JP2013120650A - 走査電子顕微鏡および二次電子検出方法 - Google Patents

走査電子顕微鏡および二次電子検出方法 Download PDF

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Publication number
JP2013120650A
JP2013120650A JP2011267068A JP2011267068A JP2013120650A JP 2013120650 A JP2013120650 A JP 2013120650A JP 2011267068 A JP2011267068 A JP 2011267068A JP 2011267068 A JP2011267068 A JP 2011267068A JP 2013120650 A JP2013120650 A JP 2013120650A
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sample
electrons
objective lens
electron beam
electron
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JP2011267068A
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Japanese (ja)
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JP2013120650A5 (https=
Inventor
Yoshihiro Takahoko
良浩 高鉾
Kotaro Hosoya
幸太郎 細谷
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Hitachi High Tech Corp
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Hitachi High Technologies Corp
Hitachi High Tech Corp
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Priority to JP2011267068A priority Critical patent/JP2013120650A/ja
Publication of JP2013120650A publication Critical patent/JP2013120650A/ja
Publication of JP2013120650A5 publication Critical patent/JP2013120650A5/ja
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JP2011267068A 2011-12-06 2011-12-06 走査電子顕微鏡および二次電子検出方法 Pending JP2013120650A (ja)

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JP2011267068A JP2013120650A (ja) 2011-12-06 2011-12-06 走査電子顕微鏡および二次電子検出方法

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JP2011267068A JP2013120650A (ja) 2011-12-06 2011-12-06 走査電子顕微鏡および二次電子検出方法

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JP2013120650A true JP2013120650A (ja) 2013-06-17
JP2013120650A5 JP2013120650A5 (https=) 2014-12-04

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016120971A1 (ja) * 2015-01-26 2016-08-04 株式会社日立製作所 荷電粒子線装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5121552U (https=) * 1974-07-01 1976-02-17
JPS5196494U (https=) * 1975-01-31 1976-08-03
JPH07169675A (ja) * 1993-12-16 1995-07-04 Natl Res Inst For Metals 電子線リソグラフィー用基板材料
JPH11273608A (ja) * 1998-03-23 1999-10-08 Hitachi Ltd 走査電子顕微鏡
JP2002083563A (ja) * 2000-09-06 2002-03-22 Hitachi Ltd 走査型電子顕微鏡
WO2011089955A1 (ja) * 2010-01-20 2011-07-28 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5121552U (https=) * 1974-07-01 1976-02-17
JPS5196494U (https=) * 1975-01-31 1976-08-03
JPH07169675A (ja) * 1993-12-16 1995-07-04 Natl Res Inst For Metals 電子線リソグラフィー用基板材料
JPH11273608A (ja) * 1998-03-23 1999-10-08 Hitachi Ltd 走査電子顕微鏡
JP2002083563A (ja) * 2000-09-06 2002-03-22 Hitachi Ltd 走査型電子顕微鏡
WO2011089955A1 (ja) * 2010-01-20 2011-07-28 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016120971A1 (ja) * 2015-01-26 2016-08-04 株式会社日立製作所 荷電粒子線装置

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