JP2013190112A - Heat treatment device - Google Patents

Heat treatment device Download PDF

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JP2013190112A
JP2013190112A JP2012054635A JP2012054635A JP2013190112A JP 2013190112 A JP2013190112 A JP 2013190112A JP 2012054635 A JP2012054635 A JP 2012054635A JP 2012054635 A JP2012054635 A JP 2012054635A JP 2013190112 A JP2013190112 A JP 2013190112A
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heat treatment
treatment apparatus
lid
liquid
holding
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JP5769653B2 (en
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Hiromi Tominaga
博美 富永
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a heat treatment device capable of easily recovering a vaporized fluorine inert fluid in the heat treatment device.SOLUTION: A heat treatment device 1 heat-treats an electron device with a fluorine inert fluid 9 as a heat medium. The heat treatment device 1 includes: a holding tank 2 which has an opening 2a and a fluid holding part 2b for holding the fluorine inert fluid 9; and a cover 5 which is arranged on an opening 2a side of the holding tank 2 and has an inner surface 5a opposite to a fluid holding part 2b side and an outer surface 5b as a surface opposite to the inner surface 5a. A basket 7 for holding the electron device is arranged on the cover 5. A hollow 5d for communicating the fluid holding part 2b and an outside of the heat treatment device 1 is formed on the cover 5 apart from the basket 7 when viewed from above the outer surface 5b.

Description

本発明は、熱処理装置に関するものであり、より特定的には、フッ素系不活性液体を熱媒体として電子素子を熱処理する熱処理装置に関するものである。   The present invention relates to a heat treatment apparatus, and more particularly to a heat treatment apparatus for heat treating an electronic element using a fluorine-based inert liquid as a heat medium.

従来、ＩＣ（Ｉｎｔｅｇｒａｔｅｄ Ｃｉｒｃｕｉｔ）素子の耐熱性試験は、はんだを熱媒体とする熱処理により行なわれていた。そのため、複数の素子を同時に処理する場合には、素子同士がはんだにより接着されるという問題があった。また、素子を１個ずつピンセットなどで掴んではんだ槽に浸漬する場合、ピンセットから脱落した素子を再生することができないという問題があった。これに対して、フッ素系不活性液体を熱媒体とし、籠に収容した複数の素子を同時に処理する熱処理装置が提案されている（たとえば、特許文献１参照）。   Conventionally, a heat resistance test of an IC (Integrated Circuit) element has been performed by heat treatment using solder as a heat medium. Therefore, when processing a plurality of elements simultaneously, there is a problem that the elements are bonded to each other by solder. Further, when the elements are held one by one with tweezers and soaked in a solder bath, there is a problem that the elements dropped from the tweezers cannot be regenerated. On the other hand, a heat treatment apparatus has been proposed in which a fluorine-based inert liquid is used as a heat medium and a plurality of elements accommodated in a basket are simultaneously processed (for example, see Patent Document 1).

実開平４−５９４５１号公報Japanese Utility Model Publication No. 4-59451

特許文献１において提案されている熱処理装置にように、フッ素系不活性液体を熱媒体とする熱処理装置では、熱処理中に蒸発したフッ素系不活性液体をより効率的に回収するための機構が要求される。   As in the heat treatment apparatus proposed in Patent Document 1, a heat treatment apparatus using a fluorinated inert liquid as a heat medium requires a mechanism for more efficiently recovering the fluorinated inert liquid evaporated during the heat treatment. Is done.

本発明は、上記課題に鑑みてなされたものであり、その目的は、蒸発したフッ素系不活性液体を熱処理装置内に容易に回収することが可能な熱処理装置を提供することである。   This invention is made | formed in view of the said subject, The objective is to provide the heat processing apparatus which can collect | recover the evaporative fluorine-type inert liquid in a heat processing apparatus easily.

