JP2014062628A - Tube - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a tube that relates to display, such as a direction symbol and an identification symbol, to the tube, saves time and effort for mounting of a marker by performing direct printing display to the tube, and can prevent that printing display is separated due to oil content which is oozed on the surface of the tube.SOLUTION: A tube in which a fluid flows includes printing display printed thereon. In the tube, before printing the printing display, oil content removal processing is performed at a printed place on which the printing display of the tube is printed.

Description

  The present invention relates to a tube through which a fluid flows.

  Many industrial machines and manufacturing apparatuses use various fluids such as water and air. For example, in a semiconductor device manufacturing process, in a grinding device called a grinder that grinds and thins a semiconductor wafer, or a cutting device called a dicer that divides a thinned semiconductor wafer into chips, a required part of the device It is known that piping for transmitting air, processing fluid, suction force, and the like is stretched (see, for example, Patent Documents 1 and 2).

  More specifically, the cutting apparatus includes at least a chuck table for sucking and holding a semiconductor wafer, an air-bearing spindle unit including a cutting blade for cutting the semiconductor wafer held on the chuck table, and a cut semiconductor wafer. And a cleaning device for cleaning.

  In addition, the grinding device includes at least a chuck table for sucking and holding a semiconductor wafer, an air bearing spindle unit including a grinding wheel for grinding the semiconductor wafer held on the chuck table, and a cleaning device for cleaning the ground semiconductor wafer. And.

  Further, in these cutting devices and grinding devices, an air suction source that generates a negative pressure for sucking the semiconductor wafer to the chuck table, an air supply source that supplies high-pressure air to the air bearing, and a cleaning solution is supplied to the cleaning device. In addition to a cleaning liquid supply source and the like, pipes are provided for guiding the fluid from the fluid suction source and the supply source to the respective action locations.

  As piping for various fluids in such a cutting device or grinding device, a tube having a diameter of about several millimeters to several tens of millimeters is generally used, and a tube cut to an appropriate length is a device. Connected in place.

  And in order to connect the several tube from which length and thickness differ appropriately, it is necessary to identify the kind of tube. Therefore, conventionally, a short cylindrical marker on which identification information such as a number indicating a tube number is printed is attached to both ends of the tube to enable identification of the tube, and a direction in which the flowing fluid is printed is short. A cylindrical marker was attached to both ends of the tube so that the fluid flow in the apparatus could be confirmed.

  On the other hand, tubes for flowing such a fluid are usually accumulated in a state of being wound around a reel. After the tube drawn from the reel is cut to a desired length, a direction symbol or A short cylindrical marker indicating an identification symbol has been attached.

JP-A-10-321562 JP-A-55-112761

  However, in the conventional method of attaching a cylindrical marker printed with a direction symbol indicating the direction of fluid flow or an identification symbol indicating the type of tube to both ends of the tube, an operator places an incorrect marker on the tube. There has been a problem that the marker is attached to the tube and the tube cannot be identified because the marker is attached to the tube, and the work of properly connecting the tube in the apparatus is delayed. In addition, there is a problem that the work of attaching the marker itself takes time.

  In view of the problem in the case of using the marker as described above, it is conceivable to display the direction symbol and the identification symbol on the tube by printing without using the marker.

  However, some resin-made tubes ooze oil from the inside to the surface of the tube over time after production.

  When printing is performed on such a resin tube, there is a concern that the print may be peeled off or thinned by oil that oozes out over time.

  The present invention has been made in view of these points, and the object of the present invention is related to the display of a direction symbol, an identification symbol, and the like on the tube. It is an object of the present invention to provide a tube that can eliminate the trouble of printing and prevent peeling of the printed display due to the oil oozing out on the surface of the tube.

  According to the first aspect of the present invention, the fluid flowing tube has a printed display printed on the tube, and the printed display of the tube is printed before the printed display is printed. A tube subjected to oil removal treatment is provided.

  According to a second aspect of the present invention, there is provided the tube according to the first aspect, wherein the oil removing process is carried out by rubbing with a sponge while supplying an organic solvent to the print target portion. .

  According to a third aspect of the present invention, there is provided the tube according to the second aspect, wherein the sponge is made of melamine sponge.

  According to the present invention, since a print display is provided in place of the marker, it is possible to save the trouble of mounting the marker on the tube. Further, since the portion to be printed on the tube is subjected to an oil removal process before the print display is printed, the oil that has oozed out is removed and the print is prevented from peeling or fading.

