KR102110755B1 - 자동 결함 분류를 위한 알려지지 않은 결함 리젝션의 최적화 - Google Patents

자동 결함 분류를 위한 알려지지 않은 결함 리젝션의 최적화 Download PDF

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KR102110755B1
KR102110755B1 KR1020130043453A KR20130043453A KR102110755B1 KR 102110755 B1 KR102110755 B1 KR 102110755B1 KR 1020130043453 A KR1020130043453 A KR 1020130043453A KR 20130043453 A KR20130043453 A KR 20130043453A KR 102110755 B1 KR102110755 B1 KR 102110755B1
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defects
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KR20130118275A (ko
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가디 그린베르그
이단 카이제르만
에프라트 로젠만
블라디미르 쉴레인
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어플라이드 머티리얼즈 이스라엘 리미티드
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    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/24—Classification techniques
    • G06F18/241—Classification techniques relating to the classification model, e.g. parametric or non-parametric approaches
    • G06F18/2411—Classification techniques relating to the classification model, e.g. parametric or non-parametric approaches based on the proximity to a decision surface, e.g. support vector machines
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    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
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    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/98—Detection or correction of errors, e.g. by rescanning the pattern or by human intervention; Evaluation of the quality of the acquired patterns
    • G06V10/987—Detection or correction of errors, e.g. by rescanning the pattern or by human intervention; Evaluation of the quality of the acquired patterns with the intervention of an operator
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
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    • G06T2207/10056—Microscopic image
    • G06T2207/10061—Microscopic image from scanning electron microscope
    • G—PHYSICS
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    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20076—Probabilistic image processing
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    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20081—Training; Learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
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KR1020130043453A 2012-04-19 2013-04-19 자동 결함 분류를 위한 알려지지 않은 결함 리젝션의 최적화 Active KR102110755B1 (ko)

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US13/451,500 2012-04-19
US13/451,500 US9715723B2 (en) 2012-04-19 2012-04-19 Optimization of unknown defect rejection for automatic defect classification

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KR102110755B1 true KR102110755B1 (ko) 2020-05-15

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US (1) US9715723B2 (https=)
JP (2) JP2013224942A (https=)
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