JP2013162111A5 - - Google Patents

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Publication number
JP2013162111A5
JP2013162111A5 JP2012025743A JP2012025743A JP2013162111A5 JP 2013162111 A5 JP2013162111 A5 JP 2013162111A5 JP 2012025743 A JP2012025743 A JP 2012025743A JP 2012025743 A JP2012025743 A JP 2012025743A JP 2013162111 A5 JP2013162111 A5 JP 2013162111A5
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JP
Japan
Prior art keywords
substrate
shows
unit
view
board
Prior art date
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Application number
JP2012025743A
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English (en)
Japanese (ja)
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JP5588469B2 (ja
JP2013162111A (ja
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Priority to JP2012025743A priority Critical patent/JP5588469B2/ja
Priority claimed from JP2012025743A external-priority patent/JP5588469B2/ja
Priority to KR1020130013259A priority patent/KR101532826B1/ko
Publication of JP2013162111A publication Critical patent/JP2013162111A/ja
Publication of JP2013162111A5 publication Critical patent/JP2013162111A5/ja
Priority to KR1020140118783A priority patent/KR101602570B1/ko
Application granted granted Critical
Publication of JP5588469B2 publication Critical patent/JP5588469B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012025743A 2012-02-09 2012-02-09 基板処理装置 Active JP5588469B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012025743A JP5588469B2 (ja) 2012-02-09 2012-02-09 基板処理装置
KR1020130013259A KR101532826B1 (ko) 2012-02-09 2013-02-06 기판 처리 장치
KR1020140118783A KR101602570B1 (ko) 2012-02-09 2014-09-05 기판 처리 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012025743A JP5588469B2 (ja) 2012-02-09 2012-02-09 基板処理装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014151419A Division JP5830140B2 (ja) 2014-07-25 2014-07-25 基板処理装置

Publications (3)

Publication Number Publication Date
JP2013162111A JP2013162111A (ja) 2013-08-19
JP2013162111A5 true JP2013162111A5 (cg-RX-API-DMAC7.html) 2014-02-27
JP5588469B2 JP5588469B2 (ja) 2014-09-10

Family

ID=49174080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012025743A Active JP5588469B2 (ja) 2012-02-09 2012-02-09 基板処理装置

Country Status (2)

Country Link
JP (1) JP5588469B2 (cg-RX-API-DMAC7.html)
KR (2) KR101532826B1 (cg-RX-API-DMAC7.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6182065B2 (ja) 2013-12-27 2017-08-16 東京エレクトロン株式会社 基板処理装置
JP6867827B2 (ja) 2017-02-28 2021-05-12 キヤノン株式会社 リソグラフィ装置および物品製造方法
JP6955922B2 (ja) * 2017-07-14 2021-10-27 株式会社ディスコ インラインシステム
JP7117366B2 (ja) * 2018-02-16 2022-08-12 東京エレクトロン株式会社 基板処理装置
JP7363591B2 (ja) * 2020-03-05 2023-10-18 東京エレクトロン株式会社 基板処理装置及び基板処理方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3943828B2 (ja) * 2000-12-08 2007-07-11 東京エレクトロン株式会社 塗布、現像装置及びパターン形成方法
KR100892756B1 (ko) * 2007-12-27 2009-04-15 세메스 주식회사 기판 처리 장치 및 이를 이용한 기판 이송 방법
JP5338757B2 (ja) * 2010-07-09 2013-11-13 東京エレクトロン株式会社 塗布、現像装置、塗布、現像方法及び記憶媒体

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