JP2013528948A - 不一致転位が活性領域から駆逐されているGaNベースレーザダイオード - Google Patents
不一致転位が活性領域から駆逐されているGaNベースレーザダイオード Download PDFInfo
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- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
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- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34333—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser
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- H01S5/3202—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures grown on specifically orientated substrates, or using orientation dependent growth
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- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
- H01S5/3201—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures incorporating bulkstrain effects, e.g. strain compensation, strain related to polarisation
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- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/3403—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers having a strained layer structure in which the strain performs a special function, e.g. general strain effects, strain versus polarisation
- H01S5/3406—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers having a strained layer structure in which the strain performs a special function, e.g. general strain effects, strain versus polarisation including strain compensation
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Abstract
Description
15 バッファ層
20 活性領域
30 N側導波層
40 P側導波層
50 N型クラッド層
60 P型クラッド層
70 N側界面層
75,85 不一致転位
80 P側界面層
90 電流阻止層
100,100' GaN端面発光レーザ
Claims (8)
- 半極性GaN基板、活性領域、N側導波層、P側導波層、N型クラッド層及びP型クラッド層を有するGaNベース端面発光レーザにおいて、
前記GaN基板が1×106/cm2以下の貫通転位密度を特徴とする、
前記活性層が前記N側導波層と前記P側導波層の間に配置され、前記N側導波層及び前記P側導波層に実質的に平行に拡がる、
前記N型クラッド層が前記N側導波層と前記GaN基板の間に配置される、
前記P型クラッド層が前記P側導波層に重ねて形成される、
前記N側導波層の歪-厚さ積が前記N側導波層の歪緩和臨界値をこえる、
緩和されたN側導波層上の成長について計算された前記活性領域の累積歪-厚さ積が前記活性領域の歪緩和臨界値より小さい、
前記N型クラッド層と前記N側導波層の間のN側界面が一群のN側不一致転位を含む、
前記P型クラッド層と前記P側導波層の間のP側界面が一群のP側不一致転位を含む、及び
前記GaN基板の前記貫通転位密度が前記N型クラッド層と前記N側導波層の間の前記界面における前記不一致転位の形成を促進するに十分である、
ことを特徴とするGaN端面発光レーザ。 - 前記GaN基板が、
(a)すべり面を定め、歪緩和は前記GaN基板の前記すべり面に沿う単方向性である、及び
(b)(i)(2021)結晶成長面または(ii)半極性結晶面の内の1つを定める、
ことを特徴とする請求項1に記載のGaN端面発光レーザ。 - (a)前記活性領域が、圧縮歪がかかる量子井戸層及び引張バリア層を含む単周期または複周期の量子井戸を有し、前記圧縮歪がかかる量子井戸層及び前記引張バリア層のそれぞれの歪-厚さ積が前記それぞれの層の歪緩和臨界値より小さい、または
(b)前記活性領域が、圧縮歪-厚さ積を特徴とする圧縮歪がかかる量子井戸層及び引張歪-厚さ積を特徴とする引張バリア層を含む単周期または複周期の量子井戸を有し、前記量子井戸層の前記圧縮歪-厚さ積が前記バリア層の前記引張歪-厚さ積とほぼ等価である、
の一方であることを特徴とする請求項1に記載のGaN端面発光レーザ。 - 前記活性領域がGaInN量子井戸層及びAlGaInNバリア層を含む単周期または複周期の量子井戸を有する、
前記N側導波層がGaInN導波層を含む、
前記GaInN量子井戸層のIn含有量が前記N側GaInN導波層のIn含有量より多い、及び
前記AlGaInNバリア層のIn含有量が前記N側GaInN導波層の前記In含有量より少ない、
ことを特徴とする請求項1に記載のGaN端面発光レーザ。 - 前記P型クラッド層及び前記N型クラッド層がAlを含む、
前記P型クラッド層の歪-厚さ積が前記P型クラッド層の歪緩和臨界値をこえる、
前記N型クラッド層の歪-厚さ積が前記N型クラッド層の歪緩和臨界値をこえる、及び
前記N型クラッド層の前記歪-厚さ積が前記N型クラッド層の歪緩和臨界値を少なくともほぼ10%上回る、
ことを特徴とする請求項1に記載のGaN端面発光レーザ。 - 前記N側界面が圧縮下にあるN型GaN遷移層を含む、
前記N側界面層の歪-厚さ積が前記N側界面層の歪緩和臨界値より小さい、及び
前記N側不一致転位が前記N型GaN遷移層の前記N型クラッド層に近接する側に配される、
