JP5769475B2 - Quality control method for machining fluid supply nozzle - Google Patents

Description

  The present invention relates to a quality control method for a machining fluid supply nozzle that supplies machining fluid such as cutting fluid and cleaning fluid to a workpiece in a cutting device, a spinner cleaning device, and the like.

  Semiconductor wafers with multiple devices such as IC and LSI, and workpieces such as resin substrates, various ceramic substrates, and glass substrates are divided into individual chips by a cutting machine. Widely used.

  The cutting apparatus includes a chuck table that holds a workpiece, a cutting unit that includes a cutting blade that cuts the workpiece held on the chuck table, and a cutting that supplies a cutting fluid (working fluid) to the cutting blade being processed. It is composed of a liquid supply nozzle (processing liquid supply nozzle), and the workpiece can be divided with high accuracy.

  Supplying the cutting fluid to the cutting blade while cutting the workpiece is very important in terms of cooling the machining heat during the cutting process and washing away the cutting waste generated by the cutting from the upper surface of the workpiece. .

  On the other hand, in the spinner cleaning device disclosed in Japanese Patent Application Laid-Open No. 10-270407, the cleaning liquid is supplied from the cleaning liquid supply nozzle while the workpiece (object to be cleaned) is held and rotated by the spinner table. The object to be processed (object to be cleaned) is cleaned by supplying to

  Cutting fluid supply nozzles for cutting devices and cleaning fluid supply nozzles for spinner cleaning devices greatly affect the processing state of the workpiece or the cleaning state of the workpiece. It is important to keep.

JP 2006-187849 A Japanese Patent Laid-Open No. 10-270407

  Conventionally, the quality of these machining liquid supply nozzles has been determined by the operator visually confirming the shape of the machining liquid ejection port and the presence or absence of burrs. However, it has been difficult to determine whether or not the machining liquid is ejected from the machining liquid supply nozzle only by visually checking the shape of the machining liquid outlet and the presence or absence of burrs.

  The present invention has been made in view of these points, and an object of the present invention is to provide a quality control method for a machining liquid supply nozzle that facilitates the quality determination of the machining liquid supply nozzle.

According to the present invention, a chuck table that holds a workpiece and a cutting device that includes a cutting means that includes a cutting blade that cuts the workpiece held by the chuck table is provided and held by the chuck table. a machining fluid quality control method of the supply nozzle for supplying a working fluid to the workpiece, the jetting step of jetting the machining fluid from the machining liquid discharge port by supplying the machining fluid to the machining liquid supply nozzle, said An imaging step of imaging the machining liquid ejected from the machining liquid ejection port with an imaging means to form a captured image; a determination step of determining whether the machining liquid supply nozzle is good or not based on the captured image formed in the imaging step; the provided, said working fluid supply nozzle, an inlet for working fluid supplied from the machining fluid supply source flows, a pair of pipes communicating with the flow inlet disposed on both sides side of the cutting blade The machining fluid jet port formed in each pipe so as to face the cutting blade, and in the imaging step, the machining fluid supply nozzle is imaged from a plurality of directions to obtain a plurality of captured images. In the determination step, the opening angle of the machining fluid when the machining fluid is ejected from the machining fluid supply nozzle, the presence or absence of cracks in the ejected machining fluid, the presence or absence of waviness, the ejected machining fluid and the machining fluid supply A quality control method for a machining liquid supply nozzle is provided , which detects an angle formed with the nozzle and determines whether the machining liquid supply nozzle is good or bad .

Preferably, the machining liquid supply nozzle has an individual identification mark for identifying a solid, and the captured image includes an individual identification number for identifying the solid of the machining liquid supply nozzle.

  In the quality control method for the machining fluid supply nozzle of the present invention, the machining fluid is supplied to the machining fluid supply nozzle, the machining fluid ejected from the machining fluid ejection port is imaged, and the quality of the machining fluid supply nozzle is determined based on the captured image. Therefore, it is possible to easily determine whether the machining liquid supply nozzle is good or bad.

