JP2013253837A - Feeler gauge - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a feeler gauge capable of easily discriminating a measuring surface with high height from a measuring surface with low height by recognizing vertical intervals of space measurement surfaces.SOLUTION: A feeler gauge 1 is composed of a bottom surface 2 to be a stationary surface, a first measurement surface 3a, a second measurement surface 3b and a third measurement surface 3c formed in parallel with the bottom surface 2 and having respectively different heights, and side faces 4a and side faces 4b erected from end parts of the bottom surface 2 to respective end parts of the first measurement surface 3a, the second measurement surface 3b and the third measurement surface 3c, and a discrimination part 5 is formed on one side face 4a extending in a longitudinal direction. Since the first measurement surface 3a side with the highest height can be easily discriminated from the third measurement surface 3c side with the lowest height by touching the discrimination part 5 with a hand, the feller gauge 1 can be held between a grinding surface of a grinding wheel and a holding surface of a chuck table without minutely confirming vertical intervals of the measurement surfaces.

Description

  The present invention relates to a clearance gauge used in a grinding apparatus for grinding a plate-shaped workpiece to cause a grinding feed means to grasp a grinding feed height of a grinding means.

  A grinding apparatus for grinding a plate-like workpiece is a grinding device that rotatably includes a chuck table that holds a plate-like workpiece and a grinding wheel on which a grinding wheel that grinds the plate-like workpiece held on the chuck table is fixed in an annular shape. And at least grinding feed means for moving the grinding means toward and away from the holding means. Then, the rotating grinding wheel contacts and presses the plate-like workpiece held on the chuck table, so that the plate-like workpiece can be finished to a predetermined thickness.

  When the plate-like workpiece is continuously ground by the grinding apparatus, the grinding wheel of the grinding wheel that contacts the plate-like workpiece is worn out, so that the grinding wheel is appropriately replaced. After exchanging the grinding wheel, in order to accurately control the position of the lower surface of the grinding wheel, a gap gauge having a predetermined thickness is placed between the lower surface (grinding surface) of the grinding wheel and the holding surface of the chuck table. Insert and lower the grinding means so that the device recognizes the vertical position of the grinding surface when the gap gauge is sandwiched between the grinding surface and the holding surface of the chuck table, and the position information during actual grinding Used for grinding feed. Specifically, the grinding feed means lowers the grinding means at a high speed until the grinding wheel comes into contact with the upper surface of the plate-like workpiece, and after the grinding wheel touches the upper surface of the plate-like workpiece, the grinding means at a predetermined speed. Is lowered to grind plate workpieces. Moreover, since the apparatus recognizes the distance between the grinding surface and the holding surface of the chuck table, the grinding surface is prevented from coming into contact with the holding surface.

  For example, the conventional gap gauge 50 shown in FIG. 6 has a plurality of measurement surfaces 51 formed in a block shape and provided with predetermined steps. Before processing the plate-like workpiece, the operator puts this gap gauge 50 between the grinding surface and the holding surface of the chuck table, measures the grinding feed height of the grinding means at this time, and puts it in the grinding device. Recognize.

  As another gap gauge, there is a gauge provided with a measurement plate for measuring a dimension of a gap of an object to be measured (for example, see Patent Document 1 below). Some have a bottom surface and an inclined surface, and the inclined surface has a scale (see, for example, Patent Document 2 below).

JP 2001-317905 A Japanese Patent Application Laid-Open No. 09-079804

  However, when the operator puts the gap gauge between the grinding surface and the holding surface of the chuck table, the part where the gap gauge is put may be behind the grinding means. , The difference in height of the measurement surface may not be known. For this reason, the operator must confirm the difference in height between the measurement surfaces of the gap gauge, and must again sandwich the gap gauge between the grinding surface of the grinding wheel and the holding surface of the chuck table, resulting in poor work efficiency. There is.

  The present invention has been made in view of the above circumstances, and the problem to be solved by the present invention is to make it possible to easily distinguish the high side and the low side of the measurement surface of the gap gauge. There is.

  The present invention provides a gap gauge comprising a plurality of measurement surfaces having different heights in stages, the gap gauge comprising a bottom surface which is a stationary surface, and a plurality of measurement surfaces having different heights formed in parallel to the bottom surface. And a pair of side surfaces extending from the end portion of the bottom surface toward the end portion of the measurement surface, and the pair of side surfaces extending in the longitudinal direction form gripping portions and extend in the longitudinal direction. An identification part is formed on one side surface, and the identification part can identify the step directions of the measurement surfaces having different heights.