本発明の熱処理装置は、フッ素系不活性液体を熱媒体として電子素子を熱処理する熱処理装置である。上記熱処理装置は、開口部を有し、フッ素系不活性液体を保持可能な液体保持部が形成された保持槽と、保持槽の開口部側に配置され、液体保持部側に対向する内面と、上記内面とは反対側の面である外面とを有する蓋とを備えている。蓋には、電子素子を保持しつつフッ素系不活性液体に浸漬可能な素子保持部が設置されている。また、蓋には、液体保持部と熱処理装置の外部とを連通する中空部が、上記外面の上方から見て素子保持部から離れて形成されている。   The heat treatment apparatus of the present invention is a heat treatment apparatus for heat treating an electronic element using a fluorine-based inert liquid as a heat medium. The heat treatment apparatus has an opening and a holding tank in which a liquid holding part capable of holding a fluorinated inert liquid is formed, and an inner surface disposed on the opening side of the holding tank and facing the liquid holding part side And a lid having an outer surface which is a surface opposite to the inner surface. An element holding part that can be immersed in a fluorine-based inert liquid while holding an electronic element is installed on the lid. In addition, the lid is formed with a hollow portion that communicates the liquid holding portion and the outside of the heat treatment apparatus away from the element holding portion as viewed from above the outer surface.

本発明の熱処理装置では、液体保持部と熱処理装置の外部とを連通する中空部が蓋に形成されている。そのため、熱処理中に蒸発して液体保持部から放出されたフッ素系不活性液体は、当該中空部に進入する。そして、フッ素系不活性液体は、中空部内において冷却されて液化し、液体保持部内に戻る。このように、本発明の熱処理装置では、蒸発したフッ素系不活性液体を中空部にて冷却液化させることにより、フッ素系不活性液体の熱処理装置の外部への放出を抑制し、さらにフッ素系不活性液体を中空部と連通する液体保持部に容易に回収することができる。以上のように、本発明の熱処理装置によれば、蒸発したフッ素系不活性液体を熱処理装置内に容易に回収することが可能な熱処理装置を提供することができる。   In the heat treatment apparatus of the present invention, the lid is formed with a hollow portion that communicates the liquid holding part and the outside of the heat treatment apparatus. Therefore, the fluorine-based inert liquid that is evaporated and released from the liquid holding part during the heat treatment enters the hollow part. Then, the fluorinated inert liquid is cooled and liquefied in the hollow portion, and returns to the liquid holding portion. As described above, in the heat treatment apparatus of the present invention, the evaporated fluorinated inert liquid is cooled and liquefied in the hollow portion, thereby suppressing the release of the fluorinated inert liquid to the outside of the heat treatment apparatus, and further the fluorinated inert liquid. The active liquid can be easily collected in the liquid holding part communicating with the hollow part. As described above, according to the heat treatment apparatus of the present invention, it is possible to provide a heat treatment apparatus that can easily recover the evaporated fluorine-based inert liquid in the heat treatment apparatus.

以上の説明から明らかなように、本発明の熱処理装置によれば、蒸発したフッ素系不活性液体を熱処理装置内に容易に回収することが可能な熱処理装置を提供することができる。   As is apparent from the above description, according to the heat treatment apparatus of the present invention, it is possible to provide a heat treatment apparatus that can easily recover the evaporated fluorine-based inert liquid in the heat treatment apparatus.

熱処理装置の構成を示す概略図である。It is the schematic which shows the structure of the heat processing apparatus. 熱処理装置の蓋および籠の構成を示す概略図である。It is the schematic which shows the structure of the lid | cover and ridge of a heat processing apparatus. 熱処理装置の構成を拡大して示す概略図である。It is the schematic which expands and shows the structure of the heat processing apparatus. 実施の形態２の熱処理装置の構成を示す概略図である。FIG. 3 is a schematic diagram illustrating a configuration of a heat treatment apparatus according to a second embodiment. 従来の熱処理装置の構成を示す概略図である。It is the schematic which shows the structure of the conventional heat processing apparatus.

