JP2014011267A - Chuck table mechanism of cutting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a chuck table mechanism of a cutting device which inhibits vibrations of a work-piece during cutting and the cost increase.SOLUTION: A chuck table mechanism 20 holds a work-piece of a cutting device 1 which cuts the work-piece with a cutting blade 31. The chuck table mechanism 20 includes: a chuck table 21 having a holding surface where the work-piece is held on the front surface side; a support base 22 which supports the chuck table 21; and weight parts 23 which are attached to the rear surface side of the chuck table 21 and a periphery of the holding surface and inhibit the vibrations of the chuck table 21.

Description

  The present invention relates to a chuck table mechanism of a cutting apparatus that performs a cutting process that divides a workpiece into individual products and device chips.

  In semiconductor device manufacturing processes and various electronic component manufacturing processes, ultrathin blades (cutting blades) called dicing saws are rotated at high speeds to convert workpieces (semiconductor wafers, glass, ceramics, etc.) into individual products and device chips. A cutting device that divides into two parts is indispensable. In the cutting apparatus, a cutting blade having a thickness of 20 μm to 300 μm composed of a bond material and fine abrasive grains (diamond, silicon carbide, etc.) contained in a large amount in the bond material is rotated at high speed to form a chuck table. The line to be divided of the workpiece held by suction is pulverized and removed at a fine level, and the workpiece is divided into individual products and device chips (see Patent Document 1).

  By the way, the cutting blade rotates at a high speed by the mounted spindle, but the spindle vibrates to a slight extent when rotating at a high speed. Cutting grooves are formed in the work piece by cutting with a cutting blade, but many chips (chipping) occur in the cutting grooves formed by the vibrating cutting blade, resulting in deterioration of quality. There was a possibility of letting. Further, even a slight vibration caused by the environment of the factory where the cutting device is installed may cause chipping (chipping) and reduce the quality.

  Therefore, as a technology to suppress the vibration of the processing unit (resonance) due to vibration caused by the rotation of the spindle, etc., a tank is provided in the spindle housing, and the liquid that becomes the weight filled in the tank is adjusted, thereby processing It has been proposed to adjust the natural frequency of the unit to suppress vibration (generation of resonance) of the machining unit (see Patent Document 2).

JP 2001-298002 A JP 2010-188433 A

  However, when a tank is provided in the spindle housing, in order to adjust the liquid amount in the tank to a liquid amount that can suppress the vibration of the processing unit, a sensor for detecting the liquid amount, a liquid supplied to the tank, or a tank Since a device for discharging the liquid from the inside is required, there is a possibility of an increase in cost. Further, a process such as verification of an appropriate liquid amount for suppressing the vibration of the processing unit is required, and the operation may become complicated until the liquid amount is adjusted to suppress the vibration of the processing unit.

  The present invention has been made in view of the above, and an object of the present invention is to provide a chuck table mechanism of a cutting apparatus that can suppress vibration of a workpiece during cutting and can suppress an increase in cost. To do.

  In order to solve the above-described problems and achieve the object, the present invention provides a chuck table mechanism for holding the workpiece of a cutting apparatus that cuts the workpiece with a cutting blade, and the chuck table mechanism includes: A chuck table having a holding surface for holding the workpiece on the front side, a support base for supporting the chuck table, and mounted on at least one of the back side of the chuck table or the periphery of the holding surface; A weight portion for suppressing vibration of the chuck table.

  Further, in the chuck table mechanism, the weight portion includes a main body portion and a mounting portion for mounting the main body portion on the chuck table, and the main body portion has a plurality of types according to various weights. It is preferably one or more, and can be mounted on the chuck table via the mounting portion.

  The chuck table mechanism of the cutting apparatus according to the present invention has a weight portion attached to the chuck table so that the weight of the chuck table is increased, and the natural frequency of the chuck table is changed. As a result, the chuck table can be prevented from resonating. Therefore, the vibration of the workpiece held on the chuck table is suppressed. In addition, since the vibration of the workpiece during cutting can be suppressed with a simple configuration in which the weight portion is attached to the chuck table, an increase in cost can be suppressed.

