JP2013230533A - Surface machining method of surface plate for polishing machine, and surface plate for polishing machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a surface machining method of a surface plate for a polishing machine by which the surface of the surface plate can be finish-machined into a precise face having a desired rugged shape without requiring artisanal skill including experiential elements, and without preparing an exclusive machine even when the surface plate for the polishing machine being a machining object has a large diameter, and by which washing after machining is facilitated.SOLUTION: A surface machining method of a surface plate for a polishing machine includes a step of, by using a surface grinding machine 10 with a rotary grinding wheel 12 movable in two axial directions, that is, longitudinal and lateral directions, performing precise shape machining on the surface plate 2 for the polishing machine being a machining object fixed to a rotating table 11 by moving the grinding wheel 12 by the combination of the two axial directions, monitoring a moving amount of the grinding wheel 12 during the shape precise machining, and finishing the surface of the surface plate 2 for the polishing machine into the precise face having the desired rugged shape.

Description

  The present invention relates to a surface processing method for a polishing machine surface plate and a surface plate for a polishing machine, and more specifically, a surface processing method for processing the surface of a polishing machine surface plate as a workpiece into a desired precision surface, The present invention also relates to a polishing machine surface plate having a surface processed using the surface processing method.

  Conventionally, as a polishing machine for polishing the surface of a workpiece such as a silicon wafer, a double-side polishing machine that simultaneously polishes both surfaces of a workpiece and a single-side polishing machine that polishes a workpiece one by one are known.

  As a general polishing machine, for example, in the case of a double-side polishing machine, a polishing machine 20 having a configuration shown in FIG. 5 is known (see Patent Document 1). The polishing machine 20 includes a lower surface plate 2 (2A) whose upper surface is a polishing surface and an upper surface plate 2 (2B) which is supported above the lower surface plate 2 (2A) so as to be movable up and down and whose lower surface is a polishing surface. ). The upper and lower surface plates 2A and 2B are rotated in directions opposite to each other around the axis by a driving device. That is, the upper surface plate 2 (2B) is rotationally driven by the drive device 22 disposed on the support frame 21. The upper surface plate 2 (2B) can be moved up and down by, for example, a cylinder device 23 as a vertical movement mechanism. On the other hand, the lower surface plate 2 (2A) is rotationally driven by a motor 24. Further, the lower surface of the lower surface plate 2 (2A) is supported by a ring-shaped support bearing 25. Further, a carrier (not shown) having a through hole for holding the wafer 3 is disposed between the lower surface plate 2 (2A) and the upper surface plate 2 (2B). According to this, by supplying the slurry from the supply pipe 26 onto the lower surface plate 2 (2A), the upper and lower surface plates 2A and 2B are rotated and the carrier is rotated, whereby the wafer 3 is moved to the upper and lower surface plates 2A and 2B. The both surfaces of the wafer 3 sandwiched between the upper and lower surface plates 2A and 2B can be polished.

  By the way, since a workpiece such as a silicon wafer that is an object to be polished by the polishing machine is required to have a surface processed with high accuracy, a surface plate for a polishing machine (for example, a polishing machine) It is necessary to finish the surface (contact surface with the workpiece) of the above-described lower surface plate and upper surface plate with high accuracy.

  For example, as a surface processing method for a surface plate for a polishing machine, as illustrated in Patent Document 2, in order to process the surface of a lower surface plate (in the same document, a ceramic lap surface) used for polishing a workpiece, There is known a surface processing method for a surface plate in which the surface plate is brought into contact with a correction carrier, and the surface plate and the correction carrier are rotated while supplying abrasive grains to finish a predetermined flat surface.

  Further, as another example of the surface processing method of the polishing machine surface plate, as shown in FIG. 6, a polishing machine surface plate 2 (for example, the above-described lower surface plate 2A, The upper surface plate 2B) is fixed on the rotating table 31 of the lapping machine 30, is brought into contact with the lapping plate 32, and the surface plate 2 and the lapping plate 32 are rotated while supplying a cutting fluid containing loose abrasive grains. A surface processing method for finishing the surface plate 2 to a predetermined flat surface is also known.

