JP2013206962A5 - - Google Patents

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Publication number
JP2013206962A5
JP2013206962A5 JP2012071743A JP2012071743A JP2013206962A5 JP 2013206962 A5 JP2013206962 A5 JP 2013206962A5 JP 2012071743 A JP2012071743 A JP 2012071743A JP 2012071743 A JP2012071743 A JP 2012071743A JP 2013206962 A5 JP2013206962 A5 JP 2013206962A5
Authority
JP
Japan
Prior art keywords
monitoring target
position information
control unit
maintenance system
target device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2012071743A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013206962A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012071743A priority Critical patent/JP2013206962A/ja
Priority claimed from JP2012071743A external-priority patent/JP2013206962A/ja
Priority to PCT/JP2013/058375 priority patent/WO2013146611A1/ja
Priority to KR20147026644A priority patent/KR20140138768A/ko
Priority to TW102110589A priority patent/TW201401334A/zh
Publication of JP2013206962A publication Critical patent/JP2013206962A/ja
Priority to US14/495,353 priority patent/US20150012124A1/en
Publication of JP2013206962A5 publication Critical patent/JP2013206962A5/ja
Withdrawn legal-status Critical Current

Links

JP2012071743A 2012-03-27 2012-03-27 保守システム及び基板処理装置 Withdrawn JP2013206962A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012071743A JP2013206962A (ja) 2012-03-27 2012-03-27 保守システム及び基板処理装置
PCT/JP2013/058375 WO2013146611A1 (ja) 2012-03-27 2013-03-22 保守システム及び基板処理装置
KR20147026644A KR20140138768A (ko) 2012-03-27 2013-03-22 보수 시스템 및 기판 처리 장치
TW102110589A TW201401334A (zh) 2012-03-27 2013-03-26 維修系統與基板處理裝置
US14/495,353 US20150012124A1 (en) 2012-03-27 2014-09-24 Maintenance System, and Substrate Processing Device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012071743A JP2013206962A (ja) 2012-03-27 2012-03-27 保守システム及び基板処理装置

Publications (2)

Publication Number Publication Date
JP2013206962A JP2013206962A (ja) 2013-10-07
JP2013206962A5 true JP2013206962A5 (enExample) 2015-04-30

Family

ID=49259864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012071743A Withdrawn JP2013206962A (ja) 2012-03-27 2012-03-27 保守システム及び基板処理装置

Country Status (5)

Country Link
US (1) US20150012124A1 (enExample)
JP (1) JP2013206962A (enExample)
KR (1) KR20140138768A (enExample)
TW (1) TW201401334A (enExample)
WO (1) WO2013146611A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6026362B2 (ja) * 2013-07-09 2016-11-16 東京エレクトロン株式会社 基板処理システム、基板処理システムの制御方法、及び記憶媒体
US9918180B2 (en) * 2014-04-28 2018-03-13 Johnson Controls Technology Company Systems and methods for detecting and using occupant location in a building management system
JP6865079B2 (ja) * 2017-03-23 2021-04-28 東京エレクトロン株式会社 基板処理装置及び基板処理方法
JP6625597B2 (ja) * 2017-11-13 2019-12-25 平田機工株式会社 搬送チャンバ
KR102165967B1 (ko) * 2017-11-17 2020-10-15 미쓰비시덴키 가부시키가이샤 3차원 공간 감시 장치, 3차원 공간 감시 방법, 및 3차원 공간 감시 프로그램
KR102045826B1 (ko) * 2018-04-27 2019-11-18 주식회사 선익시스템 진공챔버용 비상 스위치 장치와 이를 포함하는 증착장치
KR102150450B1 (ko) * 2018-05-11 2020-09-01 주식회사 선익시스템 비상 탈출이 가능한 진공챔버 및 이를 포함하는 증착장치
KR102259282B1 (ko) * 2019-07-18 2021-06-01 세메스 주식회사 물류 저장 시스템 및 그 제어 방법
JP7388896B2 (ja) * 2019-12-04 2023-11-29 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
CN114162450B (zh) 2020-09-11 2023-05-23 长鑫存储技术有限公司 曝光机台的门板密闭监测系统、方法、装置、介质和设备
KR102378366B1 (ko) * 2020-10-13 2022-03-25 주식회사 새한산업 안전펜스설비
CN118241174B (zh) * 2024-05-27 2024-08-06 上海米蜂激光科技有限公司 一种真空镀膜机安全控制方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4101166B2 (ja) * 2003-12-11 2008-06-18 大日本スクリーン製造株式会社 基板処理装置
JP5415832B2 (ja) * 2009-05-29 2014-02-12 株式会社竹中工務店 入退管理システム
JP5531003B2 (ja) * 2009-10-05 2014-06-25 株式会社日立国際電気 基板処理装置、基板処理装置のメンテナンス方法および半導体装置の製造方法

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