JP2013120650A5 - - Google Patents

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Publication number
JP2013120650A5
JP2013120650A5 JP2011267068A JP2011267068A JP2013120650A5 JP 2013120650 A5 JP2013120650 A5 JP 2013120650A5 JP 2011267068 A JP2011267068 A JP 2011267068A JP 2011267068 A JP2011267068 A JP 2011267068A JP 2013120650 A5 JP2013120650 A5 JP 2013120650A5
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JP
Japan
Prior art keywords
sample
electron
electron beam
emitted
primary electron
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Pending
Application number
JP2011267068A
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English (en)
Japanese (ja)
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JP2013120650A (ja
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Priority to JP2011267068A priority Critical patent/JP2013120650A/ja
Priority claimed from JP2011267068A external-priority patent/JP2013120650A/ja
Publication of JP2013120650A publication Critical patent/JP2013120650A/ja
Publication of JP2013120650A5 publication Critical patent/JP2013120650A5/ja
Pending legal-status Critical Current

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JP2011267068A 2011-12-06 2011-12-06 走査電子顕微鏡および二次電子検出方法 Pending JP2013120650A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011267068A JP2013120650A (ja) 2011-12-06 2011-12-06 走査電子顕微鏡および二次電子検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011267068A JP2013120650A (ja) 2011-12-06 2011-12-06 走査電子顕微鏡および二次電子検出方法

Publications (2)

Publication Number Publication Date
JP2013120650A JP2013120650A (ja) 2013-06-17
JP2013120650A5 true JP2013120650A5 (https=) 2014-12-04

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ID=48773216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011267068A Pending JP2013120650A (ja) 2011-12-06 2011-12-06 走査電子顕微鏡および二次電子検出方法

Country Status (1)

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JP (1) JP2013120650A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016120971A1 (ja) * 2015-01-26 2016-08-04 株式会社日立製作所 荷電粒子線装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5823172Y2 (ja) * 1974-07-01 1983-05-18 株式会社島津製作所 ハンシヤデンシケンシユツソウチ
JPS5349661Y2 (https=) * 1975-01-31 1978-11-29
JPH07169675A (ja) * 1993-12-16 1995-07-04 Natl Res Inst For Metals 電子線リソグラフィー用基板材料
JPH11273608A (ja) * 1998-03-23 1999-10-08 Hitachi Ltd 走査電子顕微鏡
JP4613405B2 (ja) * 2000-09-06 2011-01-19 株式会社日立製作所 走査型電子顕微鏡
DE112011100306B4 (de) * 2010-01-20 2019-06-19 Hitachi High-Technologies Corporation Ladungsteilchenstrahlvorrichtung

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