JP 2008-227393 A JP 2002-113656 A

  However, in the case of the conventional surface processing method exemplified above, there are many empirical factors to find and set the optimum conditions for the lapping machine and the correction carrier for polishing the polishing machine surface plate that is the workpiece. There was a problem that it was required and would take a long time. In addition, when the surface plate for a polishing machine, which is a workpiece, is polished, there is a problem that the lapping machine and the correction carrier are also worn and the optimum conditions cannot be maintained for a long time. These are also issues that require so-called craftsmanship techniques, and there has been a need to solve them.

  In recent years, with the increase in diameter and precision of workpieces, there is an increasing demand for increasing the diameter and precision of a polishing machine surface plate for processing the workpiece. When performing surface processing of such a surface plate for a polishing machine, according to the method using a dedicated machine such as the conventional lapping machine exemplified above, a particularly large dedicated machine must be prepared. For this reason, there is a problem that the burden on the cost becomes excessive and the use of the apparatus becomes inefficient.

  Furthermore, in the case of the conventional surface processing method exemplified above, the abrasive grains are processed while supplying free abrasive grains when polishing the polishing machine surface plate which is the workpiece. In many cases, it is finished in a state where it is cut into the surface of the surface plate for a polishing machine. As a result, it is necessary to remove abrasive grains that have bitten into the surface plate from the viewpoint of maintaining cleanliness of a clean room where a surface-finished apparatus (for example, a polishing machine) is installed and preventing foreign matter from being mixed during polishing. Yes. However, since removal requires acid cleaning and special equipment is required, there is a problem that the cost burden is excessive.

  The present invention is made in view of the above circumstances, does not require craftsmanship techniques that include many empirical elements, and prepares a dedicated machine even when the polishing machine surface plate that is a workpiece has a large diameter. It is an object of the present invention to provide a surface processing method for a surface plate for a polishing machine that can finish the surface of the surface plate to a precise surface having a desired concavo-convex shape and that can be easily cleaned after processing. .

  As an embodiment, the above-described problem is solved by a solution as disclosed below.

  The surface processing method of the surface plate for polishing machines disclosed is a table that rotates by rotating the grinding wheel in a combination of the two axial directions using a surface grinding machine in which the rotating grinding stone can move in two vertical and horizontal directions. Perform precise shape processing on a polishing machine surface plate as a fixed workpiece, monitor the amount of movement of the grinding wheel during the accurate shape processing, and form the desired uneven shape on the surface of the polishing machine surface plate. It has the process of finishing to the precision surface which has. According to this, the surface of the surface plate for polishing machines which is a workpiece can be processed using a surface grinding machine which is not a dedicated machine. Therefore, compared with the processing method using a conventional lapping machine, it does not require craftsmanship techniques that include many empirical elements, and even if the polishing machine surface plate that is the workpiece has a large diameter, Any size that fits can be processed. In addition, since grinding is performed by moving the grindstone in a combination of vertical and horizontal biaxial directions, curve processing (curved surface processing) is possible, and finishing can be performed into a surface shape having a desired uneven shape. Further, by performing feedback control by monitoring the moving amount of the grindstone, it is possible to finish the surface with high precision. Also, since abrasive grains are not used during processing, there is no need to remove the abrasive grains that have digged into the surface plate, and there is no need to install dedicated equipment (cleaning equipment) for that purpose. it can.

  Moreover, it is preferable that the said surface plate for polishers is fixed to the said table using the fixing jig used as the state at the time of fixing to a polisher. According to this, it becomes possible to fix to a table in the state similar to the state at the time of the surface plate for polishers which is a workpiece being fixed to a polisher. That is, at the time of processing the surface, the same deformation as in the state of being fixed to the polishing machine can be generated on the polishing machine surface plate. This is because the fixing position (fulcrum) of the polishing machine surface plate can be made similar during use (during polishing) and during processing. If the surface of the surface plate is processed in that state, the processing is performed in a state in which the same deformation as that generated on the surface plate is caused in advance when the surface plate is fixed to the polishing machine. It is possible to prevent a decrease in shape accuracy from occurring on the surface of the surface plate due to deformation after fixing. Therefore, a desired uneven shape can be formed with high accuracy.

