JP2013544658A5 - - Google Patents

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Publication number
JP2013544658A5
JP2013544658A5 JP2013533879A JP2013533879A JP2013544658A5 JP 2013544658 A5 JP2013544658 A5 JP 2013544658A5 JP 2013533879 A JP2013533879 A JP 2013533879A JP 2013533879 A JP2013533879 A JP 2013533879A JP 2013544658 A5 JP2013544658 A5 JP 2013544658A5
Authority
JP
Japan
Prior art keywords
load bearing
abrasive article
particles
bearing particles
group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013533879A
Other languages
English (en)
Japanese (ja)
Other versions
JP5871938B2 (ja
JP2013544658A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2011/054676 external-priority patent/WO2012051002A2/en
Publication of JP2013544658A publication Critical patent/JP2013544658A/ja
Publication of JP2013544658A5 publication Critical patent/JP2013544658A5/ja
Application granted granted Critical
Publication of JP5871938B2 publication Critical patent/JP5871938B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2013533879A 2010-10-15 2011-10-04 研磨物品 Expired - Fee Related JP5871938B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US39359810P 2010-10-15 2010-10-15
US61/393,598 2010-10-15
PCT/US2011/054676 WO2012051002A2 (en) 2010-10-15 2011-10-04 Abrasive articles

Publications (3)

Publication Number Publication Date
JP2013544658A JP2013544658A (ja) 2013-12-19
JP2013544658A5 true JP2013544658A5 (enExample) 2014-09-25
JP5871938B2 JP5871938B2 (ja) 2016-03-01

Family

ID=45938900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013533879A Expired - Fee Related JP5871938B2 (ja) 2010-10-15 2011-10-04 研磨物品

Country Status (6)

Country Link
US (1) US8932115B2 (enExample)
JP (1) JP5871938B2 (enExample)
CN (1) CN103153538B (enExample)
SG (1) SG189227A1 (enExample)
TW (1) TWI524969B (enExample)
WO (1) WO2012051002A2 (enExample)

Families Citing this family (12)

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Publication number Priority date Publication date Assignee Title
JP6188286B2 (ja) * 2012-07-13 2017-08-30 スリーエム イノベイティブ プロパティズ カンパニー 研磨パッド及びガラス、セラミックス、及び金属材料の研磨方法
PL3052271T3 (pl) * 2013-10-04 2021-10-04 3M Innovative Properties Company Spojone wyroby ścierne i sposoby
US20170210063A1 (en) * 2014-08-04 2017-07-27 3M Innovative Properties Company Finishing system for 3d printed components
US9418959B1 (en) * 2015-07-08 2016-08-16 Toyota Motor Engineering & Manufacturing North America, Inc. Systems of bonded substrates
JP2018536119A (ja) * 2015-09-25 2018-12-06 サン−ゴバン パフォーマンス プラスティックス コーポレイション 接着剤、接着剤を有するベアリング及び製造方法
CN107384312A (zh) * 2017-06-06 2017-11-24 杭州希恩希拓斯精密机械有限公司 刀头钝化研磨磨料及其制备方法
CN107799392B (zh) * 2017-09-22 2020-12-11 中国科学院微电子研究所 黑硅、制备工艺及基于黑硅的mems器件制备方法
CN107639554B (zh) * 2017-11-10 2024-12-20 江苏瑞和磨料磨具有限公司 一种粗磨抛光一次完成的双面磨砂布
US10947427B2 (en) 2018-03-29 2021-03-16 Saint-Gobain Performance Plastics Corporation Adhesive, bearing with the adhesive, and methods of making
EP3898082A1 (en) * 2018-12-18 2021-10-27 3M Innovative Properties Company Abrasive articles with varying shaped abrasive particles
KR102174958B1 (ko) * 2019-03-27 2020-11-05 에스케이씨 주식회사 결함 발생을 최소화시키는 연마패드 및 이의 제조방법
CN122008020A (zh) * 2025-10-28 2026-05-12 清华大学 磨削结构、制备方法及晶圆减薄用砂轮

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US5976000A (en) * 1996-05-28 1999-11-02 Micron Technology, Inc. Polishing pad with incompressible, highly soluble particles for chemical-mechanical planarization of semiconductor wafers
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ATE302092T1 (de) 2000-04-28 2005-09-15 3M Innovative Properties Co Schleifmittel und verfahren zum schleifen von glas
US6645624B2 (en) 2000-11-10 2003-11-11 3M Innovative Properties Company Composite abrasive particles and method of manufacture
BRPI0510534A (pt) * 2004-05-03 2007-10-30 3M Innovative Properties Co sapata para suportar uma fita abrasiva que tem uma face abrasiva e uma face traseira oposta, aparelho para promover a abrasão de uma superfìcie periférica externa de uma parede de empuxo, e, método para promover a abrasão de uma face de uma peça de trabalho
US7294049B2 (en) * 2005-09-01 2007-11-13 Micron Technology, Inc. Method and apparatus for removing material from microfeature workpieces
US7594845B2 (en) * 2005-10-20 2009-09-29 3M Innovative Properties Company Abrasive article and method of modifying the surface of a workpiece
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US8080072B2 (en) * 2007-03-05 2011-12-20 3M Innovative Properties Company Abrasive article with supersize coating, and methods
KR101404274B1 (ko) 2007-10-22 2014-06-05 니폰 가가쿠 고교 가부시키가이샤 피복 도전성 분체 및 그것을 이용한 도전성 접착제
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US20100266812A1 (en) 2009-04-17 2010-10-21 3M Innovative Properties Company Planar abrasive articles made using transfer articles and method of making the same

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