JP2013224942A - 自動欠陥分類のための未知欠陥除去の最適化 - Google Patents

自動欠陥分類のための未知欠陥除去の最適化 Download PDF

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JP2013224942A
JP2013224942A JP2013099681A JP2013099681A JP2013224942A JP 2013224942 A JP2013224942 A JP 2013224942A JP 2013099681 A JP2013099681 A JP 2013099681A JP 2013099681 A JP2013099681 A JP 2013099681A JP 2013224942 A JP2013224942 A JP 2013224942A
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class
defect
defects
feature space
confidence
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Gadi Greenberg
グリーンバーグ ガディ
Kaizerman Idan
カイゼルマン イダン
Rozenman Efrat
ローゼンマン エフラ
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Applied Materials Israel Ltd
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/24—Classification techniques
    • G06F18/241—Classification techniques relating to the classification model, e.g. parametric or non-parametric approaches
    • G06F18/2411—Classification techniques relating to the classification model, e.g. parametric or non-parametric approaches based on the proximity to a decision surface, e.g. support vector machines
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/24—Classification techniques
    • G06F18/243—Classification techniques relating to the number of classes
    • G06F18/2433—Single-class perspective, e.g. one-against-all classification; Novelty detection; Outlier detection
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/764—Arrangements for image or video recognition or understanding using pattern recognition or machine learning using classification, e.g. of video objects
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/98—Detection or correction of errors, e.g. by rescanning the pattern or by human intervention; Evaluation of the quality of the acquired patterns
    • G06V10/987—Detection or correction of errors, e.g. by rescanning the pattern or by human intervention; Evaluation of the quality of the acquired patterns with the intervention of an operator
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10056—Microscopic image
    • G06T2207/10061—Microscopic image from scanning electron microscope
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20076—Probabilistic image processing
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20081—Training; Learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
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  • Evolutionary Biology (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Life Sciences & Earth Sciences (AREA)
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  • Medical Informatics (AREA)
  • General Health & Medical Sciences (AREA)
  • Databases & Information Systems (AREA)
  • Computing Systems (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP2013099681A 2012-04-19 2013-04-18 自動欠陥分類のための未知欠陥除去の最適化 Pending JP2013224942A (ja)

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US13/451,500 US9715723B2 (en) 2012-04-19 2012-04-19 Optimization of unknown defect rejection for automatic defect classification

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WO2017168630A1 (ja) * 2016-03-30 2017-10-05 株式会社日立ハイテクノロジーズ 欠陥検査装置、欠陥検査方法
CN107820620A (zh) * 2015-05-08 2018-03-20 科磊股份有限公司 用于缺陷分类的方法和系统
JP2018198034A (ja) * 2017-05-25 2018-12-13 日東電工株式会社 画像分類システム、画像分類機能付製造装置、画像分類用の識別器、及び画像分類方法
JP2019075553A (ja) * 2017-09-28 2019-05-16 アプライド マテリアルズ イスラエル リミテッド 半導体試料の欠陥を分類する方法およびそのシステム
JP2020113767A (ja) * 2019-01-16 2020-07-27 アプライド マテリアルズ イスラエル リミテッド 半導体試料の欠陥を分類する方法およびそのシステム
WO2021075152A1 (ja) * 2019-10-18 2021-04-22 株式会社日立ハイテク 欠陥分類装置、欠陥分類プログラム
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