JP2013180920A - Scribing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress the distortion of a slider block by weight of a scribing head in a scribing device which moves the scribing head along a beam via the slider block.SOLUTION: The shape of a slider block 17 to which a scribing head is attached is made a frame shape surrounding a beam 12. At least three free bearings 21A to 23C are disposed on the respective faces of the slider block 17 facing the beam 12 and balls of the free bearings are kept in contact with the beam 12.

Description

  The present invention relates to a scribe device for forming a scribe line on a brittle material substrate, and more particularly to holding a scribe head.

  Conventionally, in a flat panel display such as a liquid crystal display panel or a liquid crystal projector substrate, a mother glass substrate is bonded together in a manufacturing process and then divided into a single panel having a predetermined size. The cutting of the brittle material substrate such as the mother glass substrate includes a scribe process and a break process, and a scribe device is used in the scribe process.

  FIG. 1 is a schematic perspective view showing an example of a conventional scribing apparatus. In the scribing apparatus 100, a moving base 101 is held so as to be movable in the y-axis direction along a pair of guide rails 102a and 102b. The ball screw 103 is screwed with the moving table 101. The ball screw 103 is rotated by driving the motor 104, and moves the moving base 101 in the y-axis direction along the guide rails 102a and 102b. A motor 105 is provided on the upper surface of the movable table 101. The motor 105 rotates the table 106 on the xy plane and positions it at a predetermined angle. The brittle material substrate 107 is placed on the table 106 and held by a vacuum suction means (not shown). Two CCD cameras 108 that image the alignment marks of the brittle material substrate 107 are provided on the scriber.

  In the scribe device 100, a bridge 110 is installed by struts 111 a and 111 b along the x-axis direction so as to straddle the moving table 101 and the upper table 106. The bridge 110 is provided with a beam 112 in the lateral direction, and a linear motor 113 is provided in the longitudinal direction of the beam 112. The linear motor 113 is a drive source that moves the scribe head 114 along the x-axis direction. A tip holder 115 having a scribing wheel is attached to the lower end portion of the scribe head 114.

  FIG. 2 is a schematic view showing the beam 112 stretched between the columns 111 a and 111 b and the scribe head 114 attached to the beam 112. As shown in the figure, a slide base 116 is attached to the movable part of the linear motor 113, and a scribe head 114 is further attached to the slide base 116. The scribe head 114 holds the chip holder 115 so as to be movable up and down. The chip holder 115 holds a disc-shaped scribing wheel 117 at the lower portion thereof in a rotatable manner. The scribing wheel 117 rolls while being pressed against the brittle material substrate with an appropriate load to form a scribe line. The scribe head 114 is provided with an elevating unit that enables such an elevating operation, for example, an air cylinder using air pressure control or an electric elevating unit using a linear motor.

  Patent Document 2 proposes a scribing device that performs scribing by rotating a feed screw by a motor and moving a scribe head in parallel on the brittle material substrate along the feed screw.

International Publication WO2009 / 157440 Japanese Unexamined Patent Publication No. 2004-10452

  However, in the scribing devices of Patent Documents 1 and 2, the scribing head is attached to the side of the linear motor or the feed screw. Therefore, a rotational moment is generated in the clockwise direction in FIG. 2 due to the weight of the scribe head. Therefore, there is a problem that the slide base is easily distorted, the scribe position is liable to be displaced during scribing, and the accuracy of the scribe position is lowered.

  The present invention has been made in view of the problems of the conventional scribing position, and is intended to improve the accuracy of the scribing position by making the slide base into a shape that is difficult to be distorted by the weight of the scribing head. Technical issue.

  In order to solve this problem, a scribing apparatus of the present invention includes a table on which a brittle material substrate is installed, a bridge having a beam parallel to the surface of the brittle material substrate installed on the table, and at least three of the beams. A slider block formed so as to surround the surface; a linear motor that linearly moves the slider block along the beam; and a scribe head that is attached to the slider block and holds a scribing wheel that scribes the brittle material substrate. , And at least three free bearings are provided on each surface facing the beam on the inner surface of the slider block.

  Here, the beam may have a stopper for preventing the slider block from dropping off at least at one end.

  According to the present invention having such a feature, the slider block is formed so as to surround at least three surfaces of the beam, and the free bearing for holding the rotatable ball is provided on the surface facing the beam. For this reason, distortion of the slider block due to the weight of the scribe head can be suppressed. Therefore, the effect that the scribing position accuracy can be improved is obtained.

FIG. 1 is a schematic perspective view of a conventional scribing apparatus. FIG. 2 is a view showing a beam and a scribe head of a conventional scribe device. FIG. 3 is a schematic perspective view of the scribing apparatus according to the embodiment of the present invention. FIG. 4 is a perspective view showing beams, columns, and slider blocks used in the scribing apparatus according to the embodiment of the present invention. FIG. 5 is a central longitudinal sectional view of the slider block according to the embodiment of the present invention. FIG. 6 is a central longitudinal sectional view of the slider block according to the embodiment of the present invention.

  FIG. 3 is a perspective view showing a scribing apparatus according to an embodiment of the present invention. In this scribing apparatus, the same parts as those in the conventional example described above are denoted by the same reference numerals. Also in the scribing apparatus 1 according to the present embodiment, the movable table 101 is held so as to be movable in the y-axis direction along the pair of guide rails 102a and 102b. The ball screw 103 is screwed with the moving table 101. The ball screw 103 is rotated by driving the motor 104, and moves the moving base 101 in the y-axis direction along the guide rails 102a and 102b. A motor 105 is provided on the upper surface of the movable table 101. The motor 105 rotates the table 106 on the xy plane and positions it at a predetermined angle. The brittle material substrate 107 is placed on the table 106 and held by a vacuum suction means (not shown). Two CCD cameras 108 that image the alignment marks of the brittle material substrate 107 are provided on the top of the scribe device 1.