ことを特徴とする請求項1に記載のGaN端面発光レーザ。 - 前記P側界面がP型GaN遷移層を含み、前記P型GaN遷移層が、前記P型GaN遷移層の前記P型クラッド層との界面を形成する側に配される前記P側不一致転位を生じるに十分に薄いことを特徴とする請求項1に記載のGaN端面発光レーザ。
- 前記活性領域が1つないしさらに多くの電流阻止層を有する、及び
緩和されたN側導波層上の成長について計算された前記阻止層の歪−厚さ積が前記阻止層の歪緩和臨界値より小さい、
ことを特徴とする請求項1に記載のGaN端面発光レーザ。
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US12/789,936 | 2010-05-28 | ||
US12/789,936 US8189639B2 (en) | 2010-05-28 | 2010-05-28 | GaN-based laser diodes with misfit dislocations displaced from the active region |
PCT/US2011/038014 WO2011150134A1 (en) | 2010-05-28 | 2011-05-26 | GaN-BASED LASER DIODES WITH MISFIT DISLOCATIONS DISPLACED FROM THE ACTIVE REGION |
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US (1) | US8189639B2 (ja) |
EP (1) | EP2577823A1 (ja) |
JP (1) | JP2013528948A (ja) |
KR (1) | KR20130080454A (ja) |
CN (1) | CN103026561B (ja) |
TW (1) | TW201206000A (ja) |
WO (1) | WO2011150134A1 (ja) |
Cited By (2)
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WO2020017207A1 (ja) * | 2018-07-20 | 2020-01-23 | ソニーセミコンダクタソリューションズ株式会社 | 半導体発光素子 |
WO2022270054A1 (ja) * | 2021-06-23 | 2022-12-29 | ソニーセミコンダクタソリューションズ株式会社 | 窒化物半導体発光素子 |
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TW201222872A (en) | 2010-10-26 | 2012-06-01 | Univ California | Limiting strain relaxation in III-nitride heterostructures by substrate and epitaxial layer patterning |
US8971370B1 (en) | 2011-10-13 | 2015-03-03 | Soraa Laser Diode, Inc. | Laser devices using a semipolar plane |
WO2013158210A2 (en) | 2012-02-17 | 2013-10-24 | Yale University | Heterogeneous material integration through guided lateral growth |
WO2014144698A2 (en) | 2013-03-15 | 2014-09-18 | Yale University | Large-area, laterally-grown epitaxial semiconductor layers |
WO2015160903A1 (en) * | 2014-04-16 | 2015-10-22 | Yale University | Nitrogen-polar semipolar gan layers and devices on sapphire substrates |
WO2015160909A1 (en) | 2014-04-16 | 2015-10-22 | Yale University | Method of obtaining planar semipolar gallium nitride surfaces |
KR20190038639A (ko) | 2016-08-12 | 2019-04-08 | 예일 유니버시티 | 성장 동안 질소 극성 패시트를 제거함으로써 외래 기판 상에 성장된 적층 무결함 반극성 및 비극성 GaN |
CN111725364A (zh) * | 2019-03-20 | 2020-09-29 | 中国科学院苏州纳米技术与纳米仿生研究所 | 短波长深紫外led外延结构、其p型层材料及制法与应用 |
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- 2011-05-26 EP EP11724873.2A patent/EP2577823A1/en not_active Withdrawn
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JPH10270756A (ja) * | 1997-03-27 | 1998-10-09 | Sanyo Electric Co Ltd | 窒化ガリウム系化合物半導体装置 |
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WO2020017207A1 (ja) * | 2018-07-20 | 2020-01-23 | ソニーセミコンダクタソリューションズ株式会社 | 半導体発光素子 |
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WO2022270054A1 (ja) * | 2021-06-23 | 2022-12-29 | ソニーセミコンダクタソリューションズ株式会社 | 窒化物半導体発光素子 |
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US20110292957A1 (en) | 2011-12-01 |
US8189639B2 (en) | 2012-05-29 |
KR20130080454A (ko) | 2013-07-12 |
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TW201206000A (en) | 2012-02-01 |
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