TWD180337S - 修整器碟片 - Google Patents

修整器碟片

Info

Publication number
TWD180337S
TWD180337S TW103306628F TW103306628F TWD180337S TW D180337 S TWD180337 S TW D180337S TW 103306628 F TW103306628 F TW 103306628F TW 103306628 F TW103306628 F TW 103306628F TW D180337 S TWD180337 S TW D180337S
Authority
TW
Taiwan
Prior art keywords
article
view
design
holder
dresser disc
Prior art date
Application number
TW103306628F
Other languages
English (en)
Inventor
Hiroyuki Shinozaki
Original Assignee
荏原製作所股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 荏原製作所股份有限公司 filed Critical 荏原製作所股份有限公司
Publication of TWD180337S publication Critical patent/TWD180337S/zh

Links

Abstract

【物品用途】;本設計的物品是修整器碟片，為半導體製造用CMP裝置的修整器碟片；利用定位銷和磁鐵或藉由真空的吸附力固定在保持器使用。;【設計說明】;將凸狀的治具抵住本物品的中央的孔並將往本物品的外周部推壓的話，就可以很容易從上述吸附力脫離。於「表示安裝在保持器狀態之參考圖」中，茶色填色的部分，是表示與研磨墊相接觸的面。;後視圖、及左側視圖和右側視圖均與前視圖相同，均予省略。;本設計不主張色彩。
TW103306628F 2014-05-15 2014-11-13 修整器碟片 TWD180337S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2014-10410F JP1524299S (zh) 2014-05-15 2014-05-15

Publications (1)

Publication Number Publication Date
TWD180337S true TWD180337S (zh) 2016-12-21

Family

ID=53511898

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103306628F TWD180337S (zh) 2014-05-15 2014-11-13 修整器碟片

Country Status (3)

Country Link
US (1) USD753736S1 (zh)
JP (1) JP1524299S (zh)
TW (1) TWD180337S (zh)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD886253S1 (en) * 2018-03-15 2020-06-02 Garlock Pipeline Technologies, Llc Gasket
USD795315S1 (en) 2014-12-12 2017-08-22 Ebara Corporation Dresser disk
USD802723S1 (en) 2015-11-27 2017-11-14 Ebara Corporation Sealing ring
USD793459S1 (en) * 2015-11-30 2017-08-01 Nawoo Precision & Industry Co., Ltd. Chip cover for tip dresser
USD919689S1 (en) * 2016-05-26 2021-05-18 Largan Precision Co., Ltd. Lens for infrared imaging
JP6842859B2 (ja) 2016-08-12 2021-03-17 株式会社荏原製作所 ドレッシング装置、研磨装置、ホルダー、ハウジング及びドレッシング方法
JP1598997S (zh) * 2017-08-31 2018-03-05
USD941444S1 (en) * 2019-02-26 2022-01-18 Cleve R. Smith Flange riser
USD954567S1 (en) 2019-06-25 2022-06-14 Ebara Corporation Measurement jig
TWD205303S (zh) 2019-10-18 2020-06-21 南韓商世韓Ｔｅｃ股份有限公司 砂輪襯套
USD1022146S1 (en) * 2020-12-02 2024-04-09 Brett Earnest Toilet detection plate

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Publication number Priority date Publication date Assignee Title
US2225193A (en) * 1937-09-15 1940-12-17 Carborundum Co Abrasive wheel
US2442129A (en) * 1945-08-06 1948-05-25 Norton Co Diamond grinding wheel construction
US2799977A (en) * 1954-08-02 1957-07-23 Landis Tool Co Machine for grinding ring-like workpieces to accurate size
US3121982A (en) * 1960-08-25 1964-02-25 Cons Diamond Dev Company Ltd Grinding wheel with adjustable abrasive segments
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USD243664S (en) * 1975-11-10 1977-03-15 Hardinge Brothers, Inc. Index ring for a machine tool
KR0158750B1 (ko) * 1995-06-09 1999-01-15 김수광 연마용 시트
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US6386963B1 (en) * 1999-10-29 2002-05-14 Applied Materials, Inc. Conditioning disk for conditioning a polishing pad
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US7037177B2 (en) * 2001-08-30 2006-05-02 Micron Technology, Inc. Method and apparatus for conditioning a chemical-mechanical polishing pad
US7131900B2 (en) * 2003-07-28 2006-11-07 Samuel Chou Grinding wheel in combination with a grinding ring
US7824498B2 (en) * 2004-02-24 2010-11-02 Applied Materials, Inc. Coating for reducing contamination of substrates during processing
NZ537537A (en) * 2004-12-24 2008-03-28 Dale Michael Mcintyre Sanitary washer having peripheral annular rebate on upper and lower faces filled with flexible medium
US7815495B2 (en) * 2007-04-11 2010-10-19 Applied Materials, Inc. Pad conditioner
US8550879B2 (en) * 2008-10-23 2013-10-08 Applied Materials, Inc. Polishing pad conditioner
USD654384S1 (en) * 2010-08-06 2012-02-21 Mcdonald Curt A Surveying stake cap
USD737873S1 (en) * 2012-09-26 2015-09-01 Ebara Corporation Dresser disk
USD743456S1 (en) * 2012-09-26 2015-11-17 Ebara Corporation Dresser disk
USD743455S1 (en) * 2013-03-26 2015-11-17 Ebara Corporation Dresser disk

Also Published As

Publication number Publication date
USD753736S1 (en) 2016-04-12
JP1524299S (zh) 2015-05-25

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