  In the scribe device 1, a bridge 10 is installed along the x-axis direction so as to straddle the movable table 101 and the table 106 on the upper side thereof. The bridge 10 includes a pair of left and right support columns 11 a and 11 b and a beam 12 therebetween. The beam 12 is provided in parallel to the surface of the table 106 at a predetermined interval from the table 106. The beam 12 is an elongated member having a constant cross section, and grooves 13A and 13B are formed along the longitudinal direction on both side surfaces. A linear motor 14 is provided in the longitudinal direction of the beam 12. The linear motor 14 is a drive source that moves the scribe head 15 along the x-axis direction. A tip holder 16 having a scribing wheel is attached to the lower end portion of the scribe head 15. The scribe head 15 and the chip holder 16 are the same as those in the prior art.

  FIG. 4 shows perspective views from different directions of the beam and the column to which the slider block of the scribing apparatus 1 is attached. In the present embodiment, stoppers 18 </ b> A and 18 </ b> B for preventing the slider block 17 from falling off are provided at both ends of the beam 12. A slider block 17 having a U-shaped cross section is provided so as to surround the beam 12 from above and from the left and right. A scribe head 15 is attached to the slider block 17 but is omitted from FIG. Hereinafter, the slider block 17 will be described in detail.

  FIG. 5 is a central longitudinal sectional view of the slider block 17. As shown in FIG. 5, the slider block 17 is a member having a U-shaped cross section, and is formed so as to surround the upper surface and the left and right side surfaces of the beam 12 by combining flat plate members. A linear scale 19 for detecting the position of the slider block 17 is provided inside the groove 13A of the beam 12.

  As shown in the drawing, free bearings 21A, 21B, 21C, 22A, 22B, 22C, 23A, 23B, and 23C are provided on the upper and left and right side surfaces of the slider block 17, respectively. Free bearings have a large number of small balls placed on a hemispherical concave surface, and a large ball is placed on top of them to hold the large ball so that it can rotate in all directions. It is a thing. Of the free bearings, 21A is provided in the center on the left side of the upper surface, and two free bearings 21B and 21C (not shown) are provided adjacent to the right side of the upper surface along the longitudinal direction of the beam. The other surfaces are similarly arranged. In this way, three free bearings are provided on each surface, and each large ball is brought into direct contact with the beam 12, so that the posture of the slider block 17 is stably maintained, and sliding movement is reduced to facilitate linear movement. ing.

  Next, the operation of the scribing apparatus according to this embodiment will be described. Since the slider block 17 has a U-shaped cross section, the slider block 17 can also be moved directly above the columns 11a and 11b. It is in. In this state, the free bearings 21 </ b> A to 23 </ b> C are stopped in contact with the beam 12. At the time of scribing, the slider block 17 is moved by the linear motor 14. At this time, the large ball of each free bearing rotates with the movement of the slider block 17, so that the sliding resistance accompanying the movement of the slider block 17 is reduced, and the linear movement can be easily performed along the beam 12. Can do. During this movement, the scribing head 15 is lowered, and the scribing wheel is rolled with respect to the brittle material substrate to perform scribing.

  In this embodiment, three free bearings are provided on each surface so that the apex of each large ball is in contact with the beam surface. However, three or more free bearings may be used on each surface.

  In this embodiment, one scribe head is linearly movable along the beam 12, but a plurality of slider blocks may be provided for one beam, and the scribe head may be attached to each slider block. Further, in this embodiment, stoppers are provided at both ends of the beam 12, but the position where the slider block abuts on this stopper may be set as the retracted position.

  In this embodiment, the slider block has a U-shaped cross section, and three free bearings are provided on each of the three surfaces. However, the whole is formed in a frame shape as shown in FIG. You may make it provide the three free bearings 24A-24C which contact.

  In addition, when scribing from above and below to sever a bonded substrate on which two brittle material substrates are bonded, a pair of beams parallel to the top and bottom are provided, and at least one slider block can be freely moved to each beam. You may make it arrange | position to.

  The present invention can suppress distortion of the slider block due to the weight of the scribe head when moving the scribe head linearly through the slider block along the beam, and is suitable for a scribe device for scribing a brittle material substrate. is there.

10 Bridge 11a, 11b Post 12 Beam 13A, 13B Groove 14 Linear motor 15 Scribe head 16 Chip holder 17 Slider block 18A, 18B Stopper 21A, 21B, 21C, 22A, 22B, 22C, 23A, 23B, 23C, 24A, 24B, 24C free bearing

Claims (2)

A table on which a brittle material substrate is installed;
A bridge having a beam parallel to the surface of the brittle material substrate placed on the table;
A slider block formed to surround at least three surfaces of the beam;
A linear motor that linearly moves the slider block along the beam;
A scribing head attached to the slider block and holding a scribing wheel for scribing the brittle material substrate,
A scribing device in which at least three free bearings are provided on each surface facing the beam on the inner surface of the slider block.   The scribing apparatus according to claim 1, wherein the beam has a stopper that prevents the slider block from falling off at least at one end.