TW201404736A - Substrate processing system and installation method for blade holder used therein - Google Patents

Abstract

The purpose of the present invention is to provide a substrate processing system which can exclude an error of misloading a rotatable blade erroneously used therein and provide an installation method for a blade holder used therein. The installation method of the blade holder includes the following steps: in a computer 19 connected to a substrate processing device A, according to the type of scribe processing, remembering a scribe manufacturing procedure formula SD which establishes correlation by setting the operation information of determining the action content of the scribe processing and the permission type information 26 of specifying the rotatable blade 12e used in the scribe processing; selecting a scribe manufacturing procedure formula SD; determining the rotatable blade 12e which is suitable for the permission type information 26 contained in the selected scribe manufacturing procedure formula SD; and accessing the code 12i of the blade holder 12 born at the demanded bearing place, and taking the blade holder 12 satisfied with conditions to install it on the substrate processing device A.

Description

Substrate processing system and mounting method of blade holder used therefor

The present invention relates to a method of mounting a blade holder in a substrate processing apparatus that is used in conjunction with a blade holder when a blade holder is mounted with a rotary blade (also referred to as a wheel blade or a scribing wheel) and a rotary blade is used. .

Moreover, the present invention relates to a substrate processing system including the above-described substrate processing apparatus and a blade holder mounting robot for mounting the blade holder to the substrate processing apparatus.

Here, the term "rotary blade" refers to a process in which a cross-sectional V-shaped blade edge is formed on a circumferential ridge line and the substrate is processed by being rotated in a state in which the blade edge is pressed against the surface of the substrate placed on the table. Processing tools. Further, the so-called scribing process refers to a process of forming a stripe-shaped slit in a substrate, and processing a deeper slit by using a grooved rotary blade having a slit formed at a fixed pitch at a fixed pitch. Broken conditions are also included in the scribing process.

In the past, it has been known that a scribing along a pre-dash line is formed on a surface of a substrate or a bonded substrate (hereinafter simply referred to as a "substrate") made of a brittle material such as glass, tantalum, ceramics, or a semiconductor by a rotary blade (for cutting) The groove processing unit or the substrate processing apparatus which cuts completely from the pre-cut line (refer to, for example, Patent Document 1, Patent Document 2, and Patent Document 3).

FIG. 18 is a schematic perspective view showing an example of a conventional substrate processing apparatus disclosed in the above-mentioned patent documents and the like. This substrate processing apparatus B includes a horizontal stage 31 on which the substrate W to be processed is placed and held. The platform 31 is configured as a rotary drive unit through a built-in motor 32 rotates in the horizontal plane and is movable in the Y direction along the horizontal track 33. The movement in the Y direction is performed by the screw shaft 35 that is rotated by the motor 34.

In the substrate processing apparatus B, a bridge portion 38 including a pair of pillars 36 and 36 and a guide rod 37 horizontally extending in the X direction so as to connect the pillars 36 and 36 is provided across the stage 31. The guide rod 37 is provided with a guide member 39 extending horizontally in the X direction, and the scribing head 40 is configured to be movable in the X direction along the guide member 39. The movement of the scribing head 40 in the X direction is performed by the driving of the motor 41. The blade holder 42 including the rotary blade 42e is detachably attached to the scribing head 40 via the holder joint 43. An elevating mechanism that can raise and lower the holder joint 43 is assembled inside the scribing head 40.

With the configuration described above, one or both of the rotary blade 42e and the stage 31 are moved while pressing the rotary blade 42e against the substrate W placed on the stage 31, thereby being movable in the XY direction. The substrate W is scribed to form a scribe groove or cut.

19 and 20 are views showing the configuration of the conventional blade holder 42 and the holder joint 43. The blade holder 42 includes a substantially cylindrical main body portion 42a and a pair of flat faces 42b and 42b which are formed in parallel with each other with respect to the axis of the main body portion 42a and symmetrically formed at one end (lower end) of the main body portion 42a, and A slit 42c formed in parallel with the flat surface 42b is formed between the pair of flat surfaces 42b, 42b along the axis of the main body portion 42a. In the slit 42c, a rotary blade 42e is rotatably attached via an axle 42d that is orthogonal to the axial center of the main body portion 42a. A type information for identifying the rotary blade 42e attached to the blade holder 42 by type or a management number assigned to each blade holder (solid identification information) is marked on one of the pair of flat faces 42b. The code 42i recorded by the management and useful data is encoded.

For example, Patent Document 3 discloses a technique in which a control unit for a device prepares a management platform for recording and updating a cumulative travel distance of a rotary blade for each blade holder (administered with a management number) used, when a specific use is used. When the management number of the blade holder is maintained, the cumulative travel distance of the rotary blade is updated to manage the replacement time of the blade holder.

Further, at the other end (upper end) of the main body portion 42a, a mounting portion 42f for positioning when attached to the holder joint 43 is provided. The mounting portion 42f includes a flat portion 42g and an inclined surface 42h formed by cutting the main body portion 42a. The flat portion 42g is parallel to the axis of the main body portion 42a and orthogonal to the pair of flat surfaces 42b located below. Further, the main body portion 42a is made of a magnetic metal such as iron.

The holder joint 43 includes a bearing 43a at the upper portion, and the lower portion serves as a holding portion 43b that holds the blade holder 42. The holding portion 43b is provided with an opening portion 43c having a substantially circular cross section that opens downward, and a magnet 43j is attached to a deep portion thereof. Further, a parallel pin 43d for positioning extending in a direction perpendicular to the axial center in a portion of the opening portion away from the axial center is provided inside the opening portion 43c. The parallel pin 43d is positioned in contact with the inclined surface 42h of the blade holder 42 when the blade holder 42 is inserted into the opening portion 43c so as to fix the direction or posture of the blade holder 42.

