JP2014047877A - Tube - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a tube capable of smoothing a work for suitably connecting a tube to the inside of an apparatus or a tube in the apparatus and enabling identification of fluid types without preparing tubes of a plurality of colors for different fluid types.SOLUTION: A tube in which a fluid flows includes a fluid type indication printed on the tube and indicating a type of the fluid flowing in the tube. Preferably, the tube further includes an identification indication printed on the tube and identifying the tube. Since an identification indication is printed in a predetermined color in accordance with the type of the fluid flowing in the tube, the identification indication also serves as fluid type indication.

Description

  The present invention relates to a tube through which a fluid flows.

  Many industrial machines and manufacturing apparatuses use various fluids such as water and air. For example, in a semiconductor device manufacturing process, in a grinding device called a grinder that grinds and thins a semiconductor wafer, or a cutting device called a dicer that divides a thinned semiconductor wafer into chips, a required part of the device It is known that piping for transmitting air, processing fluid, suction force, and the like is stretched (see, for example, Patent Documents 1 and 2).

  More specifically, the cutting apparatus includes at least a chuck table for sucking and holding a semiconductor wafer, an air-bearing spindle unit including a cutting blade for cutting the semiconductor wafer held on the chuck table, and a cut semiconductor wafer. And a cleaning device for cleaning.

  In addition, the grinding device includes at least a chuck table for sucking and holding a semiconductor wafer, an air bearing spindle unit including a grinding wheel for grinding the semiconductor wafer held on the chuck table, and a cleaning device for cleaning the ground semiconductor wafer. And.

  Further, in these cutting devices and grinding devices, an air suction source that generates a negative pressure for sucking the semiconductor wafer to the chuck table, an air supply source that supplies high-pressure air to the air bearing, and a cleaning solution is supplied to the cleaning device. In addition to a cleaning liquid supply source and the like, pipes are provided for guiding the fluid from the fluid suction source and the supply source to the respective action locations.

  As piping for various fluids in such a cutting device or grinding device, a tube having a diameter of about several millimeters to several tens of millimeters is generally used, and a tube cut to an appropriate length is a device. Connected in place.

  And in order to connect the several tube from which length and thickness differ appropriately, it is necessary to identify the kind of tube. Therefore, conventionally, a short cylindrical marker on which identification information such as a number indicating a tube number is printed is attached to both ends of the tube to enable identification of the tube, and a direction in which the flowing fluid is printed is short. A cylindrical marker was attached to both ends of the tube so that the fluid flow in the apparatus could be confirmed.

  On the other hand, tubes for flowing such a fluid are usually accumulated in a state of being wound around a reel. After the tube drawn from the reel is cut to a desired length, a direction symbol or A short cylindrical marker indicating an identification symbol has been attached.

JP-A-10-321562 JP-A-55-112761

  However, in the conventional method of attaching a cylindrical marker printed with a direction symbol indicating the direction of fluid flow or an identification symbol indicating the type of tube to both ends of the tube, an operator places an incorrect marker on the tube. There has been a problem that the marker is attached to the tube and the tube cannot be identified because the marker is attached to the tube, and the work of properly connecting the tube in the apparatus is delayed. In addition, there is a problem that the work of attaching the marker itself takes time.

  On the other hand, it is assumed that different types of fluid (for example, gas, fluid, etc.) flow in the tube depending on the connection location. In this regard, it may be possible to determine the type of fluid flowing inside based on the color of the appearance of the tube by using tubes of different colors according to the type of fluid flowing in the tube. .

  However, when using tubes of different colors, it is necessary to own a plurality of tubes of different colors according to the type of fluid, which requires labor and cost for management. In other words, in addition to the length of the tube to be cut, the color of the tube to be cut must be managed, which is very troublesome.

  Therefore, it is conceivable to use the above-described marker to identify the type of fluid, but the above-mentioned problem remains as long as the marker is used.

  The present invention has been made in view of such points, and the object of the present invention is to facilitate the work of properly connecting the tube in the apparatus or the tube in the apparatus, and to the type of fluid. Accordingly, it is necessary to provide a tube in which the type of fluid can be discriminated without having to possess tubes of a plurality of colors.

