BR112013010927A2 - conjunto de sensores óptico miniaturizados de sistemas micro eletromecânicos integrado (mems) - Google Patents

conjunto de sensores óptico miniaturizados de sistemas micro eletromecânicos integrado (mems)

Info

Publication number
BR112013010927A2
BR112013010927A2 BR112013010927A BR112013010927A BR112013010927A2 BR 112013010927 A2 BR112013010927 A2 BR 112013010927A2 BR 112013010927 A BR112013010927 A BR 112013010927A BR 112013010927 A BR112013010927 A BR 112013010927A BR 112013010927 A2 BR112013010927 A2 BR 112013010927A2
Authority
BR
Brazil
Prior art keywords
mems
optical sensor
detection
sensor array
electromechanical systems
Prior art date
Application number
BR112013010927A
Other languages
English (en)
Portuguese (pt)
Inventor
Burhanettin Erdem Alaca
Erman Timurdogan
Hakan Urey
Original Assignee
Univ Koc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Koc filed Critical Univ Koc
Publication of BR112013010927A2 publication Critical patent/BR112013010927A2/pt

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54366—Apparatus specially adapted for solid-phase testing
    • G01N33/54373—Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/024—Mixtures
    • G01N2291/02466—Biological material, e.g. blood
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever

Landscapes

  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Molecular Biology (AREA)
  • Biomedical Technology (AREA)
  • Hematology (AREA)
  • Urology & Nephrology (AREA)
  • Optics & Photonics (AREA)
  • Medicinal Chemistry (AREA)
  • Microbiology (AREA)
  • Food Science & Technology (AREA)
  • Cell Biology (AREA)
  • Biotechnology (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Micromachines (AREA)
  • Gyroscopes (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
BR112013010927A 2010-11-01 2011-09-13 conjunto de sensores óptico miniaturizados de sistemas micro eletromecânicos integrado (mems) BR112013010927A2 (pt)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US40911110P 2010-11-01 2010-11-01
US201161430871P 2011-01-07 2011-01-07
PCT/IB2011/054000 WO2012059828A2 (en) 2010-11-01 2011-09-13 Miniaturized integrated micro electo-mechanical systems (mems) optical sensor array

Publications (1)

Publication Number Publication Date
BR112013010927A2 true BR112013010927A2 (pt) 2016-09-13

Family

ID=44774090

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112013010927A BR112013010927A2 (pt) 2010-11-01 2011-09-13 conjunto de sensores óptico miniaturizados de sistemas micro eletromecânicos integrado (mems)

Country Status (9)

Country Link
US (1) US9267923B2 (https=)
EP (1) EP2635900A2 (https=)
JP (1) JP2013543127A (https=)
KR (1) KR101838476B1 (https=)
CN (1) CN103430018B (https=)
BR (1) BR112013010927A2 (https=)
CA (1) CA2816374A1 (https=)
RU (1) RU2565351C2 (https=)
WO (1) WO2012059828A2 (https=)

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EP2867683B1 (en) * 2012-06-28 2021-09-01 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO High throughput microscopy device
GB201215546D0 (en) * 2012-08-31 2012-10-17 Infinitesima Ltd Multiple probe detection and actuation
ITTO20120789A1 (it) * 2012-09-14 2012-12-14 Fond Istituto Italiano Di Tec Nologia Iit Dispositivo automatico di misura, procedimento di misura mediante tale dispositivo e sistema dotato di tale dispositivo.
US20140260688A1 (en) * 2013-03-14 2014-09-18 The Boeing Company Sensor assembly using micropillars and method of use
US9290219B2 (en) 2013-03-14 2016-03-22 The Boeing Company Locomotion system and method of controlling a robotic device
US9352256B2 (en) 2013-03-14 2016-05-31 The Boeing Company Filtration systems and methods for filtering particles of a predetermined substance
CN105659079A (zh) * 2013-09-09 2016-06-08 Koc 大学 用于粘度和质量检测的小型化集成微机电系统（mems）光学传感器阵列
US9557306B2 (en) * 2013-12-20 2017-01-31 Honeywell International Inc. Magnetically controlled gas detectors
EP3108283B1 (en) * 2014-02-17 2022-05-25 Universität Basel Atomic force microscope measuring device
US20170117905A1 (en) 2014-10-28 2017-04-27 Massachusetts Institute Of Technology Simultaneous oscillation and frequency tracking of multiple resonances via digitally implemented phase-locked loop array
WO2017058121A1 (en) * 2015-09-30 2017-04-06 Koc Universitesi A sensing device using fiber based cantilevers embedded in a cartridge
US10006888B2 (en) * 2016-04-21 2018-06-26 The Boeing Company MEMS transducers in a phased array coupled to a flexible substrate using carbon nanotubes for conformal ultrasound scanning
WO2018070984A1 (en) * 2016-10-10 2018-04-19 Hewlett-Packard Development Company, L.P. Fluid operation cell with on-chip electrical fluid operation components
CA3056255A1 (en) 2017-03-31 2018-10-04 Massachusetts Institute Of Technology Systems, articles, and methods for flowing particles
WO2018236708A1 (en) 2017-06-19 2018-12-27 Massachusetts Institute Of Technology Systems and methods for measuring properties of particles
US10514584B2 (en) * 2017-08-10 2019-12-24 Sicoya Gmbh Optical signal generator comprising a phase shifter
WO2019226958A1 (en) 2018-05-24 2019-11-28 The Research Foundation For The State University Of New York Capacitive sensor
CN109650328B (zh) * 2018-12-17 2020-05-19 大连理工大学 一种动态特性测试的激波底座激励装置及其工作方法
CA3126148A1 (en) 2019-01-10 2020-07-16 Travera LLC Calibration of a functional biomarker instrument
EP3912007A4 (en) 2019-01-10 2022-11-02 Travera LLC IDENTIFICATION OF CANCER THERAPIES
DE102020203910B3 (de) * 2020-03-26 2021-06-17 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zum Detektieren einer Verunreinigung eines MEMS-Sensorelements

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Also Published As

Publication number Publication date
RU2565351C2 (ru) 2015-10-20
JP2013543127A (ja) 2013-11-28
KR101838476B1 (ko) 2018-04-26
EP2635900A2 (en) 2013-09-11
CN103430018A (zh) 2013-12-04
WO2012059828A2 (en) 2012-05-10
RU2013125463A (ru) 2014-12-10
CN103430018B (zh) 2016-05-04
CA2816374A1 (en) 2012-05-10
KR20140022768A (ko) 2014-02-25
US9267923B2 (en) 2016-02-23
WO2012059828A3 (en) 2012-07-26
US20140147337A1 (en) 2014-05-29

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Legal Events

Date Code Title Description
B08F Application fees: application dismissed [chapter 8.6 patent gazette]
B08K Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette]

Free format text: EM VIRTUDE DO ARQUIVAMENTO PUBLICADO NA RPI 2479 DE 10-07-2018 E CONSIDERANDO AUSENCIA DE MANIFESTACAO DENTRO DOS PRAZOS LEGAIS, INFORMO QUE CABE SER MANTIDO O ARQUIVAMENTO DO PEDIDO DE PATENTE, CONFORME O DISPOSTO NO ARTIGO 12, DA RESOLUCAO 113/2013.