JP2013171981A5 - - Google Patents
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- Publication number
- JP2013171981A5 JP2013171981A5 JP2012034937A JP2012034937A JP2013171981A5 JP 2013171981 A5 JP2013171981 A5 JP 2013171981A5 JP 2012034937 A JP2012034937 A JP 2012034937A JP 2012034937 A JP2012034937 A JP 2012034937A JP 2013171981 A5 JP2013171981 A5 JP 2013171981A5
- Authority
- JP
- Japan
- Prior art keywords
- groove
- piezoelectric element
- electrode
- ceramic substrate
- element according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000000919 ceramic Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 11
- 239000013078 crystal Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000011148 porous material Substances 0.000 claims 1
- 230000005684 electric field Effects 0.000 description 2
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012034937A JP5905292B2 (ja) | 2012-02-21 | 2012-02-21 | 圧電素子及び圧電素子の製造方法 |
| US13/770,261 US9142750B2 (en) | 2012-02-21 | 2013-02-19 | Piezoelectric element with electrodes allowing substrate strain and method for manufacturing the same |
| EP13155729.0A EP2631959A3 (en) | 2012-02-21 | 2013-02-19 | Piezoelectric element and method for manufacturing the same |
| CN201310054960.1A CN103258951B (zh) | 2012-02-21 | 2013-02-20 | 压电元件及压电元件的制造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012034937A JP5905292B2 (ja) | 2012-02-21 | 2012-02-21 | 圧電素子及び圧電素子の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013171981A JP2013171981A (ja) | 2013-09-02 |
| JP2013171981A5 true JP2013171981A5 (cg-RX-API-DMAC7.html) | 2014-12-25 |
| JP5905292B2 JP5905292B2 (ja) | 2016-04-20 |
Family
ID=47722141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012034937A Active JP5905292B2 (ja) | 2012-02-21 | 2012-02-21 | 圧電素子及び圧電素子の製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9142750B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP2631959A3 (cg-RX-API-DMAC7.html) |
| JP (1) | JP5905292B2 (cg-RX-API-DMAC7.html) |
| CN (1) | CN103258951B (cg-RX-API-DMAC7.html) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9972767B2 (en) * | 2013-02-07 | 2018-05-15 | Danfoss A/S | All compliant electrode |
| US10707404B2 (en) * | 2016-07-07 | 2020-07-07 | Tdk Corporation | Piezoelectric element |
| US11296272B2 (en) * | 2017-07-20 | 2022-04-05 | Taiyo Yuden Co., Ltd. | Multilayer piezoelectric element, piezoelectric vibration apparatus, and electronic device |
| FR3097668B1 (fr) | 2019-06-24 | 2021-07-02 | Commissariat Energie Atomique | Dispositif a surface tactile |
| KR20220007694A (ko) * | 2019-06-28 | 2022-01-18 | 후지필름 가부시키가이샤 | 압전 필름 |
| JP6725049B1 (ja) * | 2019-12-16 | 2020-07-15 | Tdk株式会社 | 積層圧電素子 |
| WO2022209854A1 (ja) * | 2021-03-30 | 2022-10-06 | 富士フイルム株式会社 | 圧電フィルム |
| US20230099440A1 (en) * | 2021-09-28 | 2023-03-30 | Skyworks Global Pte. Ltd. | Piezoelectric mems device with thermal compensation from different material properties |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05335861A (ja) * | 1992-05-29 | 1993-12-17 | Tokin Corp | 圧電振動子の製造方法 |
| US5755909A (en) * | 1996-06-26 | 1998-05-26 | Spectra, Inc. | Electroding of ceramic piezoelectric transducers |
| JPH11179905A (ja) * | 1997-12-22 | 1999-07-06 | Nec Corp | インクジェットヘッドとその製造方法 |
| US7548015B2 (en) * | 2000-11-02 | 2009-06-16 | Danfoss A/S | Multilayer composite and a method of making such |
| EP1372199B1 (en) | 2001-03-12 | 2010-12-15 | NGK Insulators, Ltd. | Piezoelectric/electrostrictive film type actuator and method of manufacturing the actuator |
| JP4473529B2 (ja) * | 2002-07-12 | 2010-06-02 | 日本碍子株式会社 | 圧電／電歪膜型素子、及びその製造方法 |
| EP1570415B1 (en) * | 2002-12-12 | 2009-08-19 | Danfoss A/S | Tactile sensor element and sensor array |
| JP4344554B2 (ja) * | 2003-07-29 | 2009-10-14 | 京セラ株式会社 | 圧電アクチュエータの製造方法及び印刷ヘッドの製造方法 |
| JP4359915B2 (ja) * | 2003-08-21 | 2009-11-11 | 京セラ株式会社 | 圧電磁器振動体及び圧電共振装置 |
| JP4480371B2 (ja) | 2003-08-26 | 2010-06-16 | 京セラ株式会社 | 積層型圧電素子及び噴射装置 |
| JP4593912B2 (ja) * | 2003-12-24 | 2010-12-08 | 京セラ株式会社 | 積層型圧電素子およびその製法、並びに噴射装置 |
| JP4864899B2 (ja) * | 2005-10-28 | 2012-02-01 | 京セラ株式会社 | 積層型圧電素子およびこれを用いた噴射装置 |
| JP5004484B2 (ja) * | 2006-03-23 | 2012-08-22 | 日本碍子株式会社 | 誘電体デバイス |
| JP5032791B2 (ja) * | 2006-05-15 | 2012-09-26 | アルプス電気株式会社 | 電子部品の製造方法 |
| JP5050165B2 (ja) * | 2006-10-31 | 2012-10-17 | 京セラ株式会社 | 積層型圧電素子およびこれを用いた噴射装置 |
| CN101542766B (zh) * | 2006-11-29 | 2011-09-21 | 京瓷株式会社 | 层叠型压电元件、具备其的喷射装置及燃料喷射系统 |
| US8450908B2 (en) * | 2007-08-29 | 2013-05-28 | Kyocera Corporation | Multi-layer piezoelectric element with metal parts or ceramic parts bonded to only one piezoelectric material layer |
| JP2011041136A (ja) * | 2009-08-17 | 2011-02-24 | Taiyo Yuden Co Ltd | 弾性波デバイスおよびその製造方法 |
| EP2477247A1 (en) | 2009-09-07 | 2012-07-18 | NGK Insulators, Ltd. | Method for manufacturing piezoelectric/electrostrictive film type element |
| WO2011089746A1 (ja) * | 2010-01-20 | 2011-07-28 | 株式会社村田製作所 | 分波器 |
| JP5714361B2 (ja) | 2011-03-01 | 2015-05-07 | 日本碍子株式会社 | 端子電極形成方法及びそれを用いた圧電／電歪素子の製造方法 |
| US8891222B2 (en) * | 2012-02-14 | 2014-11-18 | Danfoss A/S | Capacitive transducer and a method for manufacturing a transducer |
| JP5474261B1 (ja) * | 2012-05-12 | 2014-04-16 | 京セラ株式会社 | 圧電アクチュエータ、圧電振動装置および携帯端末 |
-
2012
- 2012-02-21 JP JP2012034937A patent/JP5905292B2/ja active Active
-
2013
- 2013-02-19 EP EP13155729.0A patent/EP2631959A3/en not_active Withdrawn
- 2013-02-19 US US13/770,261 patent/US9142750B2/en active Active
- 2013-02-20 CN CN201310054960.1A patent/CN103258951B/zh not_active Expired - Fee Related