JP2014009135A - Substrate processing system and method for mounting chip holder used in the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate processing system and a method for mounting a chip holder capable of eliminating a mistake of erroneously mounting a wheel chip which should not be used.SOLUTION: A method for mounting a chip holder includes the steps of: setting a scribe recipe SD in which work information determining operation content of scribe processing and permissible type information 26 specifying a wheel chip 12e usable in the scribe processing are correlated and stored, for each type of scribe processing in a computer 19 connected to a substrate processing device A; selecting a scribe recipe SD; determining a wheel chip 12e that fits the permissible type information 26 included in the selected scribe recipe SD; and reading a code 12i in a chip holder 12 mounted in a prescribed mounting place, taking out the corresponding chip holder 12 and mounting it to the substrate processing device A.

Description

In the present invention, a wheel chip (also referred to as a cutter wheel or a scribing wheel) is attached to the chip holder, and when the wheel chip is used, the chip holder is mounted in a substrate processing apparatus that is used by mounting the chip holder together. Regarding the method.
The present invention also relates to a substrate processing system including the substrate processing apparatus described above and a chip holder mounting robot that mounts a chip holder on the substrate processing apparatus.
Here, the wheel tip is a processing tool for processing a substrate by rolling a blade tip having a V-shaped cross section formed on a circumferential ridge line and pressing the blade tip against the surface of the substrate placed on the table. Say. In addition, scribing is a process that forms a streak groove on the substrate, but it is divided at once by processing a deep groove using a grooved wheel tip with notches formed at a constant pitch on the cutting edge. This is also included in the scribing process.

  Conventionally, a scribe line (groove for cutting) along a planned scribe line with a wheel chip on the surface of a substrate made of a brittle material such as glass, silicon, ceramic, semiconductor or a bonded substrate (hereinafter simply referred to as “substrate”). There is known a substrate processing apparatus that forms a line or completely cuts from a line to be cut (see, for example, Patent Document 1, Patent Document 2, and Patent Document 3).

  FIG. 18 is a schematic perspective view showing an example of a conventional substrate processing apparatus disclosed in the above-mentioned patent documents. The substrate processing apparatus B includes a horizontal table 31 that places and holds a substrate W to be processed. The table 31 can be rotated in a horizontal plane by a rotation drive unit 32 incorporating a motor, and can be moved in the Y direction along a horizontal rail 33. The movement in the Y direction is performed by a screw shaft 35 that is rotated by a motor 34.

  In the substrate processing apparatus B, a bridge 38 including a pair of support columns 36 and 36 and a guide bar 37 extending horizontally in the X direction so as to connect the support columns 36 and 36 is provided so as to straddle the table 31. ing. The guide bar 37 is provided with a guide 39 extending horizontally in the X direction, and the scribe head 40 is arranged so as to be movable along the guide 39 in the X direction. The scribing head 40 is moved in the X direction by driving a motor 41. A tip holder 42 having a wheel tip 42e is detachably attached to the scribe head 40 via a holder joint 43. An elevating mechanism that allows the holder joint 43 to elevate is incorporated in the scribe head 40.

  Under such a configuration, one or both of the wheel chip 42e and the table 31 are moved while pressing the wheel chip 42e against the substrate W placed on the table 31, thereby scribing the substrate W in the XY direction. Thus, the scribe groove can be formed or divided.

19 and 20 show the configuration of a conventional tip holder 42 and holder joint 43. FIG. The chip holder 42 includes a substantially cylindrical body 42a, and a pair of flat surfaces 42b and 42b formed at one end (lower end) of the body 42a in parallel to and symmetrical to the axis of the body 42a. Further, a notch groove 42c formed in parallel with the flat surface 42b is formed between the pair of flat surfaces 42b and 42b along the axial center of the body portion 42a. A wheel chip 42e is rotatably attached to the notch groove 42c via a wheel shaft 42d orthogonal to the axial center of the body portion 42a. On one of the pair of flat surfaces 42b, model information for identifying the wheel chip 42e attached to the chip holder 42 for each type, a management number (solid identification information) assigned to each chip holder, etc. A code 42i in which data useful for management is recorded and recorded is printed.
For example, in Patent Document 3, a management table for recording and updating the cumulative travel distance of a wheel chip for each chip holder to be used (a management number is assigned) is prepared in the control unit of the apparatus. When a chip holder with a management number of is used, a technique for updating the cumulative travel distance of the wheel chip and managing the replacement time of the chip holder is disclosed.

  Further, an attachment portion 42f for positioning when attaching to the holder joint 43 is provided at the other end (upper end) of the body portion 42a. The attachment portion 42f includes a flat surface portion 42g and an inclined surface 42h formed by cutting out the body portion 42a. The flat part 42g is parallel to the axial center of the body part 42a, and is orthogonal to the pair of flat surfaces 42b below. Moreover, the trunk | drum 42a is comprised with magnetic body metals, such as iron.

  The holder joint 43 includes a bearing 43 a at the upper part, and the lower part serves as a holding part 43 b that holds the chip holder 42. The holding portion 43b is provided with an opening 43c having a substantially circular cross section that opens downward, and a magnet 43j is attached to the inner back thereof. Furthermore, a positioning parallel pin 43d extending in a direction perpendicular to the axial center is provided inside the opening 43c at a location away from the axial center of the opening. The parallel pins 43d are positioned so that when the chip holder 42 is inserted into the opening 43c, the chip holder 42 comes into contact with the inclined surface 42h so that the direction and posture of the chip holder 42 are constant.

