TWD177631S - 修整器碟片 - Google Patents

修整器碟片

Info

Publication number
TWD177631S
TWD177631S TW104303084F TW104303084F TWD177631S TW D177631 S TWD177631 S TW D177631S TW 104303084 F TW104303084 F TW 104303084F TW 104303084 F TW104303084 F TW 104303084F TW D177631 S TWD177631 S TW D177631S
Authority
TW
Taiwan
Prior art keywords
view
dresser disc
dresser
item
disc
Prior art date
Application number
TW104303084F
Other languages
English (en)
Inventor
Mitsuru Miyazaki
Kuniaki Yamaguchi
Naoki Toyomura
Takuya Inoue
Original Assignee
荏原製作所股份有限公司
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 荏原製作所股份有限公司, Ebara Corp filed Critical 荏原製作所股份有限公司
Publication of TWD177631S publication Critical patent/TWD177631S/zh

Links

Abstract

【物品用途】;本設計的物品是修整器碟片,為半導體製造用CMP裝置的修整器碟片。;【設計說明】;本物品是用來與墊片接觸而進行修整的修整器碟片,是將定位銷插入於底面側的孔部,且以磁鐵等的吸附力固定於保持支架來使用。俯視圖的平坦面部分的全部或局部,作為固定有鑽石磨粒的修整面。;後視圖、左側視圖與右視圖與前視圖相同,故均省略之。
TW104303084F 2014-12-12 2015-06-09 修整器碟片 TWD177631S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2014-27814F JP1528168S (zh) 2014-12-12 2014-12-12

Publications (1)

Publication Number Publication Date
TWD177631S true TWD177631S (zh) 2016-08-11

Family

ID=53779583

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104303084F TWD177631S (zh) 2014-12-12 2015-06-09 修整器碟片

Country Status (2)

Country Link
JP (1) JP1528168S (zh)
TW (1) TWD177631S (zh)

Also Published As

Publication number Publication date
JP1528168S (zh) 2015-07-06

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