JP2014023002A5 - - Google Patents

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Publication number
JP2014023002A5
JP2014023002A5 JP2012161032A JP2012161032A JP2014023002A5 JP 2014023002 A5 JP2014023002 A5 JP 2014023002A5 JP 2012161032 A JP2012161032 A JP 2012161032A JP 2012161032 A JP2012161032 A JP 2012161032A JP 2014023002 A5 JP2014023002 A5 JP 2014023002A5
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JP
Japan
Prior art keywords
substrate
side wall
substrate side
capacitor electrode
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012161032A
Other languages
English (en)
Japanese (ja)
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JP6286636B2 (ja
JP2014023002A (ja
Filing date
Publication date
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Priority to JP2012161032A priority Critical patent/JP6286636B2/ja
Priority claimed from JP2012161032A external-priority patent/JP6286636B2/ja
Publication of JP2014023002A publication Critical patent/JP2014023002A/ja
Publication of JP2014023002A5 publication Critical patent/JP2014023002A5/ja
Application granted granted Critical
Publication of JP6286636B2 publication Critical patent/JP6286636B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012161032A 2012-07-19 2012-07-19 センサ・デバイスおよびその製造方法 Expired - Fee Related JP6286636B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012161032A JP6286636B2 (ja) 2012-07-19 2012-07-19 センサ・デバイスおよびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012161032A JP6286636B2 (ja) 2012-07-19 2012-07-19 センサ・デバイスおよびその製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2017213349A Division JP6708597B2 (ja) 2017-11-03 2017-11-03 センサ・デバイスおよびその製造方法

Publications (3)

Publication Number Publication Date
JP2014023002A JP2014023002A (ja) 2014-02-03
JP2014023002A5 true JP2014023002A5 (ru) 2015-11-05
JP6286636B2 JP6286636B2 (ja) 2018-03-07

Family

ID=50197429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012161032A Expired - Fee Related JP6286636B2 (ja) 2012-07-19 2012-07-19 センサ・デバイスおよびその製造方法

Country Status (1)

Country Link
JP (1) JP6286636B2 (ru)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150296307A1 (en) * 2014-04-10 2015-10-15 Knowles Electronics, Llc. Dual diaphragm and dual back plate acoustic apparatus
CN105635867A (zh) * 2016-02-26 2016-06-01 钰太芯微电子科技（上海）有限公司 一种超薄麦克风
JP6708597B2 (ja) * 2017-11-03 2020-06-10 俊 保坂 センサ・デバイスおよびその製造方法
CN113647118B (zh) * 2019-03-28 2024-03-08 住友理工株式会社 静电型换能器以及静电型换能器单元

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002031148A (ja) * 2000-07-14 2002-01-31 Nsk Ltd 転がり軸受装置
JP2005183443A (ja) * 2003-12-16 2005-07-07 Hitachi Zosen Corp キャパシタ組込みプリント基板
JP5260342B2 (ja) * 2009-01-30 2013-08-14 ローム株式会社 Ｍｅｍｓセンサ
JP5198506B2 (ja) * 2010-05-07 2013-05-15 独立行政法人科学技術振興機構 機能性デバイスの製造方法並びに薄膜トランジスタ及び圧電式インクジェットヘッド
JP5500547B2 (ja) * 2010-05-28 2014-05-21 独立行政法人産業技術総合研究所 電気二重層キャパシタ
JP2011004598A (ja) * 2010-09-03 2011-01-06 Seiko Epson Corp 圧電型発電機および圧電型発電機を用いた電子機器
JP5795941B2 (ja) * 2010-11-19 2015-10-14 株式会社半導体エネルギー研究所 充電装置

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