以下、図面に基づいて本発明の実施の形態を説明する。なお、以下の図面において、同一または相当する部分には同一の参照番号を付し、その説明は繰り返さない。   Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following drawings, the same or corresponding parts are denoted by the same reference numerals, and the description thereof will not be repeated.

（実施の形態１）
はじめに、本発明の一実施の形態である実施の形態１について説明する。まず、本実施の形態の熱処理装置１の構成について説明する。図１を参照して、熱処理装置１は、フッ素系不活性液体を熱媒体として電子素子を熱処理する熱処理装置であって、保持槽２と、ヒータ３と、蓋５とを主に備えている。 (Embodiment 1)
First, Embodiment 1 which is one embodiment of the present invention will be described. First, the structure of the heat processing apparatus 1 of this Embodiment is demonstrated. Referring to FIG. 1, a heat treatment apparatus 1 is a heat treatment apparatus for heat treating an electronic element using a fluorine-based inert liquid as a heat medium, and mainly includes a holding tank 2, a heater 3, and a lid 5. .

保持槽２は、開口部２ａを有している。保持槽２には、開口部２ａの全周にわたり凹部２ｅが形成されている。また、保持槽２には、たとえばガルデン（登録商標）などのフッ素系不活性液体９を保持可能な液体保持部２ｂが形成されている。また、液体保持部２ｂは、側壁面２ｃと、底面２ｄとを含むように形成されている。ヒータ３は、液体保持部２ｂの下方に配置されている。より具体的には、ヒータ３は、保持槽２の底面２ｄに沿うように保持槽２内に埋め込まれて配置されている。   The holding tank 2 has an opening 2a. In the holding tank 2, a recess 2e is formed over the entire circumference of the opening 2a. The holding tank 2 is formed with a liquid holding portion 2b capable of holding a fluorine-based inert liquid 9 such as Galden (registered trademark). Moreover, the liquid holding | maintenance part 2b is formed so that the side wall surface 2c and the bottom face 2d may be included. The heater 3 is disposed below the liquid holding unit 2b. More specifically, the heater 3 is embedded and arranged in the holding tank 2 along the bottom surface 2 d of the holding tank 2.

蓋５は、保持槽２の開口部２ａ側に配置されており、保持槽２の液体保持部２ｂ側に対向する内面５ａと、内面５ａとは反対側の面である外面５ｂとを有している。具体的には、蓋５は、内面５ａが保持槽２の底面２ｄに対向し、液体保持部２ｂを閉じるように開口部２ａ側に配置されている。   The lid 5 is disposed on the opening 2a side of the holding tank 2, and has an inner surface 5a that faces the liquid holding unit 2b side of the holding tank 2, and an outer surface 5b that is a surface opposite to the inner surface 5a. ing. Specifically, the lid 5 is disposed on the opening 2a side so that the inner surface 5a faces the bottom surface 2d of the holding tank 2 and closes the liquid holding unit 2b.