  When the tip holder 42 is attached to the holder joint 43, as shown in FIG. 18, the tip holder 42 is inserted into the opening 43c of the holder joint 43 from the attachment portion 42f. When the mounting portion 42f is inserted into the opening 43c of the holder joint 43, the parallel pin 43d comes into contact with the inclined surface 42h of the chip holder 42, and the upper end portion of the chip holder 42 is magnetically attached to the magnet 43j. Held. As a result, the tip holder 42 can be easily attached to the holder joint 43 in a state where the orientation of the tip holder 42 is in a certain direction. When replacing the wheel chip 42e, the chip holder 42 is pulled out from the opening 43c of the holder joint 43 against the magnetic force of the magnet, and the entire chip holder is replaced. The chip holder 42 to be newly attached is selected by reading a code 42i in which data specific to the chip printed on the flat surface 42b is recorded by a reader installed separately.

International Publication Number WO2007 / 063979 JP2011-218815A International Publication Number WO2008 / 149515

  When the wheel tip runs a predetermined distance and reaches the replacement time, or when a wheel tip with a different specification is required, the substrate holder B is stopped and then the tip holder is replaced. Specifically, after removing the chip holder from the holder joint of the scribe head, a desired chip holder is selected by reading a code with a reader from among the stored chip holders, and the selected chip holder is held in the holder. Attach to the joint. It is convenient to perform such attachment work automatically by a robot because it takes time and effort if it is done manually by an operator.

When mounting with a robot, to select the desired chip holder from multiple chip holders, it is necessary to arrange the flat surface of the chip holder with a cord so that it can be easily read by a reader and pulled out by a robot. There is. In this case, since the tip holder is provided with a small wheel tip having a diameter of about 2 to 3 mm, it can be stably placed on a mounting table, for example, so that the wheel tip is not damaged with the cord surface exposed. Required. In addition, in order to select and hold the chip holder by the robot and carry it to the holder joint of the scribe head as it is, it is necessary to consider the relative assembly of the mounting table and the robot.
However, conventionally, a system configuration suitable for automatic attachment of a chip holder by such a robot has not been disclosed, and has remained unsolved.

Further, as one of the problems when the chip holder is automatically mounted by the robot, there is a problem that an operator inputs to the robot an erroneous selection of another chip holder at the time of mounting.
That is, when a chip holder to be mounted is determined from among a plurality of chip holders stocked in the vicinity of the table in advance, as long as the code information for identifying the chip holder to be mounted is correctly input, the robot is a reader. The correct tip holder can be taken out by reading the code, but if the operator's input itself is incorrect, the wrong tip holder will be selected and attached even if automatic attachment by the robot is performed. Become.

Accordingly, the present invention provides a chip holder mounting method capable of eliminating a scribing with a wheel chip that should not be used originally, and a board using the mounting method, so that mounting work due to erroneous input by an operator is not performed. The object is to provide a processing system.
In addition, the present invention provides a mounting method and a substrate processing system that can more reliably avoid the use of a wheel chip that may cause a product defect than ever, and that can efficiently mount the wheel chip. With the goal.

In order to solve the above problems, the present invention takes the following technical means. In other words, the substrate processing system of the present invention is a holder joint of a scribe head in which a chip holder that holds a wheel chip and has a code that records a type for identifying the type of the wheel chip is detachable from the chip holder. A substrate processing unit that performs scribing while attached to a chip holder, and a chip holder mounting that takes out a chip holder used for the scribing from a plurality of chip holders mounted at a predetermined mounting location and attaches the chip holder to the holder joint A substrate processing system comprising a robot and a control unit for controlling the scribing process by the substrate processing unit and the mounting of the chip holder to the holder joint of the chip holder by the chip holder mounting robot, and for each type of scribing process, Work information that defines the operation of scribe processing And a data holding unit that stores a scribe recipe that associates allowable type information that identifies wheel chips of a type that can be used for the scribe process, an input unit that performs input when creating the scribe recipe, and A wheel selection chip including a recipe selection unit for selecting one of the scribe recipes and a reader for reading a code attached to the chip holder, wherein the control unit is adapted to the wheel chip based on the allowable type information of the selected scribe recipe. The chip holder that holds the chip holder is determined, and the code attached to the chip holder at the mounting place is read by the reader, and the chip holder mounting robot is used to control the mounting of the compatible chip holder to the holder joint. .
Here, the allowable type information may include a plurality of wheel chip types.
The reader may be attached in the vicinity of a mechanism for holding a chip holder of a chip holder mounting robot.

