ITMI20130672A1 - Sensore della frequenza di rotazione - Google Patents

Sensore della frequenza di rotazione

Info

Publication number
ITMI20130672A1
ITMI20130672A1 IT000672A ITMI20130672A ITMI20130672A1 IT MI20130672 A1 ITMI20130672 A1 IT MI20130672A1 IT 000672 A IT000672 A IT 000672A IT MI20130672 A ITMI20130672 A IT MI20130672A IT MI20130672 A1 ITMI20130672 A1 IT MI20130672A1
Authority
IT
Italy
Prior art keywords
coriolis mass
rotation frequency
frequency sensor
yaw
main extension
Prior art date
Application number
IT000672A
Other languages
English (en)
Inventor
Thorsten Balslink
Burkhard Kuhlmann
Daniel Christoph Meisel
Rolf Scheben
Benjamin Schmidt
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20130672A1 publication Critical patent/ITMI20130672A1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
IT000672A 2012-05-11 2013-04-24 Sensore della frequenza di rotazione ITMI20130672A1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102012207937A DE102012207937A1 (de) 2012-05-11 2012-05-11 Drehratensensor

Publications (1)

Publication Number Publication Date
ITMI20130672A1 true ITMI20130672A1 (it) 2013-11-12

Family

ID=49475549

Family Applications (1)

Application Number Title Priority Date Filing Date
IT000672A ITMI20130672A1 (it) 2012-05-11 2013-04-24 Sensore della frequenza di rotazione

Country Status (4)

Country Link
US (1) US9651375B2 (it)
CN (1) CN103630127B (it)
DE (1) DE102012207937A1 (it)
IT (1) ITMI20130672A1 (it)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6189792B2 (ja) * 2014-05-19 2017-08-30 日立オートモティブシステムズ株式会社 角速度センサ
JP2016057073A (ja) 2014-09-05 2016-04-21 セイコーエプソン株式会社 物理量センサー素子、物理量センサー、電子機器および移動体
JP6481293B2 (ja) 2014-09-05 2019-03-13 セイコーエプソン株式会社 物理量センサー素子、物理量センサー、電子機器および移動体
JP6481294B2 (ja) * 2014-09-05 2019-03-13 セイコーエプソン株式会社 物理量センサー素子、物理量センサー、電子機器および移動体
DE102015207856A1 (de) * 2015-04-29 2016-11-17 Robert Bosch Gmbh Drehratensensor und Verfahren
US9689677B2 (en) * 2015-06-19 2017-06-27 Nxp Usa, Inc. MEMS device with common mode rejection structure
DE102015213447A1 (de) * 2015-07-17 2017-01-19 Robert Bosch Gmbh Drehratensensor mit minimierten Störbewegungen in der Antriebsmode
DE102015216459A1 (de) * 2015-08-28 2017-03-02 Robert Bosch Gmbh Kombi-Elektrode für Antrieb, Antriebsdetektion, Coriolisdetektion und Quadraturkompensation
DE102015216460A1 (de) * 2015-08-28 2017-03-02 Robert Bosch Gmbh Zweiachsiger ultrarobuster Drehratensensor für Automotive Anwendungen
DE102016213877A1 (de) * 2015-11-20 2017-05-24 Robert Bosch Gmbh Mikromechanischer Drehratensensor und Betriebsverfahren desselben
US10359284B2 (en) 2015-12-10 2019-07-23 Invensense, Inc. Yaw rate gyroscope robust to linear and angular acceleration
ITUA20162172A1 (it) * 2016-03-31 2017-10-01 St Microelectronics Srl Sensore accelerometrico realizzato in tecnologia mems avente elevata accuratezza e ridotta sensibilita' nei confronti della temperatura e dell'invecchiamento
DE102016211984A1 (de) * 2016-06-30 2018-01-04 Robert Bosch Gmbh Inertialsensor zur Messung einer Drehrate und/oder Beschleunigung
DE102017213640A1 (de) * 2017-08-07 2019-02-07 Robert Bosch Gmbh Drehratensensor, Verfahren zur Herstellung eines Drehratensensors
DE102017213637A1 (de) * 2017-08-07 2019-02-07 Robert Bosch Gmbh Ein- und zweiachsiger Drehratensensor
DE102017215503A1 (de) * 2017-09-05 2019-03-07 Robert Bosch Gmbh Mikromechanische Drehraten-Sensoranordnung und entsprechendes Herstellungsverfahren
DE102017216010A1 (de) * 2017-09-12 2019-03-14 Robert Bosch Gmbh Mikromechanische Drehraten-Sensoranordnung und entsprechendes Herstellungsverfahren
DE102018210491A1 (de) * 2018-06-27 2020-01-02 Robert Bosch Gmbh Mikroelektromechanischer Sensor
US11333499B2 (en) * 2018-09-14 2022-05-17 Honeywell International Inc. Vibratory error compensation in a tuning fork gyroscope such as a Coriolis Vibratory Gyroscope (CVG)
US10823569B1 (en) * 2019-08-22 2020-11-03 Nxp Usa, Inc. Multiple axis sensing device based on frequency modulation and method of operation
DE102020205372A1 (de) * 2020-04-28 2021-10-28 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für einen Drehratensensor und entsprechendes Herstellungsverfahren
DE102020205369A1 (de) * 2020-04-28 2021-10-28 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für einen Drehratensensor und entsprechendes Herstellungsverfahren
US11846508B2 (en) 2020-05-25 2023-12-19 Murata Manufacturing Co., Ltd. Gyroscope with mass pairs
FR3116601B1 (fr) * 2020-11-20 2022-10-14 Commissariat Energie Atomique Gyromètre resistant aux vibrations
DE102021200483A1 (de) * 2021-01-20 2022-07-21 Robert Bosch Gesellschaft mit beschränkter Haftung Dreiachsiger Drehratensensor mit einem Substrat und einem Doppelrotor

