JP2013543127A - 小型で集積化されたマイクロエレクトロメカニカルシステム（メムス）の光学センサアレイ - Google Patents

小型で集積化されたマイクロエレクトロメカニカルシステム（メムス）の光学センサアレイ Download PDF

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JP2013543127A
JP2013543127A JP2013537224A JP2013537224A JP2013543127A JP 2013543127 A JP2013543127 A JP 2013543127A JP 2013537224 A JP2013537224 A JP 2013537224A JP 2013537224 A JP2013537224 A JP 2013537224A JP 2013543127 A JP2013543127 A JP 2013543127A
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coupled
sensor
mechanical structure
light source
oscillating
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JP2013543127A5 (https=
Inventor
ハカン・ウレイ
ブルハネッティン・エルデム・アラジャ
エルマン・ティムルドガン
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Koc Universitesi
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Koc Universitesi
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems ; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems ; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54366—Apparatus specially adapted for solid-phase testing
    • G01N33/54373—Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/024—Mixtures
    • G01N2291/02466—Biological material, e.g. blood
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever

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  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Molecular Biology (AREA)
  • Biomedical Technology (AREA)
  • Urology & Nephrology (AREA)
  • Hematology (AREA)
  • Optics & Photonics (AREA)
  • Biotechnology (AREA)
  • Microbiology (AREA)
  • Cell Biology (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Micromachines (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
  • Gyroscopes (AREA)
JP2013537224A 2010-11-01 2011-09-13 小型で集積化されたマイクロエレクトロメカニカルシステム（メムス）の光学センサアレイ Pending JP2013543127A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US40911110P 2010-11-01 2010-11-01
US61/409,111 2010-11-01
US201161430871P 2011-01-07 2011-01-07
US61/430,871 2011-01-07
PCT/IB2011/054000 WO2012059828A2 (en) 2010-11-01 2011-09-13 Miniaturized integrated micro electo-mechanical systems (mems) optical sensor array

Publications (2)

Publication Number Publication Date
JP2013543127A true JP2013543127A (ja) 2013-11-28
JP2013543127A5 JP2013543127A5 (https=) 2014-10-16

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JP2013537224A Pending JP2013543127A (ja) 2010-11-01 2011-09-13 小型で集積化されたマイクロエレクトロメカニカルシステム（メムス）の光学センサアレイ

Country Status (9)

Country Link
US (1) US9267923B2 (https=)
EP (1) EP2635900A2 (https=)
JP (1) JP2013543127A (https=)
KR (1) KR101838476B1 (https=)
CN (1) CN103430018B (https=)
BR (1) BR112013010927A2 (https=)
CA (1) CA2816374A1 (https=)
RU (1) RU2565351C2 (https=)
WO (1) WO2012059828A2 (https=)

Cited By (6)

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JP2017194453A (ja) * 2016-04-21 2017-10-26 ザ・ボーイング・カンパニーＴｈｅ Ｂｏｅｉｎｇ Ｃｏｍｐａｎｙ コンフォーマル超音波走査用のカーボンナノチューブを用いてフレキシブル基板に結合されたフェーズドアレイのｍｅｍｓトランスデューサ
JP2017538921A (ja) * 2014-10-28 2017-12-28 マサチューセッツ インスティテュート オブ テクノロジー デジタル的に実装された位相ロックループアレイを用いる多数の共振の同時振動および周波数追跡
US11162886B2 (en) 2017-03-31 2021-11-02 Massachusetts Institute Of Technology Systems, articles, and methods for flowing particles
US11346755B2 (en) 2019-01-10 2022-05-31 Travera, Inc. Calibration of a functional biomarker instrument
US11754486B2 (en) 2017-06-19 2023-09-12 Massachusetts Institute Of Technology Systems and methods for measuring properties of particles
US12362038B2 (en) 2019-01-10 2025-07-15 Travera, Inc. Identifying cancer therapies