Further, the chip holder mounting method of the present invention, which is made from another viewpoint, holds a wheel chip for scribing a substrate, and also has a chip holder substrate processing apparatus having a code that records the type of the wheel chip to be held. (A) A computer connected to the substrate processing apparatus, wherein the computer is connected to work information that defines the operation content of the scribing process, and an allowable model that identifies a wheel chip of a type that can be used for the scribing process. Scribe recipe stored in association with information is set for each type of scribe processing, (b) selecting the scribe recipe when executing scribe processing, and (c) included in the selected scribe recipe Determining a wheel tip that conforms to the allowable type information to be received; (d) a predetermined mounting Place the code of the placed chip holder read by the reader, and a step of attaching to the substrate processing apparatus retrieves the chip holder that holds the wheel tip determined the in step (c).
Here, the allowable type information may include a plurality of wheel chip types.

  According to the present invention, wheel chip types that can be used in the scribe recipe are registered in advance for each scribe recipe having different operation contents. When a scribe recipe is selected, wheel chips that can be used are determined, and Since the tip holder for holding the wheel tip is picked up by the automatic means and attached to the apparatus, the attachment work due to erroneous input by the operator can be prevented, and scribing with the wheel tip that should not be used can be eliminated.

The perspective view which shows an example of the board | substrate processing apparatus used when implementing this invention. The figure which shows an example of the chip holder which concerns on this invention. The perspective view which shows the chip | tip holder which concerns on this invention, and the holder joint which attaches this. The partial cross section front view which shows the chip | tip holder and holder joint which concern on this invention. The disassembled perspective view which shows an example of a chip | tip holder storage body. Sectional drawing of the state which accommodated the chip holder in the chip holder accommodating body. Explanatory drawing which shows operation | movement of the elastic stopper in the chip | tip holder storage body shown in FIG. Sectional drawing which shows another Example of a chip holder accommodating body. Sectional drawing which shows another Example of a chip holder accommodating body. The perspective view which shows the robot and mounting shelf in the board | substrate processing apparatus shown in FIG. The perspective view which shows another Example of a mounting shelf. The perspective view which shows another Example of a mounting shelf. FIG. 2 is an explanatory diagram showing a state in which an alignment mark is imaged with a CCD camera in the substrate processing apparatus shown in FIG. 1. The block diagram which shows the structure of the control system of the board | substrate processing apparatus shown in FIG. Explanatory drawing of the scribing method of outer cutting and inner cutting. The flowchart which shows the process until it selects a scribe recipe and starts scribe. The figure which shows an example of the scribe recipe memorize | stored in the computer. The perspective view which shows an example of the conventional board | substrate processing apparatus. The perspective view which shows the conventional chip holder. The partial cross section front view which shows the conventional chip holder and holder joint.

The details of the present invention will be described below with reference to the drawings showing embodiments thereof.
FIG. 1 is a schematic perspective view showing an example of a substrate processing apparatus (substrate processing system) used when carrying out the method of the present invention. The substrate processing apparatus A includes a horizontal table 1 that places and holds a substrate W to be processed. The table 1 can be rotated in a horizontal plane by a rotary drive unit 2 incorporating a motor, and can be moved in the Y direction along a horizontal rail 3. This movement in the Y direction is performed by a screw shaft 5 that is rotated by a motor 4.

  In the substrate processing apparatus A, a bridge 8 including a pair of support columns 6 and 6 and a guide bar 7 extending horizontally in the X direction so as to connect the support columns 6 and 6 is provided so as to straddle the table 1. ing. The guide bar 7 is provided with a guide 9 extending horizontally in the X direction, and the scribe head 10 is arranged so as to be movable along the guide 9 in the X direction. The scribing head 10 is moved in the X direction by driving the motor 11. A tip holder 12 having a wheel tip 12e is detachably attached to the scribe head 10 via a holder joint 13. An elevating mechanism that allows the chip holder 12 to be raised and lowered is incorporated in the scribe head 10. Two CCD cameras 18 and 18 for imaging the alignment mark of the substrate W are provided on the bridge 8.

  Under such a configuration, one or both of the wheel chip 12e and the table 1 are moved while pressing the wheel chip 12e against the substrate W placed on the table 1, thereby scribing the substrate W in the XY direction. Thus, the scribe groove can be formed or divided.

  Further, in the vicinity of the table 1 of the substrate processing apparatus A, a mounting shelf 16 on which a plurality of chip holder storage bodies 15 for storing the chip holders 12 are mounted, and the chip holder 12 is extracted from the chip holder storage body 15 and a scribe head. A robot 17 (chip holder mounting robot) that is attached to 10 holder joints 13 or removes the chip holder 12 from the holder joint 13 is installed.

  2 shows an example of the chip holder 12, FIG. 2 (a) is a front view, FIG. 2 (b) is a side longitudinal sectional view, and FIG. 2 (c) is a perspective view. . The chip holder 12 includes a substantially cylindrical body portion 12a, and a pair of flat surfaces 12b and 12b formed at one end (lower end) of the body portion 12a in parallel to and symmetrical to the axis of the body portion 12a. Further, a notch groove 12c formed in parallel with the flat surface 12b is formed between the pair of flat surfaces 12b and 12b along the axial center of the body portion 12a. A wheel chip 12e is rotatably attached to the notch groove 12c through a wheel shaft 12d orthogonal to the axis of the trunk portion 12a with a part thereof exposed from the lower end surface of the trunk portion 12a. ing. On one side of the flat surface 12b, as will be described later, the type information for identifying the type of the wheel chip 12e held in the chip holder 12 and the management number (solid) for identifying individual chip holders are provided. A code 12i in which data useful for management such as an identification number is recorded is printed.