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US4653325A (en) * 1984-03-02 1987-03-31 Kabushikikaisha Tokyo Keiki Gyro apparatus
US5635640A (en) * 1995-06-06 1997-06-03 Analog Devices, Inc. Micromachined device with rotationally vibrated masses
JPH10339637A (ja) * 1997-06-06 1998-12-22 Nippon Soken Inc 振動型角速度検出装置
DE10203515A1 (de) 2002-01-30 2003-08-07 Bosch Gmbh Robert Mikromechanischer Drehratensensor
US6701786B2 (en) * 2002-04-29 2004-03-09 L-3 Communications Corporation Closed loop analog gyro rate sensor
CN100468062C (zh) * 2003-04-28 2009-03-11 模拟器件公司 提供一个加速度检测轴和两个角速度检测轴的微加工多传感器
FR2859528B1 (fr) * 2003-09-09 2006-01-06 Thales Sa Gyrometre micro-usine a double diapason et a detection dans le plan de la plaque usinee
US20060169041A1 (en) * 2005-02-02 2006-08-03 Madni Asad M Combined gyroscope and 2-axis accelerometer
JP2007071677A (ja) * 2005-09-07 2007-03-22 Hitachi Ltd コンバインドセンサとその製造方法
US7461552B2 (en) * 2006-10-23 2008-12-09 Custom Sensors & Technologies, Inc. Dual axis rate sensor
DE102008043796B4 (de) * 2008-11-17 2023-12-21 Robert Bosch Gmbh Drehratensensor
IT1394007B1 (it) * 2009-05-11 2012-05-17 St Microelectronics Rousset Struttura microelettromeccanica con reiezione migliorata di disturbi di accelerazione
US8322213B2 (en) * 2009-06-12 2012-12-04 The Regents Of The University Of California Micromachined tuning fork gyroscopes with ultra-high sensitivity and shock rejection
US8739626B2 (en) * 2009-08-04 2014-06-03 Fairchild Semiconductor Corporation Micromachined inertial sensor devices
US8534127B2 (en) * 2009-09-11 2013-09-17 Invensense, Inc. Extension-mode angular velocity sensor
DE102009046506B4 (de) * 2009-11-06 2024-01-18 Robert Bosch Gmbh Drehratensensor
ITTO20091042A1 (it) * 2009-12-24 2011-06-25 St Microelectronics Srl Giroscopio integrato microelettromeccanico con migliorata struttura di azionamento
DE102010000811A1 (de) * 2010-01-12 2011-07-14 Robert Bosch GmbH, 70469 Mikromechanischer Drehratensensor mit zwei sensitiven Achsen und gekoppelten Detektionsmoden
US20110252887A1 (en) * 2010-04-16 2011-10-20 Donato Cardarelli Electrical Damping for Isolation and Control of Mems Sensors Experiencing High-G Launch
DE102010029630A1 (de) * 2010-06-02 2011-12-08 Robert Bosch Gmbh Drehratensensor
DE102010061755A1 (de) * 2010-11-23 2012-05-24 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors

Also Published As

Publication number Publication date
DE102012207937A1 (de) 2013-11-14
CN103630127A (zh) 2014-03-12
CN103630127B (zh) 2017-10-27
US20130298672A1 (en) 2013-11-14
US9651375B2 (en) 2017-05-16

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