JP2014053073A5 - - Google Patents

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Publication number
JP2014053073A5
JP2014053073A5 JP2012194664A JP2012194664A JP2014053073A5 JP 2014053073 A5 JP2014053073 A5 JP 2014053073A5 JP 2012194664 A JP2012194664 A JP 2012194664A JP 2012194664 A JP2012194664 A JP 2012194664A JP 2014053073 A5 JP2014053073 A5 JP 2014053073A5
Authority
JP
Japan
Prior art keywords
chamber
charged particle
particle beam
film
diaphragm member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012194664A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014053073A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012194664A priority Critical patent/JP2014053073A/ja
Priority claimed from JP2012194664A external-priority patent/JP2014053073A/ja
Priority to PCT/JP2013/069050 priority patent/WO2014038287A1/ja
Priority to US14/423,367 priority patent/US20150206705A1/en
Priority to KR1020157003635A priority patent/KR20150036541A/ko
Priority to CN201380043744.5A priority patent/CN104584180A/zh
Publication of JP2014053073A publication Critical patent/JP2014053073A/ja
Publication of JP2014053073A5 publication Critical patent/JP2014053073A5/ja
Pending legal-status Critical Current

Links

JP2012194664A 2012-09-05 2012-09-05 荷電粒子線装置用部材、荷電粒子線装置および隔膜部材 Pending JP2014053073A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012194664A JP2014053073A (ja) 2012-09-05 2012-09-05 荷電粒子線装置用部材、荷電粒子線装置および隔膜部材
PCT/JP2013/069050 WO2014038287A1 (ja) 2012-09-05 2013-07-11 荷電粒子線装置用部材、荷電粒子線装置および隔膜部材
US14/423,367 US20150206705A1 (en) 2012-09-05 2013-07-11 Member for charged particle beam device, charged particle beam device and diaphragm member
KR1020157003635A KR20150036541A (ko) 2012-09-05 2013-07-11 하전 입자선 장치용 부재, 하전 입자선 장치 및 격막 부재
CN201380043744.5A CN104584180A (zh) 2012-09-05 2013-07-11 带电粒子线装置用部件、带电粒子线装置以及隔膜部件

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012194664A JP2014053073A (ja) 2012-09-05 2012-09-05 荷電粒子線装置用部材、荷電粒子線装置および隔膜部材

Publications (2)

Publication Number Publication Date
JP2014053073A JP2014053073A (ja) 2014-03-20
JP2014053073A5 true JP2014053073A5 (OSRAM) 2015-04-09

Family

ID=50236905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012194664A Pending JP2014053073A (ja) 2012-09-05 2012-09-05 荷電粒子線装置用部材、荷電粒子線装置および隔膜部材

Country Status (5)

Country Link
US (1) US20150206705A1 (OSRAM)
JP (1) JP2014053073A (OSRAM)
KR (1) KR20150036541A (OSRAM)
CN (1) CN104584180A (OSRAM)
WO (1) WO2014038287A1 (OSRAM)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6207824B2 (ja) * 2012-10-01 2017-10-04 株式会社日立ハイテクノロジーズ 荷電粒子線装置、隔膜の位置調整方法および隔膜位置調整ジグ
CN105190824B (zh) * 2013-05-10 2016-11-23 株式会社日立高新技术 带电粒子线装置
CN105518821B (zh) * 2013-09-06 2017-06-23 株式会社日立高新技术 带电粒子束装置以及试样图像取得方法
JP6140298B2 (ja) * 2013-12-05 2017-05-31 株式会社日立製作所 試料ホルダ及び真空分析装置
WO2017112937A1 (en) * 2015-12-23 2017-06-29 Massachusetts Institute Of Technology Electron transparent membrane for cold cathode devices
CN109075002B (zh) * 2016-04-22 2020-09-29 株式会社日立高新技术 带电粒子显微镜以及试样拍摄方法
JP6916074B2 (ja) * 2017-09-20 2021-08-11 浜松ホトニクス株式会社 電子放出管、電子照射装置及び電子放出管の製造方法
CN110186944B (zh) * 2018-02-23 2021-11-09 台湾电镜仪器股份有限公司 检验容器以及电子显微镜
US20240186103A1 (en) * 2021-04-13 2024-06-06 Hitachi High-Tech Corporation Transmission Electron Microscope
KR102791688B1 (ko) * 2021-11-25 2025-04-07 참엔지니어링(주) 대기중으로 빔을 인출하는 빔 가공 장치 및 그 제어 방법
WO2024142368A1 (ja) * 2022-12-28 2024-07-04 株式会社日立ハイテク 荷電粒子ビーム装置、及び荷電粒子ビーム装置の調整方法
KR102817234B1 (ko) * 2025-02-02 2025-06-09 (주)코셈 수동 xy 얼라인 수단 및 가스 주입수단을 구비한 대기압 전자 현미경용 멤브레인 어댑터, 및 이를 구비하는 대기압 전자현미경

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5142461A (OSRAM) * 1974-10-09 1976-04-10 Ryoji Takahashi
JPH01117028A (ja) * 1987-10-30 1989-05-09 Nec Corp 電子線位置検出基準マーク
JP3736487B2 (ja) * 2002-03-25 2006-01-18 三菱マテリアル株式会社 リソグラフィー用のダイヤモンドウェハ、マスクブランクス及びマスク並びにダイヤモンドウェハの製造方法
JP2006147430A (ja) * 2004-11-22 2006-06-08 Hokkaido Univ 電子顕微鏡
EP2080014B1 (en) * 2006-10-24 2016-08-31 B-Nano Ltd. An interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
EP1956633A3 (en) * 2007-02-06 2009-12-16 FEI Company Particle-optical apparatus for simultaneous observing a sample with particles and photons
JP2008262886A (ja) * 2007-04-12 2008-10-30 Beam Seiko:Kk 走査型電子顕微鏡装置
JP5320418B2 (ja) * 2011-01-31 2013-10-23 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP5699023B2 (ja) * 2011-04-11 2015-04-08 株式会社日立ハイテクノロジーズ 荷電粒子線装置

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