  According to the first aspect of the present invention, there is provided a tube through which a fluid flows, the tube having a fluid type indication printed on the tube and indicating the type of fluid flowing in the tube.

  According to the second aspect of the present invention, the identification display is further provided with an identification display for identifying the tube printed on the tube, and the identification display is printed in a predetermined color depending on the type of fluid flowing in the tube. The tube according to claim 1 is provided.

  According to the present invention, since the fluid type indication indicating the type of fluid flowing in the tube is printed, it is possible to determine the type of fluid flowing in the tube from the appearance of the tube without possessing a plurality of color tubes. . In addition, since a conventional marker is not used, it is possible to facilitate the work of properly connecting the tube in the apparatus or in the apparatus.

  According to the second aspect of the present invention, it is possible to determine the type of fluid flowing in the tube based on the color of the identification display.

It is an external appearance perspective view of a cutting device. It is a perspective view of the semiconductor wafer supported by the annular frame via the dicing tape. It is a figure explaining the principle of the tube of this invention. It is a figure explaining the principle of the tube of other embodiment of this invention. It is a figure which shows embodiment using the tube of this invention for piping of a cutting device. FIG. 6 is a partially enlarged view of the embodiment of FIG. 5. FIG. 6 is a partially enlarged view of the embodiment of FIG. 5. FIG. 6 is a partially enlarged view of the embodiment of FIG. 5.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 shows an external perspective view of a cutting device 2 using a tube of the present invention for piping. On the front side of the cutting device 2, there is provided operating means 4 for an operator to input instructions to the device such as machining conditions. In the upper part of the apparatus, there is provided a display means 6 such as a CRT for displaying a guidance screen for an operator and an image taken by an imaging means described later.

  As shown in FIG. 2, the first street (division planned line) S1 and the second street S2 are orthogonal to each other on the surface of the light emitting device wafer W to be diced (hereinafter also simply referred to as “wafer W”). A large number of devices D such as LEDs are formed on the wafer W by being partitioned by the first street S1 and the second street S2.

  The wafer W is attached to a dicing tape T that is an adhesive tape, and the outer peripheral edge of the dicing tape T is attached to an annular frame F. As a result, the wafer W is supported by the frame F via the dicing tape T, and a plurality of (for example, 25) wafers are accommodated in the wafer cassette 8 shown in FIG. The wafer cassette 8 is placed on a cassette elevator 9 that can move up and down.

  Behind the wafer cassette 8, a loading / unloading means 10 for unloading the wafer W before cutting from the wafer cassette 8 and loading the wafer after cutting into the wafer cassette 8 is disposed. Between the wafer cassette 8 and the loading / unloading means 10, a temporary placement area 12 that is an area on which a wafer to be loaded / unloaded is temporarily placed is provided. Positioning means 14 for positioning at a certain position is provided.

  In the vicinity of the temporary placement region 12, a transfer means 16 having a turning arm that sucks and transports the frame F integrated with the wafer W is disposed, and the wafer W carried to the temporary placement region 12 is Adsorbed by the conveying means 16 and conveyed onto the chuck table 18 and sucked by the chuck table 18, and held on the chuck table 18 by fixing the frame F by a plurality of fixing means (clamps) 19. .

  The chuck table 18 is configured to be rotatable and reciprocally movable in the X-axis direction. Above the movement path of the chuck table 18 in the X-axis direction, an alignment unit 20 that detects a street to be cut of the wafer W is provided. It is arranged.

  The alignment unit 20 includes an imaging unit 22 that images the surface of the wafer W, and can detect a street to be cut by processing such as pattern matching based on an image acquired by imaging. The image acquired by the imaging unit 22 is displayed on the display unit 6.

  A cutting means (cutting unit) 24 for cutting the wafer W held on the chuck table 18 is disposed on the left side of the alignment means 20. The cutting means 24 is configured integrally with the alignment means 20, and both move together in the Y-axis direction and the Z-axis direction.

  The cutting means 24 is configured by attaching a cutting blade 28 to the tip of a rotatable spindle 26 and is movable in the Y-axis direction and the Z-axis direction. The cutting blade 28 is located on the extended line of the imaging means 22 in the X-axis direction.