  The present invention has a plurality of measurement surfaces formed stepwise in parallel with the bottom surface, and since the identification portion is formed on one side surface extending in the longitudinal direction, if the identification portion is touched by hand, The measurement surface side with the highest height or the measurement surface side with the lowest height can be easily identified. Therefore, when the gap gauge is sandwiched between the grinding means and the holding table, the stage from the highest measurement surface to the lowest measurement surface side can be obtained by touching the gap gauge identification part with your hand. Since the direction can be easily identified, it is possible to sandwich the gap gauge between the grinding surface of the grinding wheel and the holding surface of the chuck table without checking the height difference of the measurement surface of the gap gauge. The problem of poor work efficiency can be solved.

It is sectional drawing which shows the structure of a part of grinding apparatus. It is a perspective view which shows the structure of a clearance gauge. It is a side view which shows the structure of a clearance gauge. It is a top view which shows the structure of a clearance gauge. It is a top view which shows the state in which an operator pinches a clearance gauge between a grinding wheel and a chuck table. It is a perspective view which shows the structure of the conventional clearance gauge.

  A grinding apparatus 10 shown in FIG. 1 is a processing apparatus for grinding a plate-shaped workpiece, and includes an apparatus base 100 extending in the Y-axis direction. A rotatable turntable 11 is disposed on the upper surface of the apparatus base 100. A rotation shaft 101 that rotates the turntable 11 is disposed at the center of the turntable 11. Furthermore, the turntable 11 is provided with a plurality of chuck tables 12 that can hold and rotate a plate-like workpiece. When the turntable 11 rotates, the plurality of chuck tables 12 can be revolved.

  The chuck table 12 includes a porous member 12a, and the surface of the porous member 12a serves as a holding surface 12b that holds a plate-like workpiece. A rotating shaft 103 is connected to the lower portion of the chuck table 12. The porous member 12 a communicates with a suction source 104 connected to the lower part of the rotating shaft 103. Then, the plate-like workpiece can be sucked from below by the suction force generated from the suction source 104, and the plate-like workpiece can be held on the chuck table 12.

  In the vicinity of the rotation shaft 103, a motor 105 serving as a rotation drive source of the chuck table 12 is disposed. A belt 106 is placed between the rotating shaft 103 and the motor 105, and the belt 106 can rotate the rotating shaft 103 and rotate the chuck table 12 by driving the motor 105.

  A column 102 extending in the Z-axis direction is erected on the apparatus base 100, and the first grinding means 20 is supported by the first grinding feed means 40 provided on the side of the column 102 so as to be movable up and down. Yes. The first grinding means 20 includes a rotatable spindle 21, a spindle housing 22 that rotatably supports the spindle 21, a grinding wheel 24 attached to the lower end of the spindle 21 via a mounter 23, A plurality of grinding wheels 25 fixed in an annular shape to the lower portion are provided, and the grinding wheel 24 can be rotated by the rotation of the spindle 21.

  The first grinding feed means 40 includes at least a rotatable ball screw 41, a servo motor 42 connected to the upper end of the ball screw 41, and a moving base 43 that moves in the Z-axis direction. The servo motor 42 is connected to the control unit 60, and when the control unit 60 drives the servo motor 42, the ball screw 41 rotates to move the moving base 43 up and down, and is supported by the moving base 43. One grinding means 20 can be moved up and down in the Z-axis direction.

  A gap gauge 1 shown in FIG. 2 is a gap gauge to be sandwiched between the lower surface (grinding surface) 25 a of the grinding wheel 25 of the grinding apparatus 10 and the holding surface 12 b of the chuck table 12. As shown in FIG. 2, the gap gauge 1 includes a bottom surface 2 that is a surface for placing the gap gauge 1 on a plane, a first measurement surface 3 a and a second measurement surface 3 b that are formed in parallel to the bottom surface 2. And the third measurement surface 3c, and the side surface 4a and the side surface 4b erected from the end of the bottom surface 2 toward the first measurement surface 3a, the second measurement surface 3b, and the end of the third measurement surface 3c. And is constituted by.

  As shown in FIG. 3, the first measurement surface 3a is formed at a position having the highest height B1 with respect to the bottom surface 2, and the first measurement surface 3a is formed in a planar shape.

