Adaptation of holography to specific applications
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0443—Digital holography, i.e. recording holograms with digital recording means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/08—Synthesising holograms, i.e. holograms synthesized from objects or objects from holograms
    • G03H1/0866—Digital holographic imaging, i.e. synthesizing holobjects from holograms
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B90/00—Instruments, implements or accessories specially adapted for surgery or diagnosis and not covered by any of the groups A61B1/00 - A61B50/00, e.g. for luxation treatment or for protecting wound edges
    • A61B90/20—Surgical microscopes characterised by non-optical aspects
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/0005—Adaptation of holography to specific applications
    • G03H2001/005—Adaptation of holography to specific applications in microscopy, e.g. digital holographic microscope [DHM]
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0443—Digital holography, i.e. recording holograms with digital recording means
    • G03H2001/0445—Off-axis recording arrangement
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0465—Particular recording light; Beam shape or geometry
    • G03H2001/0469—Object light being reflected by the object
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0465—Particular recording light; Beam shape or geometry
    • G03H2001/0471—Object light being transmitted through the object, e.g. illumination through living cells
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0465—Particular recording light; Beam shape or geometry
    • G03H2001/0473—Particular illumination angle between object or reference beams and hologram
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2222/00—Light sources or light beam properties
    • G03H2222/10—Spectral composition
    • G03H2222/16—Infra Red [IR]
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2222/00—Light sources or light beam properties
    • G03H2222/36—Scanning light beam

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Multimedia (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Computing Systems (AREA)
  • Theoretical Computer Science (AREA)
  • Microscoopes, Condenser (AREA)
  • Holo Graphy (AREA)

Abstract

　高い３次元分解能を有し、試料を染色する必要がなく、使い勝手のよい顕微鏡を提供する。 ３次元顕微鏡は、物体に対して光を複数の照射方向から順次照射する第１光学系と、物体から発生する回折光と参照光とを撮像部に導く第２光学系と、回折光と参照光との干渉像を撮像する撮像部と、撮像部によって取得された照射方向ごとの干渉像から物体の３次元画像を生成する処理装置（２０１）と、を含む。処理装置は、照射方向ごとの干渉像から回折光の複素振幅を求め、複素振幅から物体の３次元画像を生成する。
PCT/JP2008/056046 2007-04-04 2008-03-28 ３次元顕微鏡および３次元画像取得方法 WO2008123408A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009509194A JP5170084B2 (ja) 2007-04-04 2008-03-28 ３次元顕微鏡および３次元画像取得方法

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US90748907P 2007-04-04 2007-04-04
US60/907,489 2007-04-04
US96037707P 2007-09-27 2007-09-27
US60/960,377 2007-09-27
US12/050,645 US7633631B2 (en) 2007-04-04 2008-03-18 Three-dimensional microscope and method for obtaining three-dimensional image
US12/050,645 2008-03-18

Publications (1)

Publication Number Publication Date
WO2008123408A1 true WO2008123408A1 (ja) 2008-10-16

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US (1) US7633631B2 (ja)
JP (1) JP5170084B2 (ja)
WO (1) WO2008123408A1 (ja)

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011099781A (ja) * 2009-11-06 2011-05-19 Kyoto Institute Of Technology 再生装置、干渉計測装置、制御プログラム、および記録媒体
JP2012112805A (ja) * 2010-11-25 2012-06-14 Nippon Telegr & Teleph Corp <Ntt> 木材イメージング装置及び木材検査方法
WO2012120881A1 (ja) * 2011-03-07 2012-09-13 株式会社ニコン 非線形顕微鏡及び非線形観察方法
WO2013047709A1 (ja) * 2011-09-30 2013-04-04 ウシオ電機株式会社 デジタルホログラフィ方法及びデジタルホログラフィ装置
JP2013145199A (ja) * 2012-01-16 2013-07-25 Nikon Corp 光干渉観察装置
JP2013231716A (ja) * 2012-04-25 2013-11-14 Canon Inc 干渉測定法およびデジタルホログラフィ顕微鏡
JP2015503128A (ja) * 2011-12-22 2015-01-29 ゼネラル・エレクトリック・カンパニイ ラベルを使用しない高コントラストの細胞イメージングのための定量位相顕微鏡法
KR101563810B1 (ko) 2014-06-25 2015-10-28 한국과학기술원 공통 광 경로 3차원 회절 광 현미경 및 그의 시편 변형성 측정 방법
US9507138B2 (en) 2010-10-20 2016-11-29 Nikon Corporation Microscope system
US9563048B2 (en) 2011-04-12 2017-02-07 Nikon Corporation Microscope system, server, and program providing intensity distribution of illumination light suitable for observation
US10365164B2 (en) 2016-07-20 2019-07-30 Ushio Denki Kabushiki Kaisha Optical system phase acquisition method and optical system evaluation method
US10378963B2 (en) 2016-06-24 2019-08-13 Ushio Denki Kabushiki Kaisha Optical system phase acquisition method and optical system evaluation method
JP2020532767A (ja) * 2017-09-06 2020-11-12 オーファウデー キネグラム アーゲー ホログラムの製造方法、セキュリティ要素、及び、セキュリティ文書
JPWO2021117328A1 (ja) * 2019-12-11 2021-06-17
CN113137926A (zh) * 2021-05-06 2021-07-20 王勇 一种可用于特种工况下的平面测量系统
WO2022215499A1 (ja) * 2021-04-09 2022-10-13 富士フイルム株式会社 ホログラフィー装置及び細胞の評価方法
JP7457133B2 (ja) 2021-05-21 2024-03-27 深▲せん▼技▲術▼大学 透過反射型デジタルホログラフィック顕微鏡システム

