JP2013120650A5 - - Google Patents

Download PDF

Info

Publication number
JP2013120650A5
JP2013120650A5 JP2011267068A JP2011267068A JP2013120650A5 JP 2013120650 A5 JP2013120650 A5 JP 2013120650A5 JP 2011267068 A JP2011267068 A JP 2011267068A JP 2011267068 A JP2011267068 A JP 2011267068A JP 2013120650 A5 JP2013120650 A5 JP 2013120650A5
Authority
JP
Japan
Prior art keywords
sample
electron
electron beam
emitted
primary electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011267068A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013120650A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011267068A priority Critical patent/JP2013120650A/ja
Priority claimed from JP2011267068A external-priority patent/JP2013120650A/ja
Publication of JP2013120650A publication Critical patent/JP2013120650A/ja
Publication of JP2013120650A5 publication Critical patent/JP2013120650A5/ja
Pending legal-status Critical Current

Links

JP2011267068A 2011-12-06 2011-12-06 走査電子顕微鏡および二次電子検出方法 Pending JP2013120650A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011267068A JP2013120650A (ja) 2011-12-06 2011-12-06 走査電子顕微鏡および二次電子検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011267068A JP2013120650A (ja) 2011-12-06 2011-12-06 走査電子顕微鏡および二次電子検出方法

Publications (2)

Publication Number Publication Date
JP2013120650A JP2013120650A (ja) 2013-06-17
JP2013120650A5 true JP2013120650A5 (enrdf_load_stackoverflow) 2014-12-04

Family

ID=48773216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011267068A Pending JP2013120650A (ja) 2011-12-06 2011-12-06 走査電子顕微鏡および二次電子検出方法

Country Status (1)

Country Link
JP (1) JP2013120650A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016120971A1 (ja) * 2015-01-26 2016-08-04 株式会社日立製作所 荷電粒子線装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5823172Y2 (ja) * 1974-07-01 1983-05-18 株式会社島津製作所 ハンシヤデンシケンシユツソウチ
JPS5349661Y2 (enrdf_load_stackoverflow) * 1975-01-31 1978-11-29
JPH07169675A (ja) * 1993-12-16 1995-07-04 Natl Res Inst For Metals 電子線リソグラフィー用基板材料
JPH11273608A (ja) * 1998-03-23 1999-10-08 Hitachi Ltd 走査電子顕微鏡
JP4613405B2 (ja) * 2000-09-06 2011-01-19 株式会社日立製作所 走査型電子顕微鏡
JP5386596B2 (ja) * 2010-01-20 2014-01-15 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Similar Documents

Publication Publication Date Title
JP2013058314A5 (enrdf_load_stackoverflow)
US8513604B2 (en) Detection device and particle beam device having a detection device
WO2013035389A1 (ja) 走査電子顕微鏡
JP5825799B2 (ja) レーザ処理システム、対象物台、およびレーザ処理方法
TW201546861A (zh) 用於使用複數個帶電粒子射束檢查樣品的設備和方法
WO2012008836A3 (en) Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus
WO2010134282A1 (ja) Ｘ線顕微鏡用試料支持部材、試料収容セル、ｘ線顕微鏡、およびｘ線顕微鏡像の観察方法
KR102356527B1 (ko) 샘플을 검사하기 위한 방법 및 장치
EP2804199A3 (en) Scanning charged particle microscope, image acquisition method, and electron detection method
JP2008016454A (ja) レンズ内の分割された検出器で側面像や平面像を集めるための電子ビーム装置
US9159532B2 (en) Method of analyzing a sample and charged particle beam device for analyzing a sample
JP6169506B2 (ja) 試料ホルダ、観察システム、および画像生成方法
CN111108579B (zh) 扫描电子显微镜
US9536701B2 (en) Radiation analyzer including a support for tilting an energy-dispersive radiation detector
JP2007093593A5 (enrdf_load_stackoverflow)
JP2018147764A (ja) 走査電子顕微鏡
TW201314733A (zh) 具備反射電子檢測功能的掃描電子顯微鏡
JP2013120650A5 (enrdf_load_stackoverflow)
US20220037112A1 (en) Charged Particle Beam Apparatus and Sample Observation Method
US10121633B2 (en) Energy discriminating electron detector and scanning electron microscope using the same
US8779368B2 (en) Scintillation detection unit for the detection of back-scattered electrons for electron or ion microscopes
JP5489412B2 (ja) 蛍光ｘ線分析機能付き高分解能ｘ線顕微装置
US20150255247A1 (en) Analysis apparatus and analysis method
JP6191636B2 (ja) 電子線を用いた試料観察方法、および、電子顕微鏡
US9349564B2 (en) Charged-particle lens that transmits emissions from sample