JP2013217650A5 - - Google Patents

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Publication number
JP2013217650A5
JP2013217650A5 JP2012085489A JP2012085489A JP2013217650A5 JP 2013217650 A5 JP2013217650 A5 JP 2013217650A5 JP 2012085489 A JP2012085489 A JP 2012085489A JP 2012085489 A JP2012085489 A JP 2012085489A JP 2013217650 A5 JP2013217650 A5 JP 2013217650A5
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JP
Japan
Prior art keywords
gyro sensor
unit
drive
sensor according
side wall
Prior art date
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Application number
JP2012085489A
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English (en)
Japanese (ja)
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JP2013217650A (ja
JP6024163B2 (ja
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Priority to JP2012085489A priority Critical patent/JP6024163B2/ja
Priority claimed from JP2012085489A external-priority patent/JP6024163B2/ja
Publication of JP2013217650A publication Critical patent/JP2013217650A/ja
Publication of JP2013217650A5 publication Critical patent/JP2013217650A5/ja
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Publication of JP6024163B2 publication Critical patent/JP6024163B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012085489A 2012-04-04 2012-04-04 ジャイロセンサー、及び電子機器 Expired - Fee Related JP6024163B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012085489A JP6024163B2 (ja) 2012-04-04 2012-04-04 ジャイロセンサー、及び電子機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012085489A JP6024163B2 (ja) 2012-04-04 2012-04-04 ジャイロセンサー、及び電子機器

Publications (3)

Publication Number Publication Date
JP2013217650A JP2013217650A (ja) 2013-10-24
JP2013217650A5 true JP2013217650A5 (enrdf_load_stackoverflow) 2015-05-21
JP6024163B2 JP6024163B2 (ja) 2016-11-09

Family

ID=49589931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012085489A Expired - Fee Related JP6024163B2 (ja) 2012-04-04 2012-04-04 ジャイロセンサー、及び電子機器

Country Status (1)

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JP (1) JP6024163B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105424020B (zh) * 2015-10-30 2018-06-26 北京自动化控制设备研究所 一种带解耦功能的音叉型微机电陀螺敏感结构
JP6922325B2 (ja) 2017-03-28 2021-08-18 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、電子機器および移動体
JP7098904B2 (ja) 2017-09-29 2022-07-12 セイコーエプソン株式会社 物理量センサー、慣性計測装置、移動体測位装置、電子機器および移動体

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2888029B2 (ja) * 1992-05-08 1999-05-10 株式会社村田製作所 角速度センサ
JP3603501B2 (ja) * 1996-09-25 2004-12-22 株式会社村田製作所 角速度検出装置
JP3262082B2 (ja) * 1997-10-16 2002-03-04 株式会社豊田中央研究所 振動式角速度検出器
JP2001304866A (ja) * 2000-04-19 2001-10-31 Murata Mfg Co Ltd ジャイロ装置及びそのクロストーク低減方法
JP3812543B2 (ja) * 2003-03-28 2006-08-23 株式会社デンソー 角速度センサ装置及びその調整方法
EP1677073B1 (en) * 2004-12-29 2013-06-19 STMicroelectronics Srl Micro-electro-mechanical gyroscope having electrically insulated regions
JP2009098007A (ja) * 2007-10-17 2009-05-07 Denso Corp 物理量センサ
JP4609558B2 (ja) * 2008-09-02 2011-01-12 株式会社デンソー 角速度センサ

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