CN103430018B - 微型化的集成微机电系统(mems)光学传感器阵列 - Google Patents

微型化的集成微机电系统(mems)光学传感器阵列 Download PDF

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Publication number
CN103430018B
CN103430018B CN201180063358.3A CN201180063358A CN103430018B CN 103430018 B CN103430018 B CN 103430018B CN 201180063358 A CN201180063358 A CN 201180063358A CN 103430018 B CN103430018 B CN 103430018B
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China
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preferred
cantilever
mems
coupled
sensing
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Expired - Fee Related
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English (en)
Chinese (zh)
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CN103430018A (zh
Inventor
H.尤里
B.E.阿拉卡
E.蒂穆多甘
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Koc Universitesi
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Koc Universitesi
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54366—Apparatus specially adapted for solid-phase testing
    • G01N33/54373—Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/024—Mixtures
    • G01N2291/02466—Biological material, e.g. blood
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever

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  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Molecular Biology (AREA)
  • Biomedical Technology (AREA)
  • Hematology (AREA)
  • Urology & Nephrology (AREA)
  • Optics & Photonics (AREA)
  • Medicinal Chemistry (AREA)
  • Microbiology (AREA)
  • Food Science & Technology (AREA)
  • Cell Biology (AREA)
  • Biotechnology (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Micromachines (AREA)
  • Gyroscopes (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
CN201180063358.3A 2010-11-01 2011-09-13 微型化的集成微机电系统(mems)光学传感器阵列 Expired - Fee Related CN103430018B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US40911110P 2010-11-01 2010-11-01
US61/409111 2010-11-01
US201161430871P 2011-01-07 2011-01-07
US61/430871 2011-01-07
PCT/IB2011/054000 WO2012059828A2 (en) 2010-11-01 2011-09-13 Miniaturized integrated micro electo-mechanical systems (mems) optical sensor array

Publications (2)

Publication Number Publication Date
CN103430018A CN103430018A (zh) 2013-12-04
CN103430018B true CN103430018B (zh) 2016-05-04

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CN201180063358.3A Expired - Fee Related CN103430018B (zh) 2010-11-01 2011-09-13 微型化的集成微机电系统(mems)光学传感器阵列

Country Status (9)

Country Link
US (1) US9267923B2 (https=)
EP (1) EP2635900A2 (https=)
JP (1) JP2013543127A (https=)
KR (1) KR101838476B1 (https=)
CN (1) CN103430018B (https=)
BR (1) BR112013010927A2 (https=)
CA (1) CA2816374A1 (https=)
RU (1) RU2565351C2 (https=)
WO (1) WO2012059828A2 (https=)

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GB201215546D0 (en) * 2012-08-31 2012-10-17 Infinitesima Ltd Multiple probe detection and actuation
ITTO20120789A1 (it) * 2012-09-14 2012-12-14 Fond Istituto Italiano Di Tec Nologia Iit Dispositivo automatico di misura, procedimento di misura mediante tale dispositivo e sistema dotato di tale dispositivo.
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US9352256B2 (en) 2013-03-14 2016-05-31 The Boeing Company Filtration systems and methods for filtering particles of a predetermined substance
CN105659079A (zh) * 2013-09-09 2016-06-08 Koc 大学 用于粘度和质量检测的小型化集成微机电系统（mems）光学传感器阵列
US9557306B2 (en) * 2013-12-20 2017-01-31 Honeywell International Inc. Magnetically controlled gas detectors
EP3108283B1 (en) * 2014-02-17 2022-05-25 Universität Basel Atomic force microscope measuring device
US20170117905A1 (en) 2014-10-28 2017-04-27 Massachusetts Institute Of Technology Simultaneous oscillation and frequency tracking of multiple resonances via digitally implemented phase-locked loop array
WO2017058121A1 (en) * 2015-09-30 2017-04-06 Koc Universitesi A sensing device using fiber based cantilevers embedded in a cartridge
US10006888B2 (en) * 2016-04-21 2018-06-26 The Boeing Company MEMS transducers in a phased array coupled to a flexible substrate using carbon nanotubes for conformal ultrasound scanning
WO2018070984A1 (en) * 2016-10-10 2018-04-19 Hewlett-Packard Development Company, L.P. Fluid operation cell with on-chip electrical fluid operation components
CA3056255A1 (en) 2017-03-31 2018-10-04 Massachusetts Institute Of Technology Systems, articles, and methods for flowing particles
WO2018236708A1 (en) 2017-06-19 2018-12-27 Massachusetts Institute Of Technology Systems and methods for measuring properties of particles
US10514584B2 (en) * 2017-08-10 2019-12-24 Sicoya Gmbh Optical signal generator comprising a phase shifter
WO2019226958A1 (en) 2018-05-24 2019-11-28 The Research Foundation For The State University Of New York Capacitive sensor
CN109650328B (zh) * 2018-12-17 2020-05-19 大连理工大学 一种动态特性测试的激波底座激励装置及其工作方法
CA3126148A1 (en) 2019-01-10 2020-07-16 Travera LLC Calibration of a functional biomarker instrument
EP3912007A4 (en) 2019-01-10 2022-11-02 Travera LLC IDENTIFICATION OF CANCER THERAPIES
DE102020203910B3 (de) * 2020-03-26 2021-06-17 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zum Detektieren einer Verunreinigung eines MEMS-Sensorelements

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US20080110247A1 (en) * 2006-06-02 2008-05-15 Board Of Trustees Of Michigan State University Sensor with microelectro-mechanical oscillators
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CN1685233A (zh) * 2002-09-24 2005-10-19 英特尔公司 通过监测反馈控制的悬臂偏转来检测分子结合
US20060257286A1 (en) * 2003-10-17 2006-11-16 Adams Jesse D Self-sensing array of microcantilevers for chemical detection
US20060191320A1 (en) * 2004-02-19 2006-08-31 Pinnaduwage Lal A Chemically-functionalized microcantilevers for detection of chemical, biological and explosive material
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Also Published As

Publication number Publication date
RU2565351C2 (ru) 2015-10-20
JP2013543127A (ja) 2013-11-28
KR101838476B1 (ko) 2018-04-26
BR112013010927A2 (pt) 2016-09-13
EP2635900A2 (en) 2013-09-11
CN103430018A (zh) 2013-12-04
WO2012059828A2 (en) 2012-05-10
RU2013125463A (ru) 2014-12-10
CA2816374A1 (en) 2012-05-10
KR20140022768A (ko) 2014-02-25
US9267923B2 (en) 2016-02-23
WO2012059828A3 (en) 2012-07-26
US20140147337A1 (en) 2014-05-29

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