JP5523212B2 - Cutting blade management method - Google Patents

Description

  The present invention relates to a method for managing a cutting blade that is detachably mounted on a spindle of a cutting apparatus.

  A semiconductor wafer formed on the surface of a plurality of devices such as IC, LSI, etc., partitioned by a predetermined division line (street) formed in a grid pattern is cut along the predetermined division line by a cutting blade attached to a cutting apparatus. The device is divided into individual devices, and the divided devices are widely used in electric devices such as mobile phones and personal computers.

  The cutting apparatus includes a chuck table that sucks and holds a workpiece such as a semiconductor wafer, and a cutting means (cutting unit) that rotatably holds a cutting blade that cuts the workpiece sucked and held by the chuck table. .

  The cutting means is composed of a spindle, a motor for driving the spindle, a blade mount fixed to the tip of the spindle, a cutting blade attached to the blade mount, and a fixed nut for fixing the cutting blade to the blade mount. Has been. An operator selects a standard cutting blade suitable for the characteristics of the workpiece and attaches it to a blade mount fixed to the spindle to cut the workpiece.

JP-A-8-323545

  In this way, the blade mount is required to be fitted with a standard cutting blade that matches the characteristics of the workpiece, but the operator (operator) changes while the cutting device is operating, and then the cutting is performed. In a situation where the cutting blade has to be replaced due to damage to the blade or the like, a replacement worker may attach a cutting blade of the wrong standard to the blade mount.

  If the cutting blade specification is incorrect and an inappropriate cutting blade is mounted on the blade mount and cutting continues with a cutting blade that does not match the characteristics of the workpiece, the workpiece will be damaged or the cutting blade will be damaged. There is a problem of waking up.

  In addition, even if a skilled worker teaches how to select a cutting blade when the worker is immature and cannot select a standard cutting blade that matches the characteristics of the workpiece, the cutting blade will be damaged and cut. When it becomes necessary to replace the blade, there is a problem that the cutting blade specification is wrong and an inappropriate cutting blade is selected and the blade mount is mounted.

  The present invention has been made in view of these points, and an object of the present invention is to attach a standard cutting blade suitable for the characteristics of the workpiece to the spindle of the cutting apparatus regardless of the skill level of the operator. It is providing the management method of the cutting blade which can be performed.

  According to the first aspect of the present invention, there is provided a cutting blade management method for managing a cutting blade so that a cutting blade conforming to characteristics of a workpiece can be mounted on a spindle of a cutting apparatus, wherein the blade case is attached to the cutting blade. A coloring process for coloring in multiple colors according to the standard, a cutting blade accommodation process for accommodating cutting blades that meet the standard in a blade case colored in accordance with the standard, and the characteristics of the workpiece A cutting blade selection process for selecting a standard cutting blade, a color registration process for registering the same color as the color of the blade case containing the selected standard cutting blade in the cutting device, and the registration at the time of replacement of the cutting blade A color display step for displaying a color mark on the display screen of the cutting device; and a blade case having the same color as the color displayed on the display screen of the cutting device; Managing of the cutting blade, characterized in that the contained cutting blades in blade case equipped and a cutting blade mounting step of mounting the spindle of the cutting device is provided.

  Preferably, the cutting blade management method includes a case holder disposing step of disposing a case holder for housing the blade case in the cutting apparatus, and a blade case having the same color as the color displayed on the display screen. And a blade case housing step for housing the blade case.

  According to a second aspect of the present invention, there is provided a cutting blade management method for managing a cutting blade so that a cutting blade having a standard suitable for the characteristics of a workpiece can be mounted on a spindle of a cutting apparatus. Mark sticking process for sticking multiple color marks according to cutting blade standards, cutting blade housing process for housing cutting blades with marks in a transparent blade case, and workpiece characteristics Cutting blade selection process to select the cutting blade of the standard that meets the standards, the color registration process to register the same color as the mark attached to the cutting blade of the selected standard in the cutting device, and when replacing the cutting blade A color display step for displaying the registered color mark on the display screen of the cutting device, and a blade case having a mark of the same color as the color displayed on the display screen of the cutting device Providing a cutting blade, the management method of the cutting blade, characterized in that anda cutting blade mounting step of mounting a cutting blade housed in said blade case to the spindle of the cutting device is provided.

