JP6063005B2 - Cleaning device - Google Patents

Cleaning device Download PDF

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JP6063005B2
JP6063005B2 JP2015117399A JP2015117399A JP6063005B2 JP 6063005 B2 JP6063005 B2 JP 6063005B2 JP 2015117399 A JP2015117399 A JP 2015117399A JP 2015117399 A JP2015117399 A JP 2015117399A JP 6063005 B2 JP6063005 B2 JP 6063005B2
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aqueous solvent
cleaning
water
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storage tank
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JP2017000958A (en
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正英 内野
正英 内野
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Japan Field Co Ltd
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本発明は、機械部品、電子部品、医療機器等の被洗浄物を洗浄する洗浄装置に係るものであって、被洗浄物の浸漬洗浄及び蒸気洗浄において洗浄溶剤の大気への拡散を防止して環境負荷を減少するとともに、洗浄溶剤の消耗を減少して洗浄コストを低減可能とする洗浄装置に関するものである。   The present invention relates to a cleaning apparatus for cleaning an object to be cleaned such as a machine part, an electronic part, or a medical device, and prevents diffusion of a cleaning solvent into the atmosphere in immersion cleaning and steam cleaning of the object to be cleaned. The present invention relates to a cleaning apparatus capable of reducing cleaning costs by reducing the environmental load and reducing the consumption of cleaning solvent.

特開2008−47879号公報JP 2008-47879 A 特開平6−328052号公報JP-A-6-328052

従来より、洗浄溶剤として使用されてきたフロン113等が、オゾン層の破壊防止と温暖化防止のために1995年に世界的に生産全廃となった。それ以後、フロン代替溶剤が各種開発されているが、このようなものの中には、沸点が低いため蒸発によるロスが大きい溶剤や、キロ当たりの単価が高価な溶剤が多く、コストが高くつくことが問題となっていた。   Conventionally, Freon 113, which has been used as a cleaning solvent, was totally abolished worldwide in 1995 to prevent destruction of the ozone layer and prevention of global warming. Since then, various chlorofluorocarbon alternative solvents have been developed. Among these solvents, there are many solvents that have a large loss due to evaporation due to their low boiling point, and that have a high unit price per kilogram, which is expensive. Was a problem.

そこで従来より、特許文献1に示す如く洗浄溶剤の表面を水で被覆することによって洗浄溶剤の蒸発を抑え、洗浄溶剤の使用コストを低減しようとする方法が知られている。しかし、液面を水で被覆した洗浄溶剤中に被洗浄物を浸漬して浸漬洗浄を行った場合には、被洗浄物に水分が付着するものとなることから、シミ等の問題が生じるものとなる。また、このような洗浄の際の水分の付着を防止するためには、特許文献2に示す如く洗浄溶剤から水分を取り除くための水分分離装置のような特別な手段を必要とするものであった。   Therefore, conventionally, as shown in Patent Document 1, a method for suppressing the evaporation of the cleaning solvent by coating the surface of the cleaning solvent with water and reducing the use cost of the cleaning solvent is known. However, if the object to be cleaned is immersed in a cleaning solvent whose surface is covered with water, and water is attached to the object to be cleaned, problems such as spots may occur. It becomes. Further, in order to prevent the adhesion of moisture during such cleaning, a special means such as a moisture separation device for removing moisture from the cleaning solvent as shown in Patent Document 2 is required. .

そこで、本願発明は上述の如き課題を解決しようとするものであって、洗浄溶剤の液面を水で被覆することにより洗浄溶剤からの洗浄蒸気の発生を抑制可能とするとともに、被洗浄物への水分の付着を、高いコストをかけることなく防止可能とする洗浄装置を得ようとするものである。   Therefore, the present invention is intended to solve the above-described problems, and by covering the liquid surface of the cleaning solvent with water, it is possible to suppress generation of cleaning vapor from the cleaning solvent and to the object to be cleaned. It is an object of the present invention to obtain a cleaning device that can prevent the adhesion of moisture without increasing the cost.

本願発明は上述の如き課題を解決するため、一又は複数の貯留槽と洗浄槽とを備え、洗浄槽には、水よりも比重の大きい非水系溶剤と水とを収納することにより、洗浄槽内の非水系溶剤の液面を水の層にて被覆可能とするものである。水よりも比重の大きい非水系溶剤と水とを貯留槽や洗浄槽に収納した場合には、非水系溶剤と水とが分離して非水系溶剤の層が下側に位置し、水の層がこの非水系溶剤の層の上側に位置するものとなる。そのため、貯留槽及び洗浄槽内の非水系溶剤の液面を水の層によって完全に被覆されるため、この水の層によって非洗浄時における非水系溶剤の無駄な蒸発を防ぐことができる。 In order to solve the problems as described above, the present invention includes one or a plurality of storage tanks and a cleaning tank, and the cleaning tank contains a non-aqueous solvent having a specific gravity greater than that of water and water, thereby cleaning the tank. The liquid surface of the non-aqueous solvent can be covered with a water layer. When accommodating the large non-aqueous solvent and water having a specific gravity in the storage tank and the cleaning tank than water, non-aqueous solvent and water away partial layer of the non-aqueous solvent is located below a layer of water Is located above the non-aqueous solvent layer. Therefore, since the liquid surface of the non-aqueous solvent in the storage tank and the cleaning tank is completely covered with the water layer, it is possible to prevent wasteful evaporation of the non-aqueous solvent at the time of non-cleaning.

このような水の層によって非水系溶剤の無駄な蒸発を防ぐことができるということを実証するために、非水系溶剤の蒸発に関する実験を行った。まず、非水系溶剤としてHFE(商品名:Novec7100/スリーエムジャパン株式会社)を用いるとともに、この非水系溶剤を2つのガラス容器に97.9gずつ入れた。また、このうちの一方のガラス容器には、更に水を15.1g添加した。このように非水系溶剤に水を添加することにより、一方のガラス容器に収納した非水系溶剤は水の層によってその液面を被覆された状態となった。   In order to demonstrate that such a water layer can prevent wasteful evaporation of the non-aqueous solvent, an experiment on the evaporation of the non-aqueous solvent was conducted. First, HFE (trade name: Novec7100 / 3M Japan Co., Ltd.) was used as a non-aqueous solvent, and 97.9 g of this non-aqueous solvent was placed in two glass containers. In addition, 15.1 g of water was further added to one of the glass containers. Thus, by adding water to a non-aqueous solvent, the non-aqueous solvent accommodated in one glass container became the state by which the liquid level was coat | covered with the layer of water.