  Further, an attachment portion 12f for positioning when attaching to the holder joint 13 is provided at the other end (upper end) of the body portion 12a. The attachment portion 12f includes a flat surface portion 12g and an inclined surface 12h formed by cutting out the body portion 12a. The flat surface portion 12g is parallel to the axial center of the body portion 12a and is orthogonal to the pair of flat surfaces 12b below. The attachment portion 12f is made of a magnetic metal such as iron.

  Furthermore, one pin 12j protruding from the flat surface 12b is provided at the lower end portion of the pair of flat surfaces 12b and 12b. The pin 12j is preferably disposed at a rotationally symmetric position or a laterally symmetric position on the flat surfaces 12b and 12b. As will be described later, the pin 12j acts as a hook when the chip holder 12 is extracted from the chip holder housing 15 by the robot 17. One pin 12j is provided on each flat surface, but a plurality of pins 12j may be provided. It is also possible to omit the pin 12j on either one of the flat surfaces 12b. The chip holder 12 stored in the chip holder storage body 15 is referred to as a “chip holder storage set”.

  A slide groove 12k extending in the axial direction of the trunk portion 12a is provided on the outer peripheral surface of the trunk portion 12a on the opposite side of the attachment portion 12f. The slide groove 12k is adapted to be fitted to a convex strip 15s formed on the inner surface of a storage hole of a chip holder storage body 15 to be described later. One end of the slide groove 12k is continuous with the notch groove 12c.

  As shown in FIGS. 3 and 4, the holder joint 13 attached to the scribe head 10 includes a bearing 13 a at the upper portion, and the lower portion serves as a holding portion 13 b that holds the chip holder 12. The holding portion 13b is provided with an opening 13c having a substantially circular cross section that opens downward, and a magnet 13e is attached to the inner back thereof. Furthermore, a positioning parallel pin 13d extending in a direction perpendicular to the axis is provided inside the opening 13c at a location away from the axis of the opening 13c. The parallel pins 13d contact the inclined surface 12h (see FIG. 2) of the chip holder 12 to position the chip holder 12 in a certain direction when the chip holder 12 is inserted into the opening 13c. . In the case of the present invention, the wheel chip 12e is positioned so that the rotational traveling direction of the wheel chip 12e coincides with the scribe direction.

  When attaching the chip holder 12 to the holder joint 13, as shown in FIG. 3, the chip holder 12 is inserted into the opening 13c of the holder joint 13 from the attachment part 12f. When the mounting portion 12f is inserted into the opening 13c of the holder joint 13, it is positioned in contact with the inclined surface 12h of the chip holder 12, and the upper end portion of the chip holder 12 is magnetized and held on the magnet 13e. . As a result, the tip holder 12 can be easily attached to the holder joint 13 in a state in which the orientation of the chip holder 12 is in a certain direction. When replacing the wheel chip 12e, the chip holder 12 is pulled out against the magnetic force of the magnet 13e, and the whole chip holder is replaced.

  FIG. 5 is an exploded perspective view showing an example of the chip holder housing 15 that houses the chip holder 12, and FIG. 6 is a cross-sectional view of the chip holder 12 in a state where the chip holder 12 is housed. The chip holder housing 15 includes a housing hole 15a having a substantially circular cross section penetrating in the front-rear direction and having a flat bottom surface 15y, a front cap 15c for closing a front opening of the housing hole 15a, The rear cap 15d closes the rear opening. The storage hole 15a has an axis formed in parallel with the bottom surface 15y. The dome-shaped main body 15b is provided with a flat jaw portion 15e that extends forward and continues to the lower edge of the front opening of the storage hole 15a.

  When the chip holder 12 is stored in the storage hole 15a of the chip holder storage body 15, the wheel chip 12e is inserted from the rear opening of the storage hole 15a. At the time of this insertion, a convex strip on which the slide groove 12k of the chip holder 12 is fitted so that the flat surface 12b provided with the cord 12i of the chip holder 12 is parallel to the bottom surface 15y of the dome-shaped main body 15b and always has an upward posture. 15s is formed in the inner surface of the storage hole 15a. Since one end of the slide groove 12k of the chip holder 12 is formed continuously to the notch groove 12c, when the chip holder 12 is inserted into the storage hole 15a, the notch groove 12c serves as a guide and is fitted to the ridge 15s. The insertion operation becomes easy. Further, when the chip holder 12 is manually inserted into the storage hole 15a, with the flat surface portion 12g of the mounting portion 12f facing upward, a thumb is attached to the flat surface portion 12g, and the vicinity of the slide groove 12k on the opposite side of 180 ° If the index finger is attached to the tip holder 12 and the tip holder 12 is pinched so as to be sandwiched between the fingers, the work efficiency is improved.

  The front cap 15c is integrally formed of an elastic synthetic resin material, and has a flat plate-like portion 15f that contacts the bottom surface 15y of the dome-shaped main body 15b, and an arc-shaped upper cover that contacts the top peripheral surface of the dome-shaped main body 15b. 15g, and the plate-like portion 15f and the arcuate upper cover 15g are connected by a front wall 15h. An elastic stopper 15i having an umbrella-shaped head portion 15k is provided on the upper surface of the plate-like portion 15f so as to protrude upward, and the elastic stopper 15i is provided on the bottom surface 15y in the vicinity of the front opening of the dome-shaped main body 15b. A through hole 15j is formed for insertion through the through hole 15j.