蓋５には、液体保持部２ｂと熱処理装置１の外部とを連通する中空部５ｄが、外面５ｂの上方から見て、後述する籠７から離れて形成されている。たとえば、蓋５には、蓋５から熱処理装置１の外部側へ突出する筒状部としての回収筒５ｅが、蓋５の厚み方向に貫通して配置されている。そして、回収筒５ｅの内周側の領域が、中空部５ｄとなっている。回収筒５ｅは、液体保持部２ｂに保持されるべきフッ素系不活性液体９の液面に対して交差する方向、具体的には垂直な方向に突出している。また、回収筒５ｅは、蓋５の厚み方向に貫通して配置される別部材であってもよいが、これに限られるものではなく、たとえば蓋５と一体として形成されていてもよい。また、回収筒５ｅを構成する材料は特に限定されるものではないが、たとえばアルミニウム、銅あるいはチタンなどの熱伝導率の高い金属材料を採用することができる。また、本発明の熱処理装置において回収筒５ｅは必須の構成ではなく、たとえば中空部５ｄは、蓋５の厚み方向に貫通して形成される孔部の内周側の領域であってもよい。   The lid 5 is formed with a hollow portion 5d that allows the liquid holding portion 2b and the outside of the heat treatment apparatus 1 to communicate with each other, as viewed from above the outer surface 5b. For example, in the lid 5, a collection cylinder 5 e as a cylindrical portion protruding from the lid 5 to the outside of the heat treatment apparatus 1 is disposed so as to penetrate in the thickness direction of the lid 5. And the area | region of the inner peripheral side of the collection | recovery cylinder 5e becomes the hollow part 5d. The recovery cylinder 5e protrudes in a direction intersecting the liquid surface of the fluorinated inert liquid 9 to be held in the liquid holding part 2b, specifically in a vertical direction. Further, the recovery cylinder 5e may be a separate member that penetrates in the thickness direction of the lid 5, but is not limited thereto, and may be formed integrally with the lid 5, for example. Moreover, the material which comprises the collection cylinder 5e is not specifically limited, For example, metal materials with high heat conductivity, such as aluminum, copper, or titanium, are employable. Further, in the heat treatment apparatus of the present invention, the recovery cylinder 5e is not an essential configuration. For example, the hollow portion 5d may be a region on the inner peripheral side of a hole formed so as to penetrate in the thickness direction of the lid 5.

蓋５には、外面５ｂ側とは反対側に突出する突出部５ｃが外縁部の全周にわたり形成されている。また、蓋５は、突出部５ｃが凹部２ｅに嵌め込まれるように保持槽２に配置されている。これにより、蓋５は、保持槽２に対して開口部２ａの全周にわたり接触するように配置されている。   The lid 5 is formed with a protruding portion 5c that protrudes on the opposite side to the outer surface 5b side over the entire circumference of the outer edge portion. Moreover, the lid | cover 5 is arrange | positioned at the holding tank 2 so that the protrusion part 5c may be engage | inserted by the recessed part 2e. Thereby, the lid | cover 5 is arrange | positioned so that it may contact with respect to the holding tank 2 over the perimeter of the opening part 2a.

図１および図２を参照して、蓋５には、処理すべき素子１１を保持しつつフッ素系不活性液体９に浸漬可能な素子保持部が設置されている。ここで、素子保持部は、たとえば網目状の壁面を有する籠７などであって、素子保持部の内部と外部とが連通した構造を有する。また、蓋５には、蓋５の厚み方向に貫通する孔部が、外面５ｂの上方から見て中空部５ｄから離れて形成されており、籠７は当該孔部に挿入して配置されている。籠７には、取っ手６が取り付けられている。また、籠７には、開閉可能な扉である投入口８が設けられており、当該投入口８より籠７内に素子１１を収容可能となっている。すなわち、熱処理装置１では、蓋５を保持槽２に固定した状態において、取っ手６を保持して籠７を液体保持部２ｂ側に移動させることができる。これにより、籠７に収容された素子１１を、液体保持部２ｂにより保持されたフッ素系不活性液体９に浸漬することができる。なお、上述のように、籠７は、蓋５の厚み方向に貫通する孔部に挿入して配置されていもよいが、これに限られるものではない。図２を参照して、たとえば、籠７は蓋５の内面５ａに配置されていてもよい。   With reference to FIG. 1 and FIG. 2, the lid 5 is provided with an element holding portion that can be immersed in the fluorine-based inert liquid 9 while holding the element 11 to be processed. Here, the element holding portion is, for example, a ridge 7 having a mesh-like wall surface, and has a structure in which the inside and the outside of the element holding portion communicate with each other. Further, the lid 5 is formed with a hole penetrating in the thickness direction of the lid 5 so as to be separated from the hollow portion 5d when viewed from above the outer surface 5b, and the flange 7 is inserted and disposed in the hole portion. Yes. A handle 6 is attached to the collar 7. In addition, the basket 7 is provided with a slot 8 that is a door that can be opened and closed, and the element 11 can be accommodated in the basket 7 through the slot 8. That is, in the heat treatment apparatus 1, in the state where the lid 5 is fixed to the holding tank 2, the handle 6 can be held and the tub 7 can be moved to the liquid holding unit 2 b side. Thereby, the element 11 accommodated in the bag 7 can be immersed in the fluorine-based inert liquid 9 held by the liquid holding part 2b. As described above, the collar 7 may be inserted and disposed in a hole that penetrates the lid 5 in the thickness direction, but is not limited thereto. With reference to FIG. 2, for example, the flange 7 may be disposed on the inner surface 5 a of the lid 5.

