JP2013160516A5 - - Google Patents

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Publication number
JP2013160516A5
JP2013160516A5 JP2012019884A JP2012019884A JP2013160516A5 JP 2013160516 A5 JP2013160516 A5 JP 2013160516A5 JP 2012019884 A JP2012019884 A JP 2012019884A JP 2012019884 A JP2012019884 A JP 2012019884A JP 2013160516 A5 JP2013160516 A5 JP 2013160516A5
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JP
Japan
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measured
shape
reference mirror
probe
calculation unit
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JP2012019884A
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English (en)
Japanese (ja)
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JP5984406B2 (ja
JP2013160516A (ja
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Priority to JP2012019884A priority Critical patent/JP5984406B2/ja
Priority claimed from JP2012019884A external-priority patent/JP5984406B2/ja
Priority to US13/754,223 priority patent/US20130197844A1/en
Publication of JP2013160516A publication Critical patent/JP2013160516A/ja
Publication of JP2013160516A5 publication Critical patent/JP2013160516A5/ja
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Publication of JP5984406B2 publication Critical patent/JP5984406B2/ja
Expired - Fee Related legal-status Critical Current
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JP2012019884A 2012-02-01 2012-02-01 測定装置 Expired - Fee Related JP5984406B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012019884A JP5984406B2 (ja) 2012-02-01 2012-02-01 測定装置
US13/754,223 US20130197844A1 (en) 2012-02-01 2013-01-30 Measurement apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012019884A JP5984406B2 (ja) 2012-02-01 2012-02-01 測定装置

Publications (3)

Publication Number Publication Date
JP2013160516A JP2013160516A (ja) 2013-08-19
JP2013160516A5 true JP2013160516A5 (https=) 2015-03-26
JP5984406B2 JP5984406B2 (ja) 2016-09-06

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JP2012019884A Expired - Fee Related JP5984406B2 (ja) 2012-02-01 2012-02-01 測定装置

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US (1) US20130197844A1 (https=)
JP (1) JP5984406B2 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5532238B2 (ja) * 2010-07-08 2014-06-25 国立大学法人東京工業大学 剛体特性同定装置及び剛体特性同定方法
JP5713660B2 (ja) * 2010-12-21 2015-05-07 キヤノン株式会社 形状測定方法
DE102011115027A1 (de) * 2011-10-07 2013-04-11 Polytec Gmbh Kohärenzrasterinterferometer und Verfahren zur ortsaufgelösten optischen Vermessung der Oberflächengeometrie eines Objekts
KR101458407B1 (ko) 2013-08-23 2014-11-10 주식회사 고영테크놀러지 형상 측정장치
JP6655888B2 (ja) * 2014-08-20 2020-03-04 キヤノン株式会社 計測装置、計測方法、および物品の製造方法
JP6309868B2 (ja) 2014-09-26 2018-04-11 株式会社神戸製鋼所 形状測定装置および形状測定方法
JP6611582B2 (ja) * 2015-12-11 2019-11-27 キヤノン株式会社 計測装置、および計測方法
JP6484196B2 (ja) 2016-04-21 2019-03-13 ファナック株式会社 厚さ測定装置および厚さ測定方法
CN114964126B (zh) * 2018-05-08 2025-07-18 汉阳大学校Erica产学协力团 对象物的表面测定装置及测定方法
JP7414643B2 (ja) * 2020-05-28 2024-01-16 株式会社日立製作所 形状測定装置および形状測定方法
CN112066961B (zh) * 2020-09-15 2021-04-13 山东鑫诚精密机械有限公司 精密测量阿贝误差控制系统
CN120063673B (zh) * 2025-04-25 2025-07-11 长春萨米特光电科技有限公司 一种快速反射镜振动环境下锁止精度的测量装置及方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08219738A (ja) * 1995-02-16 1996-08-30 Nikon Corp 干渉測定装置
US6252659B1 (en) * 1998-03-26 2001-06-26 Minolta Co., Ltd. Three dimensional measurement apparatus
JP4212138B2 (ja) * 1998-03-26 2009-01-21 コニカミノルタセンシング株式会社 ３次元計測装置
JP2005017020A (ja) * 2003-06-24 2005-01-20 Canon Inc ３次元形状計測装置
US20080021672A1 (en) * 2004-03-18 2008-01-24 Renishaw Plc Scanning an Object
JP4474443B2 (ja) * 2007-07-17 2010-06-02 キヤノン株式会社 形状測定装置および方法
TWI371574B (en) * 2008-08-05 2012-09-01 Univ Nat Taipei Technology Vibration resistant interferometric scanning system and method thereof
JP5147065B2 (ja) * 2008-10-14 2013-02-20 Ｊｕｋｉ株式会社 三次元形状検査装置
US8120781B2 (en) * 2008-11-26 2012-02-21 Zygo Corporation Interferometric systems and methods featuring spectral analysis of unevenly sampled data

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