そして、非水系溶剤のみを収納したガラス容器と、非水系溶剤及び水を収納したガラス容器とを室温下で静置し、各々の蒸発量を経時的に測定した。この実験結果を下記表1に示すとともに、表1の数値をグラフ化したものを図8に示す。 And the glass container which accommodated only the non-aqueous solvent, and the glass container which accommodated the non-aqueous solvent and water were left still at room temperature, and each evaporation amount was measured with time. The experimental results are shown in Table 1 below, and the numerical values in Table 1 are graphed in FIG.

この実験結果から、非水系溶剤のみの場合は時間の経過とともに蒸発量が著しく増加しているのに対し、非水系溶剤に水を添加したものについては、120時間が経過しても蒸発量はわずか1.4wt%であり、蒸発量の著しい増加は見られないことが明らかとなった。この結果より、非水系溶剤の液面を水にて被覆することによって非水系溶剤の無駄な蒸発を防ぐことが出来ることが実証された。   From this experimental result, the amount of evaporation increased remarkably with the passage of time in the case of only the non-aqueous solvent, whereas the amount of evaporation in the case of adding water to the non-aqueous solvent increased even after 120 hours. It was only 1.4 wt%, and it became clear that there was no significant increase in evaporation. From this result, it was proved that wasteful evaporation of the non-aqueous solvent can be prevented by coating the liquid surface of the non-aqueous solvent with water.

また、被洗浄物を非水系溶剤の液内に移動させて浸漬するとともに、この浸漬完了に伴って被洗浄物を非水系溶剤内から液面よりも上方に移動させる液洗浄時には、洗浄槽内の水をオーバーフローさせて、上記の如く非水系溶剤と水とを収納した洗浄槽内の水を貯留槽に移送することにより、洗浄槽内の非水系溶剤の液面を露出させて水分が被洗浄物に付着することがないものである。即ち、非水系溶剤と水とは二層に分離するため水を貯留槽に移送することにより、非水系溶剤のみが洗浄槽内に残留するものとなり、非水系溶剤の液面を露出させることができる。そのため、被洗浄物を洗浄槽内で洗浄する際に、被洗浄物に水が付着するおそれがなく、水分によるシミなどの問題が生じにくいものとなる。 In addition, the object to be cleaned is immersed in the liquid of the non-aqueous solvent, and at the time of liquid cleaning in which the object to be cleaned is moved above the liquid surface from the non-aqueous solvent when the immersion is completed , of water to overflow, by transferring water washing tank that houses a non-aqueous solvent and water as described above in the storage tank, the water is exposed to the liquid surface of the non-aqueous solvent in the cleaning tank is to be It does not adhere to the cleaning object . That is, since the non-aqueous solvent and water are separated into two layers, by transferring the water to the storage tank, only the non-aqueous solvent remains in the cleaning tank, and the liquid level of the non-aqueous solvent may be exposed. it can. Therefore, when the object to be cleaned is cleaned in the cleaning tank, there is no risk of water adhering to the object to be cleaned, and problems such as stains due to moisture hardly occur.

また、洗浄槽は、内部に水及び非水系溶剤を収納した状態で、貯留槽に収納した非水系溶剤を移送手段にて洗浄槽に移送することにより、洗浄槽内の水をオーバーフローにより貯留槽内に移送可能としたものであっても良い。このように貯留槽に収納した非水系溶剤を洗浄槽に移送することにより、洗浄槽内の非水系溶剤の嵩が増して非水系溶剤の上部に位置する水の層が押し上げられるため、この洗浄槽内の水をオーバーフローにより貯留槽内に移送することが可能となる。   In addition, the cleaning tank is configured to store the water in the cleaning tank due to overflow by transferring the non-aqueous solvent stored in the storage tank to the cleaning tank by the transfer means in a state where water and the non-aqueous solvent are stored therein. It may be transportable inside. By transferring the non-aqueous solvent stored in the storage tank to the cleaning tank in this way, the volume of the non-aqueous solvent in the cleaning tank increases and the water layer located above the non-aqueous solvent is pushed up. It becomes possible to transfer the water in the tank into the storage tank by overflow.

また、貯留槽は、内部に水及び非水系溶剤を収納した状態で、洗浄槽に収納した非水系溶剤を移送手段にて貯留槽に移送することにより、貯留槽内の水をオーバーフローにより洗浄槽内に移送可能とするものであっても良い。このように洗浄槽に収納した非水系溶剤を貯留槽に移送することにより、貯留槽内の非水系溶剤の嵩が増して非水系溶剤の層の上部に位置する水の層が押し上げられるため、この貯留槽内の水をオーバーフローにより洗浄槽内に移送することが可能となる。   Moreover, the storage tank is a state where water and a non-aqueous solvent are stored therein, and the non-aqueous solvent stored in the cleaning tank is transferred to the storage tank by a transfer means, so that the water in the storage tank is washed by overflow. It may be one that can be transported inside. By transferring the non-aqueous solvent stored in the washing tank to the storage tank in this way, the volume of the non-aqueous solvent in the storage tank is increased and the water layer located above the non-aqueous solvent layer is pushed up, It becomes possible to transfer the water in the storage tank into the cleaning tank by overflow.

また、水は、純水であっても良い。このように純水を使用することにより、ミネラル分等の不純物の混入を防止することが可能となる。   The water may be pure water. By using pure water in this way, it becomes possible to prevent contamination of impurities such as minerals.

また、水は、冷却手段によって非水系溶剤の沸点以下に冷却するものであっても良い。このように冷却によって水を非水系溶剤の沸点以下に保持することにより、非水系溶剤が沸点以上になっても水の層により非水系溶剤の蒸発を抑制することができる。   Further, the water may be cooled to a temperature below the boiling point of the non-aqueous solvent by a cooling means. Thus, by keeping water below the boiling point of a non-aqueous solvent by cooling, even if a non-aqueous solvent becomes more than a boiling point, evaporation of a non-aqueous solvent can be suppressed by the layer of water.

本発明は上述の如く構成したものであるから、水よりも比重の大きい非水系溶剤と水とを貯留槽や洗浄槽に収納した場合には、非水系溶剤と水とが分離して非水系溶剤の層が下側に位置し、水の層がこの非水系溶剤の層の上側に位置するものとなる。そのため、水の層によって非水系溶剤の液面が被覆されることから、非水系溶剤の無駄な蒸発を防ぐことが可能となり、コストを低減することができる。 Since the present invention has been constituted as described above, when receiving a large non-aqueous solvent and water in specific gravity than water in the storage tank and the cleaning tank, a non-aqueous solvent and water min apart nonaqueous The solvent layer is located on the lower side, and the water layer is located on the upper side of the non-aqueous solvent layer. Therefore, since the liquid surface of the non-aqueous solvent is covered with the water layer, it is possible to prevent unnecessary evaporation of the non-aqueous solvent, and the cost can be reduced.