次に、本実施の形態の熱処理装置１を用いた電子素子の熱処理について説明する。図１および図２を参照して、まず、保持槽２の液体保持部２ｂ内に熱媒体であるフッ素系不活性液体９が注入される。次に、ヒータ３を動作させることにより、液体保持部２ｂに注入されたフッ素系不活性液体９が所定の処理温度にまで加熱される。ここで、フッ素系不活性液体９の処理温度は、たとえば２５５℃以上２６０℃以下であってもよい。次に、投入口８が蓋５の外面５ｂよりも上側に位置する状態にまで籠７を引き上げる。次に、投入口８を開いて処理すべき素子１１を籠７内に収容し、投入口８を閉じる。次に、取っ手６を保持しつつ籠７を液体保持部２ｂ側に移動させて、素子１１をフッ素系不活性液体９に浸漬する。素子１１の熱処理が完了した後、投入口８が蓋５の外面５ｂよりも上側に位置する状態にまで再び籠７を引き上げる。そして、投入口８を開いて熱処理された素子１１を籠７から取り出す。このようにして、本実施の形態の熱処理装置１を用いた電子素子の熱処理が実施される。   Next, heat treatment of the electronic device using the heat treatment apparatus 1 of the present embodiment will be described. With reference to FIGS. 1 and 2, first, a fluorine-based inert liquid 9 as a heat medium is injected into the liquid holding portion 2 b of the holding tank 2. Next, by operating the heater 3, the fluorine-based inert liquid 9 injected into the liquid holding unit 2b is heated to a predetermined processing temperature. Here, the treatment temperature of the fluorine-based inert liquid 9 may be, for example, 255 ° C. or more and 260 ° C. or less. Next, the hook 7 is pulled up to a state where the insertion port 8 is located above the outer surface 5 b of the lid 5. Next, the input port 8 is opened, the element 11 to be processed is accommodated in the basket 7, and the input port 8 is closed. Next, while holding the handle 6, the bag 7 is moved to the liquid holding part 2 b side, and the element 11 is immersed in the fluorine-based inert liquid 9. After the heat treatment of the element 11 is completed, the rod 7 is pulled up again until the insertion port 8 is positioned above the outer surface 5 b of the lid 5. Then, the input port 8 is opened and the heat-treated element 11 is taken out from the basket 7. In this way, the heat treatment of the electronic element using the heat treatment apparatus 1 of the present embodiment is performed.

図５を参照して、従来の熱処理装置１００では、はんだ９００を熱媒介として素子１１０の熱処理されていた。そのため、複数の素子１１０を同時に処理する場合には、素子１１０同士がはんだ９００により接着されるという問題があった。また、素子１１０を１個ずつピンセットなどで掴んではんだ槽２００に浸漬する際、ピンセットから脱落した素子１１０を再生することができないという問題があった。   Referring to FIG. 5, in conventional heat treatment apparatus 100, element 110 is heat treated using solder 900 as a heat medium. Therefore, when processing a plurality of elements 110 simultaneously, there is a problem that the elements 110 are bonded to each other by the solder 900. Further, when the elements 110 are held one by one with tweezers and immersed in the solder bath 200, there is a problem that the elements 110 that have fallen off the tweezers cannot be regenerated.

