JP2011094694A - Tube - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a tube that can smooth work for appropriately connecting the tube in an apparatus. <P>SOLUTION: The tube, in which fluid flows, has a direction symbol printed on the tube to indicate the flow direction of the fluid, and a type symbol printed on the tube to indicate the type of the tube. The direction symbol and the type symbol have different colors, and the type symbol is printed on the direction symbol. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a tube through which a fluid flows.

  Many industrial machines and manufacturing apparatuses use various fluids such as water and air. For example, in a semiconductor device manufacturing process, a grinding device called a grinder that grinds and thins a semiconductor wafer and a cutting device called a dicer that divides the thinned semiconductor wafer into chips also use various fluids. .

  The cutting device includes at least a chuck table for sucking and holding a semiconductor wafer, an air bearing spindle unit including a cutting blade for cutting the semiconductor wafer held on the chuck table, and a cleaning device for cleaning the cut semiconductor wafer. I have.

  Further, the grinding apparatus includes at least a chuck table for sucking and holding a semiconductor wafer, an air bearing spindle unit including a grinding wheel for grinding the semiconductor wafer held on the chuck table, and a cleaning apparatus for cleaning the ground semiconductor wafer. And.

  Further, in these cutting devices and grinding devices, an air suction source for generating a negative pressure for sucking the semiconductor wafer to the chuck table, an air supply source for supplying high-pressure air to the air bearing, and a cleaning liquid to the cleaning device are supplied. In addition to a cleaning liquid supply source and the like, pipes are provided for guiding the fluid from the fluid suction source and the supply source to the respective action locations.

  As piping for various fluids in such a cutting device or grinding device, a tube having a flexibility of about 10 to several tens of millimeters in diameter is generally used, and a tube cut to an appropriate length is inside the device. Connected to the right place.

  In order to properly connect a plurality of tubes having different lengths and thicknesses, it is necessary to identify the type of tube. Therefore, conventionally, a short cylinder in which identification information such as a number indicating a tube number is printed is attached to both ends of the tube so that the tube can be identified and the direction of the flowing fluid is printed. A cylindrical marker was attached to both ends of the tube so that the fluid flow in the apparatus could be confirmed.

  On the other hand, tubes are usually rolled up and stored on a reel. After the tube pulled out from the reel is cut to the desired length, a short cylindrical marker indicating direction and type symbols is attached to both ends manually. I was trying to do it.

JP-A-10-321562

  However, in the method of attaching a cylindrical marker printed with a direction symbol indicating the direction of fluid flow or a type symbol indicating the type of tube as in the prior art to both ends of the tube, an operator places an incorrect marker on the tube. There has been a problem in that it has been attached or the marker attached to the tube has come off and the tube cannot be identified, and the work of properly connecting the tube in the apparatus has been delayed.

  The present invention has been made in view of such a point, and the object of the present invention is to provide a tube that can facilitate the operation of properly connecting the tube in the device or in the device. is there.

  According to the present invention, it is a tube through which a fluid flows, and includes a direction symbol indicating the flow direction of the fluid printed on the tube, and a type symbol indicating the type of the tube printed on the tube, A tube is provided in which the direction symbol and the type symbol have different colors, and the type symbol is printed on the direction symbol.

  Preferably, the direction symbol has a light color and the type symbol has a dark color.

  According to the present invention, since the direction symbol indicating the direction of fluid flow and the type symbol indicating the type of the tube are printed on the tube, it is prevented that the marker is removed and the tube cannot be identified.

  In addition, if printing is performed automatically, it is possible to prevent the tube from being unable to be identified due to an erroneous marker mounting by the operator. Accordingly, it is possible to facilitate the work of properly connecting the tube into the apparatus.

  According to the second aspect of the invention, the direction symbol is light, the type symbol is dark, and the type symbol is printed on the direction symbol, so that the symbol can be easily read regardless of the color of the tube used. Become.

It is an external appearance perspective view of a cutting device. It is a perspective view of the semiconductor wafer supported by the annular frame via the dicing tape. It is a figure explaining the principle of the tube of this invention. It is a figure which shows embodiment using the tube of this invention for piping of a cutting device. FIG. 5 is a partially enlarged view of the embodiment of FIG. 4. FIG. 5 is a partially enlarged view of the embodiment of FIG. 4. FIG. 5 is a partially enlarged view of the embodiment of FIG. 4.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 shows an external perspective view of a cutting device 2 using a tube of the present invention for piping. On the front side of the cutting device 2, there is provided operating means 4 for an operator to input instructions to the device such as machining conditions. In the upper part of the apparatus, there is provided a display means 6 such as a CRT for displaying a guidance screen for an operator and an image taken by an imaging means described later.

