JP2014035054A5 - - Google Patents

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Publication number
JP2014035054A5
JP2014035054A5 JP2012178123A JP2012178123A JP2014035054A5 JP 2014035054 A5 JP2014035054 A5 JP 2014035054A5 JP 2012178123 A JP2012178123 A JP 2012178123A JP 2012178123 A JP2012178123 A JP 2012178123A JP 2014035054 A5 JP2014035054 A5 JP 2014035054A5
Authority
JP
Japan
Prior art keywords
bearing unit
gas bearing
hydrostatic gas
longer
rotating body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012178123A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014035054A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012178123A priority Critical patent/JP2014035054A/ja
Priority claimed from JP2012178123A external-priority patent/JP2014035054A/ja
Priority to TW102123628A priority patent/TWI622715B/zh
Priority to KR20157005284A priority patent/KR20150038502A/ko
Priority to CN201380041777.6A priority patent/CN104541077B/zh
Priority to PCT/JP2013/069767 priority patent/WO2014024666A1/ja
Publication of JP2014035054A publication Critical patent/JP2014035054A/ja
Publication of JP2014035054A5 publication Critical patent/JP2014035054A5/ja
Pending legal-status Critical Current

Links

JP2012178123A 2012-08-10 2012-08-10 静圧気体軸受ユニット Pending JP2014035054A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012178123A JP2014035054A (ja) 2012-08-10 2012-08-10 静圧気体軸受ユニット
TW102123628A TWI622715B (zh) 2012-08-10 2013-07-02 Hydrostatic gas bearing unit
KR20157005284A KR20150038502A (ko) 2012-08-10 2013-07-22 정압 기체 베어링 유닛
CN201380041777.6A CN104541077B (zh) 2012-08-10 2013-07-22 静压气体轴承单元
PCT/JP2013/069767 WO2014024666A1 (ja) 2012-08-10 2013-07-22 静圧気体軸受ユニット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012178123A JP2014035054A (ja) 2012-08-10 2012-08-10 静圧気体軸受ユニット

Publications (2)

Publication Number Publication Date
JP2014035054A JP2014035054A (ja) 2014-02-24
JP2014035054A5 true JP2014035054A5 (enrdf_load_stackoverflow) 2015-07-16

Family

ID=50067900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012178123A Pending JP2014035054A (ja) 2012-08-10 2012-08-10 静圧気体軸受ユニット

Country Status (5)

Country Link
JP (1) JP2014035054A (enrdf_load_stackoverflow)
KR (1) KR20150038502A (enrdf_load_stackoverflow)
CN (1) CN104541077B (enrdf_load_stackoverflow)
TW (1) TWI622715B (enrdf_load_stackoverflow)
WO (1) WO2014024666A1 (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104614137B (zh) * 2015-01-15 2016-08-31 浙江大学 基于静压气浮解耦装置的三分量标准振动台
DE102015010875B9 (de) * 2015-08-25 2016-12-29 Thermo Electron (Karlsruhe) Gmbh Rheometer mit Gaslager
KR102698442B1 (ko) * 2016-08-10 2024-08-26 고쿠사이 게이소쿠키 가부시키가이샤 동적 균형 시험기
CN109955097B (zh) * 2017-12-22 2020-09-01 上海理工大学 一种静压半球体轴承轴系及精密机床
US11067124B2 (en) * 2018-07-23 2021-07-20 Alio Industries, Inc. Planar rotary air bearing stage
CN111285031B (zh) * 2020-03-11 2021-09-14 上海精测半导体技术有限公司 一种旋转台
CN111637159A (zh) * 2020-05-18 2020-09-08 哈尔滨工程大学 一种带有加压孔的自适应强制润滑轴承
CN111637160B (zh) * 2020-05-18 2021-11-05 哈尔滨工程大学 一种带有不均匀孔径的强制润滑轴承
CN111637161B (zh) * 2020-05-18 2021-11-09 哈尔滨工程大学 一种带有分布式孔隙的强制润滑轴承

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5026251U (enrdf_load_stackoverflow) * 1973-07-02 1975-03-26
JPH03292413A (ja) * 1990-04-06 1991-12-24 Nippon Seiko Kk 多孔質体軸受ユニット
JPH0547543U (ja) * 1991-11-29 1993-06-25 豊田工機株式会社 回転装置
JP3653832B2 (ja) * 1995-12-06 2005-06-02 日本精工株式会社 静圧気体軸受式回転案内装置
JPH11257467A (ja) * 1998-03-06 1999-09-21 Fujiwara:Kk プーリー
JP3667108B2 (ja) * 1998-08-31 2005-07-06 京セラ株式会社 糸状体のガイドローラ
DE102005007297B4 (de) * 2005-02-17 2007-05-31 Minebea Co., Ltd. Fluiddynamisches Luftlagersystem zur Drehlagerung eines Motors
JP5812316B2 (ja) * 2010-10-29 2015-11-11 オイレス工業株式会社 ロール装置
JP5851780B2 (ja) * 2011-09-26 2016-02-03 オイレス工業株式会社 エアベアリングユニット

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