When the blade holder 42 is attached to the holder joint 43, as shown in Fig. 18, the blade holder 42 is inserted into the opening portion 43c of the holder joint 43 from the mounting portion 42f. When the mounting portion 42f is inserted into the opening portion 43c of the holder joint 43, the parallel pin 43d is positioned in contact with the inclined surface 42h of the blade holder 42, and the upper end portion of the blade holder 42 is magnetically attracted by the magnet 43j. Thereby, the holder holder 43 can be simply attached to the holder joint 43 in a state in which the posture of the blade holder 42 is directed in the fixed direction. When the rotary blade 42e is replaced, the blade holder 42 is pulled from the opening 43c of the holder joint 43 against the magnetic force of the magnet, and is replaced with the blade holder. The newly mounted blade holder 42 is selected by reading a code 42i recorded with the blade inherent data on the flat surface 42b by using a separately provided reader.

[Background literature] [Patent Literature]

[Patent Document 1] International Publication No. WO2007/063979

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2011-218815

[Patent Document 3] International Publication No. WO2008/149515

When the rotary blade moves to the prescribed travel distance to reach the replacement time, or when a rotary blade of another specification is required, the blade holder is replaced after the substrate processing apparatus B is stopped. Specifically, after the blade holder is removed from the holder of the scribing head, the desired blade holder is selected from the stored blade holders by reading the code with the reader, and the selected blade is retained. Mounted on the holder connector. If the mounting operation as described above is performed by the operator by manual operation, it is relatively troublesome, and therefore, it is convenient to perform the automatic operation by the robot.

In the case of a mounting operation by a robot, in order to select a desired blade holder from among a plurality of blade holders, it is necessary to easily read the flat surface of the blade holder having the code by using the reader and to easily utilize the robot. Pull out the configuration. In this case, since the blade holder includes a small rotary blade having a diameter of about 2 mm to 3 mm, it is required to be stably placed on, for example, a mounting table or the like so that the rotary blade is not damaged in a state where the code surface is exposed. . Moreover, in order to mount by using the robot to select and grasp the blade holder and directly transport it to the holder joint of the scribing head, it is necessary to consider the assembly of the mounting table and the robot.

However, previously, a system configuration suitable for automatic mounting of the blade holder using the robot as described above has not been disclosed, and has not been solved.

Further, one of the problems in the automatic mounting of the blade holder by the robot is a problem in which the operator manually misplaces the input of the other blade holder during the mounting.

That is, when the blade holder to be mounted is determined in advance from a plurality of blade holders in the vicinity of the platform, the robot can read by using the reader as long as the information of the code of the blade holder to be mounted is correctly input. Take the code and take out the correct blade holder, but if the input made by the operator itself produces an error, even if it is automated by the robot Installation, also select and install the wrong blade holder.

Accordingly, it is an object of the present invention to provide a method of mounting a blade holder that can eliminate a scribe line that is not supposed to be used based on an operator's erroneous input, and a substrate using the mounting method. Processing system.

Further, it is an object of the present invention to provide an mounting method and a substrate processing system which can more efficiently prevent the use of a rotary blade which may cause a defective product, and which can efficiently mount the rotary blade.

In order to solve the above problems, the following technical means are employed in the present invention. That is, the substrate processing system of the present invention includes: a substrate processing portion that is attached to a scribe line that can hold the blade holder while holding the rotary blade and is marked with a code in which a type identifying the type of the rotary blade is recorded The scribing process is performed in a state in which the head holder is attached; the blade holder mounting robot is used to take out the blade holder for the scribing process and mount it in a plurality of blade holders placed at a predetermined mounting place. And a control unit that controls the scribing process by the substrate processing unit and controls the blade holder to mount the holder by the blade holder mounting robot; and the substrate processing The system system includes: a data holding unit that memorizes the scribing process recipe according to the type of the scribing process, and the scribing process recipe determines the operation information of the action content of the scribing process and the specific type that can be used for the scribing process The allowable type information of the rotating blade is associated; the input part is input when the above-mentioned scribing process recipe is made; a recipe selection unit that selects any one of the memorandum recipes to be memorized; and a reader that reads a code marked on the blade holder; the control unit performs the following control: according to the selected rule process The allowable type information of the formula determines the blade holder that holds the suitable rotating blade, and uses the above-mentioned reader to read the code of the blade holder marked on the mounting place, and uses the above-mentioned blade holder to mount the robot to fit the blade. The holder is mounted to the above holder.

Here, the above-mentioned allowable type information may also include a plurality of types of rotating blades.

Moreover, the above reader may be mounted in the vicinity of the mechanism of the blade holder mounting robot that holds the blade holder.

Moreover, the mounting method of the blade holder of the present invention which is completed according to other viewpoints is a method of mounting a blade holder to a substrate processing apparatus which holds a rotary blade for performing scribing processing on a substrate, and has a recorded A code blade holder for holding a rotary blade, and the method for mounting the blade holder includes the following steps: (a) setting, in a computer connected to the substrate processing device, according to a type of scribing processing to determine a plan The operation information of the action content of the line processing is associated with the allowable type information of the rotary blade that can be used for the type of the scribing process, and the line process recipe is memorized; (b) the above-mentioned scribing process is selected when performing the scribing process a formulation; (c) a rotary blade that determines an allowable type of information contained in the selected scribing process recipe; and (d) a reader that reads the above-described blade holder placed at a predetermined mounting location The code removes the blade holder holding the rotary blade determined in the above step (c) and mounts it on the substrate processing apparatus.

Here, the allowable type information may also include a plurality of types of rotary blades.

According to the present invention, each type of scribing process recipe having different action contents is registered in advance, and the type of the rotary blade that can be used in the scribing process recipe is registered, and when the scribing process recipe is selected, the rotary blade that can be used is determined, and the robot is automated by using a robot or the like. The device selects and holds the blade holder of the above-described rotary blade and mounts it on the device, thereby preventing the installation operation based on the operator's erroneous input, and eliminating the scribe line using the rotary blade which should not be used.