また上記の如く、水と非水系溶剤とがそれぞれ上層と下層との二層に分離することから、上層の水をオーバーフローにて貯留槽に移送することにより非水系溶剤のみが洗浄槽内に残留するものとなり、非水系溶剤の液面を露出させることが可能となる。そのため、上記の如く非水系溶剤のみを洗浄槽内に残留させて非水系溶剤の液面を露出させて、被洗浄物を非水系溶剤の液内に移動させて浸漬するとともに、この浸漬完了に伴って被洗浄物を非水系溶剤内から液面よりも上方に移動させる液洗浄を行った際に、水分が被洗浄物に付着することがない。従って、特別な装置を必要とすることなく簡易な方法によって、被洗浄物への水分の付着によるシミの発生等を防ぐことが可能となる。 Also as mentioned above, since the water and non-aqueous solvent is separation into two layers of upper and lower layers, respectively, only the non-aqueous solvent by transferring the upper layer of water in overflow savings Tomeso is the cleaning bath It becomes possible to expose the liquid surface of the non-aqueous solvent. Therefore, as described above, only the non-aqueous solvent is left in the cleaning tank to expose the liquid surface of the non-aqueous solvent, and the object to be cleaned is moved into the liquid of the non-aqueous solvent and immersed, and this immersion is completed. Accordingly , when liquid cleaning is performed to move the object to be cleaned from the non-aqueous solvent above the liquid level , moisture does not adhere to the object to be cleaned. Therefore, it is possible to prevent the occurrence of spots due to the adhesion of moisture to the object to be cleaned by a simple method without requiring a special device.

本発明の実施例1において洗浄槽に水を被覆した状態を示す断面図。Sectional drawing which shows the state which coat | covered the washing tank with water in Example 1 of this invention. 実施例1において蒸気洗浄を行っている状態を示す断面図。Sectional drawing which shows the state which is performing the steam cleaning in Example 1. FIG. 実施例1において浸漬洗浄を行っている状態を示す断面図。Sectional drawing which shows the state which is performing immersion cleaning in Example 1. FIG. 本発明の実施例2において洗浄槽に水を被覆した状態を示す断面図。Sectional drawing which shows the state which coat | covered the washing tank with water in Example 2 of this invention. 実施例2において浸漬洗浄を行っている状態を示す断面図。Sectional drawing which shows the state which is performing immersion cleaning in Example 2. FIG. 実施例2において蒸気洗浄を行っている状態を示す断面図。Sectional drawing which shows the state which is performing the steam cleaning in Example 2. FIG. 実施例2において被洗浄物の自然乾燥を行っている状態を示す断面図。Sectional drawing which shows the state which is performing the natural drying of the to-be-cleaned object in Example 2. FIG. 非水系溶剤と水の蒸発実験結果を示すグラフ。The graph which shows the evaporation experiment result of a non-aqueous solvent and water.

本発明の実施例1を図1〜3に於いて説明すると、(1)は作業槽であって、底部(2)
に仕切板(3)を立設し、この仕切板(3)によって作業槽(1)の底部(2)側の空間を二分して一方を洗浄槽(4)、他方を貯留槽(5)としている。また、洗浄槽(4)と貯留槽(5)とには、図1に示す如く底部(2)側に連通配管(6)を設け、この連通配管(6)により両者を連通可能としている。また連通配管(6)内の液体の流通及び停止は、この連通配管(6)にそれぞれ設けた第1〜4開閉弁(7)(8)(10)(11)及びポンプ(12)を通じて行われる。このように、本実施例及び以下の実施例では、この連通配管(6)、第1〜4開閉弁(7)(8)(10)(11)、及びポンプ(12)を本発明の移送手段(13)としている。また、使用開始前は、第1〜4開閉弁(7)(8)(10)(11)の全てを閉止状態としている。
Embodiment 1 of the present invention will be described with reference to FIGS. 1 to 3. (1) is a work tank, and the bottom (2)
The partition plate (3) is erected, and the partition plate (3) bisects the space on the bottom (2) side of the work tank (1), with one being the washing tank (4) and the other being the storage tank (5). It is said. Further, as shown in FIG. 1, the cleaning tank (4) and the storage tank (5) are provided with a communication pipe (6) on the bottom (2) side, and the communication pipe (6) allows both to communicate with each other. The flow and stop of the liquid in the communication pipe (6) are performed through the first to fourth on-off valves (7), (8), (10), (11) and the pump (12) provided in the communication pipe (6). Is called. Thus, in this embodiment and the following embodiments, the communication pipe (6), the first to fourth on-off valves (7), (8), (10), and (11), and the pump (12) are transferred according to the present invention. Means (13). In addition, before the start of use, all of the first to fourth on-off valves (7), (8), (10), and (11) are closed.

また、上記の如く形成した洗浄槽(4)の内部には、洗浄槽(4)内の液体を加熱するための加熱手段(27)であるヒーター(14)と加熱温度を制御するための温度センサー(15)を設けるとともに、洗浄槽(4)及び貯留槽(5)内にはそれぞれ冷却コイル(16)(17)を設けている。また作業槽(1)の開口部(20)内周にも冷却コイル(21)を配置し、この冷却コイル(21)により作業槽(1)内の洗浄蒸気(22)の凝縮等を可能としている。また、貯留槽(5)内にも温度センサー(28)を設けている。   Further, inside the cleaning tank (4) formed as described above, there are a heater (14) as a heating means (27) for heating the liquid in the cleaning tank (4) and a temperature for controlling the heating temperature. A sensor (15) is provided, and cooling coils (16) and (17) are provided in the cleaning tank (4) and the storage tank (5), respectively. A cooling coil (21) is also arranged on the inner periphery of the opening (20) of the work tank (1), and this cooling coil (21) enables the condensation of the cleaning vapor (22) in the work tank (1). Yes. A temperature sensor (28) is also provided in the storage tank (5).

