WO2013036076A3 - 투영격자의 진폭을 적용한 3차원 형상 측정장치 및 방법 - Google Patents

투영격자의 진폭을 적용한 3차원 형상 측정장치 및 방법 Download PDF

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Publication number
WO2013036076A3
WO2013036076A3 PCT/KR2012/007233 KR2012007233W WO2013036076A3 WO 2013036076 A3 WO2013036076 A3 WO 2013036076A3 KR 2012007233 W KR2012007233 W KR 2012007233W WO 2013036076 A3 WO2013036076 A3 WO 2013036076A3
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WO
WIPO (PCT)
Prior art keywords
measurement target
image
amplitude
measuring
pattern
Prior art date
Application number
PCT/KR2012/007233
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English (en)
French (fr)
Other versions
WO2013036076A2 (ko
Inventor
박윤덕
Original Assignee
주식회사 인스펙토
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020110092042A external-priority patent/KR101333299B1/ko
Application filed by 주식회사 인스펙토 filed Critical 주식회사 인스펙토
Priority to CN201280043971.3A priority Critical patent/CN103782129B/zh
Priority to US14/343,052 priority patent/US9360306B2/en
Priority claimed from KR1020120099230A external-priority patent/KR101423829B1/ko
Publication of WO2013036076A2 publication Critical patent/WO2013036076A2/ko
Publication of WO2013036076A3 publication Critical patent/WO2013036076A3/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré

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  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

본 발명은 투영격자를 진폭을 적용한 3차원 형상 측정장치 및 방법에 관한 것으로, 더욱 상세하게는 광학계에서 주기를 갖는 투영격자의 영상을 측정대상물에 조사하고 투영격자를 패턴을 변화시켜 진폭을 구한다음 측정대상물을 상하로 움직이면서, 연속적으로 진폭의 크기를 얻고 이를 통해 측정대상물의 3차원 형상을 측정하는 것이다. 본 발명의 측정장치는 임의 높이 형상을 갖는 측정대상물에 패턴을 영사하는 패턴 영사부(310), 상기 측정대상물에 영사된 패턴영상을 획득하는 이미지센서를 포함하는 영상획득부(320), 측정대상물을 상하로 이동시키고 이동된 해당위치를 측정하는 위치센서를 포함하는 측정대상물 위치결정부(330), 상기 이미지센서에서 획득되는 영상과 상기 테이블의 위치를 측정하는 위치센서의 신호를 입력받는 제어부(340), 상기 제어부에 입력되는 이미지센서의 영상과 상기 위치센서로부터 입력받는 위치입력신호를 연산하여 측정대상물의 높이를 연산하는 연산부(350)를 포함한다.
PCT/KR2012/007233 2011-09-09 2012-09-07 투영격자의 진폭을 적용한 3차원 형상 측정장치 및 방법 WO2013036076A2 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201280043971.3A CN103782129B (zh) 2011-09-09 2012-09-07 利用投影光栅振幅的三维形状测量装置及方法
US14/343,052 US9360306B2 (en) 2011-09-09 2012-09-07 Three-dimensional profile measurement apparatus and method using amplitude size of projection grid

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR10-2011-0092042 2011-09-09
KR1020110092042A KR101333299B1 (ko) 2011-09-09 2011-09-09 투영격자의 진폭을 적용한 3차원 형상 측정장치 및 방법
KR1020120099230A KR101423829B1 (ko) 2012-09-07 2012-09-07 투영격자의 진폭을 적용한 3차원 형상 측정장치 및 방법
KR10-2012-0099230 2012-09-07

Publications (2)

Publication Number Publication Date
WO2013036076A2 WO2013036076A2 (ko) 2013-03-14
WO2013036076A3 true WO2013036076A3 (ko) 2013-05-02

Family

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Family Applications (1)

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PCT/KR2012/007233 WO2013036076A2 (ko) 2011-09-09 2012-09-07 투영격자의 진폭을 적용한 3차원 형상 측정장치 및 방법

Country Status (3)

Country Link
US (1) US9360306B2 (ko)
CN (1) CN103782129B (ko)
WO (1) WO2013036076A2 (ko)

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WO2016012426A1 (de) * 2014-07-22 2016-01-28 Carl Zeiss Smt Gmbh Verfahren zum dreidimensionalen vermessen eines 3d-luftbildes einer lithografiemaske
NL2013355B1 (en) * 2014-08-22 2016-09-23 Handicare Stairlifts B V Method and system for designing a stair lift rail assembly.
KR101639227B1 (ko) * 2015-06-08 2016-07-13 주식회사 고영테크놀러지 3차원 형상 측정장치
KR102079181B1 (ko) * 2016-03-04 2020-02-19 주식회사 고영테크놀러지 패턴광 조사 장치 및 방법
WO2017153069A1 (en) * 2016-03-07 2017-09-14 Asml Netherlands B.V. Level sensor and lithographic apparatus
CN106123806A (zh) * 2016-06-20 2016-11-16 四川川大智胜软件股份有限公司 一种基于微机电的结构光投影方案
KR102464368B1 (ko) * 2017-11-07 2022-11-07 삼성전자주식회사 메타 프로젝터 및 이를 포함하는 전자 장치
JP7157547B2 (ja) * 2018-04-20 2022-10-20 株式会社キーエンス 形状測定装置、形状測定方法及び形状測定プログラム
WO2020056566A1 (zh) * 2018-09-17 2020-03-26 苏州大学张家港工业技术研究院 一种快照式全场白光干涉显微测量方法及其装置
US10520301B1 (en) * 2018-12-31 2019-12-31 Mitutoyo Corporation Method for measuring Z height values of a workpiece surface with a machine vision inspection system
WO2021022379A1 (en) * 2019-08-07 2021-02-11 Lensvector Inc. Optical object detection and classification with dynamic beam control
CN112756281B (zh) * 2021-01-15 2023-12-12 镇江润茂钢球有限公司 一种钢球表面粗糙度筛选装置及其使用方法

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KR20110017679A (ko) * 2009-08-14 2011-02-22 (주)에이피앤텍 높이차 측정 장치 및 방법

Also Published As

Publication number Publication date
CN103782129A (zh) 2014-05-07
US9360306B2 (en) 2016-06-07
CN103782129B (zh) 2016-09-14
US20140198320A1 (en) 2014-07-17
WO2013036076A2 (ko) 2013-03-14

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