JP2013515851A - アルミニウムドープされた酸化亜鉛で基板をコーティングする方法 - Google Patents
アルミニウムドープされた酸化亜鉛で基板をコーティングする方法 Download PDFInfo
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- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 title claims abstract description 132
- 239000011787 zinc oxide Substances 0.000 title claims abstract description 66
- 239000000758 substrate Substances 0.000 title claims abstract description 34
- 238000000034 method Methods 0.000 title claims abstract description 33
- 238000000576 coating method Methods 0.000 title claims abstract description 11
- 239000011248 coating agent Substances 0.000 title claims abstract description 10
- 230000006911 nucleation Effects 0.000 claims abstract description 63
- 238000010899 nucleation Methods 0.000 claims abstract description 63
- 238000000889 atomisation Methods 0.000 claims abstract description 33
- 239000007787 solid Substances 0.000 claims abstract description 33
- 238000003631 wet chemical etching Methods 0.000 claims abstract description 8
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 24
- 239000000919 ceramic Substances 0.000 claims description 21
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 13
- 238000000151 deposition Methods 0.000 claims description 13
- 230000008021 deposition Effects 0.000 claims description 13
- 229910052782 aluminium Inorganic materials 0.000 claims description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 239000002019 doping agent Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 238000004518 low pressure chemical vapour deposition Methods 0.000 claims description 4
- 238000005229 chemical vapour deposition Methods 0.000 claims description 3
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 claims description 2
- 238000005234 chemical deposition Methods 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 238000005530 etching Methods 0.000 description 22
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 8
- 239000013081 microcrystal Substances 0.000 description 5
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 239000011701 zinc Substances 0.000 description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000000875 corresponding effect Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000000407 epitaxy Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000000543 intermediate Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000002073 nanorod Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000012048 reactive intermediate Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000004630 atomic force microscopy Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 238000001027 hydrothermal synthesis Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000013386 optimize process Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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Abstract
Description
層の成長および終端は、種々のエネルギー供給によって(特に基板温度、中性粒子エネルギー、イオンエネルギーによって)決定される。アルミニウムドープされた酸化亜鉛を製造する際のイオン電流測定によって、プラズマ励起に応じて種々のイオンエネルギーの寄与が示されている。太陽電池に適したエッチング構造を達成するためにはしたがって、主にZn末端表面が、わずかなO末端微結晶とともに存在するように、層成長に影響を及ぼすことが重要である。
固体ターゲットのアトマイゼーションによって、酸化亜鉛、またはドープされた、特にアルミニウムドープされた酸化亜鉛を含有する5nm〜400nm厚の核形成層を基板表面上に形成するステップと、
アルミニウムドープされた酸化亜鉛を含有し、核形成層上に準エピタキシャルで継続成長する(weiterwachsenden)トップ層を形成するステップと、
トップ層を湿式化学エッチングするステップとを含む。
中空陰極ガス流アトマイゼーションまたは
蒸発または
湿式化学析出または
大気圧化学気相成長(英語:chemical vapour deposition、CVD)または
低圧CVD(LP−CVD)または
大気圧プラズマ化学気相成長(PECVD)または
低圧PECVDによって形成することができる。
第1の実施例では、いくつかの試料を調べたが、その際、高周波マグネトロンアトマイゼーション(HFマグネトロンスパッタリング)によって形成された核形成層(英語:seedlayer)を段階的に390nmから25nmまで薄くした。核形成層上にそれぞれ、ZnO:Alからなるトップ層をDCマグネトロンアトマイゼーションによって析出させたが、その際、全厚は約1μmであった。こうして析出された層を全て、0.5%塩酸(HCl)でエッチングした。
異なる核形成層厚(種層厚)を有する2つの層を、スパッタリング装置から取り出し、標準大気に曝露した。次いで、層を未コーティングのガラスディスクとともに、ZnO:Alトップ層をDCマグネトロンスパッタリングによって形成するために、スパッタリング装置に装入した。これらの実験は、真空度の低下(Vakuumbruch)(層への水分などの付着)を原因として起こり得るエッチング構造の変化についての試験として役立つ。さらに、DC析出の場合の種々のエッチング構造を、HFマグネトロンスパッタリングによって形成された核形成層と比較して検証した。