  When the elastic stopper 15i is inserted into the through hole 15j, the umbrella-shaped head 15k is first compressed as shown in FIG. 7A and enters the through hole 15j as shown in FIG. 7B. The umbrella-shaped head 15k is restored to its original shape and enlarged so that it does not come out of the through hole 15j. In this posture, the size of the umbrella-shaped head 15k of the elastic stopper 15i is set in advance so as to slightly protrude inward from the inner peripheral surface of the storage hole 15a of the dome-shaped main body 15b. Further, a fragile cut line 15n is provided on the plate-like portion 15f in the vicinity of the elastic stopper 15i so that the front cap 15c can be removed leaving the elastic stopper 15i after the elastic stopper 15i is inserted into the through hole 15j. It has been. Further, a protrusion 15q (see FIG. 6) that elastically engages with an engagement groove 15p provided on the upper peripheral surface of the dome-shaped main body 15b is formed on the lower surface of the arc-shaped upper cover 15g, and is opposite to the protrusion 15q. That is, a knob piece 15r for releasing the engagement of the protrusion 15q is provided on the upper surface of the arcuate upper cover 15g.

  As shown in FIG. 6, the elastic stopper 15i cut off from the cut line 15n and left on the dome-shaped main body 15b has the flat surface 12b of the chip holder 12 accommodated in the accommodation hole 15a exposed from the front opening of the accommodation hole 15a. At this position, the tip holder 12 functions as a stopper for temporarily stopping the advancement. That is, the shoulder 12m adjacent to the flat surface 12b of the chip holder 12 abuts against the umbrella-shaped head 15k of the elastic stopper 15i, and the forward movement is restricted within the range of elastic deformation of the elastic stopper 15i. As shown in FIG. 7D, when the tip holder 12 is pulled strongly from the front opening in the pulling direction against the elastic force of the elastic stopper 15i, the elastic stopper 15i tilts and the tip holder 12 advances. Shaped to forgive. In this case, the through hole 15j is formed with a margin so that the elastic stopper 15i can be tilted. The shoulder 12m is preferably an inclined surface or an arc as shown in the figure, but may be a substantially right-angled edge as long as it can get over the umbrella-shaped head 15k against elasticity.

  The rear cap 15d is integrally formed of an elastic synthetic resin material, and protrusions 15t formed on the upper and lower surfaces of the cap inner surface are elastically engaged with engagement grooves 15u provided on the upper and lower outer surfaces of the dome-shaped main body 15b. They are attached detachably.

  The front cap 15c is for preventing the tip holder 12 from falling off from the front opening when the tip holder 12 is housed in the tip holder housing 15 and protecting the cutting edge of the wheel tip 12e. The inner surface of the front wall 15h is formed with a recess into which the blade tip of the wheel chip 12e is fitted (see FIG. 6). The rear cap 15d is for preventing the chip holder 12 from dropping from the rear opening of the storage hole 15a.

FIG. 8 (a) shows another embodiment of the stopper. In this embodiment, instead of the above-described elastic stopper 15i, a stopper for restricting the advance of the chip holder 12 is formed by an elastic locking claw 15v. The elastic locking claw 15v is attached to the dome-shaped main body 15b of the chip holder housing 15 in a state where it is elastic in the push-up direction by the spring 15w. The tip of the elastic locking claw 15v is formed as an inclined surface with an inclined surface facing the shoulder 12m of the chip holder 12, but may be an arc. The front cap 15c ′ in this embodiment has a structure in which the elastic stopper 15i is eliminated from the front cap 15c shown in the previous embodiment, and the engagement groove 15p ′ and the protrusion 15q ′ that are elastically fitted to each other. Thus, it is detachably attached to the front opening of the storage hole 15a. Moreover, the recessed part in which the blade edge | tip of the wheel chip | tip 12e fits is formed in the inner surface of the front wall 15h like the front part cap 15c. Further, a rear cap 15d is detachably attached to the rear opening of the storage hole 15a in the same manner as in the previous embodiment.
Further, in place of the rear cap 15d, as shown in FIG. 8 (b), an elastic locking claw 15x having the same configuration as the elastic locking claw 15v is provided in the vicinity of the rear opening of the storage hole 15a. The holder 12 may be prevented from dropping from the rear opening of the storage hole 15a. The tip of the elastic locking claw 15x is also formed with an inclined surface with an inclined surface facing the rear opening so that the chip holder 12 can be easily inserted and removed, but it may be an arc.

  In the above-described embodiment, an example in which one chip holder 12 is stored in each chip holder storage body 15 is shown. However, as shown in FIG. 9, a plurality of, for example, 5 to 10 chip holders 12 are stored. You can also In this case, in order to prevent the tip of the tip holder 12 from hitting the wheel tip 12e of the subsequent tip holder 12 and damaging the blade tip, the tip of the tip holder 12 is fitted to the tail portion (upper end surface in FIG. 2). It is good to provide the recessed part 12p which gets stuck.

