JP2014002140A - 基板検査用ピン - Google Patents
基板検査用ピン Download PDFInfo
- Publication number
- JP2014002140A JP2014002140A JP2013116503A JP2013116503A JP2014002140A JP 2014002140 A JP2014002140 A JP 2014002140A JP 2013116503 A JP2013116503 A JP 2013116503A JP 2013116503 A JP2013116503 A JP 2013116503A JP 2014002140 A JP2014002140 A JP 2014002140A
- Authority
- JP
- Japan
- Prior art keywords
- diameter
- inspection pin
- contact
- substrate inspection
- pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/06738—Geometry aspects related to tip portion
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/0675—Needle-like
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
- G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Geometry (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Abstract
【解決手段】本発明の基板検査用ピン100は、胴部110と、胴部110の一端に形成され、平坦な形状からなる接触部120と、を含み、接触部120の直径Fは、胴部110の直径2Rより小さいものである。
【選択図】図1
Description
110 胴部
120 接触部
Claims (10)
- 胴部と、
前記胴部の一端に形成され、平坦な形状からなる接触部と、を含み、
前記接触部の直径は前記胴部の直径より小さいことを特徴とする基板検査用ピン。 - 前記接触部の直径は、前記胴部の直径の30%〜70%の範囲で形成されることを特徴とする請求項1に記載の基板検査用ピン。
- 前記接触部の直径は、前記胴部の直径の10%〜90%の範囲で形成されることを特徴とする請求項1に記載の基板検査用ピン。
- 前記胴部と接触部とがつながる部分が、外側方向に凸状に形成されることを特徴とする請求項1に記載の基板検査用ピン。
- 前記胴部と接触部とがつながる部分が、段差状に形成されることを特徴とする請求項1に記載の基板検査用ピン。
- 前記胴部と接触部とがつながる部分が、内側方向に凸状に形成されることを特徴とする請求項1に記載の基板検査用ピン。
- 配線パターンの電気的連結状態を検査するための基板検査装置において、配線パターンの両端のパッドに接触する基板検査用ピンであって、前記パッドに接触する部分が平坦な形状からなる基板検査用ピン。
- 前記基板検査用ピンは、
胴部と、
前記胴部の一端に形成されて前記パッドに接触し、平坦な形状からなる接触部と、を含み、
前記接触部の直径は前記胴部の直径より小さいことを特徴とする請求項7に記載の基板検査用ピン。 - 前記接触部の直径は、前記胴部の直径の30%〜70%の範囲で形成されることを特徴とする請求項8に記載の基板検査用ピン。
- 前記接触部の直径は、前記胴部直径の10%〜90%の範囲で形成されることを特徴とする請求項8に記載の基板検査用ピン。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2012-0064510 | 2012-06-15 | ||
KR1020120064510A KR20130141245A (ko) | 2012-06-15 | 2012-06-15 | 기판 검사용 핀 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2014002140A true JP2014002140A (ja) | 2014-01-09 |
Family
ID=49985433
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013116503A Ceased JP2014002140A (ja) | 2012-06-15 | 2013-05-31 | 基板検査用ピン |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2014002140A (ja) |
KR (1) | KR20130141245A (ja) |
TW (1) | TW201400828A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114960344A (zh) * | 2022-06-17 | 2022-08-30 | 广东高捷体育产业有限公司 | 运动场地结构和耐刻划防滑场地 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0381669A (ja) * | 1989-08-24 | 1991-04-08 | Tokyo Kasoode Kenkyusho:Kk | プローブカード用探針 |
US20030060092A1 (en) * | 2001-04-09 | 2003-03-27 | Johnson Walter H. | Systems and methods for measuring properties of conductive layers |
JP2004093355A (ja) * | 2002-08-30 | 2004-03-25 | Toshiba Corp | Pd合金系プローブピンおよびそれを用いたプローブピン装置 |
JP2006119024A (ja) * | 2004-10-22 | 2006-05-11 | Tokyo Electron Ltd | プローブおよびその製造方法 |
JP2009025164A (ja) * | 2007-07-19 | 2009-02-05 | Tokugen:Kk | 検査治具とその製造方法 |
-
2012
- 2012-06-15 KR KR1020120064510A patent/KR20130141245A/ko not_active Application Discontinuation
-
2013
- 2013-05-28 TW TW102118761A patent/TW201400828A/zh unknown
- 2013-05-31 JP JP2013116503A patent/JP2014002140A/ja not_active Ceased
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0381669A (ja) * | 1989-08-24 | 1991-04-08 | Tokyo Kasoode Kenkyusho:Kk | プローブカード用探針 |
US20030060092A1 (en) * | 2001-04-09 | 2003-03-27 | Johnson Walter H. | Systems and methods for measuring properties of conductive layers |
JP2004093355A (ja) * | 2002-08-30 | 2004-03-25 | Toshiba Corp | Pd合金系プローブピンおよびそれを用いたプローブピン装置 |
JP2006119024A (ja) * | 2004-10-22 | 2006-05-11 | Tokyo Electron Ltd | プローブおよびその製造方法 |
JP2009025164A (ja) * | 2007-07-19 | 2009-02-05 | Tokugen:Kk | 検査治具とその製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114960344A (zh) * | 2022-06-17 | 2022-08-30 | 广东高捷体育产业有限公司 | 运动场地结构和耐刻划防滑场地 |
Also Published As
Publication number | Publication date |
---|---|
KR20130141245A (ko) | 2013-12-26 |
TW201400828A (zh) | 2014-01-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI595238B (zh) | 測試插座 | |
TWI549219B (zh) | Test sorting machine and its propulsion device, test tray and test machine interface board | |
KR101384714B1 (ko) | 반도체 검사장치 | |
WO2015122471A1 (ja) | 検査ユニット | |
TW201825920A (zh) | 用於dc參數測試的垂直式超低漏電流探針卡 | |
TWM519739U (zh) | 晶片測試裝置 | |
JP2019060768A (ja) | 抵抗測定装置、基板検査装置、及び抵抗測定方法 | |
KR20130063263A (ko) | 프로브카드 | |
JP5538107B2 (ja) | 回路基板検査用プローブユニットおよび回路基板検査装置 | |
TWI743171B (zh) | 用於探針卡之空間轉換器及相關之系統及方法 | |
TWI383159B (zh) | 電性連接瑕疵偵測裝置 | |
KR101039049B1 (ko) | 비접촉 검사방식을 적용한 단선 및 단락 검출용 칩 스케일 패키지 기판 및 그 검사장치 | |
JP4967008B2 (ja) | 基板のテスト方法 | |
US9435846B2 (en) | Testing of thru-silicon vias | |
JP2014002140A (ja) | 基板検査用ピン | |
KR102257278B1 (ko) | 전기적 접속 장치 | |
KR101778608B1 (ko) | 전기 신호 연결용 마이크로 컨택터 | |
KR20190130603A (ko) | 전기적 접속 장치 | |
TWM547673U (zh) | 晶圓測試針座結構改良 | |
JP2007067008A (ja) | 半導体検査のプローブ方法 | |
KR101467381B1 (ko) | 반도체 검사장치 | |
TW201305568A (zh) | 探測電性狀態之儀器 | |
JP3159662U (ja) | 非破壊性検査モジュール | |
JP2011107115A (ja) | 基板検査装置 | |
JP2014212181A (ja) | 多層基板 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20151216 |
|
A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20161003 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20160930 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20161004 |
|
AA92 | Notification of invalidation |
Free format text: JAPANESE INTERMEDIATE CODE: A971092 Effective date: 20161018 |