ITMI20110874A1 - Sensore di angolo di rotazione - Google Patents

Sensore di angolo di rotazione

Info

Publication number
ITMI20110874A1
ITMI20110874A1 IT000874A ITMI20110874A ITMI20110874A1 IT MI20110874 A1 ITMI20110874 A1 IT MI20110874A1 IT 000874 A IT000874 A IT 000874A IT MI20110874 A ITMI20110874 A IT MI20110874A IT MI20110874 A1 ITMI20110874 A1 IT MI20110874A1
Authority
IT
Italy
Prior art keywords
coriolis element
rotation angle
angle sensor
rotor
vibration
Prior art date
Application number
IT000874A
Other languages
English (en)
Inventor
Burkhard Kuhlmann
Daniel Christoph Meisel
Torsten Ohms
Rolf Scheben
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20110874A1 publication Critical patent/ITMI20110874A1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Measuring Volume Flow (AREA)
IT000874A 2010-06-02 2011-05-18 Sensore di angolo di rotazione ITMI20110874A1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102010029634.1A DE102010029634B4 (de) 2010-06-02 2010-06-02 Drehratensensor

Publications (1)

Publication Number Publication Date
ITMI20110874A1 true ITMI20110874A1 (it) 2011-12-03

Family

ID=44898716

Family Applications (1)

Application Number Title Priority Date Filing Date
IT000874A ITMI20110874A1 (it) 2010-06-02 2011-05-18 Sensore di angolo di rotazione

Country Status (5)

Country Link
US (1) US8875575B2 (it)
JP (1) JP5930265B2 (it)
CN (1) CN102353368B (it)
DE (1) DE102010029634B4 (it)
IT (1) ITMI20110874A1 (it)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8178989B2 (en) * 2010-12-15 2012-05-15 General Electric Company System and methods for adjusting a yaw angle of a wind turbine
DE102011056971A1 (de) * 2011-12-23 2013-06-27 Maxim Integrated Products, Inc. Mikromechanischer Coriolis-Drehratensensor
DE102012200132A1 (de) * 2012-01-05 2013-07-11 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
US20140144232A1 (en) * 2012-11-28 2014-05-29 Yizhen Lin Spring for microelectromechanical systems (mems) device
GB201307773D0 (en) * 2013-04-30 2013-06-12 Atlantic Inertial Systems Ltd MEMS sensors
DE102014225844A1 (de) * 2014-12-15 2016-06-16 Robert Bosch Gmbh Verfahren zum Testen der Funktionalität eines Drehratensensors
FI127203B (en) * 2015-05-15 2018-01-31 Murata Manufacturing Co Vibrating micromechanical sensor for angular velocity
DE102015213465A1 (de) * 2015-07-17 2017-01-19 Robert Bosch Gmbh Mehrachsiger Drehratensensor mit geteiltem zentralem Rotor
DE102017215503A1 (de) * 2017-09-05 2019-03-07 Robert Bosch Gmbh Mikromechanische Drehraten-Sensoranordnung und entsprechendes Herstellungsverfahren
JP7188311B2 (ja) 2019-07-31 2022-12-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、及び移動体
DE102020205372A1 (de) * 2020-04-28 2021-10-28 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für einen Drehratensensor und entsprechendes Herstellungsverfahren
DE102020205369A1 (de) * 2020-04-28 2021-10-28 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für einen Drehratensensor und entsprechendes Herstellungsverfahren
DE102022114407B3 (de) 2022-06-08 2023-10-05 Northrop Grumman Litef Gmbh Ringförmiger mikroelektromechanischer Drehratensensor