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GB2491806B (en) * 2011-05-25 2013-07-10 Microvisk Ltd Apparatus and method for measuring properties of a fluid
US9664500B2 (en) 2012-03-08 2017-05-30 Cornell University Tunable optofluidic apparatus, method, and applications
EP2867683B1 (en) * 2012-06-28 2021-09-01 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO High throughput microscopy device
GB201215546D0 (en) 2012-08-31 2012-10-17 Infinitesima Ltd Multiple probe detection and actuation
ITTO20120789A1 (it) * 2012-09-14 2012-12-14 Fond Istituto Italiano Di Tec Nologia Iit Dispositivo automatico di misura, procedimento di misura mediante tale dispositivo e sistema dotato di tale dispositivo.
US9290219B2 (en) 2013-03-14 2016-03-22 The Boeing Company Locomotion system and method of controlling a robotic device
US20140260688A1 (en) * 2013-03-14 2014-09-18 The Boeing Company Sensor assembly using micropillars and method of use
US9352256B2 (en) 2013-03-14 2016-05-31 The Boeing Company Filtration systems and methods for filtering particles of a predetermined substance
JP6330046B2 (ja) * 2013-09-09 2018-05-23 コチ・ウニヴェルシテシＫｏｃ Ｕｎｉｖｅｒｓｉｔｅｓｉ 粘度および質量を検出するための小型統合微小電気機械システム（ｍｅｍｓ）光センサアレイ
US9557306B2 (en) * 2013-12-20 2017-01-31 Honeywell International Inc. Magnetically controlled gas detectors
EP3108230B1 (en) * 2014-02-17 2019-08-07 Universität Basel Measuring device and method for determining mass and/or mechanical properties of a biological system
EP3356788B1 (en) * 2015-09-30 2021-07-21 Tarabios Saglik Teknolojileri Anonim Sirketi A sensing device using fiber based cantilevers embedded in a cartridge
WO2018070984A1 (en) * 2016-10-10 2018-04-19 Hewlett-Packard Development Company, L.P. Fluid operation cell with on-chip electrical fluid operation components
US10514584B2 (en) * 2017-08-10 2019-12-24 Sicoya Gmbh Optical signal generator comprising a phase shifter
JP7410935B2 (ja) 2018-05-24 2024-01-10 ザ リサーチ ファウンデーション フォー ザ ステイト ユニバーシティー オブ ニューヨーク 容量性センサ
CN109650328B (zh) * 2018-12-17 2020-05-19 大连理工大学 一种动态特性测试的激波底座激励装置及其工作方法
DE102020203910B3 (de) * 2020-03-26 2021-06-17 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zum Detektieren einer Verunreinigung eines MEMS-Sensorelements

Citations (4)

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JPH04191639A (ja) * 1990-11-26 1992-07-09 Shibata Kagaku Kikai Kogyo Kk 塵埃粒子の質量濃度の計測方法
JPH06269186A (ja) * 1993-03-12 1994-09-22 Agency Of Ind Science & Technol ２自由度振動型マイクロアクチュエータ
JP2005537496A (ja) * 2002-08-29 2005-12-08 バイオスケール，インク． 共鳴センサーおよび感知システム
JP2006220546A (ja) * 2005-02-10 2006-08-24 Seiko Instruments Inc ケミカルセンサ

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EP1543328B1 (en) * 2002-09-24 2006-11-22 Intel Corporation Detecting molecular binding by monitoring feedback controlled cantilever deflections
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KR100583233B1 (ko) * 2004-09-16 2006-05-26 한국과학기술연구원 생체물질 측정 시스템 및 방법
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JPH04191639A (ja) * 1990-11-26 1992-07-09 Shibata Kagaku Kikai Kogyo Kk 塵埃粒子の質量濃度の計測方法
JPH06269186A (ja) * 1993-03-12 1994-09-22 Agency Of Ind Science & Technol ２自由度振動型マイクロアクチュエータ
JP2005537496A (ja) * 2002-08-29 2005-12-08 バイオスケール，インク． 共鳴センサーおよび感知システム
JP2006220546A (ja) * 2005-02-10 2006-08-24 Seiko Instruments Inc ケミカルセンサ

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017538921A (ja) * 2014-10-28 2017-12-28 マサチューセッツ インスティテュート オブ テクノロジー デジタル的に実装された位相ロックループアレイを用いる多数の共振の同時振動および周波数追跡
US11143548B2 (en) 2014-10-28 2021-10-12 Massachusetts Institute Of Technology Simultaneous oscillation and frequency tracking of multiple resonances via digitally implemented phase-locked loop array
JP2017194453A (ja) * 2016-04-21 2017-10-26 ザ・ボーイング・カンパニーＴｈｅ Ｂｏｅｉｎｇ Ｃｏｍｐａｎｙ コンフォーマル超音波走査用のカーボンナノチューブを用いてフレキシブル基板に結合されたフェーズドアレイのｍｅｍｓトランスデューサ
US11162886B2 (en) 2017-03-31 2021-11-02 Massachusetts Institute Of Technology Systems, articles, and methods for flowing particles
US11754486B2 (en) 2017-06-19 2023-09-12 Massachusetts Institute Of Technology Systems and methods for measuring properties of particles
US11346755B2 (en) 2019-01-10 2022-05-31 Travera, Inc. Calibration of a functional biomarker instrument
US12362038B2 (en) 2019-01-10 2025-07-15 Travera, Inc. Identifying cancer therapies

Also Published As

Publication number Publication date
RU2013125463A (ru) 2014-12-10
CN103430018B (zh) 2016-05-04
WO2012059828A3 (en) 2012-07-26
CN103430018A (zh) 2013-12-04
KR20140022768A (ko) 2014-02-25
KR101838476B1 (ko) 2018-04-26
EP2635900A2 (en) 2013-09-11
US9267923B2 (en) 2016-02-23
CA2816374A1 (en) 2012-05-10
US20140147337A1 (en) 2014-05-29
RU2565351C2 (ru) 2015-10-20
WO2012059828A2 (en) 2012-05-10
BR112013010927A2 (pt) 2016-09-13

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