1‧‧‧ platform

2‧‧‧Rotary drive department

3‧‧‧Horizontal orbit

4‧‧‧Motor

5‧‧‧ Screw shaft

6‧‧‧ pillar

7‧‧‧Guide bars

8‧‧ ‧Bridge

9‧‧‧ Guides

10‧‧‧ Scribe head

11‧‧‧Motor

12‧‧‧ blade holder

12a‧‧‧ Main body

12b‧‧‧flat surface

12c‧‧‧ slotting

12d‧‧‧Axle

12e‧‧‧Rotating blade

12f‧‧‧Installation Department

12g‧‧‧Flat Department

12h‧‧‧ sloped surface

12i‧‧‧ code

12j‧‧ sales

12k‧‧‧ chute

12m‧‧‧ shoulder

12p‧‧‧ recess

13‧‧‧Retaining joints

13a‧‧‧ Bearing

13b‧‧‧ Keeping Department

13c‧‧‧ openings

13d‧‧‧ parallel pin

13e‧‧‧ magnet

15‧‧‧ blade holder storage body

15a‧‧‧ accommodating holes

15b‧‧‧ arched body

15c‧‧‧Front cover

15c'‧‧‧Front cover

15d‧‧‧Rear cover

15e‧‧‧颚

15f‧‧‧flat section

15g‧‧‧Arc-shaped cover

15h‧‧‧ front wall

15i‧‧‧elastic stop

15j‧‧‧through hole

15k‧‧‧Umbrella head

15n‧‧‧Cut line

15p‧‧‧ snap groove

15p'‧‧‧ snap slot

15q‧‧‧ prominence

15q'‧‧‧ prominence

15r‧‧‧Pinch

15s‧‧‧ ribs

15t‧‧‧ prominence

15u‧‧‧ snap groove

15v‧‧‧Flexible claws

15x‧‧‧elastic claws

15y‧‧‧ bottom

15z‧‧·spring

16‧‧‧Loader

16a‧‧‧ boards

16b‧‧‧ front edge

16c‧‧‧Border

17‧‧‧ Robot

17a‧‧‧ Robotic arm

17b‧‧‧Clamping claws

17c‧‧‧Reader

18‧‧‧CCD camera

19‧‧‧ computer

20‧‧‧Control Department

21‧‧‧ Drive Department

22‧‧‧ Drive Department

23‧‧‧ Blade Holder Lifting Drive

24‧‧‧Information Maintenance Department

25‧‧‧Process Process Recipe Selection Button

26‧‧‧ Allowable type information

27‧‧‧Line data

31‧‧‧ platform

32‧‧‧Rotary Drives

33‧‧‧ Track

34‧‧‧Motor

35‧‧‧ Screw shaft

36‧‧‧ pillar

37‧‧‧Guide bars

38‧‧ ‧Bridge

39‧‧‧ Guides

40‧‧‧Scratch head

41‧‧‧Motor

42‧‧‧blade holder

42a‧‧‧ Main body

42b‧‧‧flat surface

42c‧‧‧ slotting

42d‧‧‧Axle

42e‧‧‧Rotating blade

42f‧‧‧Installation Department

42g‧‧‧Flat Department

42h‧‧‧ sloped surface

42i‧‧‧ code

43‧‧‧Retaining joints

43a‧‧‧ Bearing

43b‧‧‧ Keeping Department

43c‧‧‧ openings

43d‧‧‧ parallel pin

43j‧‧‧ Magnet

A‧‧‧Substrate processing equipment

B‧‧‧Substrate processing equipment

L‧‧‧ benchmark line

M1‧‧‧Alignment alignment mark

M2‧‧ Alignment alignment mark

S‧‧‧ Straight line

SD‧‧‧ scribing process recipe

W‧‧‧Substrate

Fig. 1 is a perspective view showing an example of a substrate processing apparatus used in the practice of the present invention.

2(a) to 2(c) are views showing an example of the blade holder of the present invention.

Figure 3 is a perspective view showing the blade holder of the present invention and the holder joint for mounting the blade holder.

Figure 4 is a partial cross-sectional front elevational view of the blade holder and holder joint of the present invention.

Fig. 5 is an exploded perspective view showing an example of a blade holder housing.

Fig. 6 is a cross-sectional view showing a state in which the blade holder is housed in the blade holder housing.

7(a) to 7(d) are explanatory views showing the operation of the elastic stopper in the blade holder housing shown in Fig. 5.

8(a) and 8(b) are cross-sectional views showing another embodiment of the blade holder housing.

Fig. 9 is a cross-sectional view showing still another embodiment of the blade holder housing.

Fig. 10 is a perspective view showing a robot and a mount in the substrate processing apparatus shown in Fig. 1.

Figure 11 is a perspective view showing another embodiment of the mounting frame.

Fig. 12 is a perspective view showing still another embodiment of the mounting frame.

Fig. 13 is an explanatory view showing a state in which an alignment mark is imaged by a CCD camera in the substrate processing apparatus shown in Fig. 1;

Fig. 14 is a block diagram showing the configuration of a control system of the substrate processing apparatus shown in Fig. 1.

Fig. 15 (a) and (b) are explanatory views of the scribe method of the outer cut and the inner cut.

Fig. 16 is a flow chart showing the steps up to the start of scribing after the scribing process recipe is selected.

Fig. 17 is a view showing an example of a scribing process recipe stored in a computer.

Fig. 18 is a perspective view showing an example of a conventional substrate processing apparatus.

Figure 19 is a perspective view showing a prior blade holder.

Figure 20 is a partial cross-sectional front elevational view of a prior art blade holder and holder joint.

