JP2013152206A5 - - Google Patents

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Publication number
JP2013152206A5
JP2013152206A5 JP2012026008A JP2012026008A JP2013152206A5 JP 2013152206 A5 JP2013152206 A5 JP 2013152206A5 JP 2012026008 A JP2012026008 A JP 2012026008A JP 2012026008 A JP2012026008 A JP 2012026008A JP 2013152206 A5 JP2013152206 A5 JP 2013152206A5
Authority
JP
Japan
Prior art keywords
illumination
unit
illuminated
illumination light
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2012026008A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013152206A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012026008A priority Critical patent/JP2013152206A/ja
Priority claimed from JP2012026008A external-priority patent/JP2013152206A/ja
Priority to KR1020120127264A priority patent/KR20130079140A/ko
Priority to TW101144468A priority patent/TW201329437A/zh
Priority to CN201210578830.3A priority patent/CN103185726B/zh
Priority to US13/729,434 priority patent/US20130169795A1/en
Publication of JP2013152206A publication Critical patent/JP2013152206A/ja
Publication of JP2013152206A5 publication Critical patent/JP2013152206A5/ja
Withdrawn legal-status Critical Current

Links

JP2012026008A 2011-12-31 2012-02-09 照明装置、照明方法及び検査装置 Withdrawn JP2013152206A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012026008A JP2013152206A (ja) 2011-12-31 2012-02-09 照明装置、照明方法及び検査装置
KR1020120127264A KR20130079140A (ko) 2011-12-31 2012-11-12 조명 장치, 조명 방법 및 검사 장치
TW101144468A TW201329437A (zh) 2011-12-31 2012-11-28 照明裝置、照明方法及檢查裝置
CN201210578830.3A CN103185726B (zh) 2011-12-31 2012-12-27 照明装置、照明方法以及检查装置
US13/729,434 US20130169795A1 (en) 2011-12-31 2012-12-28 Illumination system, illumination method, and inspection system

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011290496 2011-12-31
JP2011290496 2011-12-31
JP2012026008A JP2013152206A (ja) 2011-12-31 2012-02-09 照明装置、照明方法及び検査装置

Publications (2)

Publication Number Publication Date
JP2013152206A JP2013152206A (ja) 2013-08-08
JP2013152206A5 true JP2013152206A5 (enExample) 2015-03-12

Family

ID=48677008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012026008A Withdrawn JP2013152206A (ja) 2011-12-31 2012-02-09 照明装置、照明方法及び検査装置

Country Status (5)

Country Link
US (1) US20130169795A1 (enExample)
JP (1) JP2013152206A (enExample)
KR (1) KR20130079140A (enExample)
CN (1) CN103185726B (enExample)
TW (1) TW201329437A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6547270B2 (ja) * 2014-10-10 2019-07-24 株式会社リコー 光源装置及びこの光源装置を有する画像投影装置
JP6961394B2 (ja) * 2017-05-31 2021-11-05 株式会社キーエンス 画像検査装置、画像検査方法、画像検査装置の設定方法、画像検査プログラム、画像装置の設定検査プログラム及びコンピュータで読み取り可能な記録媒体並びに記録した機器
EP3657926B1 (en) * 2017-07-18 2025-12-24 Fuji Corporation Component-mounting machine and method for adjusting illumination light amount thereof
JP2020085587A (ja) * 2018-11-21 2020-06-04 日本電気硝子株式会社 ガラス板の製造方法、及びガラス板の製造装置
CN110261395A (zh) * 2019-06-28 2019-09-20 苏州精濑光电有限公司 一种检测装置
CN110243832A (zh) * 2019-06-29 2019-09-17 苏州精濑光电有限公司 一种检测装置
CN110865033A (zh) * 2019-11-29 2020-03-06 成都天鹰锐视科技有限公司 一种基于通光量自适应调控的成像探测装置及其控制方法
CN114994071A (zh) * 2021-03-01 2022-09-02 镭亚电子(苏州)有限公司 导光板检测方法和导光板检测治具

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6345541A (ja) * 1986-08-13 1988-02-26 Hitachi Ltd 検査方法および装置
JPH01245137A (ja) * 1988-03-28 1989-09-29 Hitachi Electron Eng Co Ltd ガラスディスク表面検査装置におけるレーザビーム投光方式
JP2001141662A (ja) * 1999-11-18 2001-05-25 Central Glass Co Ltd 透明板状体の欠点検出方法および検出装置
KR100471084B1 (ko) * 2002-12-16 2005-03-10 삼성전자주식회사 영상처리시스템 및 영상처리방법
JP2009222611A (ja) * 2008-03-18 2009-10-01 Hitachi High-Technologies Corp 検査装置及び検査方法

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