JP2013171981A5 - - Google Patents

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Publication number
JP2013171981A5
JP2013171981A5 JP2012034937A JP2012034937A JP2013171981A5 JP 2013171981 A5 JP2013171981 A5 JP 2013171981A5 JP 2012034937 A JP2012034937 A JP 2012034937A JP 2012034937 A JP2012034937 A JP 2012034937A JP 2013171981 A5 JP2013171981 A5 JP 2013171981A5
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JP
Japan
Prior art keywords
groove
piezoelectric element
electrode
ceramic substrate
element according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012034937A
Other languages
English (en)
Japanese (ja)
Other versions
JP5905292B2 (ja
JP2013171981A (ja
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Publication date
Application filed filed Critical
Priority to JP2012034937A priority Critical patent/JP5905292B2/ja
Priority claimed from JP2012034937A external-priority patent/JP5905292B2/ja
Priority to US13/770,261 priority patent/US9142750B2/en
Priority to EP13155729.0A priority patent/EP2631959A3/en
Priority to CN201310054960.1A priority patent/CN103258951B/zh
Publication of JP2013171981A publication Critical patent/JP2013171981A/ja
Publication of JP2013171981A5 publication Critical patent/JP2013171981A5/ja
Application granted granted Critical
Publication of JP5905292B2 publication Critical patent/JP5905292B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012034937A 2012-02-21 2012-02-21 圧電素子及び圧電素子の製造方法 Active JP5905292B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2012034937A JP5905292B2 (ja) 2012-02-21 2012-02-21 圧電素子及び圧電素子の製造方法
US13/770,261 US9142750B2 (en) 2012-02-21 2013-02-19 Piezoelectric element with electrodes allowing substrate strain and method for manufacturing the same
EP13155729.0A EP2631959A3 (en) 2012-02-21 2013-02-19 Piezoelectric element and method for manufacturing the same
CN201310054960.1A CN103258951B (zh) 2012-02-21 2013-02-20 压电元件及压电元件的制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012034937A JP5905292B2 (ja) 2012-02-21 2012-02-21 圧電素子及び圧電素子の製造方法

Publications (3)

Publication Number Publication Date
JP2013171981A JP2013171981A (ja) 2013-09-02
JP2013171981A5 true JP2013171981A5 (OSRAM) 2014-12-25
JP5905292B2 JP5905292B2 (ja) 2016-04-20

Family

ID=47722141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012034937A Active JP5905292B2 (ja) 2012-02-21 2012-02-21 圧電素子及び圧電素子の製造方法

Country Status (4)

Country Link
US (1) US9142750B2 (OSRAM)
EP (1) EP2631959A3 (OSRAM)
JP (1) JP5905292B2 (OSRAM)
CN (1) CN103258951B (OSRAM)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9972767B2 (en) * 2013-02-07 2018-05-15 Danfoss A/S All compliant electrode
US10707404B2 (en) * 2016-07-07 2020-07-07 Tdk Corporation Piezoelectric element
US11296272B2 (en) * 2017-07-20 2022-04-05 Taiyo Yuden Co., Ltd. Multilayer piezoelectric element, piezoelectric vibration apparatus, and electronic device
FR3097668B1 (fr) 2019-06-24 2021-07-02 Commissariat Energie Atomique Dispositif a surface tactile
WO2020261822A1 (ja) * 2019-06-28 2020-12-30 富士フイルム株式会社 圧電フィルム
JP6725049B1 (ja) * 2019-12-16 2020-07-15 Tdk株式会社 積層圧電素子
CN117044238A (zh) * 2021-03-30 2023-11-10 富士胶片株式会社 压电薄膜
US20230099440A1 (en) * 2021-09-28 2023-03-30 Skyworks Global Pte. Ltd. Piezoelectric mems device with thermal compensation from different material properties

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05335861A (ja) * 1992-05-29 1993-12-17 Tokin Corp 圧電振動子の製造方法
US5755909A (en) * 1996-06-26 1998-05-26 Spectra, Inc. Electroding of ceramic piezoelectric transducers
JPH11179905A (ja) * 1997-12-22 1999-07-06 Nec Corp インクジェットヘッドとその製造方法
US7548015B2 (en) * 2000-11-02 2009-06-16 Danfoss A/S Multilayer composite and a method of making such
JP4393068B2 (ja) 2001-03-12 2010-01-06 日本碍子株式会社 圧電／電歪膜型アクチュエータ及び製造方法
JP4473529B2 (ja) * 2002-07-12 2010-06-02 日本碍子株式会社 圧電／電歪膜型素子、及びその製造方法
DE60328913D1 (de) * 2002-12-12 2009-10-01 Danfoss As Berührungssensorelement und sensorgruppe
JP4344554B2 (ja) * 2003-07-29 2009-10-14 京セラ株式会社 圧電アクチュエータの製造方法及び印刷ヘッドの製造方法
JP4359915B2 (ja) * 2003-08-21 2009-11-11 京セラ株式会社 圧電磁器振動体及び圧電共振装置
JP4480371B2 (ja) 2003-08-26 2010-06-16 京セラ株式会社 積層型圧電素子及び噴射装置
JP4593912B2 (ja) * 2003-12-24 2010-12-08 京セラ株式会社 積層型圧電素子およびその製法、並びに噴射装置
US8378554B2 (en) * 2005-10-28 2013-02-19 Kyocera Corporation Multi-layer piezoelectric element and injection apparatus using the same
JP5004484B2 (ja) * 2006-03-23 2012-08-22 日本碍子株式会社 誘電体デバイス
JP5032791B2 (ja) 2006-05-15 2012-09-26 アルプス電気株式会社 電子部品の製造方法
US8212451B2 (en) * 2006-10-31 2012-07-03 Kyocera Corporation Multi-layer piezoelectric element having a plurality of junction sections and injection apparatus employing the same
JP5066098B2 (ja) * 2006-11-29 2012-11-07 京セラ株式会社 積層型圧電素子、これを備えた噴射装置及び燃料噴射システム
CN101790803B (zh) * 2007-08-29 2012-07-18 京瓷株式会社 层叠型压电元件、具备该层叠型压电元件的喷射装置及燃料喷射系统
JP2011041136A (ja) * 2009-08-17 2011-02-24 Taiyo Yuden Co Ltd 弾性波デバイスおよびその製造方法
EP2477247A1 (en) 2009-09-07 2012-07-18 NGK Insulators, Ltd. Method for manufacturing piezoelectric/electrostrictive film type element
JPWO2011089746A1 (ja) * 2010-01-20 2013-05-20 株式会社村田製作所 分波器
JP5714361B2 (ja) 2011-03-01 2015-05-07 日本碍子株式会社 端子電極形成方法及びそれを用いた圧電／電歪素子の製造方法
US8891222B2 (en) * 2012-02-14 2014-11-18 Danfoss A/S Capacitive transducer and a method for manufacturing a transducer
CN103534827B (zh) * 2012-05-12 2016-09-28 京瓷株式会社 压电促动器、压电振动装置及便携终端

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