FIG. 1 is a diagram illustrating a configuration example of a cutting apparatus including a chuck table mechanism according to the first embodiment. FIG. 2 is a diagram illustrating a configuration example of the chuck table mechanism according to the first embodiment. FIG. 3 is a cross-sectional view of the chuck table mechanism according to the first embodiment. FIG. 4 is a development view of the chuck table mechanism according to the first embodiment. FIG. 5 is a diagram illustrating a configuration example of a chuck table mechanism according to the second embodiment. FIG. 6 is a cross-sectional view of the chuck table mechanism according to the second embodiment. FIG. 7 is a development view of the chuck table mechanism according to the second embodiment.

  DESCRIPTION OF EMBODIMENTS Embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. The constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the structures described below can be combined as appropriate. Various omissions, substitutions, or changes in the configuration can be made without departing from the scope of the present invention.

Embodiment 1
FIG. 1 is a diagram illustrating a configuration example of a cutting apparatus including a chuck table mechanism according to the first embodiment. FIG. 2 is a diagram illustrating a configuration example of the chuck table mechanism according to the first embodiment. FIG. 3 is a cross-sectional view of the chuck table mechanism according to the first embodiment. FIG. 4 is a development view of the chuck table mechanism according to the first embodiment. FIG. 3 is a cross section in a plane including the central axis of the chuck table mechanism shown in FIG.

  As shown in FIG. 1, a cutting apparatus 1 including a chuck table mechanism according to the first embodiment includes a chuck that holds a workpiece in order to divide the workpiece (not shown) or to perform edge trimming of the workpiece. The workpiece is cut by moving the chuck table mechanism 20 having the table 21 and the machining means 30 having the cutting blade 31 relative to each other. The cutting apparatus 1 includes a chuck table mechanism 20, a processing unit 30, an X-axis moving unit 40, a Y-axis moving unit 50, a Z-axis moving unit 60, and a control device 70. Here, the workpiece is a workpiece to be processed by the cutting apparatus 1, and in this embodiment, a semiconductor wafer having a base material of silicon, sapphire, gallium, or the like, a CSP substrate, glass, resin, or the like plate shape. It is a member. For example, the work piece is pasted on a dicing tape with the back side opposite to the device side surface where a plurality of devices are formed, and the dicing tape stuck on the work piece is stuck on a magnetic frame As a result, the frame is fixed.

  The chuck table mechanism 20 holds a workpiece, and includes a chuck table 21, a support base 22, and a weight portion 23.

  As shown in FIG. 2, the chuck table 21 has a holding surface 21a for holding a workpiece on the front surface side (the side opposite to the back surface side on the support base 22 side). The holding surface 21a is a surface of a disk-shaped porous ceramic or the like, and, as shown in FIG. 3, through a vacuum suction passage 21e formed in the chuck table 21 and a vacuum suction passage 22a formed in the support base 22. The workpiece to be placed is connected to a vacuum suction source (not shown) and sucked and held by a negative pressure action. Here, the holding surface 21a is formed so as to protrude to the surface side from the chuck table main body 21b. The chuck table 21 has a plurality of collar portions 21c formed on the outer periphery of a disk-shaped chuck table main body 21b. In the present embodiment, the collar portions 21c are formed at every 90 degrees at regular intervals, as shown in FIG. A magnet 21d that attracts the frame holding the workpiece by a magnetic force to each collar portion 21c via a dicing tape is attached to the surface side. As shown in FIG. 3, the chuck table 21 is detachably supported by the support base 22, and when fixed, the chuck table 21 is sucked and held by the support base 22 by a negative pressure action, and the relative relationship between the support base 22 and the chuck table 21. Rotation is regulated.

  The support base 22 supports the chuck table 21. In this embodiment, the support base 22 rotatably supports the chuck table 21 in the θ direction of the cutting apparatus 1 centering on the central axis of the support base 22. It is. The support base 22 is connected to a rotational drive source (not shown), and can rotate at an arbitrary angle in the θ direction, for example, 90 degrees or continuously by the rotational force generated by the rotational drive source. The held workpiece can be rotationally driven with respect to the cutting blade 31 such as rotating at an arbitrary angle or continuously around the central axis of the support base 22.