It is an external appearance perspective view of a cutting device. It is a perspective view of the semiconductor wafer supported by the annular frame via the dicing tape. It is a disassembled perspective view which shows the relationship between a spindle unit and the mount flange which should be fixed to a spindle. It is a disassembled perspective view which shows the relationship between a spindle unit and the hub blade which should be mounted | worn with a spindle. It is a perspective view of the state where the hub blade is mounted on the spindle. It is a disassembled perspective view which shows the relationship between a spindle unit and the washer blade which should be mounted | worn with a spindle. It is a perspective view of a cutting blade and a wheel cover part. It is a perspective view of the wheel cover part which omitted the cutting blade. It is a side view of a cutting blade and a wheel cover part. FIG. 10A shows a captured image taken from the direction of arrow A in FIG. 8, FIG. 10A shows a state in which the angle of the coolant ejected from the coolant ejecting port is measured, and FIG. 10B shows the coolant. Each of them shows a state in which it is confirmed whether or not the coolant ejected from the ejection port is broken. FIG. 9 shows a picked-up image picked up from the direction of arrow B in FIG. 8 and is used to detect the degree of shaking of the coolant ejected from the coolant jet port. FIG. 9 shows a picked-up image picked up from the direction of arrow C in FIG. 8 and is used for measuring the angle between the cooling liquid ejected from the cooling liquid outlet and the cooling liquid supply nozzle.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 shows an external view of a cutting apparatus 2 that can divide a semiconductor wafer into individual chips (devices). The quality control method for a machining fluid supply nozzle according to the present invention is used for quality control of a cooling fluid supply nozzle and a cutting fluid supply nozzle of a cutting device, for example.

  On the front side of the cutting device 2, there is provided operating means 4 for an operator to input instructions to the device such as machining conditions. In the upper part of the apparatus, there is provided a display means 6 such as a CRT for displaying a guidance screen for an operator and an image taken by an imaging means described later.

  As shown in FIG. 2, on the surface of the semiconductor wafer W to be diced, the first street S1 and the second street S2 are formed orthogonally, and the first street S1 and the second street S2 are formed. And a number of devices D are formed on the wafer W.

  The wafer W is attached to a dicing tape T that is an adhesive sheet, and the outer peripheral edge of the dicing tape T is attached to an annular frame F. As a result, the wafer W is supported by the frame F via the dicing tape T, and a plurality of wafers (for example, 25 sheets) are accommodated in the wafer cassette 8 shown in FIG. The wafer cassette 8 is placed on a cassette elevator 9 that can move up and down.

  Behind the wafer cassette 8, a loading / unloading means 10 for unloading the wafer W before cutting from the wafer cassette 8 and loading the wafer after cutting into the wafer cassette 8 is disposed. Between the wafer cassette 8 and the loading / unloading means 10, a temporary placement area 12, which is an area on which a wafer to be carried in / out, is temporarily placed, is provided. Positioning means 14 for positioning at a certain position is provided.

  In the vicinity of the temporary placement area 12, transport means 16 having a turning arm that sucks and transports the frame F integrated with the wafer W is disposed, and the wafer W carried to the temporary placement area 12 is It is sucked by the transport means 16 and transported onto the chuck table 18 and is sucked by the chuck table 18 and is held on the chuck table 18 by fixing the frame F by a plurality of clamps 19.

  The chuck table 18 is configured to be rotatable and reciprocally movable in the X-axis direction. Above the movement path of the chuck table 18 in the X-axis direction, an alignment unit 20 that detects a street to be cut of the wafer W is provided. It is arranged.

  The alignment unit 20 includes an imaging unit 22 that images the surface of the wafer W, and can detect a street to be cut by image processing such as pattern matching based on an image acquired by imaging. The image acquired by the imaging unit 22 is displayed on the display unit 6.

  On the left side of the alignment means 20, a cutting means 24 for cutting the wafer W held on the chuck table 18 is disposed. The cutting means 24 is configured integrally with the alignment means 20, and both move together in the Y-axis direction and the Z-axis direction.

  The cutting means 24 is configured by attaching a cutting blade 28 to the tip of a rotatable spindle 26 and is movable in the Y-axis direction and the Z-axis direction. The cutting blade 28 is located on the extended line of the imaging means 22 in the X-axis direction.

  Referring to FIG. 3, an exploded perspective view showing the relationship between the spindle and the blade mount attached to the spindle is shown. A spindle 26 that is rotationally driven by a servo motor (not shown) is rotatably accommodated in a spindle housing 32 of the spindle unit 30. The spindle 26 has a tapered portion 26a and a small distal end portion 26b, and a male screw 34 is formed on the small distal end portion 26b.

  A mount flange 36 includes a boss part (convex part) 38 and a fixing flange 40 formed integrally with the boss part 38, and a male screw 42 is formed on the boss part 38. Further, the mount flange 36 has a mounting hole 43.

