JP2014036081A - 電子デバイスの製造方法、電子デバイス、電子機器、および移動体 - Google Patents

電子デバイスの製造方法、電子デバイス、電子機器、および移動体 Download PDF

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Publication number
JP2014036081A
JP2014036081A JP2012175752A JP2012175752A JP2014036081A JP 2014036081 A JP2014036081 A JP 2014036081A JP 2012175752 A JP2012175752 A JP 2012175752A JP 2012175752 A JP2012175752 A JP 2012175752A JP 2014036081 A JP2014036081 A JP 2014036081A
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JP
Japan
Prior art keywords
lid
electronic device
package
sealing hole
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2012175752A
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English (en)
Japanese (ja)
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JP2014036081A5 (enExample
Inventor
Shinji Nakayama
慎二 中山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2012175752A priority Critical patent/JP2014036081A/ja
Priority to CN201310336702.2A priority patent/CN103579014A/zh
Priority to US13/959,877 priority patent/US20140043779A1/en
Publication of JP2014036081A publication Critical patent/JP2014036081A/ja
Publication of JP2014036081A5 publication Critical patent/JP2014036081A5/ja
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
    • H01L21/54—Providing fillings in containers, e.g. gas fillings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/02—Containers; Seals
    • H01L23/10—Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00—Constructional details common to different types of electric apparatus
    • H05K7/02—Arrangements of circuit components or wiring on supporting structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
    • Y10T29/49144—Assembling to base an electrical component, e.g., capacitor, etc. by metal fusion

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2012175752A 2012-08-08 2012-08-08 電子デバイスの製造方法、電子デバイス、電子機器、および移動体 Withdrawn JP2014036081A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012175752A JP2014036081A (ja) 2012-08-08 2012-08-08 電子デバイスの製造方法、電子デバイス、電子機器、および移動体
CN201310336702.2A CN103579014A (zh) 2012-08-08 2013-08-05 电子器件的制造方法、电子器件、电子设备以及移动体
US13/959,877 US20140043779A1 (en) 2012-08-08 2013-08-06 Method of manufacturing electronic device, electronic device, electronic apparatus, and mobile object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012175752A JP2014036081A (ja) 2012-08-08 2012-08-08 電子デバイスの製造方法、電子デバイス、電子機器、および移動体

Publications (2)

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JP2014036081A true JP2014036081A (ja) 2014-02-24
JP2014036081A5 JP2014036081A5 (enExample) 2015-09-10

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JP2012175752A Withdrawn JP2014036081A (ja) 2012-08-08 2012-08-08 電子デバイスの製造方法、電子デバイス、電子機器、および移動体

Country Status (3)

Country Link
US (1) US20140043779A1 (enExample)
JP (1) JP2014036081A (enExample)
CN (1) CN103579014A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019059338A1 (ja) * 2017-09-22 2019-03-28 株式会社村田製作所 圧電振動子及び圧電振動子の製造方法
JP2023101889A (ja) * 2022-01-11 2023-07-24 セイコーエプソン株式会社 慣性センサー、慣性センサーの製造方法および慣性計測装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6167494B2 (ja) * 2012-09-26 2017-07-26 セイコーエプソン株式会社 電子デバイス用容器の製造方法、電子デバイスの製造方法、電子デバイス、電子機器及び移動体機器
CN106028649B (zh) * 2016-07-28 2019-02-12 Oppo广东移动通信有限公司 移动终端的电路板和具有其的移动终端
DE102017125140B4 (de) * 2017-10-26 2021-06-10 Infineon Technologies Ag Verfahren zum Herstellen eines hermetisch abgedichteten Gehäuses mit einem Halbleiterbauteil

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5232269A (en) * 1975-09-05 1977-03-11 Matsushita Electric Ind Co Ltd Hermetic sealing method of semiconductor devices
JPH10189795A (ja) * 1996-12-19 1998-07-21 Murata Mfg Co Ltd 素子のパッケージ構造およびその製造方法
JP2004266239A (ja) * 2003-01-10 2004-09-24 Seiko Epson Corp 圧電デバイス
JP2004289238A (ja) * 2003-03-19 2004-10-14 Seiko Epson Corp 圧電デバイス用パッケージと圧電デバイスおよびこれらの製造方法ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP2004320150A (ja) * 2003-04-11 2004-11-11 Seiko Epson Corp 圧電デバイス、圧電デバイス用パッケージ、および圧電デバイスの製造方法
WO2010010721A1 (ja) * 2008-07-25 2010-01-28 日本電気株式会社 封止パッケージ、プリント回路基板、電子機器及び封止パッケージの製造方法
JP2010119141A (ja) * 2010-02-22 2010-05-27 Kyocera Corp デバイス装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5041695A (en) * 1989-06-01 1991-08-20 Westinghouse Electric Corp. Co-fired ceramic package for a power circuit
US20040241906A1 (en) * 2003-05-28 2004-12-02 Vincent Chan Integrated circuit package and method for making same that employs under bump metalization layer
JP5007494B2 (ja) * 2005-07-04 2012-08-22 セイコーエプソン株式会社 電子デバイスの製造方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5232269A (en) * 1975-09-05 1977-03-11 Matsushita Electric Ind Co Ltd Hermetic sealing method of semiconductor devices
JPH10189795A (ja) * 1996-12-19 1998-07-21 Murata Mfg Co Ltd 素子のパッケージ構造およびその製造方法
JP2004266239A (ja) * 2003-01-10 2004-09-24 Seiko Epson Corp 圧電デバイス
JP2004289238A (ja) * 2003-03-19 2004-10-14 Seiko Epson Corp 圧電デバイス用パッケージと圧電デバイスおよびこれらの製造方法ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP2004320150A (ja) * 2003-04-11 2004-11-11 Seiko Epson Corp 圧電デバイス、圧電デバイス用パッケージ、および圧電デバイスの製造方法
WO2010010721A1 (ja) * 2008-07-25 2010-01-28 日本電気株式会社 封止パッケージ、プリント回路基板、電子機器及び封止パッケージの製造方法
JP2010119141A (ja) * 2010-02-22 2010-05-27 Kyocera Corp デバイス装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019059338A1 (ja) * 2017-09-22 2019-03-28 株式会社村田製作所 圧電振動子及び圧電振動子の製造方法
JPWO2019059338A1 (ja) * 2017-09-22 2020-11-12 株式会社村田製作所 圧電振動子及び圧電振動子の製造方法
US11309864B2 (en) 2017-09-22 2022-04-19 Murata Manufacturing Co., Ltd. Piezoelectric resonator unit and method for manufacturing the piezoelectric resonator unit
JP2023101889A (ja) * 2022-01-11 2023-07-24 セイコーエプソン株式会社 慣性センサー、慣性センサーの製造方法および慣性計測装置

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US20140043779A1 (en) 2014-02-13
CN103579014A (zh) 2014-02-12

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