ITMI20110874A1 - Sensore di angolo di rotazione - Google Patents

Sensore di angolo di rotazione

Info

Publication number
ITMI20110874A1
ITMI20110874A1 IT000874A ITMI20110874A ITMI20110874A1 IT MI20110874 A1 ITMI20110874 A1 IT MI20110874A1 IT 000874 A IT000874 A IT 000874A IT MI20110874 A ITMI20110874 A IT MI20110874A IT MI20110874 A1 ITMI20110874 A1 IT MI20110874A1
Authority
IT
Italy
Prior art keywords
coriolis element
rotation angle
angle sensor
rotor
vibration
Prior art date
Application number
IT000874A
Other languages
English (en)
Inventor
Burkhard Kuhlmann
Daniel Christoph Meisel
Torsten Ohms
Rolf Scheben
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20110874A1 publication Critical patent/ITMI20110874A1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Measuring Volume Flow (AREA)
IT000874A 2010-06-02 2011-05-18 Sensore di angolo di rotazione ITMI20110874A1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102010029634.1A DE102010029634B4 (de) 2010-06-02 2010-06-02 Drehratensensor

Publications (1)

Publication Number Publication Date
ITMI20110874A1 true ITMI20110874A1 (it) 2011-12-03

Family

ID=44898716

Family Applications (1)

Application Number Title Priority Date Filing Date
IT000874A ITMI20110874A1 (it) 2010-06-02 2011-05-18 Sensore di angolo di rotazione

Country Status (5)

Country Link
US (1) US8875575B2 (it)
JP (1) JP5930265B2 (it)
CN (1) CN102353368B (it)
DE (1) DE102010029634B4 (it)
IT (1) ITMI20110874A1 (it)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8178989B2 (en) * 2010-12-15 2012-05-15 General Electric Company System and methods for adjusting a yaw angle of a wind turbine
DE102011056971A1 (de) * 2011-12-23 2013-06-27 Maxim Integrated Products, Inc. Mikromechanischer Coriolis-Drehratensensor
DE102012200132A1 (de) * 2012-01-05 2013-07-11 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
US20140144232A1 (en) * 2012-11-28 2014-05-29 Yizhen Lin Spring for microelectromechanical systems (mems) device
GB201307773D0 (en) * 2013-04-30 2013-06-12 Atlantic Inertial Systems Ltd MEMS sensors
DE102014225844A1 (de) * 2014-12-15 2016-06-16 Robert Bosch Gmbh Verfahren zum Testen der Funktionalität eines Drehratensensors
FI127203B (en) * 2015-05-15 2018-01-31 Murata Manufacturing Co Vibrating micromechanical sensor for angular velocity
DE102015213465A1 (de) * 2015-07-17 2017-01-19 Robert Bosch Gmbh Mehrachsiger Drehratensensor mit geteiltem zentralem Rotor
DE102017215503A1 (de) * 2017-09-05 2019-03-07 Robert Bosch Gmbh Mikromechanische Drehraten-Sensoranordnung und entsprechendes Herstellungsverfahren
JP7188311B2 (ja) 2019-07-31 2022-12-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、及び移動体
DE102020205372A1 (de) * 2020-04-28 2021-10-28 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für einen Drehratensensor und entsprechendes Herstellungsverfahren
DE102020205369A1 (de) * 2020-04-28 2021-10-28 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für einen Drehratensensor und entsprechendes Herstellungsverfahren
DE102022114407B3 (de) 2022-06-08 2023-10-05 Northrop Grumman Litef Gmbh Ringförmiger mikroelektromechanischer Drehratensensor

Family Cites Families (16)

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Publication number Priority date Publication date Assignee Title
JP3882973B2 (ja) * 1998-06-22 2007-02-21 アイシン精機株式会社 角速度センサ
KR100374812B1 (ko) * 1999-11-04 2003-03-03 삼성전자주식회사 두개의 공진판을 가진 마이크로 자이로스코프
JP4635345B2 (ja) * 2001-01-18 2011-02-23 株式会社村田製作所 角速度センサ
KR100431004B1 (ko) 2002-02-08 2004-05-12 삼성전자주식회사 회전형 비연성 멤스 자이로스코프
US6767758B1 (en) * 2003-04-28 2004-07-27 Analog Devices, Inc. Micro-machined device structures having on and off-axis orientations
JP4654667B2 (ja) * 2004-11-25 2011-03-23 パナソニック電工株式会社 ジャイロセンサおよび角速度検出方法
US7421897B2 (en) * 2005-04-14 2008-09-09 Analog Devices, Inc. Cross-quad and vertically coupled inertial sensors
CN101180516B (zh) * 2005-05-24 2011-09-14 独立行政法人宇宙航空研究开发机构 陀螺仪
US7222533B2 (en) * 2005-06-06 2007-05-29 Bei Technologies, Inc. Torsional rate sensor with momentum balance and mode decoupling
US7617728B2 (en) 2006-05-17 2009-11-17 Donato Cardarelli Tuning fork gyroscope
DE102006047135A1 (de) * 2006-07-31 2008-02-07 Robert Bosch Gmbh Drehratensensor
JP2008058259A (ja) * 2006-09-04 2008-03-13 Sony Corp 慣性センサおよびその製造方法
US8141424B2 (en) * 2008-09-12 2012-03-27 Invensense, Inc. Low inertia frame for detecting coriolis acceleration
JP2009014584A (ja) * 2007-07-06 2009-01-22 Epson Toyocom Corp 振動ジャイロ
JP5228675B2 (ja) * 2008-07-29 2013-07-03 富士通株式会社 角速度センサおよび電子装置
DE102008042369B4 (de) * 2008-09-25 2018-05-24 Robert Bosch Gmbh Koppelstruktur für eine Drehratensensorvorrichtung, Drehratensensorvorrichtung und Herstellungsverfahren

Also Published As

Publication number Publication date
DE102010029634B4 (de) 2024-04-11
US20110296913A1 (en) 2011-12-08
US8875575B2 (en) 2014-11-04
JP5930265B2 (ja) 2016-06-08
CN102353368A (zh) 2012-02-15
JP2011252907A (ja) 2011-12-15
DE102010029634A1 (de) 2011-12-08
CN102353368B (zh) 2016-08-10

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