  A plurality of the chip holder storage bodies 15 are prepared, and the chip holders 12 having wheel chips 12e of different types are classified according to the types, stored in the respective chip holder storage bodies 15, and stored in a factory or the like. In use, the front cap 15c is removed and aligned with the mounting shelf 16 of the substrate processing apparatus A.

FIG. 10 is a perspective view showing a mounting shelf 16 on which a plurality of, for example, three chip holder housings 15 are aligned and mounted, and a robot 17 installed in the vicinity of the mounting shelf.
In this embodiment, the mounting shelf 16 includes three shelf boards 16a that are mounted with the flat bottom surface 15y of the chip holder storage body 15 as a mounting surface. Each shelf plate 16a is surrounded by a peripheral edge of the shelf plate so that the flat surface 12b of the chip holder 12 accommodated in the chip holder housing 15 is held in a state of protruding from the front edge 16b of the shelf plate 16a. 16c is provided. Moreover, each shelf board 16a is assembled in step shape seeing from the front end edge 16b side.

The robot 17 includes a robot arm 17 a having a clamping claw 17 b at the tip, and a reader 17 c that is attached to the robot arm 17 a and reads a code 12 i provided on the flat surface 12 b of the chip holder 12. The robot arm 17a is configured such that a pinching claw 17b at the tip thereof can be pulled out by sandwiching a pair of flat surfaces 12b and 12b of the chip holder 12 exposed from the chip holder housing 15 from the side. At this time, since each shelf plate 16a is assembled in a step shape, the target chip holder 12 can be grasped and pulled out without being obstructed by other chip holders 12, and the cords 12i of each chip holder 12 can be pulled out. Do not overlap on the plane, the code 12i of each chip holder 12 can be easily and accurately read from above by the reader 17c.
Further, when the pair of flat surfaces 12b and 12b are pulled out from the side by the clamping claws 17b, the pins 12j and 12j of the flat surfaces 12b are hooked to the clamping claws 17b in the pulling direction, and are surely smooth. Can be pulled out. At this time, since the pins 12j are arranged on the flat surfaces 12b and 12b, the clamping claws 17b can be hooked in a balanced manner with respect to the pulling direction, and the chip holder 12 can be pulled out smoothly. The same applies to the case of extraction from the holder joint 13 (see FIG. 3) of the scribe head.

  As shown in FIG. 11, the plurality of shelf plates 16 a in the mounting shelf 16 are formed so as to be shifted backward so that the shelf plate 16 a closer to the robot 17 on the same plane is closer to the front edge 16 b. May be. Thus, similar to the embodiment assembled in the shape of the previous step, the target chip holder 12 is not obstructed by other chip holders 12 when the chip holder 12 is pulled out by the clamping claws 17b of the robot arm 17a. And the code 12i of each chip holder 12 can be easily read from above by the reader 17c of the robot arm 17a.

  As shown in FIG. 12, the shelf plate 16a of the mounting shelf 16 is preferably formed so as to be inclined so that the front edge 16b is downward. As a result, when the chip holder 12 is pulled out from the chip holder housing 15 by the robot arm 17a, it can be pulled out lightly by the sliding effect due to its own weight. In particular, when the chip holder housing 15 for housing the plurality of chip holders 12 shown in FIG. 9 is placed on the shelf board 16a, the shelf board 16a is provided with an inclination angle such that the chip holder 12 advances by its own weight. Is good. Thereby, when the preceding tip holder 12 is pulled out, the succeeding tip holder 12 can be moved forward by its own weight and can be put on standby for the next pulling out at the stopper position.

  In starting scribing by the substrate processing apparatus of FIG. 1, first, the substrate W is placed and held on the table 1. Then, the two CCD cameras 18 and 18 installed on the bridge 8 detect positioning alignment marks M1 and M2 at two positions on the left and right sides as shown in FIG. When the straight line S connecting the alignment marks at this time is inclined with respect to the reference straight line L connecting the two CCD cameras 18, 18, the table 1 is rotated by the rotation driving unit 2 so that the inclination angle becomes 0. Modify to be. Further, the CCD camera 18 detects a deviation of the wheel chip 12e from a preset scribe start position. If it is shifted in the Y direction, the table 1 is moved by an amount corresponding to the shift amount. If it is displaced in the X direction, the scribe head 10 is moved in the X direction by an amount corresponding to the displacement amount. The correction of the deviation in the X-Y direction and the correction of the tilt angle of the board are performed by the control unit 20 of the computer 19 as shown in the block diagram of FIG.

  In the block diagram of FIG. 14, outputs from the two CCD cameras 18 are given to the control unit 20 of the computer 19. Based on the correction value, the control unit 20 operates the table rotation driving unit 2 to rotate the table 1 and corrects the tilt angle to be zero. Further, correction of the deviation in the X-Y direction is also performed by driving the respective drive units 21 and 22. After the correction is completed, the chip holder lifting / lowering drive unit 23 is driven to lower the chip holder 12, and while the wheel chip 12e is pressed against the substrate W, one or both of the wheel chip 12e and the table 1 are moved to move the substrate W to X A scribing groove is formed by scribing in the -Y direction. The travel distance of the wheel chip 12e used at this time is recorded in the data holding unit 24, and is displayed by an alarm or the like when it is time to replace the wheel chip 12e.