  As shown in FIG. 2, the weight portion 23 is attached to at least one of the back surface side of the chuck table 21 and the periphery of the holding surface 21 a, and suppresses vibration of the chuck table 21. In this embodiment, the weight portion 23 includes a plurality of mounting portions 24 and one ring-shaped main body portion 25 that are mounted on the back surface side of the chuck table 21 and around the holding surface 21a, and a plurality of fixing portions 26. It is configured.

  Each mounting portion 24 mounts the ring-shaped main body portion 25 on the chuck table 21, and a plurality of mounting portions 24 are arranged on the surface side of the chuck table 21 corresponding to the respective flange portions 21 c. Each mounting portion 24 is provided with a magnet 24 a having the same function as the magnet 21 d of the chuck table 21. Here, as shown in FIG. 3, each mounting portion 24 is disposed in contact with the surface side of the chuck table 21 with the magnet 24 a facing the magnet 21 d in the central axis direction. Each mounting portion 24 is formed so as to protrude radially outward from the outermost periphery on the radially outer side of the collar portion 21c in this state, that is, the mounting portion disposed state. That is, as shown in FIG. 2, each mounting portion 24 has a non-overlapping region that does not overlap with each collar portion 21c on the outer side in the radial direction when viewed from the central axis direction. As shown in FIG. 4, each mounting portion 24 is formed with a through hole 24b into which the fixing portion 26 is inserted in a non-overlapping region. When the fixing portion 26 is inserted into the through hole 24b from the front surface side of each mounting portion 24, the tip of the fixing portion 26 protrudes to the back surface side opposite to the inserted side. Each mounting portion 24 is set to have a thickness that is lower than the holding surface 21a when it is disposed on the surface side of the chuck table 21. Thereby, it can prevent that the cutting blade 31 cuts into each mounting part 24 at the time of cutting. In addition, when the frame is placed on the upper surface (front surface) of each mounting portion 24, the thickness of each mounting portion 24 is set so that the upper surface (front surface) of the frame is lower than the holding surface 21 a of the chuck table 21. Is set.

  The ring-shaped main body portion 25 is a main body portion that mainly functions as a weight, is disposed in contact with the back side of the chuck table 21, and is mounted on the chuck table 21 via the mounting portion 24. It is. The ring-shaped main body portion 25 has a plurality of collar portions 25b formed on the outer periphery of a ring-shaped base portion 25a. The collar portions 25b correspond to the mounting portions 24, and are formed at regular intervals and every 90 degrees. Each collar 25b is in a radial direction with respect to the outermost outer periphery on the radially outer side of the collar portion 21c in a state in which the central axis of the ring-shaped main body 25 coincides with the central axis of the support base 22 of the chuck table 21. It is formed to protrude outward. That is, each collar portion 25b has a non-overlapping region that does not overlap with each collar portion 21c on the radially outer side as shown in FIG. 2 when viewed from the central axis direction. Each collar portion 25b has a fixed portion insertion portion 25c formed in a non-overlapping region. The fixed portion insertion portion 25c is formed so as to be opposed to each through hole 24b of each mounting portion 24 in the mounting portion disposed state in the central axis direction in the main body portion disposed state. Is formed. The diameter of the opening 25d formed by the base 25a is set larger than the diameter of the support base 22 in order to insert the ring-shaped main body 25 into the support base 22.

  The fixing part 26 fixes the ring-shaped main body part 25 to each mounting part 24. In the present embodiment, the fixing part 26 is a countersunk screw having a male screw formed at the tip. The fixing portion 26 is inserted into the through hole 24b, and the male screw formed on the fixing portion 26 is screwed with the male screw at the tip, thereby fixing the ring-shaped main body portion 25 to each mounting portion 24. In addition, when fixing the ring-shaped main-body part 25 to each mounting part 24, the fixing | fixed part 26 is set to the length which a front-end | tip does not protrude outside from the fixing | fixed part insertion part 25c.