  Preferably, the cutting blade management method includes a case holder disposing step of disposing a case holder for housing the blade case in the cutting apparatus, and a cutting blade having a mark of the same color as the color displayed on the display screen. A blade case accommodating step of accommodating the accommodated blade case in the case holder.

  According to the first aspect of the present invention, the blade case is colored in a plurality of colors corresponding to the specifications of the cutting blade, the cutting blade is accommodated in the colored blade case, and the cutting blade of the selected standard is accommodated. Register the same color as the blade case color in the cutting device, prepare a blade case of the same color as the color displayed on the display screen of the cutting device when replacing the cutting blade, and install the cutting blade housed in the blade case. Since it was attached to the spindle of the cutting device, even if the worker changed in the middle or the worker was immature, it became possible to continue using the cutting blade that matched the characteristics of the workpiece, The problem of damaging the work piece or causing frequent breakage of the cutting blade can be solved.

  According to the second aspect of the present invention, the color of the mark attached to the cutting blade is color-coded according to the standard of the cutting blade, the cutting blade is accommodated in the transparent blade case, and the cutting blade of the selected standard is selected. Prepare the blade case containing the cutting blade with the same color as the color displayed on the display screen of the cutting device when replacing the cutting blade, register the same color as the color of the mark attached to the cutting device, Since the cutting blade housed in the blade case is mounted on the spindle of the cutting device, even if the worker is changed in the middle or the worker is immature, cutting suitable for the characteristics of the workpiece The blade can be used continuously, and the problems of damaging the work piece and causing frequent breakage of the cutting blade can be solved.

It is a schematic perspective view of a cutting device. It is a disassembled perspective view which shows the relationship between a spindle unit and the blade mount which should be fixed to a spindle. It is a disassembled perspective view which shows the relationship between a spindle unit and the cutting blade which should be mounted | worn with a spindle. It is an expansion perspective view of a cutting means. It is a disassembled perspective view which shows the state which accommodates the cutting blade in the colored blade case. It is a disassembled perspective view which shows the state which accommodates the cutting blade to which the colored mark was affixed in a transparent blade case. It is a figure which shows the display screen which displays the mark of the color registered by the color registration process. 8A is a front perspective view of the case holder according to the embodiment of the present invention, and FIG. 8B is a rear perspective view thereof.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a perspective view of a cutting apparatus 2 capable of dicing a semiconductor wafer suitable for applying the cutting blade management method of the present invention and dividing it into individual chips (devices).

  On the front side of the cutting device 2, there is provided operating means 4 for an operator to input instructions to the device such as machining conditions. In the upper part of the apparatus, there is provided a display means 6 such as a CRT for displaying a guidance screen for an operator and an image taken by an imaging means described later.

  The wafer W is attached to a dicing tape T that is an adhesive tape, and the outer peripheral edge of the dicing tape T is attached to an annular frame F. Thus, the wafer W is supported by the frame F via the dicing tape T, and a plurality of wafers (for example, 25 sheets) are accommodated in the wafer cassette 8. The wafer cassette 8 is placed on a cassette elevator 9 that can move up and down.

  Behind the wafer cassette 8, a loading / unloading means 10 for unloading the wafer W before cutting from the wafer cassette 8 and loading the wafer after cutting into the wafer cassette 8 is disposed.

  Between the wafer cassette 8 and the loading / unloading means 10, a temporary placement area 12, which is an area on which a wafer to be carried in / out, is temporarily placed, is provided. Positioning means 14 for positioning at a certain position is provided.

  In the vicinity of the temporary placement area 12, transport means 16 having a turning arm that sucks and transports the frame F integrated with the wafer W is disposed, and the wafer W carried to the temporary placement area 12 is It is sucked by the transport means 16 and transported onto the chuck table 18 and is sucked by the chuck table 18 and is held on the chuck table 18 by fixing the frame F by a plurality of clamps 19.

  The chuck table 18 is configured to be rotatable and reciprocally movable in the X-axis direction. Above the movement path of the chuck table 18 in the X-axis direction, an alignment unit 20 that detects a street to be cut of the wafer W is provided. It is arranged.