  Reference numeral 25 denotes transport means for transporting the wafer W after the cutting to the cleaning device 27. The cleaning device 27 cleans the wafer W and blows air from an air nozzle to dry the wafer W.

  Next, the principle of the tube of the present invention will be described with reference to FIG. The tube 11 is made of, for example, a resin exhibiting flexibility, and a direction symbol 13 indicating a fluid flow direction indicated by an arrow A is printed on the tube 11.

  The direction symbol 13 is preferably formed from a combination of two or more straight lines or curves. By setting it to 2 or more, even when it is set to 1, the direction becomes easy to visually recognize. Further, by displaying with a line, the amount of ink used for printing can be suppressed.

  In the present embodiment, it is possible to recognize at a glance that the fluid flows toward the tip side of the direction symbol 13 by arranging the approximately “<”-shaped direction symbol 13 composed of two broken lines at two locations. I am doing so.

  According to the embodiment of the direction symbol 13 as described above, for example, while ensuring the function of indicating the direction, compared to the case of a strip-shaped arrow symbol in which one end of a rectangular shape is sharpened and the other end is recessed. However, the amount of ink used for printing can be effectively suppressed.

  Further, an identification display 15 for enabling identification of the tube 11 is printed on the side of the direction symbol 13.

  The identification display 15 displays, for example, the model used and the part to be used. For example, in “D SP1” of this embodiment, “D” indicates that it is used for a cutting device (dicer), and “SP” is used for a piping system related to the spindle 26 (see FIG. 1). “1” indicates that it is inserted into the insertion port 1 of the insertion ports related to the spindle 26 (see FIG. 1).

  The direction symbol 13 and the identification display 15 are printed in a predetermined color in order to function as a fluid type display indicating the type of fluid flowing in the tube 11. For example, when the fluid is air, it is “white”, when the fluid is nitrogen, it is “red”, when it is water, it is “blue”, when it is drained, it is “black”, when it is cutting / cleaning fluid, it is “purple”. In the case of cutting / cleaning liquid, a different color is used for each type of fluid, such as “green”.

  Thereby, the operator can discriminate the type of fluid flowing in the tube 11 by the color of the direction symbol 13 or the identification display 15. That is, the type of fluid flowing in the tube 11 can be determined from the appearance of the tube 11 without checking the connection destination by tracing the tube 11 or removing the tube and checking the fluid actually flowing.

  In addition to printing both the direction symbol 13 and the identification display 15 in a predetermined color, it is possible to determine the type of fluid flowing in the tube 11 in both the direction symbol 13 and the identification display 15. The type of the fluid flowing through the tube 11 is determined based on the color of either the direction symbol 13 or the identification display 15 by printing either one of the direction symbol 13 and the identification display 15 in a predetermined color. You may be able to.

  FIG. 4 shows another embodiment, which has a direction symbol 13A and an identification display 15A. In this embodiment, the direction symbol 13A has a configuration in which “←” is printed in two places, and the identification display 15A has a configuration in which a symbol “*” and a number “120” are printed.

  Furthermore, a fluid type display 21 indicating the type of fluid flowing in the tube 11 is printed on the tube 11. For example, a different fluid type display 21 is used for each fluid type, such as “A” representing the meaning of Air when the fluid is a gas, and “L” representing the meaning of Liquid when the fluid is water. In the example of FIG. 4, it is assumed that gas flows in the tube 11, and “A” is displayed as the fluid type display 21.

  The direction symbol 13A is not particularly limited as long as the direction symbol 13A is a combination of two or more straight lines (or curves) and can visually recognize the direction in which the fluid flows. Similarly, as the identification display 15A and the fluid type display 21, various kinds of symbols, numbers, English letters, kanji, hiragana, katakana, and figures can be used, and these may be combined. .

  Further, when “A” is displayed as the fluid type display 21 as in the embodiment shown in FIG. 4, the fluid type can be discriminated by the “A”. About the color used for 15A and the fluid kind display 21, the need to use a predetermined color can be eliminated.