  The processing means 30 performs cutting with the cutting blade 31 on the workpiece held on the chuck table 21. The cutting blade 31 is formed in an annular shape, and is a cutting grindstone for cutting a workpiece. The cutting blade 31 cuts the workpiece by rotating at high speed by a rotational force generated by a blade drive source (not shown). is there. In addition, the processing means 30 is connected to the portal support member 4 provided in the apparatus main body 2 via the Z-axis moving means 60, the processing means support member 3, and the Y-axis movement means 50. It is supported so as to be movable in the axial direction.

  The X-axis moving means 40 moves the workpiece held on the chuck table 21 relative to the cutting blade 31 in the X-axis direction in the cutting apparatus 1. The X-axis moving means 40 rotates the X-axis ball screw 42 by the rotational force generated by the X-axis pulse motor 41, thereby bringing the chuck table mechanism 20 screwed into the X-axis ball screw 42 into a pair of X-axis guides. While being guided by the rails 43, 44, the apparatus main body 2 is moved in the X-axis direction.

  The Y-axis moving means 50 moves the workpiece held on the chuck table 21 relative to the cutting blade 31 in the Y-axis direction of the cutting apparatus 1. The Y-axis moving means 50 rotates the Y-axis ball screw 52 by the rotational force generated by the Y-axis pulse motor 51, thereby bringing the processing means support member 3 screwed into the Y-axis ball screw 52 into a pair of Y-axis. While being guided by the guide rails 53 and 54, the support member 4 (device main body 2) is moved in the Y-axis direction.

  The Z-axis moving means 60 moves the workpiece held on the chuck table 21 relative to the cutting blade 31 in the Z-axis direction in the cutting apparatus 1. The Z-axis moving means 60 rotates the Z-axis ball screw 62 by the rotational force generated by the Z-axis pulse motor 61, so that the processing means 30 screwed with the Z-axis ball screw 62 is moved to a pair of Z-axis guide rails. While being guided by 63, 64, it is moved in the Y-axis direction with respect to the processing means support member 3 (device main body 2).

  The control device 70 controls the above-described components constituting the cutting device 1. The control device 70 rotates the cutting blade 31 at a high speed and relatively moves the chuck table 21 and the cutting blade 31 in the X-axis direction, the Y-axis direction, the Z-axis direction, and the θ direction, thereby cutting the workpiece. Is performed by the processing means 30. The control device 70 is mainly composed of an arithmetic processing device constituted by, for example, a CPU, a microprocessor (not shown) provided with a ROM, a RAM, etc., and a display means for displaying the state of the machining operation of the cutting device 1; The operation means used when the operator registers machining content information and the like is connected.

  Next, the cutting process of the cutting apparatus 1 according to the present embodiment will be described. The operator registers the machining conditions in the cutting apparatus 1, holds the workpiece on the chuck table 21, and starts cutting when there is an instruction to start cutting. In the cutting process, the control device 70 performs alignment adjustment based on the image captured by the imaging unit, and the relative position of the held workpiece with respect to the processing unit 30 is adjusted. Next, the control device 70 moves the chuck table 21 holding the workpiece at the imaging position to the machining area in the X-axis direction, and rotates the cutting blade 31 at high speed based on the machining conditions. Cutting is performed by relatively moving the cutting blade 31.

  When the workpiece is cut by the cutting apparatus 1, if the cutting blade 31 rotates at a high speed by the rotational force generated by the blade drive source, vibration may be generated using the processing means 30 as a vibration source. In the case where the workpiece is a gallium arsenide wafer made of a brittle material, lithium tantalate, or the like, there is a possibility that chipping occurs in the cutting groove formed by the vibrating cutting blade 31 and the quality is deteriorated. is there. For this reason, in order to change the natural frequency of the chuck table 21, the weight portion 23 is attached to the chuck table 21 in order to suppress the chuck table 21 from vibrating due to the vibration of the cutting blade 31 that cuts the workpiece. .