  The alignment unit 20 includes an imaging unit 22 that images the surface of the wafer W, and can detect a street to be cut by a process such as pattern matching based on an image acquired by imaging. The image acquired by the imaging unit 22 is displayed on the display unit 6.

  On the left side of the alignment means 20, a cutting means 24 for cutting the wafer W held on the chuck table 18 is disposed. The cutting means 24 is configured integrally with the alignment means 20, and both move together in the Y-axis direction and the Z-axis direction.

  The cutting means 24 is configured by attaching a cutting blade 28 to the tip of a rotatable spindle 26 and is movable in the Y-axis direction and the Z-axis direction. The cutting blade 28 is located on the extended line of the imaging means 22 in the X-axis direction.

  Referring to FIG. 2, an exploded perspective view showing the relationship between the spindle and the blade mount attached to the spindle is shown. A spindle 26 that is rotationally driven by a servo motor (not shown) is rotatably accommodated in a spindle housing 32 of the spindle unit 30. The spindle 26 has a tapered portion 26a and a small distal end portion 26b, and a male screw 34 is formed on the small distal end portion 26b.

A blade mount 36 includes a boss part (convex part) 38 and a fixed flange 40 formed integrally with the boss part 38, and a male screw 42 is formed on the boss part 38. Further, the blade mount 36 has a mounting hole 43.
In the blade mount 36, the mounting hole 43 is inserted into the tip small diameter portion 26b and the tapered portion 26a of the spindle 26, and the nut 44 is screwed into the male screw 34 and tightened, so that the tip portion of the spindle 26 as shown in FIG. Attached to.

FIG. 3 is an exploded perspective view showing a mounting relationship between the spindle 26 to which the blade mount 36 is fixed and the cutting blade 28. The cutting blade 28 is called a hub blade, and is configured by electrodepositing a cutting blade 50 in which diamond abrasive grains are dispersed in a nickel base material on the outer periphery of a circular base 46 having a circular hub 48.
The cutting blade 28 is attached to the spindle 26 by inserting the mounting hole 52 of the cutting blade 28 into the boss 38 of the blade mount 36 and screwing the fixing nut 54 into the male screw 42 of the boss 38.

  Referring to FIG. 4, an enlarged perspective view of the cutting means 24 is shown. A blade cover 60 covers the cutting blade 28, and a cutting water nozzle (not shown) that extends along the side surface of the cutting blade 28 is attached to the blade cover 60. Cutting water is supplied to a cutting water nozzle (not shown) via the pipe 72.

  Reference numeral 62 denotes a detachable cover, which is attached to the blade cover 60 with screws 64. The detachable cover 62 has a cutting water nozzle 70 that extends along the side surface of the cutting blade 28 when attached to the blade cover 60. The cutting water is supplied to the cutting water nozzle 70 via the pipe 74.

A blade detection block 66 is attached to the blade cover 60 with screws 68. A blade sensor (not shown) composed of a light emitting element and a light receiving element is attached to the blade detection block 66, and the state of the cutting blade 50 of the cutting blade 28 is detected by this blade sensor.
When the cutting of the cutting edge 50 is detected by the blade sensor, the cutting blade 28 is replaced with a new cutting blade. Reference numeral 76 denotes an adjusting screw for adjusting the position of the blade sensor.

  Although not shown in particular, the cutting device 2 is provided with a reference position detection sensor for detecting a reference position of the cutting blade 28 mounted on the spindle 26, and this reference position detection sensor causes a predetermined amount of wear of the cutting blade 28. If detected, the cutting blade 28 is replaced with a new cutting blade.

  Hereinafter, the management method of the cutting blade of this invention is demonstrated in detail. In the cutting blade management method of the first embodiment, as a first step, the blade case is colored in a plurality of colors corresponding to the cutting blade standards. That is, according to the cutting blade standard, for example, the blade case is colored in five colors of red, green, blue, brown, and yellow.

  Next, as a second step, a cutting blade conforming to the standard is accommodated in a blade case colored in accordance with the standard. For example, as shown in FIG. 5, a cutting blade 28 conforming to the standard is accommodated in a blade case 78 colored blue. The blade case 78 is formed from a resin molded body, and is colored blue, but the cutting blade 28 accommodated therein can be seen through.