  The code 12i of the chip holder 12 may be a one-dimensional code, for example, a bar code, but is preferably a two-dimensional code (for example, QR code (registered trademark)) capable of inputting a large amount of information in a small area. The two-dimensional code is formed by directly printing, but a label may be attached. In the code 12i, information on the type of the wheel chip 12e attached to the chip holder 12, a management number for identifying each chip holder 12 individually, and the like are recorded as text information.

Specifically, it is recorded in the following format.
(Character string representing model) / (character string representing management number) / (character string representing initial correction information)
Among these, the “model” is a character string of the size (outer diameter, inner diameter, thickness, blade edge angle, blade edge shape, etc.) and material for each type of wheel chip 12e according to a specific rule.
The “management number” is a number uniquely assigned to each wheel chip 12e.
The "initial correction information" is recorded in advance by measuring the mounting error for each wheel chip 12e in order to cancel the displacement of the scribe position due to the mounting error of the wheel chip 12e with respect to the chip holder 12. It is information for calibration.
These pieces of information are restored (decoded) when the code 12i is read by the code reader 17c.

In addition, a scribe recipe SD describing the operation content when performing the scribe processing by the substrate processing apparatus A is created for each type of scribe processing, and is recorded in the data holding unit 24 (recording medium such as a hard disk) of the computer 19. Yes.
As for the scribe recipe SD, when one of the recipes suitable for the scribe process to be executed is selected, the control unit 20 reads the recipe, and processing instructions are given to each part of the apparatus based on the contents described in the scribe recipe SD. Is sent, and the scribing process according to the description content is executed.

FIG. 17 is a diagram illustrating an example of the scribe recipe SD stored in the computer 19. Each scribe recipe SD has a recipe no. 1-No. A number for identifying each recipe as in 4 is given. In each scribe recipe SD, work information that defines the operation content to be executed in the scribe process is described as scribe data 27, and allowable model information 26 that specifies the type of wheel chip that can be used for the scribe process is also included. It is stored in association with the scribe data 27.
Specifically, as the allowable type information 26, one (or a plurality) of types of usable wheel chip 12e type data is described. In the allowable model information “D3.0T1.1H1.4” illustrated in FIG. 17, it is indicated that the wheel chip 12e having a diameter of 3.0 mm, a thickness of 1.1 mm, and an inner diameter of 1.4 mm conforms to the scribe recipe. Show.
The type described in the allowable type information 26 and the data included as “type information” in the code 12i attached to the chip holder 12 are information of the same format. Therefore, by reading the code 12i, a wheel chip 12e of a type that matches the allowable type information 26 can be found. In addition to these, the angle of the cutting edge, the shape of the cutting edge (grooved cutting edge, grooved cutting edge, groove pitch, etc.), material, etc. may be included in the allowable type information 26.

  Further, the scribe data 27 includes position information (distinguishing between “outer cut” and “inner cut” and information on the start position) for specifying where the cutting edge is to be cut out during scribing, information on the substrate size, and the board. Alignment position information and the like necessary for positioning on the table are described. In addition to these, when a plurality of scribe lines are formed in parallel on one substrate, their pitch, number, etc. are described as necessary.

  Here, the information of the start position described by one of the scribe data 27 (by “outer cut” and “inner cut”) will be described. As shown in FIG. 15A, the “outer cutting” is a state in which the lower end of the wheel tip 12e is lowered slightly below the surface (upper surface) of the substrate W, and the outer position ( Set to the scribe start position. Then, it is moved horizontally from the set position, made to collide with the end of the substrate, and then moved horizontally while being pressed with a predetermined scribe pressure to perform scribing. On the other hand, as shown in FIG. 15 (b), “inner cutting” is performed by lowering the wheel chip 12e from above on the inner side (scribing start position) from the edge of the substrate to contact the substrate with a predetermined scribe pressure, Scribing by moving horizontally while pressing. Each of the “outer cutting” and “inner cutting” has advantages and disadvantages and is selectively used depending on the type, thickness, and use of the substrate.

  When the scribe data 27 is newly created, first, a scribe method of “outer cut” or “inner cut” is determined. In the case of “outer cut”, the distance from the edge of the substrate to the scribe start position is set to “+”. In the case of “inner cut”, the numerical value is input as the “−” value as the distance from the edge of the substrate to the scribe start position, and is described in the scribe data 27. When the scribe data 27 is described, a wheel chip suitable for the “outer cutting” or “inner cutting” is determined, and the type of the wheel chip is described as the allowable type information 26. In this way, one scribe recipe SD in which the allowable type information 26 and the scribe data 27 are associated is created.

  At the time of processing, a desired recipe number can be selected from a plurality of scribe recipes already stored in the data holding unit 24 with a recipe selection button 25 (see FIG. 14). Although the selection button 25 is shown here as a recipe selection means, it is of course possible to select by other methods, for example, by displaying various recipes on the monitor of the computer 19 and selecting them. .

