JP2013535664A - 薄膜の変形の測定のためのトンネル接合を有する赤外線センサ - Google Patents
薄膜の変形の測定のためのトンネル接合を有する赤外線センサ Download PDFInfo
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- JP2013535664A JP2013535664A JP2013518952A JP2013518952A JP2013535664A JP 2013535664 A JP2013535664 A JP 2013535664A JP 2013518952 A JP2013518952 A JP 2013518952A JP 2013518952 A JP2013518952 A JP 2013518952A JP 2013535664 A JP2013535664 A JP 2013535664A
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- 239000010409 thin film Substances 0.000 title claims description 34
- 238000005259 measurement Methods 0.000 title claims description 17
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- 229910052741 iridium Inorganic materials 0.000 description 9
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
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- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
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- 239000012528 membrane Substances 0.000 description 4
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/38—Radiation pyrometry, e.g. infrared or optical thermometry using extension or expansion of solids or fluids
- G01J5/42—Radiation pyrometry, e.g. infrared or optical thermometry using extension or expansion of solids or fluids using Golay cells
Abstract
力を受ける面の変形の測定のための強固でありつつ高い感度を有するセンサ装置を提供すること。
【解決手段】
力によって生じる面の変形を測定するためのセンサ装置において、前記面M上に、同一平面における第1のストリップS1及び第2のストリップS2を、トンネル接合を形成するために配置し、これら第1及び第2のストリップのうち少なくとも前記第1のストリップS1を前記面Mにおいて可動に配置し、これにより、力の作用により生じる前記面の変形時に、前記両ストリップS1,S2の間隔が互いに拡大するよう構成した。
Description
駆動様式に応じて、トンネル接合の異なる形態が生じる。基本的に提案される全ての実施例は、当業者にとって従来技術から公知である多層膜技術において実施されることができる。
2 透明ウインドウ、絶縁層
3 金属層
100 シリコンウエハ
102 赤外線透過ウインドウ
A たわみ
d1 間隔
D 圧力接続部
F 流体
M 薄膜
L1 自由長さ
L2 自由長さ
O 犠牲層
P 圧電層
S1 ストリップ(接点)
S2 ストリップ(接点)
T2 トンネル接合
T3 トンネル接合
W 変曲点
Claims (7)
- 力によって生じる面の変形を測定するためのセンサ装置において、
前記面(M)上に、同一平面における第1のストリップ(S1)及び第2のストリップ(S2)を、トンネル接合を形成するために配置し、これら第1及び第2のストリップのうち少なくとも前記第1のストリップ(S1)を前記面(M)において可動に配置し、これにより、力の作用により生じる前記面の変形時に、前記両ストリップ(S1,S2)の間隔が互いに拡大するよう構成したことを特徴とするセンサ装置。 - 前記第1のストリップ(S1)を前記第2のストリップ(S2)よりも長くしたことを特徴とする請求項1記載のセンサ装置。
- 前記ストリップ(S1)が、前記面に固定されていない可動の自由長さ(L2)を有する部分と、前記面(M)に固定された任意の長さ(L1)を有する部分とを備えていることを特徴とする請求項1又は2記載のセンサ装置。
- 前記自由長さ(L2)を前記固定された長さ(L1)よりも長くしたことを特徴とする請求項3記載のセンサ装置。
- 前記面(M)を流体(F)で充填された測定チャンバ(1)の構成部材としたことを特徴とする請求項1〜4のいずれか1項に記載のセンサ装置。
- 前記測定チャンバの壁部の一部を前記面(M)を形成する柔軟な薄膜として形成したことを特徴とする請求項5記載のセンサ装置。
- 電磁ビームを透過させるためのウインドウ(2)を前記測定チャンバの壁部に設けたことを特徴とする請求項6記載のセンサ装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102010027346A DE102010027346A1 (de) | 2010-07-16 | 2010-07-16 | Sensoranordnung |
DE102010027346.5 | 2010-07-16 | ||
PCT/DE2011/001419 WO2012010147A2 (de) | 2010-07-16 | 2011-07-09 | Sensoranordnung |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013535664A true JP2013535664A (ja) | 2013-09-12 |
JP5786024B2 JP5786024B2 (ja) | 2015-09-30 |
Family
ID=44970895
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013518952A Expired - Fee Related JP5786024B2 (ja) | 2010-07-16 | 2011-07-09 | 薄膜の変形の測定のためのトンネル接合を有する赤外線センサ |
Country Status (5)
Country | Link |
---|---|
US (1) | US8919212B2 (ja) |
EP (1) | EP2593760B1 (ja) |
JP (1) | JP5786024B2 (ja) |
DE (1) | DE102010027346A1 (ja) |
WO (1) | WO2012010147A2 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20180053374A9 (en) | 2010-11-14 | 2018-02-22 | Binh T. Nguyen | Multi-Functional Peripheral Device |