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7633631B2 (en) * 2007-04-04 2009-12-15 Nikon Corporation Three-dimensional microscope and method for obtaining three-dimensional image
WO2009009081A2 (en) 2007-07-10 2009-01-15 Massachusetts Institute Of Technology Tomographic phase microscopy
US20110075144A1 (en) * 2009-09-25 2011-03-31 Bossa Nova Technologies, Llc Visual appearance measurement method and system for randomly arranged birefringent fibers
US8223322B2 (en) * 2009-09-25 2012-07-17 Bossa Nova Technologies, Llc Visual appearance measurement method and system for randomly and regularly arranged birefringent fibers
EP2550522B1 (en) * 2010-03-23 2016-11-02 California Institute of Technology Super resolution optofluidic microscopes for 2d and 3d imaging
JP5814684B2 (ja) * 2010-09-03 2015-11-17 オリンパス株式会社 位相物体の可視化方法及び可視化装置
US9569664B2 (en) 2010-10-26 2017-02-14 California Institute Of Technology Methods for rapid distinction between debris and growing cells
JP2013542468A (ja) * 2010-10-26 2013-11-21 カリフォルニア インスティチュート オブ テクノロジー 走査型投影レンズレス顕微鏡システム
US9643184B2 (en) 2010-10-26 2017-05-09 California Institute Of Technology e-Petri dishes, devices, and systems having a light detector for sampling a sequence of sub-pixel shifted projection images
CN102095504B (zh) * 2010-12-07 2012-07-11 四川大学 基于空间相位调制的环形共光路点衍射干涉仪
KR20140039151A (ko) * 2011-01-06 2014-04-01 더 리전트 오브 더 유니버시티 오브 캘리포니아 무렌즈 단층 촬영 이미징 장치들 및 방법들
WO2012119094A2 (en) 2011-03-03 2012-09-07 California Institute Of Technology Light guided pixel
US8866063B2 (en) * 2011-03-31 2014-10-21 The Regents Of The University Of California Lens-free wide-field super-resolution imaging device
WO2013086527A1 (en) * 2011-12-09 2013-06-13 Massachusetts Institute Of Technology Systems and methods self-referenced quantitative phase microscopy
TWI467227B (zh) * 2012-04-12 2015-01-01 Univ Nat Formosa 穿透式三維顯微裝置及方法
US10670510B2 (en) 2013-02-05 2020-06-02 Massachusetts Institute Of Technology 3-D holographic imaging continuous flow cytometry
EP2930549B1 (en) * 2014-04-08 2023-05-03 European Molecular Biology Laboratory An optical arrangement and method for imaging a sample
DE102014115153A1 (de) * 2014-10-17 2016-04-21 Carl Zeiss Ag Optische Kohärenztomographie
JP6797564B2 (ja) 2016-06-01 2020-12-09 オリンパス株式会社 位相物体可視化装置、位相物体可視化方法
US10119917B2 (en) * 2016-11-11 2018-11-06 B & W Tek LLC Apparatus and method for bidirectional Raman spectroscopy
US11340057B2 (en) * 2018-06-22 2022-05-24 Northwestern University Systems and methods for interferometric multifocus microscopy

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004538451A (ja) * 2001-06-29 2004-12-24 ユニベルスィテ リーブル ドゥ ブリュッセル 三次元顕微鏡検査法によってサンプルを得るための方法およびデバイス