これに対して、本実施の形態の熱処理装置１では、高温状態でも粘性が低いフッ素系不活性液体９を熱媒体とするため、籠７を用いて複数の素子１１を同時に熱処理する場合においても、素子１１同士の接着を回避することができる。そのため、熱処理後の素子１１の処理が容易になる。   On the other hand, in the heat treatment apparatus 1 of the present embodiment, since the fluorine-based inert liquid 9 having a low viscosity even in a high temperature state is used as a heat medium, even in the case where a plurality of elements 11 are heat-treated simultaneously using the ridge 7 Adhesion between the elements 11 can be avoided. Therefore, the processing of the element 11 after the heat treatment becomes easy.

また、本実施の形態の熱処理装置１では、保持槽２の液体保持部２ｂを閉じるように蓋５が配置されているため、図３中矢印に示すように、熱処理中において蒸発したフッ素系不活性液体９の熱処理装置１の外部への放出を抑制することができる。また、本実施の形態の熱処理装置１では、液体保持部２ｂと熱処理装置１の外部とを連通する中空部５ｄが蓋５に形成されている。そのため、熱処置中に蒸発して液体保持部２ｂから放出されたフッ素系不活性液体９の一部は、中空部５ｄに進入する。そして、フッ素系不活性液体９は、中空部５ｄ内において冷却されて液化し、液体保持部２ｂ内に戻る。このように、本実施の形態の熱処理装置１では、蒸発したフッ素系不活性液体９を中空部５ｄにて冷却液化させることにより、フッ素系不活性液体９の熱処理装置１の外部への放出を抑制し、さらに蒸発したフッ素系不活性液体９を中空部５ｄと連通する液体保持部２ｂに容易に回収することができる。以上のように、本実施の形態の熱処理装置１は、蒸発したフッ素系不活性液体９を熱処理装置１内に容易に回収することが可能な熱処理装置となっている。   Further, in the heat treatment apparatus 1 of the present embodiment, since the lid 5 is disposed so as to close the liquid holding portion 2b of the holding tank 2, as shown by an arrow in FIG. Release of the active liquid 9 to the outside of the heat treatment apparatus 1 can be suppressed. Further, in the heat treatment apparatus 1 of the present embodiment, the lid 5 is formed with a hollow part 5 d that allows the liquid holding part 2 b to communicate with the outside of the heat treatment apparatus 1. Therefore, a part of the fluorine-based inert liquid 9 that is evaporated and released from the liquid holding part 2b during the heat treatment enters the hollow part 5d. Then, the fluorinated inert liquid 9 is cooled and liquefied in the hollow portion 5d, and returns to the liquid holding portion 2b. Thus, in the heat treatment apparatus 1 of the present embodiment, the evaporated fluorine-based inert liquid 9 is cooled and liquefied in the hollow portion 5d, thereby releasing the fluorine-based inert liquid 9 to the outside of the heat treatment apparatus 1. The fluorine-based inert liquid 9 that is suppressed and evaporated can be easily recovered in the liquid holding portion 2b that communicates with the hollow portion 5d. As described above, the heat treatment apparatus 1 of the present embodiment is a heat treatment apparatus that can easily recover the evaporated fluorine-based inert liquid 9 in the heat treatment apparatus 1.

また、上述のように、本実施の形態の熱処理装置１では、籠７は、蓋５の厚み方向に貫通する孔部に挿入して配置されているため、蓋５を保持槽２に固定しつつ、籠７を移動させることができる。これにより、蓋５を保持槽２に固定しつつ、籠７に収容された素子１１をフッ素系不活性液体９に浸漬し、あるいはフッ素系不活性液体９から取り出すことが可能になるため、蒸発したフッ素系不活性液体９の熱処理装置１の外部への放出を抑制しつつ素子１１の熱処理を実施することができる。   In addition, as described above, in the heat treatment apparatus 1 according to the present embodiment, the trough 7 is arranged by being inserted into a hole that penetrates the lid 5 in the thickness direction, so that the lid 5 is fixed to the holding tank 2. While the heel 7 can be moved. As a result, it is possible to immerse the element 11 accommodated in the basket 7 in the fluorinated inert liquid 9 or to remove it from the fluorinated inert liquid 9 while fixing the lid 5 to the holding tank 2. The element 11 can be heat-treated while suppressing the release of the fluorinated inert liquid 9 to the outside of the heat treatment apparatus 1.