また、上記洗浄槽(4)及び貯留槽(5)には、非水系溶剤(23)及び水(24)を収納している。ここで、本発明で使用する非水系溶剤(23)は水(24)よりも比重の大きいものであって、例えばフロン代替溶剤としてすでに公知であるHFE(ハイドロフルオロエーテル)やHFC(ハイドロフルオロカーボン)等が挙げられる。また、本実施例及び以下の実施例で使用する水(24)は純水であるとともに、本発明の冷却手段(25)である洗浄槽(4)及び貯留槽(5)内の冷却コイル(16)(17)により、非水系溶剤(23)の沸点以下に冷却している。   The washing tank (4) and the storage tank (5) contain a non-aqueous solvent (23) and water (24). Here, the non-aqueous solvent (23) used in the present invention has a specific gravity greater than that of water (24), and for example, HFE (hydrofluoroether) and HFC (hydrofluorocarbon) which are already well-known as chlorofluorocarbon alternative solvents. Etc. In addition, the water (24) used in this example and the following examples is pure water, and the cooling coil (25) in the washing tank (4) and the storage tank (5) as the cooling means (25) of the present invention ( 16) Cooled below the boiling point of the non-aqueous solvent (23) by (17).

上記の如く構成したものにおいて被洗浄物(26)の蒸気洗浄を行う方法について以下に説明する。まず、蒸気洗浄の開始前には、洗浄槽(4)と貯留槽(5)とにそれぞれ非水系溶剤(23)及び水(24)が収納されている。これにより、洗浄槽(4)内及び貯留槽(5)内は、図1に示す如く下層を非水系溶剤(23)、上層を水(24)とする二層に分離するものとなる。そのため、洗浄槽(4)内及び貯留槽(5)内の非水系溶剤(23)の液面(18)が水(24)の層によって完全に被覆されるものとなることから、この水(24)の層によって非水系溶剤(23)の無駄な蒸発を防ぐことが可能となり、コストを抑制することができる。   A method for performing the steam cleaning of the object to be cleaned (26) in the configuration as described above will be described below. First, before the start of the steam cleaning, the non-aqueous solvent (23) and water (24) are stored in the cleaning tank (4) and the storage tank (5), respectively. As a result, the inside of the cleaning tank (4) and the storage tank (5) are separated into two layers with the lower layer being a non-aqueous solvent (23) and the upper layer being water (24) as shown in FIG. Therefore, since the liquid surface (18) of the non-aqueous solvent (23) in the cleaning tank (4) and the storage tank (5) is completely covered by the layer of water (24), this water ( The layer 24) can prevent wasteful evaporation of the non-aqueous solvent (23), thereby reducing the cost.

そして、適宜の移動機構(図示せず。)により、図1に示す如く被洗浄物(26)を作業槽(1)内の洗浄槽(4)に臨ませて配置する。そして、蒸気洗浄中に被洗浄物(26)に水(24)が付着する事態を防ぐため、蒸気洗浄を開始する前に洗浄槽(4)内の水(24)の除去作業を行う。即ち、図1に示す第1、2開閉弁(7)(8)を開弁してポンプ(12)を作動させる。これにより、貯留槽(5)内の非水系溶剤(23)が第1開閉弁(7)、ポンプ(12)、及び第2開閉弁(8)を通過して洗浄槽(4)内に移送される。そして、貯留槽(5)内の液体の嵩が減るとともに洗浄槽(4)内の液体の嵩が増し、この洗浄槽(4)内の水(24)が仕切板(3)を超えて貯留槽(5)内にオーバーフローするものとなる。   Then, by an appropriate moving mechanism (not shown), the object to be cleaned (26) is arranged facing the cleaning tank (4) in the work tank (1) as shown in FIG. Then, in order to prevent water (24) from adhering to the object (26) to be cleaned during the steam cleaning, the water (24) in the cleaning tank (4) is removed before the steam cleaning is started. That is, the first and second on-off valves (7) and (8) shown in FIG. 1 are opened to operate the pump (12). As a result, the non-aqueous solvent (23) in the storage tank (5) passes through the first on-off valve (7), the pump (12), and the second on-off valve (8) and is transferred into the cleaning tank (4). Is done. The volume of liquid in the storage tank (5) decreases and the volume of liquid in the cleaning tank (4) increases, and the water (24) in this cleaning tank (4) is stored beyond the partition plate (3). It will overflow into the tank (5).

上記の方法によって洗浄槽(4)内に収納していた水(24)が全て貯留槽(5)内に流入した時点で、ポンプ(12)を停止するとともに第1、2開閉弁(7)(8)を閉弁する。これにより、図2に示す如く洗浄槽(4)内には非水系溶剤(23)のみが残っているため、この非水系溶剤(23)の液面(18)が露出した状態となる。そして、洗浄槽(4)内に設けたヒーター(14)により非水系溶剤(23)を加熱し、図2に示す如く作業槽(1)内に洗浄蒸気(22)を発生させて被洗浄物(26)の蒸気洗浄を行う。   When all the water (24) stored in the washing tank (4) has flowed into the storage tank (5) by the above method, the pump (12) is stopped and the first and second on-off valves (7) Close (8). Thereby, as shown in FIG. 2, since only the non-aqueous solvent (23) remains in the cleaning tank (4), the liquid surface (18) of the non-aqueous solvent (23) is exposed. Then, the non-aqueous solvent (23) is heated by the heater (14) provided in the cleaning tank (4) to generate cleaning vapor (22) in the work tank (1) as shown in FIG. Perform (26) steam cleaning.

このように洗浄槽(4)内の水(24)を完全に除去し、非水系溶剤(23)の液面(18)を露出さ
せた状態で蒸気洗浄を行うことにより、水分が被洗浄物(26)に付着する事態が生じにくいものとなる。従って、特別な装置を別途必要とすることなく、簡易な方法で被洗浄物(26)への水分の付着によるシミの発生等を防ぐことが可能となる。
In this way, the water (24) in the cleaning tank (4) is completely removed, and steam cleaning is performed with the liquid surface (18) of the non-aqueous solvent (23) exposed, so that moisture can be cleaned. (26) is less likely to adhere to. Accordingly, it is possible to prevent the occurrence of spots due to the adhesion of moisture to the object to be cleaned (26) by a simple method without requiring a special device.