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5668648A (en) * 1991-11-26 1997-09-16 Kabushiki Kaisha Toshiba Computer-assisted holographic display apparatus
US5532814A (en) * 1994-06-20 1996-07-02 Cha; Soyoung S. Holographic diffraction image velocimetry for three-dimensional three-component particle fields or solid objects
EP1008919A1 (fr) * 1998-12-09 2000-06-14 Communauté Européenne (CE) Procédé et dispositif holographiques assistés par ordinateur pour restituer des images tridimensionnelles
JP4545297B2 (ja) * 2000-09-01 2010-09-15 大日本印刷株式会社 光学素子およびその製造方法
GB0204314D0 (en) * 2002-02-23 2002-04-10 Holographic Imaging Llc Computer generated holograms
WO2007002898A2 (en) * 2005-06-29 2007-01-04 University Of South Florida Variable tomographic scanning with wavelength scanning digital interface holography
US7616320B2 (en) * 2006-03-15 2009-11-10 Bahram Javidi Method and apparatus for recognition of microorganisms using holographic microscopy
US7633631B2 (en) * 2007-04-04 2009-12-15 Nikon Corporation Three-dimensional microscope and method for obtaining three-dimensional image

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004538451A (ja) * 2001-06-29 2004-12-24 ユニベルスィテ リーブル ドゥ ブリュッセル 三次元顕微鏡検査法によってサンプルを得るための方法およびデバイス

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
CHARRIERE F. ET AL.: "Cell refractive index tomography by digital holographic microscopy", OPTICS LETTERS, vol. 31, no. 2, 15 January 2006 (2006-01-15), pages 178 - 180, XP001239016 *
CUCHE E. ET AL.: "Simultaneous amplitude-contrast and quantitative phase-contrast microscopy by numerical reconstruction of Fresnel off-axis holograms", APPLIED OPTICS, vol. 38, no. 34, 1 December 1999 (1999-12-01), pages 6994 - 7001, XP002313889 *

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US10451860B2 (en) 2010-10-20 2019-10-22 Nikon Corporation Microscope system
US9507138B2 (en) 2010-10-20 2016-11-29 Nikon Corporation Microscope system
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WO2012120881A1 (ja) * 2011-03-07 2012-09-13 株式会社ニコン 非線形顕微鏡及び非線形観察方法
US9709786B2 (en) 2011-03-07 2017-07-18 Nikon Corporation Non-linear microscopy and non-linear observation method
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US9563048B2 (en) 2011-04-12 2017-02-07 Nikon Corporation Microscope system, server, and program providing intensity distribution of illumination light suitable for observation
WO2013047709A1 (ja) * 2011-09-30 2013-04-04 ウシオ電機株式会社 デジタルホログラフィ方法及びデジタルホログラフィ装置
JP2015503128A (ja) * 2011-12-22 2015-01-29 ゼネラル・エレクトリック・カンパニイ ラベルを使用しない高コントラストの細胞イメージングのための定量位相顕微鏡法
JP2013145199A (ja) * 2012-01-16 2013-07-25 Nikon Corp 光干渉観察装置
US8896840B2 (en) 2012-04-25 2014-11-25 Canon Kabushiki Kaisha Interferometric method and digital holographic microscope
JP2013231716A (ja) * 2012-04-25 2013-11-14 Canon Inc 干渉測定法およびデジタルホログラフィ顕微鏡
KR101563810B1 (ko) 2014-06-25 2015-10-28 한국과학기술원 공통 광 경로 3차원 회절 광 현미경 및 그의 시편 변형성 측정 방법
US10378963B2 (en) 2016-06-24 2019-08-13 Ushio Denki Kabushiki Kaisha Optical system phase acquisition method and optical system evaluation method
US10365164B2 (en) 2016-07-20 2019-07-30 Ushio Denki Kabushiki Kaisha Optical system phase acquisition method and optical system evaluation method
JP2020532767A (ja) * 2017-09-06 2020-11-12 オーファウデー キネグラム アーゲー ホログラムの製造方法、セキュリティ要素、及び、セキュリティ文書
US11679616B2 (en) 2017-09-06 2023-06-20 Ovd Kinegram Ag Method for producing a hologram, and security element and a security document
JPWO2021117328A1 (ja) * 2019-12-11 2021-06-17
WO2021117328A1 (ja) * 2019-12-11 2021-06-17 富士フイルム株式会社 制御装置、制御装置の作動方法、制御装置の作動プログラム
JP7237202B2 (ja) 2019-12-11 2023-03-10 富士フイルム株式会社 制御装置、制御装置の作動方法、制御装置の作動プログラム
WO2022215499A1 (ja) * 2021-04-09 2022-10-13 富士フイルム株式会社 ホログラフィー装置及び細胞の評価方法
CN113137926A (zh) * 2021-05-06 2021-07-20 王勇 一种可用于特种工况下的平面测量系统
JP7457133B2 (ja) 2021-05-21 2024-03-27 深▲せん▼技▲術▼大学 透過反射型デジタルホログラフィック顕微鏡システム

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JP5170084B2 (ja) 2013-03-27
US20080259345A1 (en) 2008-10-23
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US7633631B2 (en) 2009-12-15

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