  As shown in FIG. 4, the weight portion 23 is attached to the chuck table 21. First, the chuck table 21 is detached from the support base 22, and each attachment portion 24 is brought into the attachment portion arrangement state with respect to the chuck table 21. The ring-shaped main body portion 25 is set in the main body portion disposition state with respect to the chuck table 21. Thereby, the through hole 24b of each mounting portion 24 is opposed to the fixed portion insertion portion 25c of the ring-shaped main body portion 25 in the central axis direction. Next, the ring-shaped main body portion 25 is fixed to each mounting portion 24 by inserting each fixing portion 26 into the through hole 24 b and screwing into the fixing portion insertion portion 25 c. As a result, as shown in FIG. 3, the collar portion 21 c is sandwiched between each mounting portion 24 and the ring-shaped main body portion 25, so that the ring-shaped main body portion 25 is attached to each mounting portion 24 as shown in FIG. 2. It is attached to the chuck table 21 via.

  As described above, in the chuck table mechanism 20 of the cutting apparatus 1 according to the present embodiment, the weight of the chuck table 21 is increased during the cutting process in the cutting apparatus 1 by attaching the weight portion 23 to the chuck table 21. As a result, the natural frequency of the chuck table 21 changes, and in this embodiment, the natural frequency becomes higher than when the weight portion 23 is not attached. Therefore, a vibration source at the time of cutting (for example, if the factory itself where the cutting device 1 is installed vibrates for some reason, the factory itself, and if the cutting blade 31 vibrates due to high-speed rotation, the machining means 30). When the chuck table 21 is not attached to the chuck table 21 due to an external stimulus from the chuck and the chuck table 21 resonates, by increasing the natural frequency of the chuck table 21, the external stimulus from the vibration source during the cutting process Thus, the resonance of the chuck table 21 can be suppressed. Thereby, at the time of a cutting process, the vibration of the workpiece hold | maintained at the chuck table 21 is suppressed, and the chip | tip (chipping) of each divided | segmented product and a device chip can be suppressed. Further, by fixing the ring-shaped main body portion 25 to each mounting portion 24 by the fixing portion 26, the weight portion 23 can be mounted on the chuck table 21, so that the natural frequency of the chuck table 21 can be changed in advance. Compared with the case of incorporating the device, the natural frequency of the chuck table 21 can be changed with a simple configuration. Thereby, since the vibration of the workpiece at the time of cutting can be suppressed, the increase in cost can be suppressed as compared with the case of suppressing the vibration of the vibration source itself. Further, since the ring-shaped main body 25 can be fixed to each mounting portion 24 on the radially outer side than the outer periphery of the chuck table 21, the diameter of each mounting portion 24 and each ring-shaped main body 25 can be increased. Can do. Therefore, the weight can be increased without changing the thickness of each mounting portion 24 and each ring-shaped main body portion 25. Thus, the heavy weight portion 23 can be mounted on the chuck table 21 while suppressing interference with the chuck table 21 located in the central axis direction (for example, the support base 22 or the like). Further, since the thickness can be reduced without changing the weight of the main body 25, it is possible to suppress interference with the chuck table 21 that is positioned in the central axis direction (for example, the support base 22). be able to.

  In the first embodiment, the case where the ring-shaped main body 25 having a predetermined weight is mounted on the chuck table 21 via each mounting portion 24 has been described. However, a plurality of types corresponding to various weights are provided. Any one ring-shaped main body portion 25 may be selected from the ring-shaped main body portion 25 and mounted on the chuck table 21 via each mounting portion 24. For example, a plurality of ring-shaped main body portions 25 having the same shape only in thickness and having the same position of the fixing portion insertion portion 25 c are prepared in advance, and are actually mounted on the chuck table 21 via the mounting portions 24. After checking the vibration of the chuck table 21 during cutting or the number and presence of chipping (chipping) of the workpiece, the ring-shaped main body portion 25 having the optimum weight is selected, and each mounting portion 24 is And is attached to the chuck table 21 by the fixing portion 26. As a result, the ring-shaped main body 25 to be mounted on the chuck table 21 can be selected from a plurality of types of ring-shaped main body 25 corresponding to various weights, so that the amount of increase in the weight of the chuck table 21 can be selected. The natural frequency of the chuck table 21 can be changed according to the state of the external stimulus from, so that the chuck table 21 can be appropriately prevented from resonating.