Hereinafter, the details of the present invention will be described based on the drawings showing embodiments of the present invention.

Fig. 1 is a schematic perspective view showing an example of a substrate processing apparatus (substrate processing system) used in carrying out the method of the present invention. This substrate processing apparatus A includes a stage 1 on which the substrate W to be processed is placed and held. The platform 1 is configured to be rotatable in a horizontal plane by a rotary drive unit 2 having a built-in motor, and is movable in the Y direction along the horizontal rail 3. This movement in the Y direction is achieved by the screw shaft 5 that is rotated by the motor 4.

In the substrate processing apparatus A, a bridge portion 8 including a pair of pillars 6, 6 and a guide rod 7 extending horizontally in the X direction so as to connect the pillars 6 and 6 is provided across the stage 1. . The guide rod 7 is provided with a guide 9 extending horizontally in the X direction, and the scribing head 10 is disposed so as to be movable in the X direction along the guide 9. The movement of the scribing head 10 in the X direction is performed by the driving of the motor 11. A blade holder 12 including a rotary blade 12e is attached to the scribing head 10 so as to be attachable and detachable via the holder joint 13. An elevating mechanism that can raise and lower the blade holder 12 is assembled inside the scribing head 10. Further, two CCD (Charge Coupled Device) cameras 18 and 18 that photograph the alignment marks of the substrate W are provided on the upper portion of the bridge portion 8.

With the configuration as described above, one or both of the rotary blade 12e and the stage 1 are moved while pressing the rotary blade 12e against the substrate W placed on the stage 1, thereby being movable in the XY direction. The substrate W is scribed to form a scribe groove or cut.

Further, in the vicinity of the stage 1 of the substrate processing apparatus A, a mounting frame 16 on which a plurality of blade holder housings 15 accommodating the blade holder 12 are placed, and a robot 17 (a machine on which the blade holder is attached) Hand), which pulls out the blade holder 12 from the blade holder receiving body 15 and is attached to the holder joint 13 of the scribing head 10, or from the holder joint 13 The blade holder 12 is removed.

Fig. 2 is a view showing an example of the blade holder 12, Fig. 2(a) is a front view, Fig. 2(b) is a side longitudinal sectional view, and Fig. 2(c) is a perspective view. The blade holder 12 includes: a substantially cylindrical main body portion 12a; and a pair of flat surfaces 12b and 12b which are formed in parallel with each other with respect to the axis of the main body portion 12a and symmetrically formed at one end (lower end) of the main body portion 12a; A slit 12c formed in parallel with the flat surface 12b is formed along the axis of the main body portion 12a between the pair of flat surfaces 12b and 12b. In the slit 12c, the rotary blade 12e is rotatably attached to a state in which one of the rotary blades 12e is exposed from the lower end surface of the main body portion 12a via the wheel shaft 12d orthogonal to the axial center of the main body portion 12a. On one of the flat faces 12b, a code 12i is recorded as follows, the code 12i recording information for identifying the type of the rotary blade 12e held on the blade holder 12, or for identifying each Management-useful information such as the management number (individual identification number) of the blade holder.

Further, at the other end (upper end) of the main body portion 12a, a mounting portion 12f for positioning when attached to the holder joint 13 is provided. The mounting portion 12f includes a flat portion 12g and an inclined surface 12h formed by cutting the main body portion 12a. The flat portion 12g is parallel to the axis of the main body portion 12a and orthogonal to the pair of flat surfaces 12b located below. Further, the mounting portion 12f is made of a magnetic metal such as iron.

Further, a pin 12j protruding from the flat surface 12b is provided at a lower end portion of the pair of flat faces 12b, 12b, respectively. Preferably, the pin 12j is disposed on the flat surfaces 12b and 12b at a rotationally symmetrical position or a bilaterally symmetrical position. As described below, the pin 12j functions as a snap member when the blade holder 12 is pulled out from the blade holder housing 15 by the robot 17. Further, the pin 12j is provided on each flat surface, but a plurality of pins may be provided. Moreover, the pin 12j of any one of the flat faces 12b may be omitted. In addition, the blade holder 12 is accommodated in the blade holder housing 15 as a "blade holder storage group".

A chute 12k extending in the axial direction of the main body portion 12a is provided on the outer peripheral surface of the main body portion 12a and on the opposite side of the mounting portion 12f. The chute 12k is formed on the blade with the following The ridge 15s on the inner surface of the housing hole of the holder housing 15 is fitted. One end of the chute 12k is connected to the slot 12c.

As shown in FIGS. 3 and 4, the holder joint 13 attached to the scribing head 10 is provided with a bearing 13a at the upper portion, and the lower portion serves as a holding portion 13b for holding the blade holder 12. The holding portion 13b is provided with an opening 13c having a substantially circular cross section that opens downward, and a magnet 13e is attached to a deep portion thereof. Further, inside the opening portion 13c, a positioning parallel pin 13d extending in a direction perpendicular to the axial center of the opening portion 13c away from the axial center is provided. When the blade holder 12 is inserted into the opening 13c, the parallel pin 13d is brought into contact with the inclined surface 12h (see FIG. 2) of the blade holder 12 to position the blade holder 12 in the fixed direction. In the case of the present invention, the positioning is performed such that the rotational traveling direction of the rotary blade 12e coincides with the scribing direction.

When the blade holder 12 is attached to the holder joint 13, as shown in FIG. 3, the blade holder 12 is inserted into the opening 13c of the holder joint 13 from the mounting portion 12f to be attached. When the attachment portion 12f is inserted into the opening portion 13c of the holder joint 13, it is positioned in contact with the inclined surface 12h of the blade holder 12, and the upper end portion of the blade holder 12 is magnetically attracted by the magnet 13e to be held. Thereby, the holder holder 12 can be simply attached to the holder joint 13 in a state in which the posture of the blade holder 12 is directed in the fixed direction. When the rotary blade 12e is replaced, the blade holder 12 is pulled against the magnetic force of the magnet 13e, and replaced with the blade holder.