（実施の形態２）
次に、本発明の他の実施の形態である実施の形態２について説明する。本実施の形態の熱処理装置１０は、基本的には、上記実施の形態１の熱処理装置１と同様の構成を備え、かつ同様の効果を奏する。しかし、本実施の形態の熱処理装置１０は、蓋５の形状において上記実施の形態１の熱処理装置１とは異なっている。 (Embodiment 2)
Next, Embodiment 2 which is another embodiment of the present invention will be described. The heat treatment apparatus 10 according to the present embodiment basically has the same configuration as the heat treatment apparatus 1 according to the first embodiment and has the same effects. However, the heat treatment apparatus 10 of the present embodiment is different from the heat treatment apparatus 1 of the first embodiment in the shape of the lid 5.

図４を参照して、熱処理装置１０では、蓋５は、その外縁部が保持槽２の開口部２ａの全周にわたり形成された凹部２ｅに嵌め込まれている。また、蓋５の内面５ａは、液体保持部２ｂに保持されるべきフッ素系不活性液体９の液面に対して傾いた領域を有している。具体的には、蓋５の内面５ａは、曲面からなっており、液体保持部２ｂから離れる側に突出する凸形状を有している。また、内面５ａのフッ素系不活性液体９の液面に対する傾きは、蓋５の外縁側に近づくに従い大きくなっている。これにより、熱処理装置１のように蓋５の内面５ａがフッ素系不活性液体９の液面に対して平行である場合に比べて、蒸発したフッ素系不活性液体９を内面５ａを伝って液体保持部２ｂに回収することがより容易になる。このように、本実施の形態の熱処理装置１０は、上記形状を有する蓋５を備えることにより、蒸発したフッ素系不活性液体９を熱処理装置１０内により容易に回収することが可能な熱処理装置となっている。   Referring to FIG. 4, in heat treatment apparatus 10, lid 5 is fitted in a recess 2 e formed on the outer periphery of opening 2 a of holding tank 2 over the entire circumference. The inner surface 5a of the lid 5 has a region inclined with respect to the liquid surface of the fluorine-based inert liquid 9 to be held by the liquid holding portion 2b. Specifically, the inner surface 5a of the lid 5 is a curved surface, and has a convex shape that protrudes away from the liquid holding portion 2b. Further, the inclination of the inner surface 5 a with respect to the liquid surface of the fluorine-based inert liquid 9 increases as the outer edge side of the lid 5 is approached. Thereby, compared with the case where the inner surface 5a of the lid 5 is parallel to the liquid surface of the fluorinated inert liquid 9 as in the heat treatment apparatus 1, the evaporated fluorinated inert liquid 9 is transferred to the liquid through the inner surface 5a. It becomes easier to collect in the holding part 2b. As described above, the heat treatment apparatus 10 of the present embodiment includes the lid 5 having the above-described shape, so that the evaporated fluorine-based inert liquid 9 can be easily collected in the heat treatment apparatus 10. It has become.

今回開示された実施の形態はすべての点で例示であって、制限的なものではないと考えられるべきである。本発明の範囲は上記した説明ではなくて特許請求の範囲によって示され、特許請求の範囲と均等の意味、および範囲内でのすべての変更が含まれることが意図される。   The embodiment disclosed this time is to be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

本発明の熱処理装置は、蒸発したフッ素系不活性液体を熱処理装置内に容易に回収することが要求される熱処理装置において、特に有利に適用され得る。   The heat treatment apparatus of the present invention can be applied particularly advantageously in a heat treatment apparatus that requires that the evaporated fluorine-based inert liquid be easily recovered in the heat treatment apparatus.

