RU2565351C2 - Миниатюризированная интегральная схема матрицы оптических датчиков, выполненная по принципам микроэлектромеханических систем (mems) - Google Patents
Миниатюризированная интегральная схема матрицы оптических датчиков, выполненная по принципам микроэлектромеханических систем (mems) Download PDFInfo
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- RU2565351C2 RU2565351C2 RU2013125463/28A RU2013125463A RU2565351C2 RU 2565351 C2 RU2565351 C2 RU 2565351C2 RU 2013125463/28 A RU2013125463/28 A RU 2013125463/28A RU 2013125463 A RU2013125463 A RU 2013125463A RU 2565351 C2 RU2565351 C2 RU 2565351C2
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
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- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
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- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
- G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
- G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
- G01N33/54366—Apparatus specially adapted for solid-phase testing
- G01N33/54373—Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
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- G01N2291/042—Wave modes
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- Health & Medical Sciences (AREA)
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- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
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- Gyroscopes (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US40911110P | 2010-11-01 | 2010-11-01 | |
| US61/409,111 | 2010-11-01 | ||
| US201161430871P | 2011-01-07 | 2011-01-07 | |
| US61/430,871 | 2011-01-07 | ||
| PCT/IB2011/054000 WO2012059828A2 (en) | 2010-11-01 | 2011-09-13 | Miniaturized integrated micro electo-mechanical systems (mems) optical sensor array |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RU2013125463A RU2013125463A (ru) | 2014-12-10 |
| RU2565351C2 true RU2565351C2 (ru) | 2015-10-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2013125463/28A RU2565351C2 (ru) | 2010-11-01 | 2011-09-13 | Миниатюризированная интегральная схема матрицы оптических датчиков, выполненная по принципам микроэлектромеханических систем (mems) |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US9267923B2 (https=) |
| EP (1) | EP2635900A2 (https=) |
| JP (1) | JP2013543127A (https=) |
| KR (1) | KR101838476B1 (https=) |
| CN (1) | CN103430018B (https=) |
| BR (1) | BR112013010927A2 (https=) |
| CA (1) | CA2816374A1 (https=) |
| RU (1) | RU2565351C2 (https=) |
| WO (1) | WO2012059828A2 (https=) |
Families Citing this family (23)
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|---|---|---|---|---|
| GB2491806B (en) * | 2011-05-25 | 2013-07-10 | Microvisk Ltd | Apparatus and method for measuring properties of a fluid |
| US9664500B2 (en) | 2012-03-08 | 2017-05-30 | Cornell University | Tunable optofluidic apparatus, method, and applications |
| EP2867683B1 (en) * | 2012-06-28 | 2021-09-01 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | High throughput microscopy device |
| GB201215546D0 (en) * | 2012-08-31 | 2012-10-17 | Infinitesima Ltd | Multiple probe detection and actuation |
| ITTO20120789A1 (it) * | 2012-09-14 | 2012-12-14 | Fond Istituto Italiano Di Tec Nologia Iit | Dispositivo automatico di misura, procedimento di misura mediante tale dispositivo e sistema dotato di tale dispositivo. |
| US20140260688A1 (en) * | 2013-03-14 | 2014-09-18 | The Boeing Company | Sensor assembly using micropillars and method of use |
| US9290219B2 (en) | 2013-03-14 | 2016-03-22 | The Boeing Company | Locomotion system and method of controlling a robotic device |
| US9352256B2 (en) | 2013-03-14 | 2016-05-31 | The Boeing Company | Filtration systems and methods for filtering particles of a predetermined substance |
| CN105659079A (zh) * | 2013-09-09 | 2016-06-08 | Koc 大学 | 用于粘度和质量检测的小型化集成微机电系统（mems）光学传感器阵列 |
| US9557306B2 (en) * | 2013-12-20 | 2017-01-31 | Honeywell International Inc. | Magnetically controlled gas detectors |
| EP3108283B1 (en) * | 2014-02-17 | 2022-05-25 | Universität Basel | Atomic force microscope measuring device |
| US20170117905A1 (en) | 2014-10-28 | 2017-04-27 | Massachusetts Institute Of Technology | Simultaneous oscillation and frequency tracking of multiple resonances via digitally implemented phase-locked loop array |
| WO2017058121A1 (en) * | 2015-09-30 | 2017-04-06 | Koc Universitesi | A sensing device using fiber based cantilevers embedded in a cartridge |
| US10006888B2 (en) * | 2016-04-21 | 2018-06-26 | The Boeing Company | MEMS transducers in a phased array coupled to a flexible substrate using carbon nanotubes for conformal ultrasound scanning |
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- 2011-09-13 JP JP2013537224A patent/JP2013543127A/ja active Pending
- 2011-09-13 KR KR1020137012998A patent/KR101838476B1/ko not_active Expired - Fee Related
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| JP2013543127A (ja) | 2013-11-28 |
| KR101838476B1 (ko) | 2018-04-26 |
| BR112013010927A2 (pt) | 2016-09-13 |
| EP2635900A2 (en) | 2013-09-11 |
| CN103430018A (zh) | 2013-12-04 |
| WO2012059828A2 (en) | 2012-05-10 |
| RU2013125463A (ru) | 2014-12-10 |
| CN103430018B (zh) | 2016-05-04 |
| CA2816374A1 (en) | 2012-05-10 |
| KR20140022768A (ko) | 2014-02-25 |
| US9267923B2 (en) | 2016-02-23 |
| WO2012059828A3 (en) | 2012-07-26 |
| US20140147337A1 (en) | 2014-05-29 |
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