FIG. 5 is an exploded perspective view showing an example of the blade holder housing 15 that houses the blade holder 12, and FIG. 6 is a cross-sectional view showing a state in which the blade holder 12 is housed. The blade holder housing 15 includes a receiving hole 15a that passes through the front and rear substantially circular cross sections, and includes a dome-shaped body 15b having a flat bottom surface 15y, a front cover 15c that closes the opening before the receiving hole 15a, and The rear cover 15d whose rear opening is closed. The housing hole 15a is formed such that its axis is parallel to the bottom surface 15y. The dome-shaped main body 15b is provided with a flat crotch portion 15e that is continuous with the lower edge of the opening portion before the accommodation hole 15a and extends forward.

The blade holder 12 is housed in the housing hole 15a of the blade holder housing 15 At this time, the opening portion is inserted into the rotary blade 12e first from the opening hole 15a. At the time of the insertion, the flat surface 12b provided with the code 12i of the blade holder 12 is formed in the inner surface of the housing hole 15a so as to be parallel to the bottom surface 15y of the dome-shaped main body 15b and always facing upward. The ridge 15s of the blade holder 12 of the blade holder 12 is fitted. Since one end of the chute 12k of the blade holder 12 is formed in connection with the slit 12c, when the blade holder 12 is inserted into the receiving hole 15a, the slit 12c can be a guide and can be fitted into the ridge 15s, thereby The insertion operation becomes easy. Further, when the blade holder 12 is inserted into the housing hole 15a by hand, the thumb is placed on the plane portion 12g with the flat portion 12g of the mounting portion 12f facing upward, and the index finger is placed at 180°. In the vicinity of the chute 12k on the opposite side, the blade holder 12 is pinched by the two fingers and inserted into the housing hole 15a, and the operation efficiency is improved.

The front cover 15c is integrally formed of an elastic synthetic resin material, and includes a flat portion 15f that is in surface contact with the bottom surface 15y of the dome-shaped main body 15b, and a circle that is in surface contact with the top peripheral surface of the dome-shaped main body 15b. The arcuate upper cover 15g is connected to the arcuate upper cover 15g by the front wall 15h. On the upper surface of the plate-like portion 15f, an elastic stopper 15i having an umbrella-shaped head portion 15k is provided to protrude upward, and a resilient stopper 15i is formed from the bottom surface in the vicinity of the opening portion before the dome-shaped body 15b. 15y through hole 15j.

When the elastic stopper 15i is inserted into the through hole 15j, first, as shown in Fig. 7(a), the umbrella-shaped head portion 15k is compressed and enters, and if it passes through the through hole 15j, as shown in Fig. 7(b) The umbrella-shaped head portion 15k as shown is restored to its original shape and enlarged, so that it cannot be pulled out from the through hole 15j. The size of the umbrella-shaped head portion 15k of the elastic stopper 15i is set in advance so as to slightly protrude from the inner circumferential surface of the accommodation hole 15a of the dome-shaped main body 15b in this posture. Further, in order to allow the elastic stopper 15i to be retained after the elastic stopper 15i is inserted into the through hole 15j, the front cover 15c can be removed, and on the plate portion 15f near the elastic stopper 15i. A fragile cut line 15n is provided. Further, a projection 15q (see FIG. 6) elastically engaged with the engagement groove 15p provided on the upper circumferential surface of the dome-shaped main body 15b is formed on the lower surface of the arc-shaped upper cover 15g, on the opposite side of the projection 15q, That is, the upper surface of the arc-shaped upper cover 15g is provided with a surface for releasing the protrusion The pinch 15j of the 15q is snapped.

The elastic stopper 15i which is cut out from the cutting line 15n and remains on the dome-shaped main body 15b functions as a stopper which is a blade holder 12 housed in the housing hole 15a as shown in FIG. The flat surface 12b temporarily stops the advancement of the blade holder 12 from a position where the opening portion is exposed before the accommodation hole 15a. That is, the shoulder portion 12m of the blade holder 12 adjacent to the flat surface 12b abuts against the umbrella-shaped head portion 15k of the elastic stopper 15i to be prevented from advancing within the range of elastic deformation of the elastic stopper 15i. Further, as shown in FIG. 7(d), if the blade holder 12 is strongly pulled from the front opening portion in the pulling-out direction against the elastic force of the elastic stopper 15i, the elastic stopper 15i is tilted to allow The blade holder 12 travels. In this case, in order to enable the elastic stopper 15i to be tilted, the through hole 15j is formed to have a sufficient space. Further, the shoulder portion 12m is preferably an inclined surface or an arc as shown in the drawing, but may be a substantially right-angled edge as long as it can pass over the umbrella-shaped head portion 15k against the elastic force.

The rear cover 15d is integrally formed of an elastic synthetic resin material, and the upper and lower projections 15t formed on the inner surface of the cover are elastically engaged with the upper and lower engagement grooves 15u provided on the outer circumferential surface of the dome-shaped main body 15b, and are detachably attached. Ground installation.

The front cover 15c is for preventing the blade holder 12 from coming off from the front opening portion and protecting the blade tip of the rotary blade 12e when the blade holder 12 is housed in the blade holder housing 15, and is inside the front wall 15h. A concave portion into which the tip of the rotary blade 12e is fitted is formed (see FIG. 6). Further, the rear cover 15d serves to prevent the blade holder 12 from coming off the opening portion after the insertion hole 15a.