  Moreover, in the said Embodiment 1, each mounting part 24 may be formed in the outer periphery same as the outermost periphery in the radial direction outer side of the collar part 21c in the mounting part arrangement | positioning state. In this case, each through hole 24b is formed in a region where each mounting portion 24 and each flange portion 21c overlap when viewed from the central axis direction, and the through hole facing the through hole 24b in the central axis direction is chucked. The fixing portion insertion portion 25c is formed on the collar portion 25b of the table 21 so as to face each through hole of the chuck table 21 in the central axis direction in a state where the main body portion is disposed. As a result, the fixing portion 26 is inserted into the through hole 24b from the front surface side of each mounting portion 24, inserted into the through hole of the chuck table 21, and screwed into the fixing portion insertion portion 25c. Can be mounted on the chuck table 21 via the mounting portions 24.

[Embodiment 2]
Next, the chuck table mechanism of the cutting apparatus according to the second embodiment will be described. Since the basic configuration of the chuck table mechanism of the cutting apparatus according to the second embodiment is the same as that of the chuck table mechanism 20 of the cutting apparatus 1 according to the first embodiment, the description of the configuration is omitted. The chuck table mechanism of the cutting apparatus according to the second embodiment is capable of mounting a plurality of main body portions on the chuck table via the mounting portion.

  FIG. 5 is a diagram illustrating a configuration example of a chuck table mechanism according to the second embodiment. FIG. 6 is a cross-sectional view of the chuck table mechanism according to the second embodiment. FIG. 7 is a development view of the chuck table mechanism according to the second embodiment. FIG. 6 is a cross section in a plane including the central axis of the chuck table mechanism.

  As shown in FIG. 7, the weight portion 23 includes a mounting portion 24, a ring-shaped main body portion 25, a fixing portion 26, an additional main body portion 27, and an additional fixing portion 28. As for the ring-shaped main-body part 25, the additional fixing | fixed part insertion part 25e is formed in the some collar part 25b. In the present embodiment, the additional fixing portion insertion portion 25e is formed at a plurality of locations (two locations in the figure) between the fixing portion insertion portion 25c and the base portion 25a, and a female screw is formed.

  The additional main body portion 27 is a main body portion and functions mainly as a weight. A plurality of additional main body portions 27 are disposed in contact with the back surface side of the ring-shaped main body portion 25 so as to correspond to the respective flange portions 25b. By being fixed to the main body portion 25, the chuck body 21 is mounted via the mounting portion 24. Here, in the present embodiment, each additional main body portion 27 has a shape approximate to the collar portion 25b, and is formed with a through hole 27a. The through hole 27 a is inserted with the additional fixing portion 28, and the additional main body portion in which the center axis of the arc forming the outer periphery on the radially outer side of the additional main body portion 27 coincides with the central axis of the ring-shaped main body portion 25. In the arrangement state, each additional fixing portion insertion portion 25e is formed to face each other in the central axis direction. When the additional fixing portion 28 is inserted into the through hole 27a from the back surface side of each additional main body portion 27, as shown in FIG. 6, the surface side opposite to the side on which the tip of the additional fixing portion 28 is inserted. Protrusively.

  As shown in FIG. 7, the weight portion 23 is attached to the chuck table 21. First, the chuck table 21 is removed from the support base 22, and each of the attachment portions 24 is placed on the chuck table 21. The ring-shaped main body portion 25 is set in the main body portion disposition state with respect to the chuck table 21. Thereby, the through-hole 24b of each mounting part 24 is made to oppose the fixing | fixed part insertion part 25c of the ring-shaped main-body part 25, respectively in a center axis line direction. Next, the ring-shaped main body portion 25 is fixed to each mounting portion 24 by inserting each fixing portion 26 into the through hole 24 b and screwing into the fixing portion insertion portion 25 c. Next, each additional main body portion 27 is placed in an additional main body portion disposition state with respect to the ring-shaped main body portion 25, and the through hole 27a of each additional main body portion 27 is connected to the additional fixing portion insertion portion 25e of the ring-shaped main body portion 25 and the central axis. It is made to oppose in each direction. Next, each additional fixing portion 28 is inserted into the through hole 27 a and screwed into the additional fixing portion insertion portion 25 e, thereby fixing each additional main body portion 27 to the ring-shaped main body portion 25. As a result, as shown in FIG. 6, when the collar portion 21 c is sandwiched between the mounting portions 24 and the ring-shaped main body portion 25, the ring-shaped main body portions 25 to which the additional main body portions 27 are fixed are It is mounted on the chuck table 21 via the mounting portion 24.