Subsequently, the mounting operation of the chip holder 12 will be described.
When the cumulative travel distance of the wheel tip 12e in use has reached the replacement time or when replacing the wheel tip 12e with another specification, the robot 17 replaces the wheel tip 12e after the substrate processing apparatus A is stopped. Is called. At that time, the control unit 20 refers to the allowable type information 26 described in the scribe recipe SD, and sends a signal regarding the type of wheel tip that can be used to the robot. Then, the robot 17 reads the code 12i of the chip holder 12 stocked in the chip holder housing 15 of the mounting table 16 by the accompanying reader 17c, and selects the chip holder 12 having the wheel chip that matches the model. Extract and attach to holder joint 13.

FIG. 16 is a flowchart showing a process from selecting a scribe recipe to be used to starting scribe. First, when a desired scribe recipe SD is selected with the selection button 25 of the computer 19 (S1), the allowable type information 26 described in the selected scribe recipe SD is referred to, and the wheel chip 12e usable for the recipe is referred to. The model is determined (S2). When the wheel chip 12e is determined, the robot arm 17a removes the previously used chip holder from the holder joint 13 and moves it to a separately prepared storage box. Go to get 12 (S3). Then, the code 12i of the chip holder 12 is read by the reader 17c. Since the read code 12i includes type information specifying the type of the wheel chip 12e, the type information included in the read code 12i is different from the allowable type information 26 described in the scribe recipe SD. If so, the operation of moving to the next chip holder 12 and reading the code 12i again is repeated. In this way, the chip holder 12 having the type information that matches the allowable type information 26 described in the scribe recipe SD is found and selected (S4). Subsequently, the selected chip holder 12 is extracted from the chip holder housing 15 by the robot arm 17a (S5). The extracted chip holder 12 is carried to the scribe head 10 and attached to the holder joint 13 (S6). Thereafter, scribing is automatically started along the work information described in the scribe data 27 of the scribe recipe SD (S7).
By performing such processing, since only the chip holder having the wheel chip suitable for the allowable type information of the scribe recipe SD is selected and attached by the robot, it is possible to prevent the problem that the wrong chip holder 12 is attached.

  As mentioned above, although the typical Example of this invention was described, this invention is not necessarily specified to said embodiment, The objective is achieved and it corrects and changes suitably within the range which does not deviate from a claim. Is possible.

  For example, the allowable type information 26 of the scribe recipe SD may include a plurality of types. In that case, when reading the code 12i of the chip holder 12 with the reader 17c, it moves so as to make a round of each chip holder storage body 15 placed on the mounting table 16, and reads the codes 12i of all the chip holders 12. Therefore, one chip holder to be used for the next processing may be determined. In this case, priorities can be set for a plurality of types included in the allowable type information.

  INDUSTRIAL APPLICABILITY The present invention can be used in a substrate processing apparatus that processes or divides a scribe line for cutting on a substrate by scribing while pressing a wheel chip against the surface of the substrate.

A substrate processing apparatus W substrate 1 table 10 scribe head 12 chip holder 12b flat portion 12i code 12e wheel chip 13 holder joint 15 chip holder housing 16 mounting shelf 17 robot 19 computer 25 recipe selection button

Claims (5)

Scribing is performed in a state in which a chip holder that holds a wheel chip and has a code that records a type for identifying the type of the wheel chip is attached to a holder joint of a scribe head that can be attached and detached. A substrate processing section;
A chip holder mounting robot that takes out a chip holder used for the scribe processing from a plurality of chip holders mounted at a predetermined mounting location and attaches the chip holder to the holder joint;
A substrate processing system comprising a control unit for controlling scribe processing by the substrate processing unit and controlling attachment of a chip holder to a holder joint by the chip holder mounting robot,
For each type of scribe processing, a data holding unit that stores a scribe recipe that associates work information that defines the operation contents of the scribe processing and allowable type information that identifies wheel chip types that can be used for the scribe processing,
An input unit for performing input when creating the scribe recipe;
A recipe selection unit for selecting one of the stored scribe recipes;
A reader for reading a code attached to the chip holder,
The control unit determines a chip holder holding a suitable wheel chip based on the permissible model information of the selected scribe recipe, and reads the code attached to the chip holder at the mounting place with the reader to adapt. A substrate processing system, wherein the chip holder mounting robot is controlled to be mounted on the holder joint by the chip holder mounting robot.   The substrate processing system according to claim 1, wherein the allowable type information includes types of a plurality of wheel chips.   The substrate processing system according to claim 1, wherein the reader is attached in the vicinity of a mechanism that holds a chip holder of a chip holder mounting robot. A method of attaching a chip holder having a code that records a model of a wheel chip to be held and a wheel chip for scribing a substrate to a substrate processing apparatus,
(A) The computer connected to the substrate processing apparatus stores the work information defining the operation content of the scribing process and the permissible model information specifying the type of wheel chip that can be used for the scribing process in association with each other. Setting a scribe recipe for each type of scribe processing;
(B) selecting the scribe recipe when performing the scribe process;
(C) determining a wheel tip that conforms to acceptable type information included in the selected scribe recipe;
(D) reading the code of the chip holder placed at a predetermined placement location with a reader, taking out the chip holder holding the wheel chip determined in step (c), and attaching it to the substrate processing apparatus; A method for mounting a chip holder comprising:   The chip holder mounting method according to claim 4, wherein the allowable model information includes a plurality of wheel chip types.

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