  As shown in FIG. 2, on the surface of the light emitting device wafer W to be diced, the first street (division planned line) S1 and the second street S2 are formed orthogonally, and the first street S1 A plurality of devices D such as LEDs are formed on the wafer W by being partitioned by the second street S2.

  The wafer W is attached to a dicing tape T that is an adhesive tape, and the outer peripheral edge of the dicing tape T is attached to an annular frame F. As a result, the wafer W is supported by the frame F via the dicing tape T, and a plurality of wafers (for example, 25 sheets) are accommodated in the wafer cassette 8 shown in FIG. The wafer cassette 8 is placed on a cassette elevator 9 that can move up and down.

  Behind the wafer cassette 8, a loading / unloading means 10 for unloading the wafer W before cutting from the wafer cassette 8 and loading the wafer after cutting into the wafer cassette 8 is disposed. Between the wafer cassette 8 and the loading / unloading means 10, a temporary placement area 12, which is an area on which a wafer to be carried in / out, is temporarily placed, is provided. Positioning means 14 for positioning at a certain position is provided.

  In the vicinity of the temporary placement area 12, transport means 16 having a turning arm that sucks and transports the frame F integrated with the wafer W is disposed, and the wafer W carried to the temporary placement area 12 is Adsorbed by the conveying means 16 and conveyed onto the chuck table 18 and sucked by the chuck table 18, and held on the chuck table 18 by fixing the frame F by a plurality of fixing means (clamps) 19. .

  The chuck table 18 is configured to be rotatable and reciprocally movable in the X-axis direction. Above the movement path of the chuck table 18 in the X-axis direction, an alignment unit 20 that detects a street to be cut of the wafer W is provided. It is arranged.

  The alignment unit 20 includes an imaging unit 22 that images the surface of the wafer W, and can detect a street to be cut by a process such as pattern matching based on an image acquired by imaging. The image acquired by the imaging unit 22 is displayed on the display unit 6.

  A cutting means (cutting unit) 24 for cutting the wafer W held on the chuck table 18 is disposed on the left side of the alignment means 20. The cutting means 24 is configured integrally with the alignment means 20, and both move together in the Y-axis direction and the Z-axis direction.

  The cutting means 24 is configured by attaching a cutting blade 28 to the tip of a rotatable spindle 26 and is movable in the Y-axis direction and the Z-axis direction. The cutting blade 28 is located on the extended line of the imaging means 22 in the X-axis direction.

  Reference numeral 25 denotes transport means for transporting the wafer W after cutting to the cleaning device 27. The cleaning device 27 cleans the wafer W and blows air from the air nozzle to dry the wafer W.

  Next, the principle of the tube of the present invention will be described with reference to FIG. The tube 11 is made of, for example, a transparent resin, and a direction symbol 13 indicating the fluid flow direction indicated by an arrow A is printed on the tube 11. Further, a type symbol 15 indicating the type of the tube 11 is printed on the direction symbol 13.

  This type symbol 15 is a symbol that can distinguish, for example, a tube through which air flows and a tube through which water flows, and that can further distinguish the connecting portion of the tube. Preferably, the direction symbol 13 is formed from a light color such as yellow, and the type symbol 15 is formed from a dark color such as dark blue or black.

  By making the direction symbol light color, the type symbol dark color, and printing the type symbol 15 on the direction symbol 13, the direction symbol 13 and the type symbol 15 can be easily read regardless of the color of the tube 11.

  Referring to FIG. 4, there is shown a piping configuration diagram of the cutting apparatus 2 using the tube principle of the present invention. High pressure air is supplied from the air source 40 to the clean unit 46 via the tube 31. As shown in the enlarged view of FIG. 5, a direction symbol 31a is printed on the tube 31, and a type symbol A0 is printed on the direction symbol 31a.

  The clean unit 46 has a plurality of filters, and cleans the high-pressure air supplied from the air source 40. From the clean unit 46, air for suction release is supplied to the chuck table 18 via the tube 33, high pressure air is supplied to the negative pressure generating means 52 such as an ejector via the tube 35, and via the tube 37. Air for air bearing is supplied to the spindle unit 30.

  The clean unit 46 further supplies the wheel cover opening / closing air to the wheel cover 32 that covers the cutting blade 28 via the tube 39, and supplies air via the tube 41 to form the air curtain 34. The air is supplied to the branch joint 56 for the microscope 38 through the. As shown in FIG. 5, these tubes 33 to 43 have a direction symbol indicating an air supply direction with an arrow, and type symbols A1 to A6 printed on the direction symbol.

  The negative pressure generating means 52 generates a negative pressure using a high-pressure fluid passing through the orifice, supplies a negative pressure for chuck table vacuum to the chuck table 18 through the tube 45, and passes through the tube 47. A negative pressure for spinner table vacuum is supplied to the spinner cleaning device 27.