  According to the second aspect of the present invention, oil can be efficiently removed by rubbing with a sponge while supplying an organic solvent.

  According to the invention described in claim 3, by using the melamine sponge, the portion to be printed on the surface of the tube is slightly shaved and minute irregularities are formed on the surface, so that the printed display is further peeled off. It becomes difficult to fade or fade.

It is an external appearance perspective view of a cutting device. It is a perspective view of the semiconductor wafer supported by the annular frame via the dicing tape. It is a figure shown about embodiment of an oil content removal process. It is a figure shown about embodiment, such as an identification symbol.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 shows an external perspective view of a cutting device 2 using a tube of the present invention for piping. On the front side of the cutting device 2, there is provided operating means 4 for an operator to input instructions to the device such as machining conditions. In the upper part of the apparatus, there is provided a display means 6 such as a CRT for displaying a guidance screen for an operator and an image taken by an imaging means described later.

  As shown in FIG. 2, the first street (division planned line) S1 and the second street S2 are orthogonal to each other on the surface of the light emitting device wafer W to be diced (hereinafter also simply referred to as “wafer W”). A large number of devices D such as LEDs are formed on the wafer W by being partitioned by the first street S1 and the second street S2.

  The wafer W is attached to a dicing tape T that is an adhesive tape, and the outer peripheral edge of the dicing tape T is attached to an annular frame F. As a result, the wafer W is supported by the frame F via the dicing tape T, and a plurality of (for example, 25) wafers are accommodated in the wafer cassette 8 shown in FIG. The wafer cassette 8 is placed on a cassette elevator 9 that can move up and down.

  Behind the wafer cassette 8, a loading / unloading means 10 for unloading the wafer W before cutting from the wafer cassette 8 and loading the wafer after cutting into the wafer cassette 8 is disposed. Between the wafer cassette 8 and the loading / unloading means 10, a temporary placement area 12 that is an area on which a wafer to be loaded / unloaded is temporarily placed is provided. Positioning means 14 for positioning at a certain position is provided.

  In the vicinity of the temporary placement region 12, a transfer means 16 having a turning arm that sucks and transports the frame F integrated with the wafer W is disposed, and the wafer W carried to the temporary placement region 12 is Adsorbed by the conveying means 16 and conveyed onto the chuck table 18 and sucked by the chuck table 18, and held on the chuck table 18 by fixing the frame F by a plurality of fixing means (clamps) 19. .

  The chuck table 18 is configured to be rotatable and reciprocally movable in the X-axis direction. Above the movement path of the chuck table 18 in the X-axis direction, an alignment unit 20 that detects a street to be cut of the wafer W is provided. It is arranged.

  The alignment unit 20 includes an imaging unit 22 that images the surface of the wafer W, and can detect a street to be cut by processing such as pattern matching based on an image acquired by imaging. The image acquired by the imaging unit 22 is displayed on the display unit 6.

  A cutting means (cutting unit) 24 for cutting the wafer W held on the chuck table 18 is disposed on the left side of the alignment means 20. The cutting means 24 is configured integrally with the alignment means 20, and both move together in the Y-axis direction and the Z-axis direction.

  The cutting means 24 is configured by attaching a cutting blade 28 to the tip of a rotatable spindle 26 and is movable in the Y-axis direction and the Z-axis direction. The cutting blade 28 is located on the extended line of the imaging means 22 in the X-axis direction.

  Reference numeral 25 denotes transport means for transporting the wafer W after the cutting to the cleaning device 27. The cleaning device 27 cleans the wafer W and blows air from an air nozzle to dry the wafer W.

  Next, with reference to FIG. 3, an embodiment of the oil removal process characteristic of the present invention will be described. By performing this oil removal process on the surface of the resin tube 11 in advance, it is possible to make various displays printed on the surface of the tube 11 difficult to peel off or thin.

  The material of the tube 11 to be subjected to the oil removal process is not particularly limited. For example, a resin tube made of urethane resin or fluorine resin is conceivable.

  And this oil component removal process is for removing the oil component which oozes out from the tube 11 with progress of time. In the present embodiment, the organic solvent 52 is applied to the surface of the tube 11 from the solvent application device 50, thereby removing oil that has oozed out on the surface of the tube 11.