Figure 8 (a) shows another embodiment of the stopper. In this embodiment, instead of the above-described elastic stopper 15i, a stopper that restricts the advancement of the blade holder 12 by the elastic locking claws 15v is formed. The elastic locking claws 15v are attached to the dome-shaped main body 15b of the blade holder housing 15 in a state of being biased by the spring 15w in the push-up direction. The front end of the elastic locking claw 15v is formed with an inclined surface facing the inclined surface of the shoulder portion 12m of the blade holder 12, but may be an arc. The front cover 15c' in this embodiment is exemplified in the above embodiment The front cover 15c removes the structure of the elastic stopper 15i, and is detachably attached to the opening before the accommodation hole 15a by the engagement grooves 15p' and the projections 15q' which are elastically fitted to each other. On the inner surface of the front wall 15h, a concave portion into which the blade edge of the rotary blade 12e is fitted is formed in the same manner as the front cover 15c. In the opening portion after the accommodation hole 15a, the rear cover 15d is detachably attached in the same manner as in the above embodiment.

Further, instead of the rear cover 15d, an elastic locking claw 15x having the same configuration as that of the elastic locking claw 15v may be provided in the vicinity of the opening portion after the accommodation hole 15a as shown in Fig. 8(b) to avoid The blade holder 12 is detached from the opening after the receiving hole 15a. The front end of the elastic locking claw 15x is also formed with an inclined surface facing the inclined surface of the rear opening portion so as to easily insert the blade holder 12 and is difficult to fall off, but may be an arc.

In the above embodiment, an example in which one blade holder 12 is housed in each of the blade holder housings 15 is exemplified. However, as shown in FIG. 9, a plurality of, for example, 5 to 10 blade holders 12 may be housed. In this case, in order to prevent the cutting blade 12e of the subsequent blade holder 12 from abutting against the tail portion of the blade holder 12 in front, the blade edge is damaged, preferably at the end of the blade holder 12 (the upper end face in FIG. 2) A recess 12p into which the tip is embedded is provided.

The blade holder housing 15 is provided in a plurality of pieces, and the blade holders 12 having the different types of the rotary blades 12e are divided into different types, and are stored in the respective blade holder housings 15 and stored in the factory or the like. Further, at the time of use, the front cover 15c is removed and placed on the mounting frame 16 of the substrate processing apparatus A in a neat manner.

FIG. 10 is a perspective view showing a mounting frame 16 on which a plurality of, for example, three blade holder housings 15 are arranged in alignment, and a robot hand 17 provided in the vicinity of the mounting frame.

In this embodiment, the mounting frame 16 includes three shelf plates 16a on which the flat bottom surface 15y of the blade holder housing 15 is placed as a mounting surface. In each of the shelf plates 16a, the flat surface 12b of the blade holder 12 accommodated in the blade holder housing body 15 is held in a state of being protruded from the front end edge 16b of the shelf plate 16a, and a frame is provided on the peripheral edge portion of the shelf plate. 16c. and, Each of the shelf plates 16a is assembled in a stepped manner when viewed from the front end edge 16b side.

The robot 17 includes a robot arm 17a having a grip claw 17b at its front end, and a reader 17c mounted on the robot arm 17a and reading a code 12i provided on the flat surface 12b of the blade holder 12. The arm 17a is configured such that the grip claws 17b at the distal end thereof are pulled out from the pair of flat faces 12b and 12b of the blade holder 12 exposed from the blade holder housing 15 in the lateral direction. At this time, since the shelf plates 16a are assembled in a stepped manner, the target blade holder 12 can be grasped without being hindered by the other blade holders 12, and pulled out by the blade holders 12 The code 12i does not overlap on the plane, so that the code 12i of each blade holder 12 can be easily and correctly read by the reader 17c from above.

Further, when the pair of flat faces 12b and 12b are pulled out from the lateral direction by the grip claws 17b, the pins 12j and 12j of the flat faces 12b become the catches of the pair of gripping claws 17b with respect to the drawing direction. So that it can be pulled out reliably and smoothly. At this time, since the pin 12j is disposed on each of the flat faces 12b and 12b, the grip claws 17b can be caught with good balance with respect to the pull-out direction, and the blade holder 12 can be smoothly pulled out. Furthermore, the same applies to the case where the holder joint 13 (see Fig. 3) of the scribing head is pulled out.

The plurality of shelf plates 16a of the mounting frame 16 may also be arranged on the same side of the frame plate 16a on the side close to the robot 17 on the same plane, and the front end edges 16b thereof are retracted in the rear. And formed. Therefore, similarly to the above-described embodiment in which the steps are assembled in a stepwise manner, when the blade holder 12 is pulled by the clamping claws 17b of the robot arm 17a, the target holder can be grasped without being hindered by the other blade holders 12. The blade holder 12 is pulled out, and the code 12i of each blade holder 12 is easily read from above by the reader 17c of the robot arm 17a.

Preferably, the shelf 16a of the mounting frame 16 is formed to be inclined so that the front end edge 16b is downward as shown in FIG. Thereby, when the blade holder 12 is pulled out from the blade holder housing 15 by the robot arm 17a, it can be easily pulled out by the sliding effect by the own weight. In particular, the blade for accommodating a plurality of blade holders 12 as shown in FIG. When the holder housing 15 is placed on the shelf 16a, it is preferable to set the inclination angle of the shelf 16a in advance so that the blade holder 12 advances by its own weight. Thus, if the front blade holder 12 is pulled out, the subsequent blade holder 12 can advance by its own weight and wait for the next pull-out at the position of the stopper.

When the scribing is started by the substrate processing apparatus of FIG. 1, first, the substrate W is placed and held on the stage 1. Then, the positioning marks M1 and M2 for positioning on the left and right sides of the substrate are detected by the two CCD cameras 18 and 18 provided on the bridge unit 8 as shown in FIG. When the straight line S connected to the alignment mark at this time is inclined with respect to the reference line L connecting the two CCD cameras 18 and 18, the rotation driving unit 2 rotates the stage 1 and the inclination angle becomes zero. Corrected. Moreover, the offset of the rotary blade 12e with respect to the preset start position of the scribing line is also detected by the CCD camera 18. If offset in the Y direction, the platform 1 is moved by an amount corresponding to its offset. Further, if it is shifted in the X direction, the scribing head 10 is moved in the X direction by an amount corresponding to the amount of shift. The correction of the shift in the X-Y direction or the correction of the tilt angle of the substrate is performed by the control unit 20 of the computer 19 as shown in the block diagram of FIG.