  In addition, the step of processing the surface of the polishing machine surface plate is performed under a temperature environment similar to the temperature environment when performing a static accuracy inspection in a state where the polishing machine surface plate is fixed to the polishing machine. It is preferable. According to this, the surface of the polishing machine surface plate is processed in a temperature environment similar to the temperature environment when performing static accuracy inspection with the polishing machine surface plate fixed to the polishing machine. It becomes possible to do. In other words, the polishing machine surface plate that is the workpiece is processed in a temperature environment similar to that used for static accuracy inspection while being fixed to the polishing machine. It is possible to prevent a reduction in shape accuracy from occurring on the surface of the surface plate due to a difference in deformation amount due to a difference in temperature between the workpiece and the workpiece. Therefore, a desired uneven shape can be formed with high accuracy.

  In addition, the polishing machine surface plate has a liquid flow part therein, and the step of processing the surface of the polishing machine surface plate includes a liquid in the liquid flow part of the polishing machine surface plate. It is preferable that the polishing machine surface plate is adjusted to a desired temperature by passing it through. According to this, when processing the surface of the surface plate for the polishing machine and the temperature of the surface plate for the polishing machine when performing the static accuracy inspection in a state where the surface plate for the polishing machine being the workpiece is fixed to the polishing machine It is possible to make the temperature of the platen the same. As a result, it is possible to prevent a decrease in shape accuracy from occurring on the surface of the surface plate due to a difference in deformation due to a difference in temperature between the static accuracy inspection and the time of processing. Therefore, a desired uneven shape can be formed with high accuracy.

  Further, the step of processing the surface of the polishing machine surface plate is preferably carried out in a plurality of times by setting the feed setting value of the grindstone in the vertical axis direction to a unit of several μm. In a normal grinding process, in order to shorten the grinding time, it is common to increase the feed setting value of the grindstone as much as possible and to reduce the number of times of grinding. However, when the grindstone feed setting value is set to a small value of several μm, and the machining process is divided into a plurality of times, the polishing is performed at the time of machining the surface of the polishing machine surface plate that is the workpiece. When the grindstone is pressed against the machine surface plate, the stress generated on the surface plate can be reduced. As a result, since the deformation amount of the surface plate can be reduced, it is possible to prevent the shape accuracy from being lowered on the surface of the surface plate due to the deformation. Therefore, a desired uneven shape can be formed with high accuracy.

  The disclosed polishing machine surface plate is characterized in that the surface is finished into a precision surface having a desired concavo-convex shape by using the surface processing method of the polishing machine surface plate. According to this, it is possible to realize a polishing machine surface plate in which the surface shape at the time of use (during polishing) is formed in a desired uneven shape with high accuracy.

  According to the surface processing method of the surface plate for a polishing machine disclosed, it does not require craftsmanship technology that includes many empirical elements, and even if the surface plate for the polishing machine that is the workpiece is a large diameter Without preparing a machine, the surface of the surface plate can be finished to a precise surface having a desired concavo-convex shape, and cleaning after processing becomes easy.

It is a perspective view (schematic diagram) which shows the example of the surface grinder used for the surface processing method of the surface plate for polishers concerning the embodiment of the present invention. It is explanatory drawing for demonstrating the surface processing method of the surface plate for grinders which concerns on embodiment of this invention. It is a flowchart of the surface processing method of the surface plate for grinders which concerns on embodiment of this invention. It is explanatory drawing for demonstrating the surface processing method of the surface plate for grinders which concerns on embodiment of this invention. It is the schematic of the polisher provided with the surface plate for polishers which is a workpiece in the surface processing method of the surface plate for polishers which concerns on embodiment of this invention. It is explanatory drawing for demonstrating the surface processing method of the surface plate for polishing machines which concerns on the conventional embodiment.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Note that components having the same function are denoted by the same reference symbols throughout the drawings for describing the embodiments, and the repetitive description thereof may be omitted. Further, the device configuration diagram is a schematic diagram and does not display actual dimensions (ratio) in each device configuration.