１，１０ 熱処理装置、２ 保持槽、２ａ 開口部、２ｂ 液体保持部、２ｃ 側壁面、２ｄ 底面、２ｅ 凹部、３ ヒータ、５ 蓋、５ａ 内面、５ｂ 外面、５ｃ 突出部、５ｄ 中空部、５ｅ 回収筒、６ 取っ手、７ 籠、８ 投入口、９ フッ素系不活性液体、１１ 素子。   1,10 Heat treatment apparatus, 2 holding tank, 2a opening, 2b liquid holding portion, 2c side wall surface, 2d bottom surface, 2e recess, 3 heater, 5 lid, 5a inner surface, 5b outer surface, 5c protruding portion, 5d hollow portion, 5e Collection cylinder, 6 handle, 7 籠, 8 inlet, 9 fluorinated inert liquid, 11 elements.

Claims (7)

フッ素系不活性液体を熱媒体として電子素子を熱処理する熱処理装置であって、
開口部を有し、前記フッ素系不活性液体を保持可能な液体保持部が形成された保持槽と、
前記保持槽の前記開口部側に配置され、前記液体保持部側に対向する内面と、前記内面とは反対側の面である外面とを有する蓋とを備え、
前記蓋には、前記電子素子を保持しつつ前記フッ素系不活性液体に浸漬可能な素子保持部が設置され、
前記蓋には、前記液体保持部と前記熱処理装置の外部とを連通する中空部が、前記外面の上方から見て前記素子保持部から離れて形成されている、熱処理装置。 A heat treatment apparatus for heat treating an electronic element using a fluorine-based inert liquid as a heat medium,
A holding tank having an opening and formed with a liquid holding portion capable of holding the fluorine-based inert liquid;
A lid having an inner surface disposed on the opening side of the holding tank and facing the liquid holding unit side, and an outer surface that is a surface opposite to the inner surface;
The lid is provided with an element holding part that can be immersed in the fluorine-based inert liquid while holding the electronic element,
The heat treatment apparatus, wherein the lid is formed with a hollow portion communicating with the liquid holding part and the outside of the heat treatment apparatus away from the element holding part when viewed from above the outer surface. 前記中空部は、前記蓋から前記外部側へ突出する筒状部の内周側の領域である、請求項１に記載の熱処理装置。   The heat treatment apparatus according to claim 1, wherein the hollow portion is a region on an inner peripheral side of a cylindrical portion protruding from the lid to the outside. 前記籠には、開閉可能な扉が形成されている、請求項１または２に記載の熱処理装置。   The heat treatment apparatus according to claim 1, wherein a door that can be opened and closed is formed on the bag. 前記蓋の前記内面は、前記液体保持部に保持されるべき前記フッ素系不活性液体の液面に対して傾いた領域を有している、請求項１〜３のいずれか１項に記載の熱処理装置。   The said inner surface of the said lid | cover has an area | region inclined with respect to the liquid level of the said fluorine-type inert liquid which should be hold | maintained at the said liquid holding | maintenance part. Heat treatment equipment. 前記蓋の前記内面は、前記液体保持部から離れる側に突出する凸形状を有している、請求項４に記載の熱処理装置。   The heat treatment apparatus according to claim 4, wherein the inner surface of the lid has a convex shape that protrudes to the side away from the liquid holding portion. 前記蓋の前記内面は、曲面である、請求項４または５に記載の熱処理装置。   The heat treatment apparatus according to claim 4, wherein the inner surface of the lid is a curved surface. 前記蓋には、前記蓋の厚み方向に貫通する孔部が前記中空部から離れて形成されており、
前記籠は、前記孔部に挿入して配置されている、請求項１〜６のいずれか１項に記載の熱処理装置。 The lid is formed with a hole penetrating in the thickness direction of the lid away from the hollow portion,
The heat treatment apparatus according to any one of claims 1 to 6, wherein the ridge is inserted and disposed in the hole.
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