In the block diagram of Fig. 14, the outputs from the two CCD cameras 18 are given to the control unit 20 of the computer 19. The control unit 20 operates the stage rotation driving unit 2 based on the correction value to rotate the stage 1 and corrects the inclination angle to zero. Further, the correction of the shift in the X-Y direction is performed by driving the respective drive units 21 and 22. After the correction is completed, the blade holding holder lifting/lowering driving unit 23 lowers the blade holder 12, and presses the rotary blade 12e against the substrate W to move one or both of the rotary blade 12e and the stage 1, thereby The substrate W is scribed in the XY direction to form a scribe groove. The travel distance of the rotary blade 12e used at this time is recorded in the data holding unit 24, and when the replacement time of the rotary blade 12e is reached, it is displayed as an alarm or the like.

The code 12i of the blade holder 12 can use a one-dimensional code, such as a barcode, but is preferably a two-dimensional code that can input more information in a small area (for example, a QR code (registrar) Mark)). The two-dimensional code is formed by direct marking, but the label can also be attached. In the code 12i, the information of the type of the rotary blade 12e attached to the blade holder 12, or the management number for individually identifying each blade holder 12 is recorded as text information.

Specifically, it is recorded in the following format.

(indicating the type string) / (indicating the string of the management number) / (indicating the string of the initial correction information)

Among them, the type is a string of various types of dimensions (outer diameter, inner diameter, thickness, tip angle, tip shape, etc.) or material of the rotary blade 12e in accordance with a prescribed rule.

Further, the "management number" is a number uniquely assigned to each of the rotary blades 12e.

The "initial correction information" refers to a correction information that is measured for each rotary blade 12e in order to eliminate the offset of the scribe line position due to the mounting error of the rotary blade 12e with respect to the blade holder 12. .

The information is decoded when the code 12i is read by the code reader 17c.

In addition, the scribing process recipe SD which is described in the operation of the scribing process by the substrate processing apparatus A is prepared based on the type of scribing processing, and is recorded in the data holding unit 24 of the computer 19 (recording such as a hard disk). In the media).

If one process recipe suitable for the scribing process to be executed later is selected in the scribing process recipe SD, the control unit 20 transmits the process to each part of the device according to the content described in the scribing process recipe SD by reading the process recipe. The command is executed, and the scribing process based on the recorded content is executed.

Fig. 17 is a view showing an example of the scribing process recipe SD memorized in the computer 19. In each of the scribing process recipes SD, the number for identification of each process recipe is given as in the process recipe No. 1 to No. 4. In each of the scribing process recipes SD, operation information for determining the content of the operation performed in the scribing process is described as the scribing data 27, and the allowable type information of the type of the rotary blade that can be used in the scribing process is specified. Established with the lined data 27 Remember to remember.

Specifically, as the allowable type information 26, a type of data of one (or plural) of usable rotary blades 12e is described. In the allowable type information "D3.0T1.1H1.4" illustrated in Fig. 17, a rotary insert 12e having a diameter of 3.0 mm, a thickness of 1.1 mm, and an inner diameter of 1.4 mm is suitable for the scribing process recipe.

The type described in the allowable type information 26 and the information included in the code 12i indicated by the blade holder 12 as "type information" are the same type of information. Therefore, by reading the code 12i, it is possible to find the rotary blade 12e of the type conforming to the allowable pattern information 26. In addition to these, the allowable type information 26 may also include the angle of the cutting edge or the shape of the cutting edge (the tip of the groove, the groove without the groove, the groove spacing, etc.), the material, and the like.

Further, in the scribing data 27, position information (where the difference between the "outer cut" and the "inscribed" and the start position) of the cutting edge is specified in the scribing process, or the size of the substrate is specified. Information, alignment information required to place the substrate on the platform and position it. In addition to these, when a plurality of scribe lines are formed in parallel on one substrate, the pitch, the number of the lines, and the like of the lines are also required to be described.

Here, the information on the start position ("outcut" and "inside") described as one piece of the scribing data 27 will be described. As shown in Fig. 15 (a), the "outer cut" is set to the outer side of the edge of the substrate W in a state where the lowermost end of the rotary blade 12e is lowered slightly below the surface (upper surface) of the substrate W. (starting position of the line). Then, the rotary blade 12e is horizontally moved from the set position, passes over the end portion of the substrate, passes over the end portion, and is horizontally moved while being pressed with a predetermined scribing pressure to perform scribing. On the other hand, as shown in Fig. 15 (b), the "inner cut" is such that the rotary blade 12e is lowered from the upper end to the inner side (the scribing start position) from the end edge of the substrate, and is abutted against the substrate with a predetermined scribing pressure. The upper side is pressed while being horizontally moved while being pressed. The "external cut" and "internal cut" each have advantages and disadvantages, and can be used depending on the type, thickness, and use of the substrate.

When creating a new scribing data 27, first determine the "outcut" or "inscribed" scribing method. In the case of "external cutting", the distance from the edge of the substrate to the starting position of the scribing When the value is set to "+" and the value is entered, in the case of "inscribed", the distance from the edge of the substrate to the start position of the scribe line is set to "-" and the value is entered and recorded. Line information 27. When the scribing data 27 is described, the rotary blade suitable for the "outcut" or "inscribed" is determined. Therefore, the type of the rotary blade is described as the allowable type information 26. In this manner, one scribing process recipe SD that associates the allowable type information 26 with the scribing material 27 is prepared.

