JP2013501211A - 基板の欠陥を検出及び分類する方法及びシステム - Google Patents

基板の欠陥を検出及び分類する方法及びシステム Download PDF

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Publication number
JP2013501211A
JP2013501211A JP2012521936A JP2012521936A JP2013501211A JP 2013501211 A JP2013501211 A JP 2013501211A JP 2012521936 A JP2012521936 A JP 2012521936A JP 2012521936 A JP2012521936 A JP 2012521936A JP 2013501211 A JP2013501211 A JP 2013501211A
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Japan
Prior art keywords
substrate
light
imaging unit
unit
image
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JP2012521936A
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English (en)
Japanese (ja)
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JP2013501211A5 (enExample
Inventor
シュワイゼル ジャン−フィリップ
フイフェン リ
シャオフェン リン
シャオフェン グオ
フェン グオ
シャオウェイ スン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Glass France SAS
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Saint Gobain Glass France SAS
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Publication date
Priority claimed from CN2009101611073A external-priority patent/CN101988908A/zh
Priority claimed from CN200910246381.0A external-priority patent/CN102081047B/zh
Application filed by Saint Gobain Glass France SAS filed Critical Saint Gobain Glass France SAS
Publication of JP2013501211A publication Critical patent/JP2013501211A/ja
Publication of JP2013501211A5 publication Critical patent/JP2013501211A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G01N2021/8967—Discriminating defects on opposite sides or at different depths of sheet or rod

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  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2012521936A 2009-07-31 2010-02-26 基板の欠陥を検出及び分類する方法及びシステム Pending JP2013501211A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
CN200910161107.3 2009-07-31
CN2009101611073A CN101988908A (zh) 2009-07-31 2009-07-31 用于对基板的缺陷进行区分的方法和系统
CN200910246381.0 2009-11-27
CN200910246381.0A CN102081047B (zh) 2009-11-27 2009-11-27 用于对基板的缺陷进行区分的方法和系统
PCT/CN2010/070791 WO2011011988A1 (en) 2009-07-31 2010-02-26 Method and system for detecting and classifying defects of substrate

Publications (2)

Publication Number Publication Date
JP2013501211A true JP2013501211A (ja) 2013-01-10
JP2013501211A5 JP2013501211A5 (enExample) 2013-04-04

Family

ID=43528732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012521936A Pending JP2013501211A (ja) 2009-07-31 2010-02-26 基板の欠陥を検出及び分類する方法及びシステム

Country Status (5)

Country Link
US (1) US20120133762A1 (enExample)
EP (1) EP2459989A4 (enExample)
JP (1) JP2013501211A (enExample)
KR (1) KR20120040257A (enExample)
WO (1) WO2011011988A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2021090827A1 (enExample) * 2019-11-05 2021-05-14

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101324015B1 (ko) * 2011-08-18 2013-10-31 바슬러 비전 테크놀로지스 에이지 유리기판 표면 불량 검사 장치 및 검사 방법
KR101435621B1 (ko) * 2012-11-09 2014-08-29 와이즈플래닛(주) 복수의 촬상 장치를 이용한 검사대상 위치 판단장치
KR102368587B1 (ko) 2015-10-21 2022-03-02 삼성전자주식회사 검사 장치, 그를 포함하는 반도체 소자의 제조 시스템, 및 반도체 소자의 제조 방법
JP7183155B2 (ja) * 2016-11-02 2022-12-05 コーニング インコーポレイテッド 透明基板上の欠陥部検査方法および装置
JP7183156B2 (ja) 2016-11-02 2022-12-05 コーニング インコーポレイテッド 透明基板上の欠陥部の検査方法および装置並びに入射光の出射方法
US20240426761A1 (en) * 2023-06-24 2024-12-26 John Le Method and optical system for imaging optical defect
CN117782823A (zh) * 2024-02-23 2024-03-29 易事特智能化系统集成有限公司 一种光伏材料检测设备

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63163152A (ja) * 1986-12-24 1988-07-06 Hitachi Condenser Co Ltd 透明基材又は半透明基材の検査方法とその検査装置
JPH07113757A (ja) * 1993-10-14 1995-05-02 Asahi Glass Co Ltd 透光性物体の欠点検出方法
JPH11337493A (ja) * 1998-05-28 1999-12-10 Nikon Corp 画像処理による異常点位置検出システム
JP2003329612A (ja) * 2002-05-16 2003-11-19 Asahi Glass Co Ltd 被検査物の検査方法
JP2005180993A (ja) * 2003-12-17 2005-07-07 Kanto Auto Works Ltd 樹脂溶着部の撮像装置
JPWO2006057125A1 (ja) * 2004-11-24 2008-06-05 旭硝子株式会社 透明板状体の欠陥検査方法および装置
JP2009174918A (ja) * 2008-01-22 2009-08-06 Asahi Glass Co Ltd 欠陥検査装置、欠陥検査方法及び板状体の製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3225651A (en) * 1964-11-12 1965-12-28 Wallace A Clay Methods of stereoscopic reproduction of images
CA2252308C (en) * 1998-10-30 2005-01-04 Image Processing Systems, Inc. Glass inspection system
US7382457B2 (en) * 2004-01-22 2008-06-03 Wintriss Engineering Corporation Illumination system for material inspection
US7567344B2 (en) * 2006-05-12 2009-07-28 Corning Incorporated Apparatus and method for characterizing defects in a transparent substrate

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63163152A (ja) * 1986-12-24 1988-07-06 Hitachi Condenser Co Ltd 透明基材又は半透明基材の検査方法とその検査装置
JPH07113757A (ja) * 1993-10-14 1995-05-02 Asahi Glass Co Ltd 透光性物体の欠点検出方法
JPH11337493A (ja) * 1998-05-28 1999-12-10 Nikon Corp 画像処理による異常点位置検出システム
JP2003329612A (ja) * 2002-05-16 2003-11-19 Asahi Glass Co Ltd 被検査物の検査方法
JP2005180993A (ja) * 2003-12-17 2005-07-07 Kanto Auto Works Ltd 樹脂溶着部の撮像装置
JPWO2006057125A1 (ja) * 2004-11-24 2008-06-05 旭硝子株式会社 透明板状体の欠陥検査方法および装置
JP2009174918A (ja) * 2008-01-22 2009-08-06 Asahi Glass Co Ltd 欠陥検査装置、欠陥検査方法及び板状体の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2021090827A1 (enExample) * 2019-11-05 2021-05-14
JP2025069345A (ja) * 2019-11-05 2025-04-30 株式会社小糸製作所 検査装置

Also Published As

Publication number Publication date
WO2011011988A1 (en) 2011-02-03
EP2459989A1 (en) 2012-06-06
US20120133762A1 (en) 2012-05-31
KR20120040257A (ko) 2012-04-26
EP2459989A4 (en) 2017-03-29

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