  First, a configuration example of the polishing machine surface plate 2 that is a workpiece in the surface processing method of the polishing machine surface plate according to the present embodiment will be described. As described above, the polishing machine surface plate 2 is a surface plate for processing (polishing) the workpiece 3 in the polishing machine 20 (see FIG. 5) for polishing the surface of the workpiece 3 such as a silicon wafer. Lower surface plate 2A, upper surface plate 2B). Here, the lower surface plate 2A of the polishing machine 20 will be described as an example of the surface plate 2 for the polishing machine.

  The conventional polishing machine surface plate (for example, ceramic surface plate) mainly has a diameter of about 800 [mm] or less. However, in recent years, with an increase in workpiece diameter, there has been a demand for an increase in the diameter of a surface plate for a polishing machine (for example, a diameter of about 1200 [mm]). In this regard, in the processing method according to the present embodiment, a polishing machine surface plate having a diameter of about 500 to 2800 [mm] can be used as a workpiece. In particular, it is very effective in that the surface processing of a polishing plate having a diameter of 800 [mm] or more, which has been difficult to process, can be performed easily and with high accuracy.

  Examples of materials constituting the polishing machine surface plate 2 include stainless steel materials, iron-based metal materials, and ceramic materials. For example, in the case of a surface plate using alumina ceramic, a large amount of diamond free abrasive grains is required in the surface processing by a conventional lapping machine, which causes a problem that the processing cost increases. However, according to the processing method according to the present embodiment, the solution can be achieved.

  Next, the structural example of the surface grinding machine 10 used for the surface processing method of the surface plate for polishing machines which concerns on this embodiment is demonstrated. FIG. 1 shows a perspective view (schematic diagram) of a surface grinding machine 10.

  The surface grinder 10 is a general-purpose horizontal axis circular table surface grinder as an example. A rotating table 11 for fixing the workpiece is provided. The table 11 can be placed and fixed even if it is the polishing machine surface plate 2 having a diameter of about 1200 [mm] or more. Note that rotation is controlled by an inverter, and stable rotation is realized.

When surface processing of the polishing machine surface plate 2 is performed using the surface grinding machine 10, the polishing machine surface plate 2 is in a state similar to the state when being fixed to the polishing machine 20. It is fixed to the table 11 using
As an example, the fixing jig 4 is a ring-shaped member as shown in FIG. More specifically, the polishing machine surface plate 2 (here, the lower surface plate 2A) is fixed on the ring-shaped bearing 25 (for example, a thrust bearing) when fixed to the polishing machine 20 (see FIG. 5). Fixed in the mounted state. Therefore, it is preferable to use a ring-shaped member having a plate surface having the same diameter and the same width as the bearing 25 (that is, the same inner diameter and the same outer diameter) as the fixing jig 4.

  According to this, it becomes possible to fix to the table 11 in the same state as the state when the polishing machine surface plate 2 that is a workpiece is fixed to the polishing machine 20. That is, at the time of processing the surface of the polishing machine surface plate 2, deformation similar to the state when fixed to the polishing machine 20 can be generated in the polishing machine surface plate 2. This is because the fixing position (fulcrum) of the polishing machine surface plate 2 can be made the same during use (during polishing) and during processing. If the surface of the surface plate 2 is processed in that state, the processing (grinding) is performed in a state in which the same deformation as that generated in the surface plate 2 is caused in advance when the surface plate 2 is fixed to the polishing machine 20. Therefore, it is possible to prevent the shape accuracy from being lowered on the surface of the surface plate 2 due to the deformation after being fixed to the polishing machine 20. Therefore, a desired uneven shape can be formed with high accuracy in the surface processing of the polishing platen 2.