Further, at the time of processing, the desired recipe recipe number can be selected from the plurality of scribing process recipes memorized in the material holding portion 24 by using the recipe recipe selection button 25 (refer to FIG. 14). In addition, here, as the selection method of the process recipe, the selection button 25 is exemplified, and of course, other methods are used, for example, by displaying various process recipes on the monitor of the computer 19 and selecting the recipe recipe.

Next, the mounting operation of the blade holder 12 will be described.

When the cumulative travel distance of the rotating blade 12e in use reaches the replacement time or needs to be replaced with the rotary blade 12e of another specification, the replacement of the rotary blade 12e is performed by the robot 17 after the substrate processing apparatus A is stopped. At this time, the control unit 20 refers to the allowable pattern information 26 described in the scribing process recipe SD, and sends a signal regarding the type of the rotatable blade that can be used to the robot. In this manner, the robot 17 reads the code 12i of the blade holder 12 stored in the blade holder housing 15 of the mounting table 16 by the attached reader 17c, and selects the blade holder having the rotary blade conforming to the type. 12 and pull it out and mount it on the holder joint 13.

Fig. 16 is a flow chart showing the steps up to the start of scribing after selecting the scribing process recipe to be used. First, if the desired scribing process recipe SD is selected (S1) by the select button 25 of the computer 19, the allowable type information 26 described in the selected scribing process recipe SD is determined to determine the rotation that can be used for the process recipe. The type of the blade 12e (S2). Dying When the rotary blade 12e is fixed, if the holder 13 is attached with the previously used blade holder, the robot arm 17a removes the blade holder and moves it to the separately prepared storage box, and then goes to the stage 16 to take the blade to hold. With 12 (S3). Moreover, the code 12i of the blade holder 12 is read by the reader 17c. Since the code 12i that has been read contains the type information specifying the type of the rotary blade 12e, if the type information contained in the read code 12i is different from the allowable type information 26 described in the scribe process recipe SD, the movement is performed. The action of the code holder 12i is repeated until the next blade holder 12 repeats. In this manner, the blade holder 12 having the pattern information in accordance with the allowable pattern information 26 described in the scribing process recipe SD is found and selected (S4). Then, the selected blade holder 12 is taken out from the blade holder housing 15 by the robot arm 17a (S5). The extracted blade holder 12 is carried to the scribing head 10 and attached to the holder joint 13 (S6). Thereafter, the scribing process is automatically started in accordance with the operation information described in the scribing data 27 of the scribing process recipe SD (S7).

By performing such a process, only the blade holder of the rotary blade having the allowable type information suitable for the scribing process recipe SD is selected and mounted by the robot, so that the problem of the wrong blade holder 12 can be prevented.

The representative embodiments of the present invention have been described above, but the present invention is not limited to the embodiments described above, and modifications and changes may be appropriately made without departing from the scope of the claims.

For example, the allowable pattern information 26 of the scribing process recipe SD may also include a plurality of types. In this case, when the code 12i of the blade holder 12 is read by the reader 17c, each of the blade holder housings 15 placed on the mounting table 16 is moved one by one to read all the blade holders 12. Code 12i, and then decide on one blade holder for the next processing. In this case, it is also possible to pre-set the priority order for the plural types included in the allowable type information.

[Industrial availability]

The invention can be utilized to press the rotating blade against the surface of the substrate A substrate processing apparatus for cutting a scribe line or cutting the substrate is performed by scribing.

Claims (5)

A substrate processing system comprising: a substrate processing portion that is attached to a scribe line that can be detachably attached to the blade holder while holding a rotary blade and having a code indicating that a type identifying the type of the rotary blade is recorded The scribing process is performed in a state in which the head holder is attached; the blade holder mounting robot is loaded with the blade holder for the scribing process and loaded in a plurality of blade holders placed at a predetermined mounting place And a control unit that controls the scribing process by the substrate processing unit and controls the blade holder to mount the holder by the blade holder mounting robot; and the substrate processing The system includes: a data holding unit that memorizes the scribing process recipe according to the type of the scribing process, and the scribing process formula determines the operation information of the action content of the scribing process and the type that can be used in the scribing process. The allowable type information of the rotating blade is associated; the input portion is input when the above-mentioned scribing process recipe is made; a recipe selection unit that selects any one of the memorandum recipes to be memorized; and a reader that reads a code marked on the blade holder; the control unit performs the following control: according to the selected stroke The allowable type information of the line process recipe determines the blade holder that holds the suitable rotary blade, and uses the above-mentioned reader to read the code of the blade holder marked on the mounting place, and the above-mentioned blade holder mounting robot will be suitable. The blade holder is mounted on the above holder joint. The substrate processing system of claim 1, wherein the permissible type information includes plural numbers The type of rotating blade. A substrate processing system according to claim 1 or 2, wherein said reader is mounted in the vicinity of a mechanism for holding the blade holder of the blade holder mounting robot. A method of mounting a blade holder, which is a method of mounting a blade holder to a substrate processing apparatus, the blade holder holding a rotary blade for scribing a substrate, and having a code for recording a type of the rotating blade The blade holder includes the following steps: (a) setting, in the computer connected to the substrate processing apparatus, operation information for determining the action content of the line processing according to the type of the line processing a scribing process recipe that is associated with the permissible type information of a rotary blade of a type that can be used in the scribing process; (b) selecting the scribing process recipe when performing scribing processing; (c) determining suitable for the a rotary blade that selects the allowable type information contained in the scribing process recipe; and (d) reads the above code of the blade holder placed at a predetermined mounting place by using a reader, and takes out the above step (c) The blade holder of the rotary blade determined in the above is mounted on the substrate processing apparatus. The method of installing the blade holder of claim 4, wherein the permissible type information includes a plurality of types of rotating blades.