次に、蒸気洗浄が終了すると、非水系溶剤(23)の無駄な蒸発を防ぐために再び洗浄槽(4)内の非水系溶剤(23)の液面(18)を水(24)にて被覆する。即ち、第3、4開閉弁(10)(11)を開弁するとともにポンプ(12)を作動させることにより、洗浄槽(4)内の非水系溶剤(23)が第3開閉弁(10)、ポンプ(12)、及び第4開閉弁(11)を通過して貯留槽(5)内に移送される。これにより、洗浄槽(4)内の液体の嵩が減るとともに、貯留槽(5)内の液体の嵩が増すため、貯留槽(5)内の水(24)が仕切板(3)を超えて洗浄槽(4)内にオーバーフローするものとなる。そして、洗浄槽(4)内の非水系溶剤(23)の液面(18)が水(24)によって完全に被覆された時点でポンプ(12)を停止するとともに第3、4開閉弁(10)(11)を閉弁する。これにより、図1に示す如く洗浄槽(4)内の非水系溶剤(23)の液面(18)が水(24)によって被覆され、洗浄槽(4)内の非水系溶剤(23)の無駄な蒸発を防ぐことができる。   Next, when the steam cleaning is completed, the liquid surface (18) of the non-aqueous solvent (23) in the cleaning tank (4) is again covered with water (24) to prevent unnecessary evaporation of the non-aqueous solvent (23). To do. That is, by opening the third and fourth on-off valves (10) and (11) and operating the pump (12), the non-aqueous solvent (23) in the washing tank (4) is removed from the third on-off valve (10). Then, it passes through the pump (12) and the fourth on-off valve (11) and is transferred into the storage tank (5). This reduces the volume of liquid in the cleaning tank (4) and increases the volume of liquid in the storage tank (5), so that the water (24) in the storage tank (5) exceeds the partition plate (3). As a result, it overflows into the washing tank (4). When the liquid surface (18) of the non-aqueous solvent (23) in the washing tank (4) is completely covered with water (24), the pump (12) is stopped and the third and fourth on-off valves (10 ) (11) is closed. Thereby, as shown in FIG. 1, the liquid surface (18) of the non-aqueous solvent (23) in the cleaning tank (4) is covered with water (24), and the non-aqueous solvent (23) in the cleaning tank (4) is covered. Useless evaporation can be prevented.

次に、本実施例の洗浄装置にて被洗浄物(26)の浸漬洗浄を行う方法について以下に説明する。まず、図1に示す如く洗浄槽(4)及び貯留槽(5)内にそれぞれ水(24)及び非水系溶剤(23)を収納した状態から、蒸気洗浄時と同様に第1、2開閉弁(7)(8)を開弁するとともにポンプ(12)を作動させて、貯留槽(5)内の非水系溶剤(23)を第1開閉弁(7)、ポンプ(12)、及び第2開閉弁(8)通過して洗浄槽(4)内に移送する。これにより、洗浄槽(4)内の水(24)が仕切板(3)を超えて貯留槽(5)内にオーバーフローして洗浄槽(4)内の水(24)を全て貯留槽(5)内に移送する。   Next, a method for immersing the object to be cleaned (26) with the cleaning apparatus of this embodiment will be described below. First, as shown in FIG. 1, from the state in which water (24) and non-aqueous solvent (23) are stored in the cleaning tank (4) and the storage tank (5), respectively, (7) Open the valve (8) and operate the pump (12) to remove the non-aqueous solvent (23) in the storage tank (5) from the first on-off valve (7), the pump (12), and the second It passes through the on-off valve (8) and is transferred into the washing tank (4). As a result, the water (24) in the cleaning tank (4) overflows into the storage tank (5) beyond the partition plate (3) and all the water (24) in the cleaning tank (4) is stored in the storage tank (5 ).

その後、ポンプ(12)を停止するとともに第1、2開閉弁(7)(8)を閉弁することにより、図3に示す如く洗浄槽(4)内に非水系溶剤(23)のみが残留し、この非水系溶剤(23)の液面(18)が露出した状態となる。そして、適宜の移動機構(図示せず。)によって図3に示す如く被洗浄物(26)を洗浄槽(4)の非水系溶剤(23)中に浸漬する。このように、簡易な方法によって洗浄槽(4)内の全ての水(24)を除去して非水系溶剤(23)の液面(18)を露出させた状態で浸漬洗浄を行うことにより、被洗浄物(26)への水分の付着によるシミの発生などを防ぐことが可能となる。   Thereafter, the pump (12) is stopped and the first and second on-off valves (7) and (8) are closed, so that only the non-aqueous solvent (23) remains in the cleaning tank (4) as shown in FIG. Then, the liquid surface (18) of the non-aqueous solvent (23) is exposed. Then, the object (26) to be cleaned is immersed in the non-aqueous solvent (23) of the cleaning tank (4) as shown in FIG. 3 by an appropriate moving mechanism (not shown). In this way, by removing all water (24) in the cleaning tank (4) by a simple method and performing immersion cleaning with the liquid surface (18) of the non-aqueous solvent (23) exposed, It is possible to prevent the occurrence of spots due to the adhesion of moisture to the object to be cleaned (26).

そして、浸漬洗浄が終了すると、上記移動機構によって被洗浄物(26)を非水系溶剤(23)中から洗浄槽(4)の上方に引き上げる。その後第3、4開閉弁(10)(11)を開弁するとともにポンプ(12)を作動させることにより、洗浄槽(4)内の非水系溶剤(23)が第3開閉弁(10)、ポンプ(12)、及び第4開閉弁(11)を通過して貯留槽(5)内に移送される。これにより、貯留槽(5)内の水(24)が仕切板(3)を超えて洗浄槽(4)内に流れこみ、図1に示す如く洗浄槽(4)内の非水系溶剤(23)の液面(18)が水(24)によって再び被覆されることから、浸漬洗浄終了後における洗浄槽(4)内の非水系溶剤(23)の無駄な蒸発を防ぐことができる。そして洗浄槽(4)内の非水系溶剤(23)の液面(18)が水(24)によって完全に被覆された後、ポンプ(12)を停止するとともに第3、4開閉弁(10)(11)を閉弁する。   When the immersion cleaning is completed, the object to be cleaned (26) is pulled up from the non-aqueous solvent (23) to above the cleaning tank (4) by the moving mechanism. Thereafter, the third and fourth on-off valves (10) and (11) are opened and the pump (12) is operated, so that the non-aqueous solvent (23) in the washing tank (4) becomes the third on-off valve (10), It passes through the pump (12) and the fourth on-off valve (11) and is transferred into the storage tank (5). As a result, the water (24) in the storage tank (5) flows over the partition plate (3) into the cleaning tank (4), and the non-aqueous solvent (23 in the cleaning tank (4) as shown in FIG. ) Is again covered with water (24), it is possible to prevent wasteful evaporation of the non-aqueous solvent (23) in the cleaning tank (4) after the immersion cleaning is completed. After the liquid level (18) of the non-aqueous solvent (23) in the washing tank (4) is completely covered with water (24), the pump (12) is stopped and the third and fourth on-off valves (10) Close (11).

