JP2013539946A5 - - Google Patents

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JP2013539946A5
JP2013539946A5 JP2013533251A JP2013533251A JP2013539946A5 JP 2013539946 A5 JP2013539946 A5 JP 2013539946A5 JP 2013533251 A JP2013533251 A JP 2013533251A JP 2013533251 A JP2013533251 A JP 2013533251A JP 2013539946 A5 JP2013539946 A5 JP 2013539946A5
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JP
Japan
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JP2013533251A
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Japanese (ja)
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JP5926735B2 (ja
JP2013539946A (ja
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Priority claimed from FI20106063A external-priority patent/FI20106063L/fi
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JP2013533251A 2010-10-14 2011-10-14 広帯域音響結合薄膜bawフィルタ Active JP5926735B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US39295510P 2010-10-14 2010-10-14
FI20106063A FI20106063L (fi) 2010-10-14 2010-10-14 Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin
US61/392,955 2010-10-14
FI20106063 2010-10-14
PCT/FI2011/050891 WO2012049372A1 (en) 2010-10-14 2011-10-14 Wide-band acoustically coupled thin-film baw filter

Publications (3)

Publication Number Publication Date
JP2013539946A JP2013539946A (ja) 2013-10-28
JP2013539946A5 true JP2013539946A5 (enExample) 2014-11-06
JP5926735B2 JP5926735B2 (ja) 2016-05-25

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JP2013533251A Active JP5926735B2 (ja) 2010-10-14 2011-10-14 広帯域音響結合薄膜bawフィルタ

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US (4) US9893712B2 (enExample)
EP (1) EP2628246B1 (enExample)
JP (1) JP5926735B2 (enExample)
CN (2) CN108988819A (enExample)
FI (1) FI20106063L (enExample)
WO (1) WO2012049372A1 (enExample)

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US12301212B2 (en) 2018-06-15 2025-05-13 Murata Manufacturing Co., Ltd. XBAR resonators with non-rectangular diaphragms
US11146238B2 (en) 2018-06-15 2021-10-12 Resonant Inc. Film bulk acoustic resonator fabrication method
US12184261B2 (en) 2018-06-15 2024-12-31 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with a cavity having round end zones
US11909381B2 (en) 2018-06-15 2024-02-20 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with two-layer electrodes having a narrower top layer
US11264966B2 (en) 2018-06-15 2022-03-01 Resonant Inc. Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack
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US11996822B2 (en) 2018-06-15 2024-05-28 Murata Manufacturing Co., Ltd. Wide bandwidth time division duplex transceiver
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US12212306B2 (en) 2018-06-15 2025-01-28 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method
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US11870423B2 (en) 2018-06-15 2024-01-09 Murata Manufacturing Co., Ltd. Wide bandwidth temperature-compensated transversely-excited film bulk acoustic resonator
US11967945B2 (en) 2018-06-15 2024-04-23 Murata Manufacturing Co., Ltd. Transversly-excited film bulk acoustic resonators and filters
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JP7501529B2 (ja) * 2018-10-31 2024-06-18 株式会社村田製作所 フィルタデバイス及びフィルタデバイスを製造する方法
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