  The organic solvent 52 is not particularly limited. For example, it is conceivable to use a highly volatile alcohol solvent.

  Further, in addition to the application of the organic solvent 52, the surface is rubbed with a sponge 54.

  The treatment of the surface of the tube 11 by the sponge 54 is intended to wipe off oil that has oozed on the tube surface. Further, the friction between the sponge 54 and the surface of the tube 11 can be expected to increase the surface roughness of the tube 11, that is, an effect that minute irregularities are attached to the surface of the tube 11.

  The sponge 54 is not specifically limited. For example, it is conceivable to use a commercially available melamine sponge (also called a polishing sponge) known to have a high effect of polishing the surface. By using such a melamine sponge, it can be expected that minute irregularities are effectively formed on the surface of the tube 11.

  Note that the oil removal process described above may be performed automatically by a dedicated device that performs application of the organic solvent 52 and treatment (polishing) with the sponge 54 at the same time, in addition to manual work by an operator.

  Alternatively, the surface of the tube 11 may be rubbed with a sponge 54 in which the organic solvent 52 has been previously infiltrated. Moreover, it is preferable that the range which performs an oil content removal process is performed locally in the location where a printing process is made in the length direction of the tube 11 and an outer peripheral surface. Thereby, the time for an oil content removal process can be suppressed to the minimum.

  And the printing as shown in FIG. 4 is implemented with respect to the tube 11 which performed the oil removal process as mentioned above. In the example of FIG. 4, a direction symbol 13 indicating the fluid flow direction indicated by an arrow A is printed on the tube 11. As a printing method, for example, a known ink jet method can be considered.

  The direction symbol 13 is preferably formed from a combination of two or more straight lines or curves. By setting it to 2 or more, even when it is set to 1, the direction becomes easy to visually recognize. Further, by displaying with a line, the amount of ink used for printing can be suppressed.

  In the present embodiment, it is possible to recognize at a glance that the fluid flows toward the tip side of the direction symbol 13 by arranging the approximately “<”-shaped direction symbol 13 composed of two broken lines at two locations. I am doing so.

  According to such an embodiment, for example, compared to the case of a band-shaped arrow symbol in which one end of a rectangular shape is sharpened and the other end is recessed, printing is performed while ensuring a function of indicating a direction. It is possible to effectively suppress the amount of ink to be used.

  Further, an identification symbol 15 for enabling identification of the tube 11 is printed on the side of the direction symbol 13.

  The identification symbol 15 displays, for example, the model used and the part to be used. For example, in “D SP1” of this embodiment, “D” indicates that it is used for a cutting device (dicer), and “SP” is used for a piping system related to the spindle 26 (see FIG. 1). “1” indicates that it is inserted into the insertion port 1 of the insertion ports related to the spindle 26 (see FIG. 1).

  In addition, the direction symbol 13 and the identification symbol 15 preferably have the same color. That is, it is preferable to print with the same color ink.

  As a result, it is possible to save the trouble of managing the inks of a plurality of colors, and it is possible to reduce the cost by purchasing a large amount of inks of the same color.

  As in this embodiment, the direction symbol 13 is not particularly limited as long as it is a combination of two or more straight lines (or curves) and can visually recognize the direction in which the fluid flows. Similarly, as the identification symbol 15, various types such as symbols, numbers, English characters, kanji, hiragana, katakana, and figures can be used, and these may be combined.

  As described above, since the directional symbol 13 and the identification symbol 15 are printed after the oil removal process described above, the oil on the surface of the tube 11 is removed, and the surface has a minute amount. Since the unevenness is formed, it is possible to prevent the print from peeling or fading due to the oil that has oozed out of the tube 11.

  In the above-described embodiment, the example in which the tube of the present invention is applied to the piping of the cutting apparatus has been described. However, the use of the tube of the present invention is not limited to this, and examples thereof include a grinding apparatus and a polishing apparatus. The same applies to piping of other processing devices.

11 Tube 13 Directional symbol 15 Identification symbol 50 Solvent application device 52 Organic solvent 54 Sponge

Claims (3)

A tube through which fluid flows,
Comprising a printed display printed on the tube;
A tube in which an oil removing process is performed on a portion of the tube to be printed before the print display is printed. The oil removal treatment is carried out by rubbing with a sponge while supplying an organic solvent to the printed part,
The tube according to claim 1. The sponge is made of melamine sponge,
The tube according to claim 2.

Images