  As shown in the enlarged view of FIG. 6, the tube 45 is printed with a direction symbol including an arrow indicating a negative pressure supply direction, and a type symbol A11 is printed on the direction symbol. On the tube 47, a direction symbol including an arrow indicating a negative pressure supply direction is printed, and a type symbol A12 is printed on the direction symbol.

  As best shown in the enlarged view of FIG. 7, the cover opening / closing air is supplied from the branch joint 56 to the microscope 38 via the tube 49, and the macro microscope blow air is supplied via the tube 51. Blow air for a micro microscope is supplied through.

  The tube 49 has a direction symbol and a type symbol A13 printed on the direction symbol, the tube 51 has a direction symbol and a type symbol A14 printed on the direction symbol, and the tube 53 has a direction symbol and It has a classification symbol A15 printed on the direction symbol.

  The exhaust air from the chuck table 18 is exhausted to the duct 60 through the tube 55, the exhaust air from the spinner cleaning device 27 is exhausted to the duct 60 through the tube 57, and the exhaust air from the spindle 30 is exhausted through the tube 59. And discharged to the duct 60.

  The exhaust air from the wheel cover 32 is exhausted to the duct 60 through the tube 61, and the exhaust air from the air curtain 34 is exhausted to the duct 60 through the tube 63. Exhaust air from the microscope 38 is discharged to the duct 60 through the tube 65.

  Thus, all the air used by each component of the cutting device 2 is discharged to the duct 60. Further, for example, a colorless and transparent tube is used as a tube for supplying air, and A indicating “Air” is used as a type symbol.

  From the coolant source 42, for example, a coolant such as city water is supplied to the clean unit 48 via the tube 67. The clean unit 48 includes a plurality of filters, and the coolant is filtered by these filters.

  Coolant is supplied from the clean unit 48 to the spindle unit 30 that rotatably supports the spindle 26 via the tube 69. The coolant discharged from the spindle unit 30 is discharged to the drain 58 through the tube 71. The tubes 67, 69, 71 are colored light blue, for example, to supply liquid. Further, L indicating “Liquid” is used as the type symbol.

  A liquid such as pure water is supplied from the cutting / cleaning liquid source 44 to the clean unit 50 through the tube 73. The clean unit 50 includes a plurality of filters. The cleaning liquid is supplied from the clean unit 50 to the spinner cleaning device 27 via the tube 75, the cutting fluid is supplied to the wheel cover branch joint 54 via the tube 77, and the liquid supplied via the tube 79 is water. A curtain 36 is formed.

  As best shown in the enlarged view of FIG. 7, the shower nozzle cutting fluid is supplied from the branch joint 54 to the wheel cover 32 via the tube 83, and the blade cooling cutting fluid is supplied via the tube 85, A cutting fluid for shower is supplied through the tube 87.

  The cleaning liquid discharged from the spinner cleaning device 27 is discharged to the drain 58 through the tube 81, the cutting liquid discharged from the wheel cover 32 is discharged to the drain 58 through the tube 89, and the liquid forming the water curtain 36 is It is discharged to the drain 58 through the tube 91.

  The tubes 73 to 91 are used for supplying a liquid such as a cooling liquid and a cutting liquid, and discharging a used liquid, so that the tubes 73 to 91 are colored, for example, light blue to distinguish them from the air supply tubes. . Further, L indicating “Liquid” is printed on these tubes.

  As described above, by color-coding the tubes that supply air and the tubes that supply liquid, it is possible to prevent erroneous connection of the tubes by the operator. Further, by directly printing the direction symbol and the type symbol on the tube, it is possible to prevent the tube from being unidentified due to the marker being removed as in the prior art.

  In addition, the direction symbol to be printed directly on the tube is a light color such as yellow, yellow-green, the type symbol indicating the tube type is dark color such as 紺 or black, and the type symbol is printed on the direction symbol. The direction symbol and type symbol can be easily read regardless of the tube color.

  In the above-described embodiment, the example in which the tube of the present invention is applied to the piping of the cutting apparatus has been described. However, the use of the tube of the present invention is not limited to this, and other examples such as a grinding apparatus and a polishing apparatus are used. The same applies to piping of processing equipment.

2 Cutting device 11 Tube 13 Direction symbol 15 Type symbol 28 Cutting blade 30 Spindle unit 32 Wheel cover 38 Microscope 40 Air source 42 Coolant source 44 Cutting / cleaning fluid source 52 Negative pressure generating means 58 Drain 60 Duct

Claims (2)

A tube through which fluid flows,
A direction symbol indicating the flow direction of the fluid printed on the tube;
A type symbol indicating the type of the tube printed on the tube,
The direction symbol and the type symbol have different colors,
A tube characterized in that the type symbol is printed on the direction symbol.   The tube according to claim 1, wherein the direction symbol has a light color and the type symbol has a dark color.

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