JP2013251542A5 - - Google Patents

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Publication number
JP2013251542A5
JP2013251542A5 JP2013112636A JP2013112636A JP2013251542A5 JP 2013251542 A5 JP2013251542 A5 JP 2013251542A5 JP 2013112636 A JP2013112636 A JP 2013112636A JP 2013112636 A JP2013112636 A JP 2013112636A JP 2013251542 A5 JP2013251542 A5 JP 2013251542A5
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JP
Japan
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periodic
stitches
array
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periodicity
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JP2013112636A
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English (en)
Japanese (ja)
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JP2013251542A (ja
JP5745573B2 (ja
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Priority claimed from US13/482,955 external-priority patent/US8640060B2/en
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Publication of JP2013251542A5 publication Critical patent/JP2013251542A5/ja
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Publication of JP5745573B2 publication Critical patent/JP5745573B2/ja
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JP2013112636A 2012-05-29 2013-05-29 製造ツールのレシピを生成する方法及びそのシステム Active JP5745573B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/482,955 2012-05-29
US13/482,955 US8640060B2 (en) 2012-05-29 2012-05-29 Method of generating a recipe for a manufacturing tool and system thereof

Publications (3)

Publication Number Publication Date
JP2013251542A JP2013251542A (ja) 2013-12-12
JP2013251542A5 true JP2013251542A5 (enExample) 2014-09-18
JP5745573B2 JP5745573B2 (ja) 2015-07-08

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ID=49671900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013112636A Active JP5745573B2 (ja) 2012-05-29 2013-05-29 製造ツールのレシピを生成する方法及びそのシステム

Country Status (4)

Country Link
US (1) US8640060B2 (enExample)
JP (1) JP5745573B2 (enExample)
KR (1) KR101521190B1 (enExample)
TW (1) TWI474208B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2789311B2 (ja) 1995-04-05 1998-08-20 株式会社十勝重機工作所 大動物移動式診療台
US9141730B2 (en) * 2011-09-12 2015-09-22 Applied Materials Israel, Ltd. Method of generating a recipe for a manufacturing tool and system thereof
US10012689B2 (en) 2015-03-25 2018-07-03 Applied Materials Israel Ltd. Method of inspecting a specimen and system thereof
US10671786B2 (en) 2016-11-29 2020-06-02 Taiwan Semiconductor Manufacturing Co., Ltd. Method of modeling a mask by taking into account of mask pattern edge interaction
US10466586B2 (en) 2016-11-29 2019-11-05 Taiwan Semiconductor Manufacturing Co., Ltd. Method of modeling a mask having patterns with arbitrary angles
CN109246257B (zh) * 2018-10-12 2021-10-08 平安科技（深圳）有限公司 流量调配方法、装置、计算机设备及存储介质
CN109446695A (zh) * 2018-11-08 2019-03-08 中铁山桥集团有限公司 一种基于acad快速拼图的方法
US12118726B2 (en) * 2021-01-15 2024-10-15 Kulicke And Soffa Industries, Inc. Intelligent pattern recognition systems for wire bonding and other electronic component packaging equipment, and related methods

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3191710B2 (ja) * 1997-01-20 2001-07-23 日本電気株式会社 図形一括電子線描画用マスク及び図形一括電子線描画用マスク作成方法並びに図形一括電子線描画装置
US6486066B2 (en) * 2001-02-02 2002-11-26 Matrix Semiconductor, Inc. Method of generating integrated circuit feature layout for improved chemical mechanical polishing
US6886153B1 (en) * 2001-12-21 2005-04-26 Kla-Tencor Corporation Design driven inspection or measurement for semiconductor using recipe
JP4868727B2 (ja) * 2004-09-27 2012-02-01 株式会社東芝 自動検査レシピ作成装置及び作成方法
US7869643B2 (en) * 2007-01-31 2011-01-11 Applied Materials South East Asia Pte. Ltd. Advanced cell-to-cell inspection
KR100924338B1 (ko) * 2007-06-25 2009-11-05 주식회사 하이닉스반도체 선형 패턴 어레이 형성 방법, 이에 따른 반도체 소자 및이에 사용되는 포토 마스크
US9141730B2 (en) * 2011-09-12 2015-09-22 Applied Materials Israel, Ltd. Method of generating a recipe for a manufacturing tool and system thereof

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