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1932-03-11 |
1933-08-29 |
Titan Abrasives Company |
Abrasive disk
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1939-03-15 |
1941-05-20 |
Albertson & Co Inc |
Abrasive disk and method of making the same
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1951-04-28 |
1954-08-03 |
Minnesota Mining & Mfg |
Multiple center hole abrasive disk
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1969-03-12 |
1971-03-09 |
Spitfire Tool & Machine Co Inc |
Lapping and polishing machine
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1969-05-08 |
1973-10-09 |
Norton Co |
Coated abrasive belt joint
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1970-01-20 |
1971-09-20 |
Fab Ab Eka |
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1979-04-18 |
1980-08-05 |
Sheldahl, Inc. |
Unidirectional tape
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1979-06-29 |
1982-02-09 |
Minnesota Mining And Manufacturing Company |
Non-fused aluminum oxide-based abrasive mineral
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1984-03-23 |
1986-11-18 |
Norton Company |
Abrasive material and method for preparing the same
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1985-04-30 |
1989-05-16 |
Alvin P. Gerk |
Process for durable sol-gel produced alumina-based ceramics, abrasive grain and abrasive products
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1985-12-30 |
1988-09-13 |
Minnesota Mining And Manufacturing Company |
Abrasive grits formed of ceramic containing oxides of aluminum and yttrium, method of making and using the same and products made therewith
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1987-05-27 |
1989-11-21 |
Minnesota Mining And Manufacturing Co. |
Abrasive grits formed of ceramic containing oxides of aluminum and rare earth metal, method of making and products made therewith
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1991-02-06 |
1998-01-13 |
Minnesota Mining & Mfg |
Structured abrasive article
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1991-05-09 |
1993-10-26 |
Minnesota Mining And Manufacturing Company |
Method of splicing endless abrasive belts and cones
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1994-02-22 |
1995-09-04 |
Minnesota Mining And Manufacturing Company |
Method for making an endless coated abrasive article and the product thereof
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1994-07-26 |
1996-07-09 |
Kabushiki Kaisha Toshiba |
Apparatus for processing semiconductor wafers
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1994-08-22 |
1997-01-21 |
Minnesota Mining And Manufacturing Company |
Splice means, a method of splicing an abrasive article with same and the spliced abrasive article formed thereby
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1995-06-07 |
2002-09-24 |
Ultimate Abrasive Systems, L.L.C. |
Method for making a sintered article and products produced thereby
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1995-12-08 |
2006-03-16 |
Norton Company |
Placas de soporte para discos abrasivos.
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1996-04-16 |
1997-10-28 |
Sony Corp |
研磨方法と研磨装置
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1998-10-07 |
2000-11-21 |
Keltech Engineering |
Lapping apparatus and method for high speed lapping with a rotatable abrasive platen
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1997-04-04 |
2000-05-16 |
Micron Technology, Inc. |
Variable abrasive polishing pad for mechanical and chemical-mechanical planarization
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1997-12-12 |
1999-07-06 |
Micron Technology, Inc. |
Method and apparatus for processing a planar structure
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1998-05-28 |
1999-12-07 |
Speedfam-Ipec Co Ltd |
ポリッシング加工機
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1999-05-21 |
2001-07-17 |
Lam Research Corporation |
Chemical mechanical planarization or polishing pad with sections having varied groove patterns
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1999-06-24 |
2002-07-16 |
Micron Technology, Inc. |
Fixed abrasive chemical-mechanical planarization of titanium nitride
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1999-12-30 |
2003-05-27 |
Lam Research |
Polishing pad and method of manufacture
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2000-05-03 |
2002-05-16 |
Eppert Stanley E. |
Semiconductor polishing pad
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2000-06-19 |
2006-03-09 |
Struers A/S |
Eine schleif- und/oder polierscheibe mit mehreren zonen
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2000-08-31 |
2014-04-16 |
株式会社荏原制作所 |
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2000-11-29 |
2002-06-13 |
Muilenburg Michael J. |
Abrasive article having a window system for polishing wafers, and methods
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2001-02-26 |
2002-09-06 |
Mitsubishi Materials Silicon Corp |
半導体ウェーハの研磨装置
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2001-12-14 |
2004-12-28 |
Oriol, Inc. |
Rigid plate assembly with polishing pad and method of using
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2002-09-13 |
2003-08-05 |
Infineon Technologies Ag |
Finishing pad design for multidirectional use
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2003-01-10 |
2004-07-29 |
3M Innovative Properties Company |
Pad constructions for chemical mechanical planarization applications
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2003-04-22 |
2010-04-28 |
ニッタ・ハース株式会社 |
研磨装置
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2004-06-29 |
2006-05-01 |
Iv Technologies Co Ltd |
An inlaid polishing pad and a method of producing the same
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2004-08-31 |
2006-04-18 |
Tech Semiconductor Pte. Ltd. |
Retaining ring structure for edge control during chemical-mechanical polishing
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2005-05-09 |
2007-08-01 |
Nat Univ Chung Cheng |
Method for detecting the using condition and lifetime of the polish pad by sensing the temperature of the grinding interface during the chemical-mechanical polishing process
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2005-07-28 |
2009-02-24 |
3M Innovative Properties Company |
Abrasive agglomerate polishing method
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2005-12-07 |
2007-06-07 |
Yoon Il-Young |
Fixed abrasive polishing pad, method of preparing the same, and chemical mechanical polishing apparatus including the same
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2006-02-15 |
2012-06-13 |
应用材料公司 |
抛光仓
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