  That is, as in the embodiment shown in FIG. 4, the type of fluid can be determined by displaying a letter or symbol such as “A” as the fluid type display 21. There is no need to do. For example, when all of the direction symbol 13A, the identification display 15A, and the fluid type display 21 are displayed in black, the determination is made based on the fluid type display 21 (“A”) rather than the color “black”. It is to be configured.

  Referring to FIG. 5, there is shown a piping configuration diagram of the cutting apparatus 2 using the tube principle of the present invention. High pressure air is supplied from the air source 40 to the clean unit 46 via the tube 31. As shown in the enlarged view of FIG. 6, a direction symbol “<<” is printed on the tube 31, and an identification symbol “DAC1” is printed on the side of the direction symbol. In this identification symbol “DAC1”, “D” indicates that it is used for a cutting device (dicer), “AC” indicates that the air source 40 (A) and the clean unit 46 (C) are connected, “1” indicates that the air source 40 and the clean unit 46 are inserted into the insertion port 1.

  The clean unit 46 has a plurality of filters, and cleans the high-pressure air supplied from the air source 40. From the clean unit 46, air for suction release is supplied to the chuck table 18 via the tube 33, high pressure air is supplied to the negative pressure generating means 52 such as an ejector via the tube 35, and via the tube 37. Air for air bearing is supplied to the spindle unit 30.

  The clean unit 46 further supplies the wheel cover opening / closing air to the wheel cover 32 that covers the cutting blade 28 via the tube 39, and supplies air via the tube 41 to form the air curtain 34. The air is supplied to the branch joint 56 for the microscope 38 through the. As shown in FIG. 6, these tubes 33 to 43 have a direction symbol indicating an air supply direction with an arrow and an identification symbol printed on the side of the direction symbol.

  For the above tubes 31 to 43, since air flows inside, “white” is used as the color of the identification symbol of each tube 31 to 43, and this “white” color is the fluid type. Serves as a display. Furthermore, “A” indicating that the fluid type flowing in the tube is “Air” may be added to the identification symbol as a fluid type display. In addition, by adding “A” as the fluid type display in this way, there is no need to particularly limit the display color.

  The negative pressure generating means 52 generates a negative pressure using a high-pressure fluid passing through the orifice, supplies a negative pressure for chuck table vacuum to the chuck table 18 through the tube 45, and passes through the tube 47. A negative pressure for spinner table vacuum is supplied to the spinner cleaning device 27.

  As shown in the enlarged view of FIG. 7, the tube 45 is printed with a direction symbol “<<” including an arrow indicating a negative pressure supply direction, and an identification symbol “DNCT2” is printed on the side of the direction symbol. . Here, regarding “DNCT2,” “D” indicates that it is used for a cutting device (dicer), and “NCT” indicates that the negative pressure generating means 52 (N) and the chuck table 18 (CT) are connected. “2” indicates that the negative pressure generating means 52 and the chuck table 18 are inserted into the insertion port 2.

  Similarly, a direction symbol “<<” including an arrow indicating a negative pressure supply direction is printed on the tube 47, and an identification symbol “DNSPN3” is printed on the side of the direction symbol. Here, regarding “DNSSPN3”, “D” indicates that it is used for a cutting device (dicer), and “NSPN” indicates that the negative pressure generating means 52 (N) and the spinner 28 (SPN) are connected. , “3” indicates that the negative pressure generating means 52 and the spinner 28 are respectively inserted into the insertion port 3.

  Since the air flows in the tubes 45 and 47, “white” is used as the color of the identification symbol of each tube 45 and 47, and the color of “white” is the fluid type. Serves as a display. Furthermore, “A” indicating that the fluid type flowing in the tube is “Air” may be added to the identification symbol as a fluid type display. In addition, by adding “A” as the fluid type display in this way, there is no need to particularly limit the display color.

  As best shown in the enlarged view of FIG. 8, cover opening / closing air is supplied from the branch joint 56 to the microscope 38 via the tube 49, and blow air for the macro microscope is supplied via the tube 51. Blow air for a micro microscope is supplied through.