  As shown in FIG. 2, the surface grinding machine 10 has a configuration in which the rotating grindstone 12 can move in two vertical and horizontal directions (vertical axis direction and horizontal axis direction). More specifically, the grindstone 12 is movable in a direction parallel to the vertical axis, that is, the vertical axis (Z axis in FIG. 2), and in a direction parallel to the horizontal axis, that is, the horizontal axis (Y axis in FIG. 2). is there. A linear scale (not shown) is provided in each of the vertical axis direction and the horizontal axis direction. This makes it possible to accurately grasp the moving amount of the grindstone 12.

  According to said structure, the grindstone 12 can be moved by the combination of the vertical and horizontal biaxial directions. Therefore, the surface of the workpiece (polishing machine surface plate 2) can be curved (curved) and finished into a surface having a desired uneven shape.

  The surface grinding machine 10 may be configured to include a machining liquid supply means (not shown) for supplying a machining liquid during machining.

  Next, a surface processing method for a polishing machine surface plate according to an embodiment of the present invention will be described with reference to the flowchart of FIG. In addition, the surface processing method of the surface plate 2 for polishing machines which concerns on this embodiment is demonstrated taking the case where it implements using the said surface grinder 10 as an example.

First, the polishing machine surface plate 2 is fixed to the table 11 of the surface grinding machine 10 (step S1).
In the present embodiment, the fixing jig 4 is used for fixing. For example, when the polishing machine surface plate 2 (here, the lower surface plate 2A) is a workpiece, the above-mentioned ring-shaped fixing jig 4 is disposed on the table 11 and polished on the fixing jig 4. The machine surface plate 2 is placed and fixed (see FIG. 2).

  Next, in the present embodiment, a process is performed in which the polishing machine surface plate 2 is in a temperature environment similar to the temperature environment when performing the static accuracy inspection with the polishing machine 20 fixed to the polishing machine 20 (step S2). .

  According to this, the polishing machine surface plate 2 of the polishing machine under the temperature environment similar to the temperature environment when the static accuracy inspection is performed in a state where the polishing machine surface plate 2 as a workpiece is fixed to the polishing machine 20. It becomes possible to process the surface. That is, since the polishing machine surface plate 2 that is a workpiece is processed in a temperature environment similar to the temperature environment when the static accuracy inspection is performed while being fixed to the polishing machine 20, the static accuracy It is possible to prevent a decrease in shape accuracy from occurring on the surface of the surface plate 2 due to a difference in deformation amount due to a difference in temperature between the time of inspection and the time of processing. Therefore, a desired uneven shape can be formed with high accuracy.

Here, when the polishing platen 2 has a configuration having a liquid flow passage (not shown) inside, the following step S2 ′ may be performed together with the above step S2. That is, as the step S2 ′, the step of processing the surface of the polishing machine surface plate 2 is performed by passing a liquid at a predetermined temperature through the liquid flow part of the polishing machine surface plate 2. 2 is performed while adjusting to a desired temperature distribution.
According to this, the temperature distribution of the surface plate 2 and the surface of the surface plate 2 when the static accuracy inspection is performed in a state where the surface plate 2 for the polishing machine, which is a workpiece, is fixed to the polishing machine 20. It becomes possible to make the temperature distribution of the said surface plate 2 at the time of processing the same. As a result, it is possible to prevent a decrease in shape accuracy from occurring on the surface of the surface plate 2 due to a difference in deformation amount due to a difference in temperature distribution between the static accuracy inspection and the workpiece. Therefore, a desired uneven shape can be formed with high accuracy.

Following step S2, the coordinates corresponding to the grinding wheel trajectory are input based on the target shape (step S3). Then, following the step S3, a step of performing shape precision machining is performed by grinding the polishing machine surface plate 2 as a workpiece fixed to the rotating table 11 by moving the grindstone 12 (step S4). ). At this time, the grindstone 12 is moved in a combination of the two axial directions by using the surface grinder 10 in which the rotating grindstone 12 is movable in two vertical and horizontal directions (Y-axis direction and Z-axis direction in FIG. 2).
According to this, it is possible to finish the surface of the polishing machine surface plate 2 into a precision surface having a desired uneven shape. The term “precision surface” as used herein refers to a convex shape (so-called bowl shape), concave shape (so-called mortar shape) having a concavo-convex of several μm to several tens μm, W shape, inverted W shape, seagull shape, etc. These are all shape names derived from the cross-sectional shape.