  The mounting flange 36 is inserted into the tip small diameter portion 26b and the taper portion 26a of the spindle 26, and the nut 44 is screwed into the male screw 34 to be tightened, as shown in FIG. Attached to.

  FIG. 4 is an exploded perspective view showing the mounting relationship between the spindle 26 to which the mount flange 36 is fixed and the cutting blade 28. The cutting blade 28 is called a hub blade, and is configured by electrodepositing a cutting blade 50 in which diamond abrasive grains are dispersed in a nickel base material on the outer periphery of a circular base 46 having a circular hub 48.

  The mounting hole 52 of the cutting blade 28 is inserted into the boss portion 38 of the mount flange 36, and the fixing nut 54 is screwed onto the male screw 42 of the boss portion 38 and tightened, so that the cutting blade 28 is moved to the spindle 26 as shown in FIG. Attached to.

  Referring to FIG. 6, there is shown an exploded perspective view showing how the ring-shaped or washer-shaped cutting blade 56 is mounted on the spindle 26. The cutting blade 56 is composed of a cutting blade (electroforming grindstone) electroformed entirely.

  The cutting blade 56 is inserted into the boss portion 38 of the mount flange 36, the detachable flange 58 is further inserted into the boss portion 38, and the fixing nut 54 is screwed into the male screw 42 and tightened, whereby the cutting blade 56 is fixed to the fixing flange 40. And is attached to the spindle 26 by being sandwiched from both sides by the detachable flange 58.

  Referring to FIG. 7, a perspective view of a state in which a cutting blade mounted on a spindle is surrounded by a wheel cover (blade cover) 60 is shown. FIG. 8 is a perspective view of the wheel cover portion with the cutting blade omitted. A blade break detector 62 is attached to the wheel cover 60.

  As shown in FIG. 9, in the blade breakage detector 62, the tip of the light emitting part 64 connected to the optical fiber 66 and the tip of the light receiving part similarly connected to the optical fiber face each other across the cutting blade 50 of the cutting blade 28. It is positioned and configured.

  68 is an adjusting screw for adjusting the position of the blade breakage detector 62, and 70 is a fixing screw for fixing the blade breakage detector 62 at the adjusted position. A marker 72 is formed at the tip of the light emitting portion 64.

  Referring to FIG. 7, a perspective view of a state in which the cutting blade 28 attached to the spindle is surrounded by a wheel cover (blade cover) 60 is shown. FIG. 8 is a perspective view of the wheel cover 60 from which the cutting blade 28 is omitted.

  An air cylinder (not shown) is accommodated in the wheel cover 60, and a mounting plate (not shown) is fixed to the tip of the piston rod of the air cylinder. A coolant nozzle assembly 76 is fastened to the mounting plate by screws 86.

  As best shown in FIG. 8, the coolant nozzle assembly 76 includes a pair of connecting pipes 78a and 78b to which hoses 82a and 82b are connected, respectively, and both the front and back sides of the cutting blade 28 connected to the connecting pipes 78a and 78b. It includes a pair of coolant supply nozzles (working fluid supply nozzles) 80a and 80b each composed of a pipe extending to the side. Each of the coolant supply nozzles 80a and 80b has an individual identification mark for identifying a solid.

  Reference numeral 81 denotes a coolant jet (working fluid jet) formed in each coolant supply nozzle 80a, 80b so as to face the cutting blade 28. Each of the cooling liquid supply nozzles 80a and 80b has an inflow port through which the cooling liquid flows in a connection portion of the connection pipes 78a and 78b. A splash cover 84 is provided outside the respective coolant supply nozzles 80a and 80b. In the present embodiment, a cooling liquid in which carbon dioxide gas is mixed in pure water is used as the cooling liquid.

  Reference numeral 88 denotes a cutting fluid block (nozzle block), which is fastened to the wheel cover 60 by screws 90. The cutting fluid block 88 includes a connection pipe 92 connected to the hose 96 and a cutting fluid nozzle 94 (see FIG. 9) connected to the connection pipe 92.

  The tip (cutting fluid supply port) of the cutting fluid nozzle 94 opens toward the cutting blade 50 of the cutting blade 28. As shown in FIG. 8, the coolant nozzle assembly 76 can be adjusted in the arrow Z direction, and the cutting fluid block 88 can be adjusted in the arrow Y direction.