  The tube 49 has a direction symbol “<<” and an identification symbol “DB1MS1” printed on the side of the direction symbol. Here, regarding “DB1MS1”, “D” indicates that it is used for a cutting device (dicer), “BMS” indicates that the branch joint 56 (B1) and the microscope 38 (MS) are connected, and “ “1” is shown to be inserted into the insertion port 1 in each of the branch joint 56 and the microscope 38.

  Similarly, the tube 51 has a direction symbol “<<” and an identification symbol “DB1MS2” printed on the side of the direction symbol. Here, regarding “DB1MS2,” “D” indicates that it is used for a cutting device (dicer), “BMS” indicates that the branch joint 56 (B1) and the microscope 38 (MS) are connected, and “ “2” is shown to be inserted into the insertion port 2 in each of the branch joint 56 and the microscope 38.

  Similarly, the tube 53 has a direction symbol “<<” and an identification symbol “DB1MS3” printed on the side of the direction symbol. Here, regarding “DB1MS3”, “D” indicates that it is used for a cutting device (dicer), “BMS” indicates that the branch joint 56 (B1) and the microscope 38 (MS) are connected, and “ “3” is shown to be inserted into the insertion port 3 in each of the branch joint 56 and the microscope 38.

  The exhaust air from the chuck table 18 is exhausted to the duct 60 through the tube 55, the exhaust air from the spinner cleaning device 27 is exhausted to the duct 60 through the tube 57, and the exhaust air from the spindle 30 is exhausted through the tube 59. And discharged to the duct 60.

  The exhaust air from the wheel cover 32 is exhausted to the duct 60 through the tube 61, and the exhaust air from the air curtain 34 is exhausted to the duct 60 through the tube 63. Exhaust air from the microscope 38 is discharged to the duct 60 through the tube 65.

  Then, since air flows inside the tubes 61 and 65 in FIG. 8, “white” is used as the color of the identification symbol of each tube 61 and 65, and the color of “white” is the fluid. Functions as a type display. Furthermore, “A” indicating that the fluid type flowing in the tube is “Air” may be added to the identification symbol as a fluid type display. In addition, by adding “A” as the fluid type display in this way, there is no need to particularly limit the display color.

  As shown in FIG. 5, a coolant such as city water is supplied from the coolant source 42 to the clean unit 48 via a tube 67. The clean unit 48 includes a plurality of filters, and the coolant is filtered by these filters.

  Coolant is supplied from the clean unit 48 to the spindle unit 30 that rotatably supports the spindle 26 via the tube 69. The coolant discharged from the spindle unit 30 is discharged to the drain 58 through the tube 71.

  As for the tubes 67 and 69, since water before being used flows inside, “blue” is used as the color of the identification symbol of the tubes 67 and 69. Functions as a fluid type display. Similarly, for the tube 71, the drainage after being used in the inside flows, so that “black” is used as the color of the identification symbol of the tube 71, and this “black” color is used as the fluid type display. Function. Furthermore, “L” indicating that the fluid type flowing in the tube is “Liquid” may be added to the identification symbol as a fluid type display. In addition, according to the addition of “L” as the fluid type display in this way, there is no need to particularly limit the display color.

  As shown in FIG. 5, a liquid such as pure water is supplied from the cutting / cleaning liquid source 44 to the clean unit 50 through a tube 73. The clean unit 50 includes a plurality of filters. The cleaning liquid is supplied from the clean unit 50 to the spinner cleaning device 27 via the tube 75, the cutting fluid is supplied to the wheel cover branch joint 54 via the tube 77, and the liquid supplied via the tube 79 is water. A curtain 36 is formed.

  As best shown in the enlarged view of FIG. 8, the shower nozzle cutting fluid is supplied from the branch joint 54 to the wheel cover 32 via the tube 83, and the blade cooling cutting fluid is supplied via the tube 85, A cutting fluid for shower is supplied through the tube 87.

  The tube 83 has a direction symbol “<<” and an identification symbol “DB2HC1” printed on the side of the direction symbol. Here, regarding “DB2HC1,” “D” indicates that it is used for a cutting device (dicer), “B2HC” indicates that the branch joint 54 (B2) and the wheel cover 32 (HC) are connected, “1” indicates that the branch joint 56 and the wheel cover 32 are inserted into the insertion port 1.