  When performing the step S4, when the surface grinding machine 10 includes the above-described machining liquid supply means (not shown), it is preferable to adjust the temperature of the machining liquid to a predetermined temperature and supply it. The reason for this is that a temperature distribution similar to that at the time of static accuracy inspection of the polishing machine surface plate 2 that is a workpiece can be obtained, and deformation of the surface plate 2 due to a change in the temperature distribution can be prevented. It is.

  Moreover, when performing step S4, it processes (grinds), monitoring the moving amount | distance of the grindstone 12. FIG. The surface grinding machine 10 includes a linear scale, and can accurately grasp the moving amount of the grindstone 12. The movement amount is monitored (measured), and a control unit (not shown) performs feedback control based on the monitoring result (measurement result). More specifically, the actual movement amount of the grindstone 12 is monitored by a linear scale in each of the vertical axis direction (Z-axis direction) and the horizontal axis direction (Y-axis direction), and feedback control is performed to move the grindstone 12. Thereby, since the moving amount of the grindstone 12 can be controlled with high accuracy, the surface of the polishing platen 2 can be processed with high accuracy.

  Here, the amount of movement of the grindstone 12 during shape precision machining is monitored (measured), and the control unit determines whether or not the amount of movement has reached a specified value (a preset amount of movement) (step S5). . As a result of the determination, if the specified value is not reached, the movement of the grindstone 12 is continued, and if the specified value is reached, the movement of the grindstone 12 is stopped.

  In the present embodiment, as shown in the explanatory diagram of FIG. 4, the grinding step is performed a plurality of times (for example, n) by setting the feed set value a of the grindstone 12 in the vertical axis direction (Z-axis direction) to several μm. (This is an example in which the required grinding amount (dimension in the Z-axis direction) is a [μm] × n [times]). However, it may be stopped manually or automatically as long as it can be confirmed that the entire processing surface has been processed before reaching n times in the set locus.

Here, the broken line in FIG. 4 is the locus of the grindstone 12. More specifically, as shown in FIG. 4, when finishing the polishing platen 2 with a convex center, the control unit calculates the trajectory of the grindstone 12 (broken line in FIG. 4) and 1 stroke. The feed control is performed with the feed set value a set every time. This is repeated until the entire surface on one side of the radius of the polishing machine surface plate 2 hits (grinds) as shown in FIG. At this time, since the polishing machine surface plate 2 is fixed to the table 11 and is rotated, the trajectory on one side of the radius is finished in a shape that is folded and transferred.
The starting point of the one stroke can be set on either the center side or the outer peripheral side of the polishing machine surface plate 2.

  According to this, by setting the feed set value a of the grindstone 12 to a small value in units of several μm and performing the machining process (grinding process) a plurality of times (here, n times), the workpiece When the surface of the polishing machine surface plate 2 is processed, stress generated in the surface plate 2 can be reduced by pressing the grindstone 12 against the polishing machine surface plate 2. As a result, since the deformation amount of the surface plate 2 can be reduced, it is possible to prevent the shape accuracy from being lowered on the surface of the surface plate 2 due to the deformation. Therefore, a desired uneven shape can be formed with high accuracy.

  As a specific process, the control unit determines whether or not the number of times of sending the grindstone 12 has reached a specified number (here, n times) (step S6). As a result of the determination, if the specified number has not been reached, the control unit (not shown) moves the grindstone 12 vertically by the distance set as the feed setting value (preset feed setting value) of the grindstone 12 in the vertical direction. Control is performed in the axial direction (step S7), and then steps S4 to S6 are repeated. When the specified number of times has been reached, a series of steps is completed.