尚、本実施例では上記の如く、作業槽(1)内を仕切板(3)によって洗浄槽(4)と貯留槽(5)とに二分割しているが、他の異なる実施例ではこれに限らず、作業槽(1)内を複数枚の仕切板(3)を配置することによって三分割以上とすることも可能である。   In the present embodiment, as described above, the work tank (1) is divided into the cleaning tank (4) and the storage tank (5) by the partition plate (3). Not limited to this, it is possible to divide the work tank (1) into three or more by arranging a plurality of partition plates (3).

上記実施例1では蒸気洗浄の際に、洗浄槽(4)内の非水系溶剤(23)を蒸発させることによって洗浄蒸気(22)を発生させたが、本実施例2では作業槽(1)とは別個に設けた蒸気発生槽(31)にて洗浄蒸気(22)を発生させて、この洗浄蒸気(22)を蒸気洗浄に用いている。本
実施例2について図4〜7にて説明すると、(1)は作業槽であって、底部(2)に仕切板(
3)を立設し、この仕切板(3)によって作業槽(1)の底部(2)側の空間を二分して一方を洗浄槽(4)、他方を貯留槽(5)としている。また、洗浄槽(4)と貯留槽(5)との間には、図4に示
す如く底部(2)側に連通配管(6)を設け、この連通配管(6)により両者を連通可能としている。また連通配管(6)内の液体の流通は、この連通配管(6)にそれぞれ設けた第1〜4開閉弁(7)(8)(10)(11)及びポンプ(12)を介して行われる。尚、洗浄開始前の第1〜4開閉弁(7)(8)(10)(11)は閉止状態としている。
In the first embodiment, the cleaning steam (22) is generated by evaporating the non-aqueous solvent (23) in the cleaning tank (4) during the steam cleaning, but in the second embodiment, the working tank (1) Cleaning steam (22) is generated in a steam generation tank (31) provided separately from this, and this cleaning steam (22) is used for steam cleaning. The second embodiment will be described with reference to FIGS. 4 to 7. (1) is a work tank, and a partition plate (
3) is erected, and the partition plate (3) bisects the space on the bottom (2) side of the work tank (1), with one serving as a cleaning tank (4) and the other serving as a storage tank (5). In addition, a communication pipe (6) is provided between the cleaning tank (4) and the storage tank (5) on the bottom (2) side as shown in FIG. 4 so that both can communicate with each other. Yes. The liquid in the communication pipe (6) is circulated through the first to fourth on-off valves (7), (8), (10), (11) and the pump (12) provided in the communication pipe (6). Is called. The first to fourth on-off valves (7), (8), (10), and (11) before the start of cleaning are in a closed state.

また、上記の如く形成した洗浄槽(4)及び貯留槽(5)の内周には、それぞれ冷却コイル(1
6)(17)を配置している。また作業槽(1)の開口部(20)内周にも冷却コイル(21)を巻き回し、洗浄蒸気(22)の凝縮等を可能としている。また図4に示す如く、洗浄槽(4)及び貯留槽(5)には、非水系溶剤(23)及び水(24)を収納している。ここで、本実施例で使用する非水系溶剤(23)は水(24)よりも比重の大きいものであって、例えばフロン代替溶剤としてすでに知られているHFE(ハイドロフルオロエーテル)やHFC(ハイドロフルオロカーボン)等が挙げられる。また、本実施例及び以下の実施例で使用する水(24)は純水である。また、貯留槽(5)内には温度センサー(28)を設けている。
In addition, the cooling coils (1) are respectively disposed on the inner periphery of the cleaning tank (4) and the storage tank (5) formed as described above.
6) (17) is arranged. Further, a cooling coil (21) is also wound around the inner periphery of the opening (20) of the working tank (1) to allow the cleaning steam (22) to be condensed. As shown in FIG. 4, the cleaning tank (4) and the storage tank (5) contain a non-aqueous solvent (23) and water (24). Here, the non-aqueous solvent (23) used in this example has a specific gravity greater than that of water (24). For example, HFE (hydrofluoroether) and HFC (hydrocarbon) that are already known as chlorofluorocarbon alternative solvents are used. Fluorocarbon) and the like. The water (24) used in this example and the following examples is pure water. A temperature sensor (28) is provided in the storage tank (5).

また本実施例では上記の如き構成の作業槽(1)とは別個に蒸気発生槽(31)を配置している。この蒸気発生槽(31)には蓋体(32)を設けており、内部を密閉可能なものとしている。また、この蒸気発生槽(31)の内部には本実施例の加熱手段(37)であるヒーター(33)と温度センサー(34)とが設けられているとともに、非水系溶剤(23)が収納されている。   In this embodiment, the steam generation tank (31) is disposed separately from the work tank (1) having the above-described configuration. The steam generation tank (31) is provided with a lid (32) so that the inside can be sealed. The steam generation tank (31) is provided with a heater (33) as a heating means (37) and a temperature sensor (34) of the present embodiment, and a non-aqueous solvent (23) is accommodated therein. Has been.

上記の如く構成したものにおいて、被洗浄物(26)の洗浄方法について以下に説明する。まず、浸漬洗浄について説明すると、洗浄槽(4)内及び貯留槽(5)内には、図4に示す如く非水系溶剤(23)及び水(24)をそれぞれ収納している。そのため、洗浄槽(4)内及び貯留槽(5)内は、図4に示す如くいずれも下層を非水系溶剤(23)、上層を水(24)とする二層に分離することから、洗浄槽(4)内及び貯留槽(5)内の非水系溶剤(23)の液面(18)は水(24)の層によって完全に被覆されるものとなる。従って、このように非水系溶剤(23)の液面(18)を被覆する水(24)の槽によって、洗浄槽(4)及び貯留槽(5)内の非水系溶剤(23)の無駄な蒸発を防ぐことが可能となり、コストを抑制することができる。   A method for cleaning the object (26) to be cleaned will be described below. First, the immersion cleaning will be described. In the cleaning tank (4) and the storage tank (5), a non-aqueous solvent (23) and water (24) are respectively stored as shown in FIG. Therefore, as shown in FIG. 4, the cleaning tank (4) and the storage tank (5) are separated into two layers with the lower layer being a non-aqueous solvent (23) and the upper layer being water (24). The liquid level (18) of the non-aqueous solvent (23) in the tank (4) and the storage tank (5) is completely covered by the water (24) layer. Therefore, the water (24) tank covering the liquid surface (18) of the non-aqueous solvent (23) in this way wastes the non-aqueous solvent (23) in the cleaning tank (4) and the storage tank (5). Evaporation can be prevented and costs can be reduced.