  The blade case 78 includes a main body case 80 and a cover 82 attached to the main body case 80 by a hinge portion 84 so as to be opened and closed. The main body case 80 is formed with a circular convex portion 86 into which the mounting hole 52 of the cutting blade 28 is fitted.

  A hook 88 is integrally formed on the cover 82, and the cover 88 is closed with respect to the main body case 80 by engaging the hook 88 with an engaging protrusion 90 formed on the main body case 80. Retained.

  As a third step, a standard cutting blade 28 that matches the characteristics of the workpiece is selected. Therefore, for example, a blue blade case 78 containing a standard cutting blade suitable for the characteristics of the workpiece is selected.

  Next, as the fourth step, the same color as the blade case 78 containing the selected standard cutting blade 28 is registered in the cutting device 2 by the operation means 4. For example, blue is registered, and the cutting operation is performed in this state.

  When the cutting operation is continued and the cutting of the cutting edge 50 is detected by the blade sensor, or when the reference position detection sensor detects the wear of the cutting edge 50 more than a predetermined amount, the operator (operator) Replace with a new cutting blade.

  In this embodiment, as shown in FIG. 7, when the cutting blade is replaced, the color mark registered on the display screen 7 of the display means 6 of the cutting device 2, that is, the blue color mark 100 in this embodiment is displayed.

  The color mark 100 is displayed on the display screen 7 of the display means 6 by the operator operating the operation means 4, for example. More preferably, the detachable cover 62 is removed from the blade cover 60 when the cutting device 28 is replaced, but the color mark 100 registered in conjunction with this removal operation may be displayed on the display screen 7 of the display means 6.

  Therefore, the operator prepares a blade case 78 of the same color as the displayed color mark 100, takes out the cutting blade 28 from the blade case 78, and attaches it to the blade mount 36 fixed to the tip of the spindle 26.

  Preferably, a case holder 94 as shown in FIG. 8 that houses a blade case 78 that houses a cutting blade 28 of a selected standard is mounted at an appropriate location of the cutting device 2.

  Referring to FIG. 8A, a front side perspective view of the case holder 94 is shown. FIG. 8B is a rear perspective view of the case holder 94. The case holder 94 has a case accommodating portion 96 having a shape corresponding to the shape of the blade case 78. A permanent magnet 98 is disposed on the back surface of the case holder 94.

  The case holder 94 is formed of a resin molded body, and preferably a resin is selected so that the blade case 78 accommodated therein can be seen through. Then, as shown in FIG. 1, the case holder 94 is mounted on the front surface of the cover portion 21 in which the alignment means 20 of the cutting device 2 is accommodated, for example.

  By storing the blue blade case 78 containing the selected standard cutting blade 28 in the case holder 94, when the cutting blade 28 is replaced, the operator can quickly put the cutting blade 28 meeting the standard into the spindle 26. Can be attached to.

  As described above, according to the cutting blade management method of the present embodiment, the color mark 100 of the same color as the blade case 78 containing the standard cutting blade 28 selected at the time of replacement of the cutting blade is displayed on the display screen 7 of the display means 6. Therefore, even if the worker is changed in the middle or the worker is immature, the cutting blade 28 suitable for the characteristics of the workpiece can be continuously used. Accordingly, it is possible to prevent the workpiece 26 from being damaged or the cutting blade from being damaged by mounting the cutting blade 28 that does not meet the standards on the spindle 26.

  Next, the management method of the cutting blade of 2nd Embodiment is demonstrated. In this embodiment, as a 1st process, the mark of a several color is affixed on a some cutting blade corresponding to the specification of a cutting blade.

  The shape or the like of the mark is not limited. For example, a seal 92 as shown in FIG. 6 is attached to the cutting blade 28. The seal 92 is color-coded into five types, for example, red, green, blue, brown, and yellow according to the type of the cutting blade 28.

  Next, as a second step, the cutting blade 28 to which the seal 92 is attached is accommodated in a transparent blade case 78A. In the case of the present embodiment, the blade case 78A may be configured so that the color of the seal 92 attached to the cutting blade 28 accommodated therein can be seen through, and the blade case 78A has a color corresponding to the seal 92. There is no need to color. Of course, the blade case 78A may be colored in the same color as the seal 92.