  In this manner, the surface processing method for the polishing machine surface plate according to the present embodiment is completed.

  As described above, according to the disclosed surface processing method for a polishing machine surface plate, the surface of the polishing machine surface plate that is a workpiece can be processed using a surface grinding machine that is not a dedicated machine. Therefore, compared with the conventional processing method using a lapping machine, it is possible to solve the problem that much empirical elements are required to find and set the optimum conditions of the lapping machine and it takes a very long time. Become. Further, when the polishing machine surface plate, which is a workpiece, is polished, the lapping machine, the correction carrier, and the like are worn, so that the problem that the optimum condition cannot be maintained for a long time can be solved. That is, it is possible to solve the problem that so-called artisan technology is required. Furthermore, it is possible to perform processing even when the polishing machine surface plate that is a workpiece has a large diameter.

In addition, since grinding is performed by moving the grindstone in a combination of vertical and horizontal biaxial directions, curve processing (curved surface processing) is possible, and finishing can be performed into a surface shape having a desired uneven shape. Further, by performing feedback control by monitoring the moving amount of the grindstone, it is possible to finish the surface with high precision. In addition, since no abrasive grains are used during processing, a process for removing the abrasive grains that have bitten into the surface plate is not required, and installation of dedicated equipment (cleaning equipment) for that purpose is also unnecessary.
Furthermore, even if the material of the workpiece (the surface plate for the polishing machine) changes, it can be dealt with by changing to a grindstone suitable for it.

  If the surface processing method of the surface plate for polishing machines disclosed is used, a precise surface having a desired concavo-convex shape, that is, a convex shape (so-called bowl shape) having a concavo-convex shape of several μm to several tens of μm, a concave shape (so-called It is possible to realize a polishing machine surface plate 2 formed in a mortar shape, a W shape, an inverted W shape, a seagull shape, or the like.

  Needless to say, the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the present invention. In particular, the lower platen of the double-sided polishing machine has been described as an example of the polishing machine platen that is a workpiece, but the present invention is not limited to this.

2 Polishing machine surface plate 2A Polishing machine surface plate (lower surface plate)
2B Polishing machine surface plate (upper surface plate)
3 Work 4 Fixing jig 10 Surface grinding machine 11 Table 12 Grinding wheel 20 Polishing machine 30 Lapping machine 31 Table 32 Lapping machine

Claims (6)

A surface plate for a polishing machine as a workpiece fixed to a rotating table by moving the grindstone in a combination of the two axial directions using a surface grinder capable of moving the rotating grindstone in two vertical and horizontal directions. And a step of finishing the surface of the surface plate for the polishing machine into a precision surface having a desired concavo-convex shape by performing shape precision processing on the surface, monitoring the movement amount of the grindstone during the shape precision processing. The surface processing method of the surface plate for polishing machines. 2. The polishing machine surface plate according to claim 1, wherein the polishing machine surface plate is fixed to the table using a fixing jig that is in a state similar to a state when being fixed to the polishing machine. Surface processing method. The step of processing the surface of the polishing machine surface plate is carried out in a temperature environment similar to the temperature environment when performing a static accuracy inspection in a state where the polishing machine surface plate is fixed to the polishing machine. The surface processing method of the surface plate for polishers of Claim 1 or Claim 2 characterized by the above-mentioned. The polishing machine surface plate has a liquid flow part inside,
The step of processing the surface of the polishing machine surface plate is carried out while adjusting the polishing machine surface plate to a desired temperature distribution by flowing liquid through the liquid flow part of the polishing machine surface plate. The surface processing method of the surface plate for grinders as described in any one of Claims 1-3 characterized by the above-mentioned. The step of processing the surface of the surface plate for a polishing machine is carried out in a plurality of times by setting the feed setting value of the grindstone in the vertical axis direction to a unit of several μm. The surface processing method of the surface plate for polishing machines as described in any one of Claims. A polishing machine surface characterized in that the surface is finished into a precision surface having a desired concavo-convex shape by using the surface processing method for a polishing machine surface plate according to claim 1. Board.

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