  In the quality control method for the working fluid supply nozzle of the present invention, first, the coolant is supplied to the coolant supply nozzles 80a and 80b via the hoses 82a and 82b connected to the coolant supply source, and the coolant supply nozzle 80a. , 80 b, an ejection step for ejecting the coolant from the coolant outlet 81 is performed.

  And the imaging step which images the cooling fluid ejected from the cooling fluid outlet 81 from the arrow A direction, the B direction, and the C direction in FIG. 8 is performed. Next, a determination step for determining the quality of the coolant supply nozzle based on the captured image is performed, but it is preferable to perform image processing on the captured image before performing the determination step.

  The captured image subjected to the image processing is displayed on the display screen. As an image processing system for executing image processing, for example, an ultra-high speed flexible image processing system XG-7000Series manufactured by KEYENCE can be used.

Preferably, the captured image and the data processed from the captured image are stored in a storage device, and for example, when trouble occurs, the image and data are referred to and used for solving the trouble. Further, by processing the captured image if necessary, it may be subjected to computer simulation.

  The imaging step is performed from the directions of arrows A, B, and C. However, imaging may be performed using a plurality of cameras, or the coolant supply nozzles 80a and 80b may be connected to A, B, and C with a single movable camera. You may make it image from three directions. Alternatively, the camera may be fixed and the coolant supply nozzles 80a and 80b may be moved. Subsequently, a determination step of determining whether the coolant supply nozzles 80a and 80b are good or not based on the captured image is performed.

  The imaging step may be performed with the wheel cover 60 attached to the cutting device, or may be performed with the cooling nozzle assembly placed on a dedicated inspection device.

  Referring to FIG. 10A, an imaging screen 100A displaying a captured image captured from the direction of arrow A in FIG. 8 is shown. The captured image is sharpened by image processing, and the edge of the coolant ejected from the coolant jet port 81 of the coolant supply nozzle 80a is detected.

  In this imaging screen 100A, the opening angle θ of the cooling liquid 83 ejected from the cooling liquid outlet 81 of the cooling liquid supply nozzle 80a is measured, and if the opening angle θ is within a predetermined allowable range, it is determined to be acceptable. However, if it falls outside the allowable range, it is judged as unacceptable.

  Similarly, the coolant is also ejected from the coolant outlet 81 of the coolant supply nozzle 80b, the opening angle of the coolant is measured, and when the opening angle is within a predetermined allowable range, it is determined as acceptable, If it falls outside the allowable range, it is judged as a failure.

  The imaging screen 100A displays the opening angle: Δ of the left nozzle (L nozzle) 80a and the opening angle: □ of the right nozzle (R nozzle) 80b. Further, an individual identification number for identifying the solid of the coolant supply nozzles 80a and 80b is displayed on the imaging screen 100A.

Here, the identification mark displayed on the coolant supply nozzles 80a and 80b may be different from the solid identification display on the imaging screen 100A. For example, the coolant supply nozzle 80a, a two-dimensional bar code assigned to 80b, may be the imaging screen 100A displaying the serial number as the individual identification number.

Referring to FIG. 10B, there is shown an imaging screen 100B that displays a captured image for confirming whether or not the coolant 83 ejected from the coolant outlet 81 of the coolant supply nozzle 80a is broken. The captured image is clarified by image processing, and the presence or absence of cracking of the coolant ejected from the coolant jet port 81 of the coolant supply nozzle 80a is detected. In the imaging screen 100 </ b> B, 85 is a space, and the coolant 83 ejected from the coolant outlet 81 is broken into two.

  Therefore, in this case, (L nozzle) crack: NG is displayed. Similarly, it is confirmed whether or not the cooling liquid 83 ejected from the cooling liquid outlet 81 of the R nozzle 80b is cracked. If there is no crack, (R nozzle) cracking: OK is displayed.

Referring to FIG. 11, an imaging screen 100C that displays a captured image captured from the direction of arrow B in FIG. 8 is shown. The captured image is clarified by image processing, and the presence or absence of the swell of the coolant 83 ejected from the coolant outlet 81 of the coolant supply nozzle 80a is detected.

  In this imaging screen 100C, the coolant 83 ejected from the three coolant outlets 81 of the coolant supply nozzle 80a is imaged from the direction of the arrow B in FIG. 8, and the shaking state of the ejected coolant (whether there is no swell) ) Is detected. When there is no swell or when the swell is within a predetermined range, (L nozzle) swell: OK is displayed.