そして、浸漬洗浄を開始する際には、まず被洗浄物(26)への水(24)の付着を防ぐため、洗浄槽(4)内の水(24)の除去作業を行う。即ち、図4に示す第1、2開閉弁(7)(8)を開弁してポンプ(12)を作動させる。これにより、貯留槽(5)内の非水系溶剤(23)が第1開閉弁(7)、ポンプ(12)、及び第2開閉弁 (8)を通過して洗浄槽(4)内に移送される。これにより、貯留槽(5)内の液体の嵩が減るとともに洗浄槽(4)内の液体の嵩が増し、洗浄槽(4)内の水(24)が仕切板(3)を超えて貯留槽(5)内にオーバーフローするものとなる。   When the immersion cleaning is started, first, the water (24) in the cleaning tank (4) is removed in order to prevent the water (24) from adhering to the object to be cleaned (26). That is, the first and second on-off valves (7) and (8) shown in FIG. 4 are opened to operate the pump (12). As a result, the non-aqueous solvent (23) in the storage tank (5) passes through the first on-off valve (7), pump (12), and second on-off valve (8) and is transferred into the cleaning tank (4). Is done. As a result, the volume of the liquid in the storage tank (5) decreases and the volume of the liquid in the cleaning tank (4) increases, and the water (24) in the cleaning tank (4) is stored beyond the partition plate (3). It will overflow into the tank (5).

そして、洗浄槽(4)内の水(24)が全て貯留槽(5)内に流入した時点で、ポンプ(12)を停止するとともに第1、2開閉弁(7)(8)を閉弁する。これにより、図5に示す如く洗浄槽(4)内には非水系溶剤(23)のみが残留するため、この非水系溶剤(23)の液面(18)が露出した状態となる。このように洗浄槽(4)内の水(24)を完全に除去し、非水系溶剤(23)の液面(18)を露出させた状態で被洗浄物(26)の浸漬洗浄を行うことにより、被洗浄物(26)に水(24)が付着する事態が生じにくいものとなる。従って、特別な装置を別途必要とすることなく、簡易な方法で被洗浄物(26)への水分の付着によるシミの発生などを防ぐことができる。   Then, when all the water (24) in the washing tank (4) has flowed into the storage tank (5), the pump (12) is stopped and the first and second on-off valves (7) and (8) are closed. To do. As a result, only the non-aqueous solvent (23) remains in the cleaning tank (4) as shown in FIG. 5, so that the liquid surface (18) of the non-aqueous solvent (23) is exposed. In this way, the water (24) in the cleaning tank (4) is completely removed, and the object to be cleaned (26) is cleaned while the liquid surface (18) of the non-aqueous solvent (23) is exposed. This makes it difficult for water (24) to adhere to the object (26) to be cleaned. Therefore, it is possible to prevent the occurrence of spots due to the adhesion of moisture to the object to be cleaned (26) by a simple method without requiring a special device.

そして上記の如く非水系溶剤(23)の液面(18)を露出させた状態で、被洗浄物(26)を適宜の移動機構(図示せず。)によって図5に示す如く洗浄槽(4)の非水系溶剤(23)内に浸漬して浸漬洗浄を行う。この浸漬洗浄時には、洗浄槽(4)内の冷却コイル(16)によって被洗浄物(26)が冷却された状態で行われる。そして浸漬洗浄が完了した後、上記移動機構によって被洗浄物(26)を再び非水系溶剤(23)の液面(18)よりも上方に移動させる。   Then, with the liquid surface (18) of the non-aqueous solvent (23) exposed as described above, the object to be cleaned (26) is cleaned by an appropriate moving mechanism (not shown) as shown in FIG. And dipping in a non-aqueous solvent (23). This immersion cleaning is performed in a state where the object to be cleaned (26) is cooled by the cooling coil (16) in the cleaning tank (4). After the immersion cleaning is completed, the object to be cleaned (26) is again moved above the liquid level (18) of the non-aqueous solvent (23) by the moving mechanism.

そして浸漬洗浄が終了した時点で洗浄槽(4)内の非水系溶剤(23)の無駄な蒸発を防ぐため、洗浄槽(4)内の非水系溶剤(23)の液面(18)を水(24)にて被覆する。即ち、第1、2開閉弁(7)(8)を閉弁した状態で、第3、4開閉弁 (10)(11)を開弁し、ポンプ(12)を作動させる。これにより、洗浄槽(4)内の非水系溶剤(23)が第3開閉弁 (10)、ポンプ(12)、及び第4開閉弁 (11)を通過して貯留槽(5)内に移送されるとともに、洗浄槽(4)内の液体の嵩が減る。   When the immersion cleaning is completed, the liquid level (18) of the non-aqueous solvent (23) in the cleaning tank (4) is washed with water to prevent unnecessary evaporation of the non-aqueous solvent (23) in the cleaning tank (4). Cover with (24). That is, with the first and second on-off valves (7) and (8) closed, the third and fourth on-off valves (10) and (11) are opened to operate the pump (12). As a result, the non-aqueous solvent (23) in the cleaning tank (4) passes through the third on-off valve (10), the pump (12), and the fourth on-off valve (11) and is transferred into the storage tank (5). In addition, the bulk of the liquid in the cleaning tank (4) is reduced.

その一方、貯留槽(5)内の非水系溶剤(23)の嵩が増すため貯留槽(5)内の水(24)が仕切板(3)を通じて洗浄槽(4)内にオーバーフローし、水(24)によって洗浄槽(4)内の非水系溶剤(23)の液面(18)が被覆される。そして、図4に示す如く洗浄槽(4)内の非水系溶剤(23)の液面(18)が完全に水(24)に被覆された時点で、第3、4開閉弁 (10)(11)を閉弁するとともにポンプ(12)を停止する。   On the other hand, since the volume of the non-aqueous solvent (23) in the storage tank (5) increases, the water (24) in the storage tank (5) overflows into the cleaning tank (4) through the partition plate (3), and the water (24) covers the liquid surface (18) of the non-aqueous solvent (23) in the cleaning tank (4). When the liquid surface (18) of the non-aqueous solvent (23) in the cleaning tank (4) is completely covered with water (24) as shown in FIG. 4, the third and fourth on-off valves (10) ( 11) is closed and the pump (12) is stopped.