US10050935B2 (en) | 2014-07-09 | 2018-08-14 | Shape Security, Inc. | Using individualized APIs to block automated attacks on native apps and/or purposely exposed APIs with forced user interaction |
US9729506B2 (en) | 2014-08-22 | 2017-08-08 | Shape Security, Inc. | Application programming interface wall |
CN111207725B (zh) * | 2020-01-08 | 2021-12-28 | 杭州交通工程监理咨询有限公司 | 一种隧道沉降监测装置以及安装该装置的设备、方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06140661A (ja) * | 1992-10-27 | 1994-05-20 | Yokogawa Electric Corp | 物理量検出素子及びその製造方法 |
JPH0875758A (ja) * | 1994-09-02 | 1996-03-22 | Canon Inc | 円弧状反りレバー型アクチュエータ及び情報入出力用プローブ並びに該プローブを用いた情報処理装置 |
JP2010054416A (ja) * | 2008-08-29 | 2010-03-11 | Sumitomo Precision Prod Co Ltd | 赤外線検出センサ |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS564916A (en) * | 1979-06-25 | 1981-01-19 | Murata Mfg Co Ltd | Elastic surface wave filter |
US5298748A (en) | 1992-06-15 | 1994-03-29 | California Institute Of Technology | Uncooled tunneling infrared sensor |
DE19520457C2 (de) * | 1995-06-03 | 1997-07-31 | Forschungszentrum Juelich Gmbh | Meßfühler einer Sonde zur Messung der Topographie einer Probenoberfläche |
US6318184B1 (en) * | 1997-06-02 | 2001-11-20 | The Penn State Research Foundation | Beam strain gauge |
US5959200A (en) * | 1997-08-27 | 1999-09-28 | The Board Of Trustees Of The Leland Stanford Junior University | Micromachined cantilever structure providing for independent multidimensional force sensing using high aspect ratio beams |
US6202495B1 (en) * | 1997-12-10 | 2001-03-20 | Northeastern University | Flow, tactile and orientation sensors using deformable microelectrical mechanical sensors |
KR100431004B1 (ko) * | 2002-02-08 | 2004-05-12 | 삼성전자주식회사 | 회전형 비연성 멤스 자이로스코프 |
US6933808B2 (en) * | 2002-07-17 | 2005-08-23 | Qing Ma | Microelectromechanical apparatus and methods for surface acoustic wave switching |
TWI226934B (en) * | 2003-11-27 | 2005-01-21 | Hong Hocheng | System of nanoimprint with mold deformation detector and method of monitoring the same |
EP2060891A1 (en) * | 2007-11-12 | 2009-05-20 | Technische Universiteit Delft | Infrared sensor comprising a Golay cell |
DE102008018504A1 (de) | 2008-04-10 | 2009-10-15 | Forschungszentrum Jülich GmbH | Sensoranordnung |
KR101295887B1 (ko) * | 2010-04-13 | 2013-08-12 | 한국전자통신연구원 | 플렉서블 소자의 벤딩 테스트 설비 |
-
2010
- 2010-07-16 DE DE102010027346A patent/DE102010027346A1/de not_active Withdrawn
-
2011
- 2011-07-09 EP EP11782364.1A patent/EP2593760B1/de not_active Not-in-force
- 2011-07-09 US US13/807,121 patent/US8919212B2/en not_active Expired - Fee Related
- 2011-07-09 JP JP2013518952A patent/JP5786024B2/ja not_active Expired - Fee Related
- 2011-07-09 WO PCT/DE2011/001419 patent/WO2012010147A2/de active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06140661A (ja) * | 1992-10-27 | 1994-05-20 | Yokogawa Electric Corp | 物理量検出素子及びその製造方法 |
JPH0875758A (ja) * | 1994-09-02 | 1996-03-22 | Canon Inc | 円弧状反りレバー型アクチュエータ及び情報入出力用プローブ並びに該プローブを用いた情報処理装置 |
JP2010054416A (ja) * | 2008-08-29 | 2010-03-11 | Sumitomo Precision Prod Co Ltd | 赤外線検出センサ |
Also Published As
Publication number | Publication date |
---|---|
WO2012010147A9 (de) | 2012-04-19 |
DE102010027346A1 (de) | 2012-01-19 |
EP2593760A2 (de) | 2013-05-22 |
WO2012010147A2 (de) | 2012-01-26 |
US8919212B2 (en) | 2014-12-30 |
WO2012010147A3 (de) | 2012-03-22 |
EP2593760B1 (de) | 2014-03-26 |
JP5786024B2 (ja) | 2015-09-30 |
US20130205919A1 (en) | 2013-08-15 |
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