  The second measurement surface 3b is formed at a position having a height B2 with respect to the bottom surface 2, and is at a position lower than the first measurement surface 3a. The second measurement surface 3b is also formed in a planar shape. A step 6 having a predetermined height difference H1 is formed between the first measurement surface 3a and the second measurement surface 3b. The height difference H1 of the step 6 is, for example, 20 μm.

  Further, the third measurement surface 3c is formed at a position having the lowest height B3 with respect to the bottom surface 2, and is at a position lower than the second measurement surface 3b. The third measurement surface 3c is also formed in a planar shape. A step 7 having a predetermined height difference H2 is formed between the second measurement surface 3b and the third measurement surface 3c. The height difference H2 of the step 7 is, for example, 20 μm. Thus, the 1st measurement surface 3a, the 2nd measurement surface 3b, and the 3rd measurement surface 3c comprise the measurement surface from which height differs in steps, and the other from one end of a longitudinal direction to the other It has a step direction toward the end of the.

  The pair of side surfaces 4a extending in the longitudinal direction is a grip portion that can be gripped by the operator's hand. Then, the gap gauge 1 can be moved by the operator holding the pair of side surfaces 4a.

  As shown in FIGS. 2 and 3, an identification portion 5 that is chamfered from the first measurement surface 3 a to the bottom surface 2 is formed on one side surface 4 a of the gap gauge 1. In the gap gauge 1, since the height difference H1 of the step 6 and the height difference H2 of the step 7 are very small, each 20 μm, the operator can trace by hand from the first measurement surface 3a to the third measurement surface 3c. Even if it is touched, it is difficult to identify the height difference. Therefore, it is possible to identify which side the first measurement surface 3a having the higher height is on by touching the identification unit 5 by hand. Further, if the identification unit 5 can confirm the first measurement surface 3a side, it is possible to easily identify that the other side of the gap gauge 1 is the third measurement surface 3c side.

  The gap gauge 1 configured as described above is used before processing a plate-like workpiece by the grinding apparatus 10 shown in FIG. That is, the gap gauge 1 is sandwiched between the grinding surface 25a of the grinding wheel 25 in contact with the plate-like workpiece and the holding surface 12b of the chuck table 12, and the grinding feed height of the grinding means 20 at that time is recognized. Then, the control unit 60 is made to grasp the height information.

  As shown in FIG. 5, the grinding apparatus 10 includes a second grinding means 30 together with the first grinding means 20. The second grinding means 30 is configured in substantially the same manner as the first grinding means 20 shown in FIG. 1, but the grinding wheel 25 is a grinding wheel for rough grinding in the first grinding means 20. On the other hand, the second grinding means 30 is a grinding wheel for finish grinding. The second grinding means 30 is also configured to be fed in the vertical direction by a grinding means having the same configuration as the first grinding feed means 40 shown in FIG. The operator P and the operator P ′ shown in FIG. 5 are persons who sandwich the gap gauge 1 between the grinding surface and the holding surface 12b.

  The turntable 11 shown in FIG. 5 rotates in the direction of the arrow A <b> 1 by the rotation of the rotating shaft 101, and moves the chuck table 12 below the first grinding means 20. When the chuck table 12 rotates in the direction of arrow A2 and moves below the first grinding means 20, the first grinding feed means 40 shown in FIG. 1 lowers the first grinding means 20 in the Z-axis direction. .

  Next, the operator P shown in FIG. 5 grasps the pair of side surfaces 4a of the gap gauge 1 shown in FIG. 3 and touches the gap gauge 1 with his / her hand to confirm where the identification unit 5 is located. When the operator P touches with hands along a pair of side surface 4a and a pair of side surface 4b, the identification part 5 can be confirmed. Thereby, the 1st measurement surface 3a side with the highest height and the 3rd measurement surface 3c side with the lowest height can be distinguished easily.

  After confirming the direction of the gap gauge 1 in this way, as shown in FIG. 5, the gap gauge 1 is sandwiched between the holding surface 12b of the chuck table 12 and the grinding surface 25a shown in FIG. The operator P identifies the first measurement surface 3a side with the highest height of the gap gauge 1 and the third measurement surface 3c side with the lowest height by the identification unit 5 shown in FIG. After grasping the direction, the third measurement surface 3 c side having the lowest height is directed to the center of the first grinding means 20.