走査フォース顕微鏡によって、本明細書に提示されている方法で形成されたいくつかの層の表1に示されている平均粗さ(RMS粗さ)を決定した。こうして、REM写真で示された構造を量的にも把握することができた。
Claims (11)
- アルミニウムドープされた酸化亜鉛で基板をコーティングする方法であって、
固体ターゲットのアトマイゼーションによって、酸化亜鉛、またはドープされた、特にアルミニウムドープされた酸化亜鉛を含有する5nm〜400nm厚の核形成層を基板表面上に形成するステップと、
アルミニウムドープされた酸化亜鉛を含有し、核形成層上に準エピタキシャルで継続成長するトップ層を形成するステップと、
トップ層を湿式化学エッチングするステップとを含むことを特徴とする方法。 - 核形成層を5nm〜30nmの厚さで基板上に形成することを特徴とする、請求項1に記載の方法。
- ZnO、ならびにAl2O3および/または任意の他のドーパントの含有分を含有するセラミック固体ターゲットを高周波マグネトロンスパッタリングすることによって核形成層が形成され、核形成層が、格子構造を保持しているか、または少なくともほぼ保持していることを特徴とする、請求項1または2のいずれか1項に記載の方法。
- 核形成層を形成するために、セラミック固体ターゲットが使用され、該セラミック固体ターゲットは、ZnOおよび0重量%超であり1重量%未満であるAl2O3の含有分を有し、高周波マグネトロンアトマイゼーションによって温度T>300℃でアトマイゼーションされてなることを特徴とする、請求項3に記載の方法。
- 核形成層を形成するために、セラミック固体ターゲットが使用され、該セラミック固体ターゲットは、ZnOおよび1〜2重量%の間のAl2O3の含有分を有し、高周波マグネトロンアトマイゼーションによって温度T≦300℃でアトマイゼーションされてなることを特徴とする、請求項3に記載の方法。
- 核形成層が基板に施与される析出速度が、20nmm/分未満であることを特徴とする、請求項1〜5のいずれか1項に記載の方法。
- 核形成層を形成するために、セラミック固体ターゲットが使用され、該セラミック固体ターゲットは、ZnOならびにAl2O3および/または任意の他のドーパントの含有分を有し、DCマグネトロンスパッタリングによってアトマイゼーションされてなり、核形成層を基板に施与する析出速度が20nmm/分未満であることを特徴とする、請求項1または2のいずれか1項に記載の方法。
- 核形成層の上に継続成長するトップ層が、ZnOおよびAl2O3の含有分を含有するセラミック固体ターゲットをDCマグネトロンアトマイゼーションまたはDCパルスマグネトロンアトマイゼーションによってアトマイゼーションすることによって得られることを特徴とする、請求項1〜7のいずれか1項に記載の方法。
- 核形成層上に継続成長するトップ層が、アルミニウムドープされた酸化亜鉛を含有する金属固体ターゲットを反応性ガスプロセス中で、DCマグネトロンアトマイゼーションまたは中間周波数マグネトロンアトマイゼーションによってアトマイゼーションすることによって形成されることを特徴とする、請求項1〜7のいずれか1項に記載の方法。
- 核形成層上に継続成長するトップ層を、
中空陰極−ガス流アトマイゼーションまたは
蒸発または
湿式化学析出または
大気圧化学気相成長(CVD)または
低圧CVD(LP−CVD)または
大気圧プラズマ化学気相成長(PECVD)または
低圧PECVDによって形成することを特徴とする、請求項1〜7のいずれか1項に記載の方法。 - 請求項1〜10のいずれか1項の記載によってアルミニウムドープされた酸化亜鉛でコーティングされた基板の、シリコン薄層太陽電池のフロント接点としての使用。
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DE102009060547A DE102009060547A1 (de) | 2009-12-23 | 2009-12-23 | Verfahren zum Beschichten eines Substrats mit aluminiumdotiertem Zinkoxid |
DE102009060547.9 | 2009-12-23 | ||
PCT/EP2010/070655 WO2011076921A1 (de) | 2009-12-23 | 2010-12-23 | Verfahren zum beschichten eines substrats mit aluminiumdotiertem zinkoxid |
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JP (1) | JP2013515851A (ja) |
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CN102623569A (zh) * | 2012-04-11 | 2012-08-01 | 保定天威薄膜光伏有限公司 | 薄膜太阳能电池的绒面透明导电氧化物薄膜的制备方法 |
CN103508406B (zh) * | 2012-06-29 | 2016-08-24 | 无锡华润上华半导体有限公司 | Azo薄膜、制备方法以及包括其的mems器件 |
JP2015535892A (ja) * | 2012-10-08 | 2015-12-17 | コーニング インコーポレイテッド | 導電性透明アルミニウムドープ酸化亜鉛スパッタ膜 |
DE102013105771B4 (de) | 2013-06-05 | 2021-01-21 | VON ARDENNE Asset GmbH & Co. KG | Vorrichtung und Verfahren zum Abscheiden einer Schicht mittels Magnetronsputtern |
CN108950501A (zh) * | 2018-07-15 | 2018-12-07 | 天津大学 | 一种高透光zao导电薄膜的制备方法 |
CN113130770B (zh) * | 2021-04-16 | 2022-03-11 | 河南大学 | 一种钙钛矿太阳能电池及其制备方法 |
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DE102004003760B4 (de) * | 2004-01-23 | 2014-05-22 | Forschungszentrum Jülich GmbH | Verfahren zur Herstellung einer leitfähigen und transparenten Zinkoxidschicht und Verwendung derselben in einer Dünnschichtsolarzelle |
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- 2010-12-23 WO PCT/EP2010/070655 patent/WO2011076921A1/de active Application Filing
- 2010-12-23 JP JP2012545346A patent/JP2013515851A/ja active Pending
- 2010-12-23 US US13/519,030 patent/US20130203211A1/en not_active Abandoned
- 2010-12-23 EP EP10798099A patent/EP2516692A1/de not_active Withdrawn
- 2010-12-23 KR KR1020127018077A patent/KR20120096074A/ko not_active Application Discontinuation
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US20130203211A1 (en) | 2013-08-08 |
CN102741446A (zh) | 2012-10-17 |
DE102009060547A1 (de) | 2011-06-30 |
KR20120096074A (ko) | 2012-08-29 |
WO2011076921A1 (de) | 2011-06-30 |
EP2516692A1 (de) | 2012-10-31 |
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