JP2013256707A5 - - Google Patents
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- Publication number
- JP2013256707A5 JP2013256707A5 JP2012134933A JP2012134933A JP2013256707A5 JP 2013256707 A5 JP2013256707 A5 JP 2013256707A5 JP 2012134933 A JP2012134933 A JP 2012134933A JP 2012134933 A JP2012134933 A JP 2012134933A JP 2013256707 A5 JP2013256707 A5 JP 2013256707A5
- Authority
- JP
- Japan
- Prior art keywords
- lens
- film
- film forming
- lens holder
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000005755 formation reaction Methods 0.000 claims description 2
- 230000003287 optical Effects 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012134933A JP5921351B2 (ja) | 2012-06-14 | 2012-06-14 | 成膜装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012134933A JP5921351B2 (ja) | 2012-06-14 | 2012-06-14 | 成膜装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2013256707A JP2013256707A (ja) | 2013-12-26 |
JP2013256707A5 true JP2013256707A5 (de) | 2015-08-06 |
JP5921351B2 JP5921351B2 (ja) | 2016-05-24 |
Family
ID=49953376
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012134933A Expired - Fee Related JP5921351B2 (ja) | 2012-06-14 | 2012-06-14 | 成膜装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5921351B2 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105549342B (zh) * | 2016-03-08 | 2019-01-08 | 佛山市国星半导体技术有限公司 | 一种紫外激光光刻方法 |
CN105549343B (zh) * | 2016-03-08 | 2019-02-01 | 佛山市国星半导体技术有限公司 | 一种光刻装置 |
JP7171270B2 (ja) | 2018-07-02 | 2022-11-15 | キヤノン株式会社 | 成膜装置およびそれを用いた成膜方法 |
CN111235539B (zh) * | 2020-03-10 | 2021-04-20 | 摩科斯新材料科技(苏州)有限公司 | 一种小孔内壁薄膜沉积方法及装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3290999B2 (ja) * | 1997-05-16 | 2002-06-10 | ホーヤ株式会社 | 光学レンズ基材のホルダ設置機構 |
JP4345869B2 (ja) * | 1997-05-16 | 2009-10-14 | Hoya株式会社 | スパッタ成膜用の膜厚補正機構 |
US5996792A (en) * | 1997-07-23 | 1999-12-07 | Eastman Kodak Company | Optical lens tray |
JP4474109B2 (ja) * | 2003-03-10 | 2010-06-02 | キヤノン株式会社 | スパッタ装置 |
JP2004315014A (ja) * | 2003-04-15 | 2004-11-11 | Hitachi Maxell Ltd | トレイならびに光学品の処理方法 |
JP2006328485A (ja) * | 2005-05-26 | 2006-12-07 | Olympus Corp | 膜厚予測方法及び成膜方法 |
JP2006328488A (ja) * | 2005-05-27 | 2006-12-07 | Olympus Corp | 膜厚予測方法及び成膜方法 |
WO2012133468A1 (ja) * | 2011-03-28 | 2012-10-04 | コニカミノルタアドバンストレイヤー株式会社 | 対物レンズの製造方法 |
-
2012
- 2012-06-14 JP JP2012134933A patent/JP5921351B2/ja not_active Expired - Fee Related
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