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3882973B2 (ja) * 1998-06-22 2007-02-21 アイシン精機株式会社 角速度センサ
KR100374812B1 (ko) * 1999-11-04 2003-03-03 삼성전자주식회사 두개의 공진판을 가진 마이크로 자이로스코프
JP4635345B2 (ja) * 2001-01-18 2011-02-23 株式会社村田製作所 角速度センサ
KR100431004B1 (ko) 2002-02-08 2004-05-12 삼성전자주식회사 회전형 비연성 멤스 자이로스코프
US6767758B1 (en) * 2003-04-28 2004-07-27 Analog Devices, Inc. Micro-machined device structures having on and off-axis orientations
JP4654667B2 (ja) * 2004-11-25 2011-03-23 パナソニック電工株式会社 ジャイロセンサおよび角速度検出方法
US7421897B2 (en) * 2005-04-14 2008-09-09 Analog Devices, Inc. Cross-quad and vertically coupled inertial sensors
JP4761076B2 (ja) * 2005-05-24 2011-08-31 独立行政法人 宇宙航空研究開発機構 ジャイロスコープ
US7222533B2 (en) * 2005-06-06 2007-05-29 Bei Technologies, Inc. Torsional rate sensor with momentum balance and mode decoupling
US7617728B2 (en) 2006-05-17 2009-11-17 Donato Cardarelli Tuning fork gyroscope
DE102006047135A1 (de) * 2006-07-31 2008-02-07 Robert Bosch Gmbh Drehratensensor
JP2008058259A (ja) * 2006-09-04 2008-03-13 Sony Corp 慣性センサおよびその製造方法
US8141424B2 (en) * 2008-09-12 2012-03-27 Invensense, Inc. Low inertia frame for detecting coriolis acceleration
JP2009014584A (ja) * 2007-07-06 2009-01-22 Epson Toyocom Corp 振動ジャイロ
JP5228675B2 (ja) * 2008-07-29 2013-07-03 富士通株式会社 角速度センサおよび電子装置
DE102008042369B4 (de) * 2008-09-25 2018-05-24 Robert Bosch Gmbh Koppelstruktur für eine Drehratensensorvorrichtung, Drehratensensorvorrichtung und Herstellungsverfahren

Also Published As

Publication number Publication date
DE102010029634A1 (de) 2011-12-08
US20110296913A1 (en) 2011-12-08
JP2011252907A (ja) 2011-12-15
US8875575B2 (en) 2014-11-04
CN102353368B (zh) 2016-08-10
CN102353368A (zh) 2012-02-15
DE102010029634B4 (de) 2024-04-11
JP5930265B2 (ja) 2016-06-08

Similar Documents

Publication Publication Date Title
ITMI20110874A1 (it) Sensore di angolo di rotazione
ITMI20110010A1 (it) Sensore micromeccanico di velocita' angolare contemplante due assi sensitivi e modalita' di rilevamento accoppiate
ITMI20130672A1 (it) Sensore della frequenza di rotazione
ITMI20101291A1 (it) Sensore micromeccanico di frequenza di rotazione
ITMI20130964A1 (it) Sensore di velocita' di rotazione
MX2015008428A (es) Unidad de accionamiento con sensor de inclinacion integrado.
EP2826596A3 (en) Impact rotation tool and impact rotation tool attachment
EP2703131A3 (en) Robot
WO2011161113A3 (de) Winkelsensor
MX340977B (es) Cartucho.
WO2012161690A8 (en) Mems devices sensing both rotation and acceleration
JP2014046402A5 (it)
WO2008088326A9 (en) Hall effect helicopter mast torque meter
MY169945A (en) Sensor transportation apparatus and guide device
ATE496279T1 (de) Mikromechanischer coriolis-drehratensensor
WO2014095786A3 (de) Winkelsensors
EP2626987A3 (en) Sensing magnet apparatus for motor
EA201201012A1 (ru) Устройство для затягивания резьбовых соединений
GB2476622A (en) Apparatus for azimuth measurements using gyro sensors
EP2570787A3 (en) Torque sensor with relative angle sensing device
IN2015DN01064A (it)
JP2013213754A5 (it)
WO2013124412A3 (de) Sensoranordnung, vorrichtung und verfahren zur ermittlung von schwingungen eines messobjekts sowie messobjekt mit zumindest einer derartigen sensoranordnung
WO2014053917A3 (en) Driving a rotating device based on a combination of speed detection by a sensor and sensor-less speed detection
WO2012112908A3 (en) Inertial navigation sculling algorithm