  As described above, in the chuck table mechanism 20 of the cutting apparatus 1 according to the present embodiment, each additional main body portion 27 is mounted on the chuck table 21 via each mounting portion 24 in addition to the ring-shaped main body portion 25. Compared with the case of only the ring-shaped main body 25, the weight of the chuck table 21 can be increased. Further, since each additional main body 27 is not in a ring shape, the chuck table 21 is supported on the support base 22 after the chuck table 21 to which the ring-shaped main body 25 is mounted is attached to the support base 22 via each mounting portion 24. It can be mounted on the chuck table 21 without being removed from the base 22. Therefore, the weight of the chuck table 21 can be easily changed in order to suppress the vibration of the workpiece held on the chuck table 21 as compared with the case of the ring-shaped main body 25 alone. The work for suppressing the vibration of the workpiece held on the chuck table 21 can be simplified.

  In the second embodiment, each additional main body 27 is added and fixed to the ring-shaped main body 25. However, the present invention is not limited to this. You may mount to the chuck table 21 by fixing each. In this case, when the chuck table 21 is sandwiched between each mounting portion 24 and each additional main body portion 27, at least one of each mounting portion 24 or each additional main body portion 27 and a restriction mechanism that restricts relative movement with the chuck table 21. (For example, a groove into which a protrusion formed on one side and a protrusion formed on the other side are inserted) is preferably provided. Alternatively, it is preferable that each additional main body 27 is fixed to the single ring-shaped mounting portion by the fixing portion 26 instead of each mounting portion 24.

  Further, in the first and second embodiments, each mounting portion 24 is disposed so as to protrude from the surface of the chuck table 21, but a groove corresponding to each mounting portion 24 is formed on the surface side of the chuck table 21, Each mounting portion 24 may not protrude from the surface of the chuck table 21. Moreover, in the said Embodiment 1, 2, it is preferable that each mounting part 24 is formed with the nonmagnetic material. In this case, when each mounting portion 24 is placed on the surface side of the chuck table 21, the magnet 21d and the magnet 24a approach each other by magnetic attraction, and the positioning of each mounting portion 24 with respect to the chuck table 21 is facilitated. Can do. Moreover, in the said Embodiment 1, 2, the fixing | fixed part 26 and the additional fixing | fixed part 28 are not limited to a screw, Any may be sufficient as long as it is an engagement mechanism which can cancel | release fixation, such as a volt | bolt.

DESCRIPTION OF SYMBOLS 1 Cutting device 20 Chuck table mechanism 21 Chuck table 22 Support base 23 Weight part 24 Mounting part 25 Ring-shaped main-body part (main-body part)
26 fixed part 27 additional main part (main part)
28 Additional fixing portion 30 Processing means 31 Cutting blade 40 X-axis moving means 50 Y-axis moving means 60 Z-axis moving means 70 Control device

Claims (2)

A chuck table mechanism for holding the workpiece of a cutting apparatus that cuts the workpiece with a cutting blade,
The chuck table mechanism is
A chuck table having a holding surface for holding the workpiece on the surface side;
A support base for supporting the chuck table;
A weight portion that is mounted on at least one of the back surface side of the chuck table and the periphery of the holding surface, and suppresses vibration of the chuck table;
A chuck table mechanism for a cutting apparatus comprising: The weight portion includes a main body portion, and a mounting portion for mounting the main body portion to the chuck table,
2. The chuck table mechanism of the cutting apparatus according to claim 1, wherein the main body portion is any one or more of a plurality of types according to various weights, and can be mounted on the chuck table via the mounting portion.

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