  After confirming the direction of the gap gauge 1, the operator P shown in FIG. 5 inserts the gap gauge 1 into the insertion position 8 from the third measurement surface 3c side having the lowest height. At this time, the insertion position 8 and the gap gauge 1 inserted into the first grinding means 20 may be hidden behind the first grinding means 20, and the height difference formed in the gap gauge 1 may not be known. Even in this case, the operator P touches the identification part 5 of the gap gauge 1 with his / her hand, and at least the first measurement surface 3a side having the highest height and the third measurement surface 3c side having the lowest height. Therefore, it is not necessary to confirm the height difference of the gap gauge 1.

  Here, with reference to the bottom surface 2, for example, when the height of the first measurement surface 3 a is 740 μm, the height of the second measurement surface 3 b is 720 μm, and the height of the third measurement surface 3 c is 700 μm. For example, when it is desired to set the distance D between the holding surface 12b and the grinding surface 25a shown in FIG. 1 to 700 μm, the gap gauge 1 is slid so that the third measurement surface 3c is located immediately below the grinding wheel 25. I'll do it. The clearance gauge 1 inserted into the insertion position 8 is sandwiched between the holding surface 12b of the chuck table 12 and the grinding surface 25a by the lowering operation of the first grinding means 20.

  When the gap gauge 1 is thus sandwiched between the holding surface 12b of the chuck table 12 and the grinding surface 25a, the first grinding feed means 40 is controlled with respect to the Z-axis direction position of the first grinding means 70 at that time. Recognizes the control unit 60. And the height control of the following 1st grinding means 70 is performed on the basis of the position. For example, when the thickness of the plate-like workpiece to be ground is 700 μm, the first grinding means 20 is lowered at a high speed until the grinding surface 25a is lowered to a position 700 μm higher than the holding surface 12b of the chuck table 12, After that, grinding is performed by feeding at a predetermined speed.

  Similarly, the second grinding means 30 shown in FIG. 5 is also accurately controlled by sliding the gap gauge 1 between the holding surface 12b of the chuck table 12 and the grinding surface and performing the same control. In addition, the grinding feed can be controlled efficiently.

  As described above, since the gap gauge 1 is formed with the identification portion 5 on one side surface 4a side, the operator places the gap gauge 1 between the lower surface 25a of the grinding wheel 25 and the holding surface 12b of the holding table 12. When it is sandwiched between the two, the identification part 5 of the gap gauge 1 is touched by hand to easily identify the first measurement surface 3a side having the highest height or the third measurement surface 3c side having the lowest height. Therefore, it is not necessary to confirm the height difference of the measurement surface of the gap gauge 1. Therefore, the gap gauge 1 can be sandwiched between the grinding surface of the grinding wheel 24 and the holding surface 12b of the chuck table 12 without checking the height difference of the measurement surface.

  In the gap gauge 1 shown in the present embodiment, the identification portion 5 is formed on the first measurement surface 3a side having the highest height, but the identification portion 5 is identified on the third measurement surface 3c side having the lowest height. It is good also as a structure which formed the part 5. FIG. Furthermore, the number of steps of the gap gauge 1 is not limited to the configuration shown in the present embodiment.

1: Gauge gauge 2: Bottom surface 3a: First measurement surface 3b: Second measurement surface 3c: Third measurement surface 4a, 4b: Side surface 5: Identification part 6, 7: Step 8: Insertion position 10: Grinding device 100: device base 101: rotating shaft 102: column 103: rotating shaft 104: suction source 105: motor 106: belt 11: turntable 12: chuck table 12a: porous member 12b: holding surface 20: first grinding means 21 : Spindle 22: Spindle housing 23: Mount 24: Grinding wheel 25: Grinding wheel 25a: Lower surface 30: Second grinding means 40: Grinding feed means 41: Ball screw 42: Motor 43: Moving base 50: Gap gauge 51: Measurement Surface 60: control unit

Claims (1)

In gap gauges with multiple measuring surfaces with different heights in stages,
The gap gauge includes a bottom surface that is a stationary surface, a plurality of measurement surfaces that are formed in parallel with the bottom surface, and a side surface that is erected from an end portion of the bottom surface toward an end portion of the measurement surface. And consists of
A pair of side surfaces extending in the longitudinal direction is a gripping part,
An identification portion is formed on one side surface extending in the longitudinal direction,
A gap gauge capable of identifying the step directions of measurement surfaces having different heights stepwise by the identification unit.

Images