TWD177631S - 修整器碟片 - Google Patents
修整器碟片Info
- Publication number
- TWD177631S TWD177631S TW104303084F TW104303084F TWD177631S TW D177631 S TWD177631 S TW D177631S TW 104303084 F TW104303084 F TW 104303084F TW 104303084 F TW104303084 F TW 104303084F TW D177631 S TWD177631 S TW D177631S
- Authority
- TW
- Taiwan
- Prior art keywords
- view
- dresser disc
- dresser
- item
- disc
- Prior art date
Links
- 239000006061 abrasive grain Substances 0.000 abstract 1
- 229910003460 diamond Inorganic materials 0.000 abstract 1
- 239000010432 diamond Substances 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 238000009966 trimming Methods 0.000 abstract 1
Abstract
【物品用途】;本設計的物品是修整器碟片,為半導體製造用CMP裝置的修整器碟片。;【設計說明】;本物品是用來與墊片接觸而進行修整的修整器碟片,是將定位銷插入於底面側的孔部,且以磁鐵等的吸附力固定於保持支架來使用。俯視圖的平坦面部分的全部或局部,作為固定有鑽石磨粒的修整面。;後視圖、左側視圖與右視圖與前視圖相同,故均省略之。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPD2014-27814F JP1528168S (zh) | 2014-12-12 | 2014-12-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
TWD177631S true TWD177631S (zh) | 2016-08-11 |
Family
ID=53779583
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW104303084F TWD177631S (zh) | 2014-12-12 | 2015-06-09 | 修整器碟片 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP1528168S (zh) |
TW (1) | TWD177631S (zh) |
-
2014
- 2014-12-12 JP JPD2014-27814F patent/JP1528168S/ja active Active
-
2015
- 2015-06-09 TW TW104303084F patent/TWD177631S/zh unknown
Also Published As
Publication number | Publication date |
---|---|
JP1528168S (zh) | 2015-07-06 |
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