次に、上記浸漬洗浄が完了した後に被洗浄物(26)の蒸気洗浄を行う。まず、作業槽(1)とは別個に形成した蒸気発生槽(31)には蓋体(32)を配置するとともに、この蒸気発生槽(31)と作業槽(1)との連通を可能とする連通配管(35)に設けた第5開閉弁(36)を閉弁し、蒸気発生槽(31)内を密閉状態にしておく。そしてこの蒸気発生槽(31)内のヒーター(33)によって非水系溶剤(23)を加熱し、蒸気発生槽(31)内に非水系溶剤(23)の洗浄蒸気(22)を予め発生させておく。   Next, after the immersion cleaning is completed, the object to be cleaned (26) is subjected to steam cleaning. First, the vapor generating tank (31) formed separately from the working tank (1) is provided with a lid (32), and the steam generating tank (31) and the working tank (1) can communicate with each other. The fifth on-off valve (36) provided in the communication pipe (35) to be closed is closed to keep the steam generation tank (31) in a sealed state. Then, the non-aqueous solvent (23) is heated by the heater (33) in the steam generation tank (31), and cleaning steam (22) of the non-aqueous solvent (23) is generated in advance in the steam generation tank (31). deep.

その後、蒸気洗浄を行う際に第5開閉弁(36)を開弁することにより、密閉されていた蒸気発生槽(31)内が洗浄蒸気(22)の発生によって高圧となっていることから、この洗浄蒸気(22)が第5開閉弁(36)を通過して作業槽(1)内に流入するものとなる。そして、このように作業槽(1)内に送られた洗浄蒸気(22)によって、図6に示す如くこの作業槽(1)内に配置した被洗浄物(26)の蒸気洗浄が行われる。ここで、浸漬洗浄時には、洗浄槽(4)内の冷却コイル(16)にて冷却された非水系溶剤(23)内に被洗浄物(26)を浸漬していたことから、この被洗浄物(26)は十分に冷やされた状態で蒸気洗浄の工程に移行する。   After that, when the steam cleaning is performed, the fifth on-off valve (36) is opened, so that the inside of the sealed steam generation tank (31) becomes high pressure due to the generation of cleaning steam (22). The cleaning steam (22) passes through the fifth on-off valve (36) and flows into the working tank (1). Then, with the cleaning steam (22) sent into the work tank (1) in this way, the object to be cleaned (26) arranged in the work tank (1) is steam cleaned as shown in FIG. Here, the object to be cleaned (26) was immersed in the non-aqueous solvent (23) cooled by the cooling coil (16) in the cleaning tank (4) during the immersion cleaning. (26) shifts to the steam cleaning process in a sufficiently cooled state.

そのため、蒸気洗浄時には、非水系溶剤(23)の洗浄蒸気(22)が冷やされた被洗浄物(26)
の表面に付着することから、この洗浄蒸気(22)の凝縮比が高くなって洗浄効率を向上させることができる。そして、蒸気洗浄終了時には、第5開閉弁(36)を閉弁して蒸気発生槽(31)からの非水系溶剤(23)の流入を停止し、移動機構によって被洗浄物(26)を図7に示す如く作業槽(1)の開口部(20)付近に配置して被洗浄物(26)の自然乾燥を行う。
Therefore, the object to be cleaned (26) in which the cleaning steam (22) of the non-aqueous solvent (23) is cooled during the steam cleaning.
Therefore, the cleaning steam (22) has a high condensation ratio, thereby improving the cleaning efficiency. At the end of the steam cleaning, the fifth on-off valve (36) is closed to stop the inflow of the non-aqueous solvent (23) from the steam generation tank (31), and the object to be cleaned (26) is moved by the moving mechanism. As shown in FIG. 7, the object to be cleaned (26) is naturally dried by being arranged near the opening (20) of the work tank (1).

4 洗浄槽
5 貯留槽
13 移送手段
18 液面
22 洗浄蒸気
23 非水系溶剤
24 水
25 冷却手段
27 加熱手段
31 蒸気発生槽
37 加熱手段

4 Washing tank
5 Reservoir
13 Transportation means
18 Liquid level
22 Cleaning steam
23 Non-aqueous solvent
24 water
25 Cooling means
27 Heating means
31 Steam generation tank
37 Heating means

Claims (4)

一又は複数の貯留槽と洗浄槽とを備え、洗浄槽には、水よりも比重の大きい非水系溶剤と水とを収納することにより、洗浄槽内の非水系溶剤の液面を水の層にて被覆し非水系溶剤の無駄な蒸発を防止可能とする一方、被洗浄物を非水系溶剤の液内に移動させて浸漬するとともに、この浸漬完了に伴って被洗浄物を非水系溶剤内から液面よりも上方に移動させる液洗浄時には、洗浄槽内の水をオーバーフローさせて貯留槽に移送することにより、洗浄槽内の非水系溶剤の液面を露出させて水分が被洗浄物に付着することがないことを特徴とする洗浄装置。 Comprising one or a plurality of reservoirs and the cleaning tank, the cleaning tank, by accommodating a larger non-aqueous solvent and water in specific gravity than water, the liquid level of the non-aqueous solvent in the washing Kiyoshiso water while you possible to prevent wasteful evaporation of the coated non-aqueous solvent in the layer, while immersed by moving the object to be cleaned in a liquid non-aqueous solvent the object to be cleaned non accompanying this immersion complete when liquid cleaning Before moving above the liquid surface from the aqueous solvent, by the water in the washing tank by overflow for transferring the savings Tomeso, exposure the liquid level of the non-aqueous solvent in the cleaning tank it is allowed to moisture cleaning apparatus characterized by do not adhere to the object to be cleaned. 洗浄槽は、内部に水及び非水系溶剤を収納した状態で、貯留槽に収納した非水系溶剤を移送手段にて洗浄槽に移送することにより、洗浄槽内の水をオーバーフローにより貯留槽内に移送可能とするとともに、貯留槽は、内部に水及び非水系溶剤を収納した状態で、洗浄槽に収納した非水系溶剤を移送手段にて貯留槽に移送することにより、貯留槽内の水をオーバーフローにより洗浄槽内に移送可能とすることを特徴とする請求項1の洗浄装置。   The cleaning tank is a state in which water and a non-aqueous solvent are stored therein, and the non-aqueous solvent stored in the storage tank is transferred to the cleaning tank by a transfer means, whereby the water in the cleaning tank is overflowed into the storage tank. The storage tank is configured to transfer the water in the storage tank by transferring the non-aqueous solvent stored in the cleaning tank to the storage tank by a transfer means in a state where water and the non-aqueous solvent are stored inside. 2. The cleaning apparatus according to claim 1, wherein the cleaning apparatus can be transferred into the cleaning tank by overflow. 水は、純水であることを特徴とする請求項1、または2の洗浄装置。   The cleaning apparatus according to claim 1 or 2, wherein the water is pure water. 水は、冷却手段によって非水系溶剤の沸点以下に冷却したことを特徴とする請求項1、2、または3の洗浄装置。   4. The cleaning apparatus according to claim 1, wherein water is cooled to a boiling point or lower of the non-aqueous solvent by a cooling means.
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