  Similarly, the tube 85 has a direction symbol “<<” and an identification symbol “DB2HC2” printed on the side of the direction symbol. Here, regarding “DB2HC2,” “D” indicates that it is used for a cutting device (dicer), “B2HC” indicates that the branch joint 54 (B2) and the wheel cover 32 (HC) are connected, “2” indicates that each of the branch joint 56 and the wheel cover 32 is inserted into the insertion port 2.

  Similarly, the tube 87 has a direction symbol “<<” and an identification symbol “DB2HC3” printed on the side of the direction symbol. Here, regarding “DB2HC3”, “D” indicates that it is used for a cutting device (dicer), “B2HC” indicates that the branch joint 54 (B2) and the wheel cover 32 (HC) are connected, “3” indicates that each of the branch joint 56 and the wheel cover 32 is inserted into the insertion port 3.

  The cleaning liquid discharged from the spinner cleaning device 27 is discharged to the drain 58 through the tube 81, the cutting liquid discharged from the wheel cover 32 is discharged to the drain 58 through the tube 89, and the liquid forming the water curtain 36 is It is discharged to the drain 58 through the tube 91.

  In FIG. 5, since the cutting / cleaning liquid before being used inside flows for the tubes 73 to 79, “purple” is used as the color of the identification symbol of the tubes 73 to 79. The color of “purple” functions as a fluid type display. Similarly, for the tubes 71, 89, 91, since the cutting / cleaning liquid after being used inside flows, “green” is used as the color of the identification symbol of the tubes 71, 89, 91. The color “green” functions as a fluid type display. Furthermore, “L” indicating that the fluid type flowing in the tube is the liquid “Liquid” may be added to these tubes as a fluid type display. In addition, according to the addition of “L” as the fluid type display in this way, there is no need to particularly limit the display color.

  The present invention can be implemented as described above. That is, as shown in the example of FIG. 3, a tube 11 through which a fluid flows, a fluid type display (direction symbol 13 and identification display 15 indicating the type of fluid that is printed on the tube 11 and flows in the tube 11. A tube 11 having a color).

  As a result, it is possible to prevent the tube from being unable to be identified due to an erroneous marker attachment by an operator, as has been conventionally done, and to facilitate the work of properly connecting the tube in the apparatus or in the apparatus. . In addition, it is not necessary to have tubes of a plurality of colors according to the type of fluid, and it is possible to provide a tube that can identify the type of fluid. Further, the type of fluid flowing in the tube 11 can be determined from the appearance of the tube 11 without checking the connection destination by tracing the tube 11 or removing the tube and checking the fluid actually flowing.

  Further, as shown in the example of FIG. 3, an identification display 15 that is printed on the tube 11 and identifies the tube 11 is further provided, and the identification display 15 is printed in a predetermined color depending on the type of fluid flowing in the tube 11. Thus, the identification display 15 may also be used as a fluid type display.

  As a result, the type of fluid can be determined by the color of the identification display 15.

  In the above embodiment, the color of the tube 11 is not particularly limited, but in order to make the fluid type display easy to see, a color having a strong contrast with the color of the fluid type display is adopted. Is preferred.

  Further, in order to make the fluid type display easier to see, the color of the tube 11 is set to a predetermined color only at the location where the fluid type display is arranged. An area having a display color and a color with strong contrast may be formed.

  In the above-described embodiment, the example in which the tube of the present invention is applied to the piping of the cutting apparatus has been described. However, the use of the tube of the present invention is not limited thereto, and examples thereof include a grinding apparatus and a polishing apparatus. The same applies to piping of other processing devices.

11 Tube 13 Directional symbol 15 Identification display 21 Fluid type display

Claims (2)

A tube through which fluid flows,
A tube provided with a fluid type indication indicating the type of fluid printed on the tube and flowing in the tube. An identification display printed on the tube and identifying the tube;
The identification display is combined with the fluid type display by printing the identification display in a predetermined color depending on the type of fluid flowing in the tube.
The tube according to claim 1.

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