  Similarly, the cooling liquid ejected from the cooling liquid ejection port 81 of the cooling liquid ejection nozzle 80b is imaged from the opposite side to the arrow B direction in FIG. 8 to detect the degree of fluctuation (no swell) of the ejected cooling liquid. To do. When there is no swell or when the swell is within a predetermined range, (R nozzle) swell: OK is displayed.

Referring to FIG. 12, an imaging screen 100D that displays a captured image captured from the direction of arrow C in FIG. 8 is shown. The captured image is clarified by image processing, and the ejection angle of the coolant 83 ejected from the coolant outlet 81 of the coolant supply nozzle 80a is detected.

  In this imaging screen 100D, the angles (ejection angles) formed by the cooling liquid 83 ejected from the three cooling liquid ejection ports 81 of the cooling liquid supply nozzle 80a and the cooling liquid supply nozzle 80a are measured. The coolant outlet 81 is displayed.

  Similarly, an angle formed between the coolant 83 supplied from the three coolant outlets 81 of the coolant supply nozzle 80b and the coolant supply nozzle 80b is supplied from the coolant supply nozzle 80b. ) And the respective ejection angles are displayed on the imaging screen 100D. When the measured ejection angle is within the allowable range, it is determined to be acceptable, and when the ejection angle is outside the allowable range, it is determined to be unacceptable.

  In the above-described embodiment, the opening angle of the coolant 83 ejected from the coolant jet port 81 based on the three captured images taken from the directions of the arrows A, B, and C, the presence or absence of cracks, the presence or absence of swell, and the ejection angle These four items are checked, and a determination step is performed in which any one of the items is determined to be defective if there is NG. However, the number of captured images and check items are not limited to the numbers described above.

  In the embodiment described above, the example in which the quality control method for the machining fluid supply nozzle of the present invention is applied to the cooling fluid supply nozzles 80a and 80b of the cutting apparatus has been described. However, a plurality of cutting fluids ejected from the cutting fluid nozzle 94 are used. The quality of the cutting fluid nozzle 94 may be determined by taking an image from the direction. Furthermore, the present invention may be applied to a machining liquid supply nozzle of a grinding device or a spinner cleaning device.

  In the quality control method for the cooling liquid supply nozzles 80a and 80b of the above-described embodiment, the cooling liquid is supplied to the cooling liquid supply nozzles 80a and 80b, the cooling liquid ejected from the cooling liquid outlet 81 is imaged, and based on the captured image. Therefore, the quality of the coolant supply nozzles 80a and 80b is determined, so that the quality determination of the coolant supply nozzles 80a and 80b can be performed quantitatively without any variation in the quality determination by the operator.

2 Cutting device 18 Chuck table 24 Cutting means 26 Spindle 28 Cutting blade 60 Wheel cover (blade cover)
80a, 80b Coolant supply nozzle 81 Coolant outlet 83 Coolant

Claims (2)

Workpiece disposed in a cutting apparatus having a chuck table for holding a workpiece and a cutting means including a cutting blade for cutting the workpiece held on the chuck table and held by the chuck table A quality control method for a machining fluid supply nozzle for supplying machining fluid to
An ejection step of supplying the machining liquid to the machining liquid supply nozzle and ejecting the machining liquid from the machining liquid ejection port;
An imaging step of imaging the machining liquid ejected from the machining liquid ejection port with an imaging means to form a captured image;
A determination step for determining the quality of the processing liquid supply nozzle based on the captured image formed in the imaging step ,
The machining fluid supply nozzle includes an inlet through which a machining fluid supplied from a machining fluid supply source flows, a pair of pipes that are in communication with the inlet and disposed on both front and back sides of the cutting blade, and the cutting The machining fluid spout formed in each pipe so as to face the blade,
In the imaging step, the machining liquid supply nozzle is imaged from a plurality of directions to form a plurality of captured images,
In the determination step, the opening angle of the machining liquid when the machining liquid is ejected from the machining liquid supply nozzle, the presence or absence of cracks in the ejected machining liquid, the presence or absence of waviness, the relationship between the ejected machining liquid and the machining liquid supply nozzle A quality control method for a machining fluid supply nozzle , wherein an angle formed is detected to determine whether the machining fluid supply nozzle is good or bad . The working fluid supply nozzle has an individual identification mark for identifying a solid,
The quality control method for a machining liquid supply nozzle according to claim 1, wherein the captured image includes an individual identification number for identifying a solid of the machining liquid supply nozzle.

Images