  As a third step, a standard cutting blade that matches the characteristics of the workpiece is selected. For example, the cutting blade 28 to which the blue seal 92 is attached is selected. Therefore, the blade case 78A that accommodates the cutting blade 28 having the blue seal 92 adhered therein is selected.

  Next, as the fourth step, the same color as the color of the mark (seal) 92 attached to the cutting blade 28 of the selected standard is registered in the cutting device 2. The registered color is displayed as a color mark 100 on the display screen 7 of the display means 6 by the operator operating the operation means 4 when the cutting blade 28 needs to be replaced. More preferably, the color mark 100 of the color automatically registered when the cutting blade 28 is replaced is displayed on the display screen 7 of the display means 6.

  Therefore, the operator prepares a blade case 78A containing the cutting blade 28 to which the mark (seal) 92 of the same color as the color mark 100 displayed on the display screen 7 of the cutting device 2 is attached. The cutting blade 28 is taken out and this cutting blade 28 is mounted on the spindle 26 of the cutting device 2.

  In this embodiment, for example, a case holder 94 is mounted on the front surface of the cover portion 21 in which the alignment means 20 is accommodated, for example, and the same cutting blade 28 currently used in the case holder 94 is used. It is preferable to accommodate a blade case 78A that accommodates the cutting blade 28 to which the standard mark 92 is attached. By adopting such a configuration, it is possible to quickly mount the cutting blade 28 on the spindle 26 that conforms to the standard when the cutting blade 28 is replaced.

  Also in the cutting blade management method of the present embodiment, the color mark 100 of the cutting blade 28 to be mounted is displayed on the display screen 7, so that the cutting blade 28 is detected by detecting wear of the cutting blade or chipping of the cutting blade. When it is necessary to replace the blade with a new cutting blade, it is possible to prevent the wrong cutting blade not conforming to the standard from being attached to the spindle 26.

2 Cutting device 18 Chuck table 24 Cutting means 26 Spindle 28 Cutting blade 36 Blade mount 78, 78A Blade case 92 Mark (seal)
94 Case holder 98 Permanent magnet

Claims (4)

A cutting blade management method for managing a cutting blade so that a cutting blade conforming to the characteristics of a workpiece can be mounted on a spindle of a cutting device,
A coloring process for coloring the blade case into a plurality of colors corresponding to the cutting blade standard;
A cutting blade housing process for housing cutting blades that meet the standards in a blade case that is colored according to the standards,
A cutting blade selection process for selecting a cutting blade of a standard that matches the characteristics of the workpiece,
A color registration step of registering in the cutting device the same color as the color of the blade case containing the selected standard cutting blade;
A color display step for displaying a mark of the registered color on the display screen of the cutting apparatus when the cutting blade is replaced;
A cutting blade mounting step of preparing a blade case of the same color as the color displayed on the display screen of the cutting device and mounting the cutting blade accommodated in the blade case on the spindle of the cutting device;
A cutting blade management method comprising: A cutting blade management method for managing a cutting blade so that a cutting blade conforming to the characteristics of a workpiece can be mounted on a spindle of a cutting apparatus,
A mark sticking process for sticking a plurality of marks to a plurality of cutting blades in accordance with the cutting blade standard,
A cutting blade housing step for housing the cutting blade with the mark attached in the transparent blade case;
A cutting blade selection process for selecting a cutting blade of a standard that matches the characteristics of the workpiece,
A color registration step of registering in the cutting device the same color as the mark attached to the selected standard cutting blade;
A color display step for displaying a mark of the registered color on the display screen of the cutting apparatus when the cutting blade is replaced;
Cutting in which a cutting blade accommodated in a blade case having a mark of the same color as the color displayed on the display screen of the cutting device is prepared, and the cutting blade accommodated in the blade case is mounted on a spindle of the cutting device Blade mounting process;
A cutting blade management method comprising: A case holder disposing step of disposing a case holder for housing the blade case in the cutting device;
A blade case housing step of housing a blade case of the same color as the color displayed on the display screen in the case holder;
The cutting blade management method according to claim 1, further comprising: A case holder disposing step of disposing a case holder for housing the blade case in the cutting device;
A blade case accommodation step of accommodating a blade case containing a cutting blade having a mark of the same color as the color displayed on the display screen in the case holder;
The method for managing a cutting blade according to claim 2, further comprising:

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